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108         S]å              {, 48 Sw{, 5 g (2001)
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                                                                                                                         S]å        {, 48 Sw{, 5 g (2001)                 109
4 N
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110              S]å      {, 48 Sw{, 5 g (2001)
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           j!}D:T/F                                                               kÒ`'riŒê: PH3                     SïqÃ`'riŒê:          Si
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                                                                                            5                                 4
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           2.„¸l#‘Ï(1-4)                                                                                                      2
           3.•˜¨|û}q(1-3)                                                                                                     3
           4.ˆýzSq[³(1-4)                                                                   3                                 3
           5.NºTá/Š-P™Œ¡u"fÝ—2(1-3)                                                        3                                  3
           kÒ`'riŒêfÝ—2cex/pkp}rp¸Sq[³cex                                                  45                               216

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           j_SðvøSq[³{I}(0-5)                                                                                  5
           j_SðSq[³z^¦                                                                                        @^¦

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                                                                                       S]å {, 48                    Sw{, 5 g (2001)                 111
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112   S]å             {, 48 Sw{, 5 g (2001)
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                                                                           S]å {, 48       Sw{, 5 g (2001)   113
; ^àRÙ|û}q
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  • 3. ˆhNŒ kÒ`'riŒêfÝ—2{I} 0-5 O 6 - 15 16 - 35 2 36 - 70 3 > 70 4 šØjpQl4|û}qVàNuvtu1Š¿et_ŒNKRŸ€ýN•³ ˆýzj_W‹W÷ˆLRkeSq[³Rg• ( Preliminary Hazard Analysis) , b[ŒQhY1S»SŸŠ-ŠaÉgNKRŸ€ý0b@N嘨–ªŠU {é•xQúšØo[W(Sq[³v„j_ O0‚‹Šfô{¡tNshe¼Sq–ª`']åOX4b@•ópº Sðˆýz Q•R)u(NåSq[³‚SïdÍO`'Rg• , ‘͉• , N‹[æN^~NNb@gv„aYN‹eEv†‚˜¨–ª( Hazard and Operability Study, HazOp ) b , ŠUO0TŒ‹Šfô{¡tNKN•³ SÊg*€ýkcxºO•_ªeâ Y1Š¤j!_‚_q—ÿRg• (Failure Modes and [šŠ-ŠbOimjn–g•Ü0 Effects Analysis, FMEA) pºN;v„e¹lÕ•2ˆL •2Nkev„ŠUO0 , , ŠUO0mA NåcÐfŠUO0v„eHs‡ NŒ0SJšÔˆýz[‰QhŠUO0mAz zY‚W- 0 SJšÔˆýz[‰QhŠUO0–dY‚RMe‡ŠªfY , N0RkeSq[³Rg• : SJšÔj_SðvøSq[³ kx}•wO†QwgNåNv„Y‘Ívîv„ : (1) {&TSq–ª`']åOX4b@[égåf¨j¢gålÕ‰•NK {I}Rg•lÕ ‰•lB0 u1e¼•ó 1997 ^tSJšÔu"imuLg*v|U (2) [¢‰Àc_Qú‘ÍY'o[W(Sq[³NKˆýzU®QC0 Qú|!fv„Rke˜¨–ªŠUO0]åQw ]åx–bt°[‰ˆ[ , (3) ˜¨–ª{¡tv„Nt°0 N-_ÃNCSÀ–vl ( Dow ) S[xQlSøb@v|UNK (4) cÐO›]åzNºTáj¢h8Š-P™j_SðiË• ‚Š-Š , S[xfÝ—2cex (CEI) ‘ÝSJšÔˆýz0 SŸtv„j_g0 j_SðSÊ^àRÙry`'R NåxzvOîkc_Œ …Éu1Nz. , (5) •¨‹XxlšÔŠ-Šv„vòžÞ0 , SïvøN’kÔ•TŒ‘ÏSv„e¹_ˆh•Tbpº|!U®0 (6) •¨‹X[‰Qh{¡tcªe½v„—lB0 }“šW_v„{I} , v|UpºSJšÔj_SðvøSq[³ (7) Opº˜¨–ªc§R6lz{Vv„‘͉•SÀcj0 , {I}Rg•e¹lÕ vîv„W(e¼cÐO›_ë•€|!O¿v„ eégbPW(WQgc¨ˆLˆýz[‰QhŠUO0v„‰À [š‘ÏŠUO0e¹lÕO†Š{—Tj_SðNKvø˜¨–ª , …É _õTŒPZlÕN;‰•v„Œaf/P³}qv„S[x]åim‚wó kdSïOpº˜¨–ªc’^•v„O•dÚ0 S^à , OF•ê1997 ^tNå_ŒVàWQgu"im}PiË]ò SJšÔj_SðvøSqfø{I}Rg•NCf/€‘Ï v|u‹ŠSSÊlÕ‰•v„‰•lB , bPW(wóS^àv„ VàSJšÔj_SðS[xriŒêYm)b@• bNKSq[³`' }“šW•keOîe9yû•I•óSJšÔ]åimˆýz , Nb Y'v„Nz.ŠUO0e¹lÕ0h9dÚ•NS»aYN‹eEv„ RŸv„v|UQúQi–Žkµ_v„SJšÔˆýz[‰QhŠUO0, • bSJšÔ^àdY1v„gN;‰•Và} pºS }qŠ , j!_0™–QHbPSÀ–vlS[xQlSøv„S[xfÝ [xriŒêYm) €S[xriŒêb@• bv„Sq[³SïR —2cex( Chemical Exposure Index, CEI ) v| pºQi˜^: pkp}‚kÒ`'0g,e¹lÕSs}œT€‘ÏS UN† SJšÔj_SðvøSq[³{I}Rg• " e¹ [xriŒêYm)b@• bNKpkp}rp¸SÊkÒ`'Sq[³ , , Nåkd•|!fv„e¹lÕpºexw>Yv„SJšÔ u(NåŠU[šTj_SðNKvøSq[³{I}Y'Opº , lÕ S]å {, 48 Sw{, 5 g (2001) 105
  • 4. T& (FMEA) b Sq[³‚SïdÍO`'Rg• (Haze) e9U„^ú‹p•ýŽd W SJšÔˆýz[‰QhŠUO0j!_ xºzË_Œ~Œb@—ŠUO0˜;s‡TŒmñ^¦v„Wúy0 [³{I}0 g,e¹lÕ€anN†N”z.Và[P , •N›Và[Pg_q (4) ŠUO0b@_—NKN”˜Sq[³{I}exvøNXSsSï —ÿS[xriŒêYm)b@• bNKSq[³v„V´‘Í`'bSï _—R0kÒ`'riŒêfÝ—2cex0 €ý`' : (5) h9dÚˆhNŒSïkÒ`'riŒêfÝ—2cex•IcÛpº (I) riŒêg,ŒêSq[³ ( zËSsPe^·Sq[³ / riŒêpk kÒ`'riŒêfÝ—2{I}0 p}rp¸g,ŒêSq[³ ) (6) •¨‹XQúŠrj_Sðb@O•u(NKS[xriŒêN-fqà (2) „¸l#‘Ï `' (Nf) bSÍaÉ`' (Nr) gšØNKriŒê (3) •˜¨|û}q OpºŠUO0pkp}rp¸Sq[³NKriŒê0 (4) ˆýzSqfø (7) h9dÚ3.2 {Àpkp}rp¸Sq[³cexb@€anNK (5) NºTá/ Š-P™Œ¡u"fÝ—2 N”˜Sq[³Và[PRR%ŠUO0kÏN˜Và[PNKSq g,e¹lÕ}“u1yÑb€hHimuLTOŠukNKx [³{I}0 (8) ŠUO0b@_—NKN”˜Sq[³{I}exvøNXSsSï v|SÊW([æ–›NKQkTfvW^à•2ˆLŠfŠU_ŒYk!Oî , kc€b b@Nå]ñ€anN†sþX4[æRÙ0g,e¹lÕ‚å _—R0pkp}rp¸Sq[³cex0 , (9) h9dÚˆhNSïpkp}rp¸Sq[³cex•IcÛpº O•u(e¼^àRÙ|û}q Qv˜¨–ªgONO0NK†^0WNŒ , pºQvŠUO0mAz keš_ŠªfY‚N : pkp}rp¸Sq[³{I}0 (I) •xdÇNPwgo[W(pkp}0rp¸SÊkÒ`'ri ao) SÖkÒ`'riŒêfÝ—2{I}‚pkp}rp¸Sq[³{I ŒêYl¹NKj_Sð0 }•šØ€pºj_SðvøSq[³{I} ; ‚åkÒ`' (2) •¨‹XQúŠrj_Sðb@O•u(NKS[xriŒêN-kÒ`' riŒêfÝ—2{I}‚pkp}rp¸Sq[³{I}Qi€ ( zËSsPe^·Sq[³Và[P ) gšØNKriŒêOpºŠU WGY'e¼b{Ie¼ 3 ' RGSÖ•šØNK{I}R l O0kÒ`'riŒêfÝ—2NKriŒê0 Opºj_SðvøSq[³{I}0 (3) h9dÚ3.1 {ÀkÒ`'riŒêfÝ—2cexb@€anNK Éh9dÚˆhVÛSïj_SðvøSq[³{I}aÉQú N”˜Sq[³Và[PRR%ŠUO0kÏN˜Và[PNKSq kdj_SðNKSq[³z^¦0 106 S]å {, 48 Sw{, 5 g (2001)
  • 5. / Š-P™Œ¡u" fÝ—2{I} lz[špkp}rp¸Sq[³{I} WNŒ SJšÔj_SðvøSq[³{I}Rg•mAzW S]å {, 48 Sw{, 5 g (2001) 107
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  • 7. ˆhVÛ j_SðSq[³z^¦ 2-3 N-^¦ 4-5 @^¦ (4) ˆýzSq[³ , Tá0}-OîNºTábQvNÖvø•ÜNºTá]åO A. ‚å|û}qNKXÓR›•…•N psig 10 (1.75 }U SÏpºNºTágSï€ýfÝ—2v„S@Wß0 Y'l#XÓ ) , Và[PP<SÖ2 0 2 NVÞ˜¨S@(RAP b SUB-FAB) g•èNýO ° B. ‚åriŒêW(00 C NåNpºq±N[‰[šbSï€ý 1 , imNºTáW(Qg]åO NŠ-P™}-OîNºTᘠQwgq±N[‰[š`' , b‚N‚,riŒêY‚zz W÷ˆL ]åO0 PM l#0l4bQvNÖSï€ýNKlagÓri{Ic¥‰øg•w l NS[xTÁ^«b? / l#šÔb?QgOimNºTá—fôcÛ , SÍaÉ RGVà[PP<SÖ2 0 ‘xhv / ’ütö , gNN›O‹ˆL`'dÍO0 C ‚åriŒêe¼j_SðN-pºm²aK0NgR q±ˆÝ•n , RGVà[PP<SÖ 0‚ågN•ðQiz.Và[P[X 2 3.2 pkp}rp¸Sq[³cex , W( Và[PP<SÖ ‚ågN•ðNz.Và[P[X 3 ; (1) riŒêpkp}rp¸g,ŒêSq[³ , ) W( Và[PP<SÖ 4; ‚åN•ðVà[PWGN[X ŒêNK NFPA Sq[³{I}N-v„ Nf( fqÃ`' W( , RGVà[PP<SÖ1 0 P<pºQvVà[PP< , QvexP<{ÄWpº 0 ,4, exP< D. ‚åj_SðNKdÍOc¡Nº]åe¹_NNºTágvôc¥ aY'NãˆhSq[³`'ašØ0‚åriŒêNK Nr ( SÍaÉ c¥‰øS[xriŒêNK†^€ , RGVà[PP<SÖ 4 0 `' ) P<NN 3 RGSÖ ‚ Nr exP<•Y'€pºQv Nf ' (5) NºTáfÝ—2 , Và[PP<0‚åriŒêq!lÕgå_—Qv Nf P< SïO•N fÝ—2‘Ïb@ŠUO0v„U®QCbj_Sðv|um)o ˆhlz[šQvNf P<0Nˆhpº NFPA-J18 e¼f fB , –D•ÑNºTáfÝ—2v„Sï€ý0 qÃ`'NK[š•© : 3 - FAB Qgu1e¼NY) 24 fBv†gOimNº Nf{vô h•Nö 1.fqÃ`'l#šÔ0 4 2.•êqÃ`'riŒê0 3.•ƒpkžÞ< 22.8°C(73°F)Nl¸žÞ< 37.8°C(100°F)NKriŒê0 1.•ƒpkžÞ< 22.8°C (73°F)Nl¸žÞQh37.8°C (lOO°F)NKm²šÔ0 3 2.•ƒpkžÞ•22.8°C ((73°F)Nl¸žÞ< 37.8°C (lOO°F)NKm²šÔ0 2 37.8°C (lOO°F) <•ƒpkžÞ< 93.4°C (200°F)NKm²šÔ0 •ƒpkžÞ> 93.4°C (200°F)NKm²šÔ0 0 —^SïqÃ`'0 (2) „¸l#‘Ï XÓR›0n«^¦0j_h°eE–œ0Y1c§SÍaÉ0lagÓb , riŒêW(Sï€ýNK gXÞrÀlÁ " 15 R”Qg NºpºY1Š¤v„gXÞrÀlÁ OFN‰•NûaPGŠ- 100 gNål#aKm)ob„¸v|v„gY'‘Ï0•xdÇSï€ýNK % v„QgTriW( 15 R”Qggm)QIN&[ŒQh„¸v|0 S]å {, 48 Sw{, 5 g (2001) 109
  • 8. 4 N , –D•ÑNºTá / Š-P™Œ¡u"fÝ—2v„Sï€ý0 > 10 kg fB 3 - 1 1 0 kg "- 3 - F AB Qgu1e¼NY) 24 fBv†gOimNº 2 - 1 00g"-999 g Tá0}-OîNºTábQvNÖvø•ÜNºTá]åO , l N < 100 g SÏpºNºTágSï€ýfÝ—2v„S@Wß0 ;‚åriŒêpkp}rp¸g,ŒêSq[³€‘ÏSÍaÉ`' , RG FAB QgT_j_Sðc’R[Æ–Æ , Œ¡u"PùP< „¸l#‘ÏSÖQvgY'm)o‘Ï0 fŒ´0 (3) •˜¨|û}q 2 NVÞ˜¨S@(RAP b SUB-FAB) g•èNýO riŒêNKdôecvôc¥S×R0b@W(W0žÞNK•˜¨|û , imNºTáW(Qg]åO NŠ-P™}-OîNºTᘠ}qv„_q—ÿ0 W÷ˆL ]åO0VÞ˜¨S@Qgg•èNýj_Sð0 PM 2 NN‚,[¤Qg•˜¨|û}q , Y‚S[xfv^«b?0 ’ütöSÊŠ-e½ , Œ¡u"PùP<•šØ0 l#šÔb?{I0 l NS[xTÁ^«b? / l#šÔb?QgOimNºTá—fô 1.5 NVÞ˜¨S@(RAP b SUB-FAB) Qgg_7R6 cÛ‘xhv’ütö , gNN›O‹ˆL`'dÍO0 / , •˜¨mA l#mAvôc¥}“u1Pt—bNKVÞ S[xTÁ^«b? / l#šÔb?QgPÅgO›‘xj_S𠘨|û}qc’Qú , Vàkdl¹ov„riŒêfˆ« bl#töi , Œ¡u"PùP<•ON0 z‘ËNNfnïuY0 ˆhN”pº ECVD ˆýzR)u(kde¹lÕŠUO0v„}Pgœ P 1 - FAB Qgg_7R6•˜¨mA , l#mAvôc¥ NK{ÄO‹0 , }“u1šØg¶W0g•^6•óNdNKVÞ˜¨|û}q VÛ0Sq[³‚SïdÍO`'Rg•aÉu(e¼SJšÔˆý Vàkdm)ov„riŒêfˆ«z‘ËNNfnï z uY0 l N[¤Y , m)ov„riŒêfˆ«z‘ËNNfnï Sq[³‚SïdÍO ( HazOp ) SŸf/ 1 uRg• uY0 ICI S[xQlSøW( 1960 ^tNãpºŠUO0QvšØo[W( ;‚åriŒêQwg•êqÃ`'RGkd˜Sq[³žÞexSÖ Sq[³ˆýzb@v|UQúv„ŠUO0e¹lÕ , Qvry‚rf/R) 3 0 (4) ˆýzSq[³ u(PO–â_[W( guidewor u1 ) ‚ˆýzSÃex}D A. ‚å|û}qNKXÓR›•…•N psig 10 (1.75 }U T_Œv|UQúga•©v„ˆýzPO–â ( process de- ) , Và[PP<SÖ2 0 viation) , Y'l#XÓ Nåj¢šWˆýzS@kµNKup^8PO–âf/T& ° B. ‚åriŒêW( 100 C NåNpºq±N[‰[šbSï€ý gv|u ? v|uv„SŸVàpºOU ? v|u_Œv„_Œgœf/ Qwgq±N[‰[š`' , b‚N‚,riŒêY‚zz NÀž¼ gNÀž¼Sq[³ ? N&•¨‹X|û}qeâgv„–2‹w ? l#0l4bQvNÖSï€ýNKlagÓri{Ic¥‰øg•w , cªe½TŒŠ-Š f/T&•³NåOÝ‹w ? ˜¨–ªf/T&Sïc¥ SÍaÉ , RGVà[PP<SÖ 2 0 S× ? kdN•Nz˜}PTTz.im]åzNºTá}Db c. ‚åb@€‘Ïv„fqÃ`'riŒêg,Ž«N_QwgkÒ`' ŠUO0}D , ••Ng‹pxŠv„e¹_ , •2ˆL•fR› ry`' (Nh [_ 2) , e¼v|um)ofB`Pg_q , oÀvê imwå‹X0]åzSŸt0jn–‰•{ÄSÊ , —ÿ}Ê`%†U•n€ýR› RGVà[PP<SÖ 2 0‚åg PNºv„]åim}“šWN¤mA_Yet_Œ , •¨‹XQúb@gSï N•ðQiz.Và[P[XW( , Và[PP<SÖ‚åg 3 ; €ýv„OimSq[³ , OFVàpºc¡u(_[WN剕{Äg N•ðNz.Và[P[XW( , Và[PP<SÖ4; ‚åN ‹pxŠv„j!_ , Vàkdf/Nz.}PiËSv„•fR›oÀ , •ðVà[PWGN[XW( RGVà[PP<SÖ 1 0 vê0W(ŠUO0RM˜QSï€ýv„e6–Æ‚n–P™NRŒ , : D. ‚åriŒêe¼j_SðN-pºm²aKNgR q±ˆÝ•n e™NåO¿R)e¼ŠUO0˜¨–ª RGVà[PP<SÖ 0 4 (1) fôe°v„{¡}ÚQVhW ( P &ID ) (5) NºTá/ Š-P™Œ¡u"fÝ—2 (2) ˆýzmAzW ( PFD ) pº€‘Ïb@ŠUO0v„U®QCbj_Sðv|um)o / ‹fX1ORÕ^•R (3) €o“– 110 S]å {, 48 Sw{, 5 g (2001)
  • 9. ˆhN” PECVD ˆýzRkeSq[³Rg•ˆh j!}D:T/F kÒ`'riŒê: PH3 SïqÃ`'riŒê: Si j_Sð: PECVD N0kÒ`'riŒêfÝ—2 NŒ0pkp}rp¸Sq[³ 1.zËSsPe^·Sq[³(0 - 5) /riŒêpkp}rp¸g,ŒêSq[³ 5 4 (0-4) 2.„¸l#‘Ï(1-4) 2 3.•˜¨|û}q(1-3) 3 4.ˆýzSq[³(1-4) 3 3 5.NºTá/Š-P™Œ¡u"fÝ—2(1-3) 3 3 kÒ`'riŒêfÝ—2cex/pkp}rp¸Sq[³cex 45 216 kÒ`'riŒêfÝ—2{I}(0-4)/pkp}rp¸Sq[³{I}(0 3 4 - 4) j_SðvøSq[³{I}(0-5) 5 j_SðSq[³z^¦ @^¦ (4) ˆýzcÏ•ð þRkÏNh•l#šÔbS[xTÁO›aÉ{¡}Úv†pºN (5) dÍObKQŠ/ z^• {ÀžÞ0 (6) riŒê[‰QhŒÇe™ˆh ( MSDS ) . Chamber 0Exhaust ( T+wzzƒÜ ) SÊ (7) ]å^à‘M•nW Local Scrubber TpºN{ÀžÞ0 (8) vø•ÜNKaYN‹eEX1TJfø (2) oÕ_nm|û}q ( Wet Bench) (9) vø•ÜNK]åimjn–‰•{Ä , Y‚ SEMI 0 þRVàlby_v„Qg_ªt°|û}q , T‘xiý•“Nå NFPA 0FM 0 . . {I j_h°bK•Â•K•fvW, eENKj!}DS ao) QvNÖŠUO0g^kR©v„ŒÇŠ ( Y‚ HF j!}D0 APM j!}D0 SPM j! ŠUO0RMaÉO•ˆýzry`'‚dÍOSŸtˆýz }D ) TpºN{ÀžÞ0 |û}qRƒR•ŠkÛ‚å^rˆýzS@kµOpºxŠ{ÀžÞ (3) l#töjà : (Nodes) , , NåO¿•{ÀžÞ•2ˆLRg• €xŠ .{¡}Ú•èNýY‚N•ðj_SðO›aÉ{¡}ÚNKPZ {ÀžÞRƒRv„N‚,SŸRGY‚N : lÕ0 (1) [š•©kÏPN;‰•ˆýzQCNöpºN{ÀžÞ þRcÛtö0}-OîNKdÍOz^•N-v„kÏNkeš_ (2) [š•©kÏP‚eâ[XŠ-P™•#c¥v„{¡}ÚpºN{À TpºN{ÀžÞ0 žÞ ŠUO0g•“b@xŠNKˆýzPO–âNå{¡}Ú|û}q (3) [š•©NËe¼kÏPN;‰•{ÀžÞ•“v„{¡}ÚpºN{À pºO‹Y‚ˆhQm0 HazOp Rg•NKQh…Ðy:aWY‚ žÞ WN0SæŠUO0•NzN-bP_u( SEMI S 1 0-96 (4) [š•©kÏNQwgU®NOu(bvîv„v„Re/{¡ , ˜¨–ªŠUO0jn–Nå‘ÏSTˆýzPO–âv„˜¨–ª Y‚ }ÚpºN{ÀžÞ ˆhNe¼V´‘Í`'b_Œgœ ( Consequence) R ‘ÝSJšÔˆýzŠ-P™|û}qv„ry`' , bP }v„[š•© , ˆhQke¼˜;s‡bSï€ý`' ( Likeli- : , SÈ{ÀžÞRƒRv„e¹_kxpº^~˜^ hood) R}v„[š•© Qi€v„}DTcjSs˜¨ (1) j_Sð : –ª , Y‚ˆhN]NK˜¨–ªŠUO0wé–c0 S]å {, 48 Sw{, 5 g (2001) 111
  • 10. kc—bv„ aK^¦ g‹p˜ NNNNN --+ /"- wå‹X &NSŸN NNVàN Së0 1|ll 0 WN Sq[³‚SïdÍO`'Rg•y:aW ˆhQm {¡}Ú|û}qNKPO–â_[W NPÅ.... ..SÉ Sêg•èNý vøSÍv„ –d.. . .NKY (More) (Less€˜0) (As well as) (Part of) (Reverse) (Other than) mA‘Ï þRON/q!mA þR–ÜŒê(N þR“/Š¤riŒê þR@mA‘Ï N;TH þR“/Š¤}Db þR•mA (Flow) N;eæ vø[¹ri) þRmAT“/Š¤ XÓR› þR@XÓ þRONXÓ (Pressure) n«^¦ þRfvn« þRONn« (Tempreture) þRm)o/x4 }PiËgPŒê ˆÂ þR•¥NöQgo þRzzl#oQe l¹o (T+c§R6 QVhzzl# CD A) . PurgeN }-Oî [ŒQh 112 S]å {, 48 Sw{, 5 g (2001)
  • 11. ˆhN V´‘Í`'{I} N;‰•k!|û}qdY1 S[xriŒêm)o,Qwgf«`'t°XƒbY'w> 2 Qi^¦ l8NEY1€ý bŠ-e½dXÞ Pe^·• bP·fø ‘«vBP·[³bf«fB k!‰•k!|û}qdY1 S[xriŒêm)o,—YuLŠªfN‹eEŠ¿gO 3 N-^¦ Y1€ý bŠ-e½dXÞ X1TJ —^‘͉•Š-P™bŠ- S[xriŒêm)o,PÅ—O‹ˆL`'v„n–d,g* 4 ON^¦ PÅ—N‚,`'l»vB e½dXÞ W÷ˆLN‹eEŠ¿gåX1TJ ˆhQk Sï€ý`'{I} Sï€ý`'R˜^ ˜gv|u˜;s‡ A }“^8v„ kÏ^t•…•N5k! B Sï€ýv„ kÏ^t•…•N1k!,OFg*•…•N5k! C N_Š1v„ 5^tQg•…•N1k!,OFg*•…•N1^t1k! D zv„ 10^tQg•…•N1k!,OF5^tQgg*•…•N1k! E iuNSï€ýv„ 10^tQgg*•…•N1k! ˆhN] ˜¨–ªŠUO0wé–c ˜¨–ªŠUO0wé–c Sï€ý`' A B C D E 2 3 4 V´ 2 2 3 4 4 ‘Í `' 3 2 3 4 4 5 4 3 4 4 5 5 {IpºšØ^¦Sq[³ˆýz ; …„•œj!}Dv„šØ^¦Sq[³ˆý N”0Rg•}Pgœ}qŠ‚{ÄO‹ zRGNåS[xl#vøl‰zM (CVD) pºN; ; žÃQI WVÛf/bPW(gÐfvW^àaÉu( SJšÔj_ _®_qS@v„N;‰•Sq[³f/QI–;R‘SÊQvn¶R‘v„•wg , , SðvøSq[³{I}Rg•lÕ " W÷ˆLRkeSq[³R fÝ—2UO˜L•ôvL`'TŒ_q—ÿu€²NKSq[³ VàY' , g• Tj!}DŠ-P™v„}Pgœ}qŠ0N‚,v„}“šWf/ •èNý]òwåSq[³`'v„n¶R‘v†]òˆ«SÖNã , Nj_Sð , , dôecj!}DN-v„r{¡ˆýz0–â[PiQe0•èNýv„ NKdÍO•ýpº•‰[Æ_ SbìfôcÛ…åTÁ Vàkdg* oÕ_nmj_Sð0–öNöSÊr{¡}-OîNKnmj_SðŠUO0QúšØSq[³j_Sð ; ‡UR;j!}Dv„UO˜LW(e¼ S]å {, 48 Sw{, 5 g (2001) 113
  • 12. ; ^àRÙ|û}q co TŒ‘x`'l#šÔNKkÒ`'‚•P‡U`' , •ëO•im€_ŘW( •1g‹ŠRÕ_ë•{Iu"imry`' v„šØ^¦Sq[³f/rykŠl#šÔv„l#töjÃSÊ 49 % HF gwív„fB•“QgVàaÉ^X4‚ˆýzNK—€PZQúŠ¿ v„O›‘x|û}q0kd{I}ŠUO0lÕv„–PR6N;‰•pºNå et ? " v„^8aKNSÈ_Ř—bVà VàkdW( ‹Šfô NQižÞ : kd€u"uNK šØ˜¨–ª " v„N‹[æf/bPW(kdV (1) NåS[x`'Sq[³pºN; , Vj—ó0n8–â•;0—^ Šfc¢Šv„•Ü“u`'Š²˜L0 n8–â•;0–ûl#Sq[³0j_h°`'Sq[³{Irit 1992 ^t•ŽWe?^œRÞ]å•è€wim[‰Qhˆ[u `'Sq[³g+€an0 •r (OSHA) R6ŠN&QlOHe½ˆLNKˆýz[‰Qh{¡ (2) S[x`'Sq[³SÈNåkÒ`'riŒêYm)‚pkp}NKzË t (PSM) , lÕhH ‹Šfô{¡t ( Management Ss`'Sq[³pºN; , €ab`'Sq[³g*€an0 of Change' MOC) }QezËlÕ{¡t , ‰•lBšØ , kdQi˜–PR6v„N;Vàv†W(e¼g,ŠUO0lÕv„Š- Sq[³`'ˆýz]å^à^úzËR6^¦ˆýzNKOîe9aÉ Š€Ìfof/ˆýz[‰QhTŒSq–ª`']åOX4b@lÕ‰•N- gkc_v„u3ŠËz^•0h8QÆz^•0W÷ˆL_ʼn•v„ NKR{¡Sq[³riNKeE0•Üe¼{, (2) ˜–PR6Sïe¼g, / Š}ô0b€ˆS [‰QhŠUO00vø•ÜNºTá_ŘTJwå ŒêSq[³Và[PR QeabkÒ`'Và[PNK€anNˆNåˆÜ ŒÇe™˜O_ʼn•NKfôe°{I0€bW0Sq–ª`'] , _7 €{, (1) ˜–PR6RG^ú‹pSæˆLNå Checklist OX4b@[égåf¨j¢g啦lÕ0N¦‰•lBŠ[šˆýzOî , bQvNÖe¹lÕR N啨‹X0 e9[‰QhŠukgR%e¼Nå_€imuLacu(v„]åzg }“u1RkeSq[³Rg•}Pgœ•¨‹XNKšØ^¦Sq[³ RÙu3ŠËz^• , PÅO}“Œ»‚fBzNK{¡c§ SÊ , j_Sðˆýz•2NkeNåSq[³‚SïdÍO`'Rg• ISO 9000 •„W‘Íe¼e‡Nö{¡R6 , ˆýz‹Šfô˜¨ ( HazOp ) •2ˆLŠUO0 , ˆhSAf/wýu2–bl#töi –ªŠUO0bpºN˜‘͉•v„{¡tz^•0 |û}qNKŠUO0y:{Ä0bP–dN†aÉu( HazOp R O•0Sq–ª`']åOX4b@[égåf¨j¢g啦lÕ0 g•|û}qSv„Q*žÞY , SæR Qe S 1 0-96 SEMI ŠU , –DNöNNK‰•[š ˆýzOîe9[‰QhŠuk•óaÉT+ , 0FM : O0˜¨–ª e9U„^ú‹pkN-RG€an SEMI NRN‹˜ {Ijn–NKQ*‚o]åim[æRÙ^ú‹pNåR _7ˆýz[‰ (1) ˆýzOîe9z^• Qh0 (2) [‰Qhˆ[u_q—ÿŠUO0cªe½ (3) ˆýzdÍObKQŠOîkccªe½ Qm0šØyÑb€^àb?‹Šfô{¡t—lBv„€Ìfo (4) ˆýzŒÇe™fôe°cªe½ Sq[³”QR%0˜¨–ªŠUO0‚˜¨–ªc§R6NK‰• (5) RÞs‹eY€²Š}ôcªe½ Rƒ pº^úzËN嘨–ªpºWúyv„[‰Qhˆ[uŠukv„ " (6) QvNÖ‘MTcªe½ Wúg,j!_0q6€ˆýz]å^àN-Sï€ý–¨fBgVàdÍ N0hHO‹xzv : HDPCVD ^âl#†Ut|û}qSÊ O0}-Oî0u"€ý0u"TÁ‰•h<0€ýn•{À}0]å ^àRÙc’˜¨{¡m)oN‹Nö [‰t°OÝ0}“oß`'Và} bQvNÖ—^}“oß`'Và} € •2ˆLNN›Oîe9hH0}Ê`%‹Šfô0•èfB`'‹Š šØ[Æ^¦–ûo?S[xl#vøl‰zM (HDPCVD) , fô u•ô}0_®v„–ö}DNö‹Šfô , f/T&gu"ue° , f/SJšÔˆýzN-…„•œj!}Dv„‘͉•ˆýzŠ-P™ v„˜¨–ª ? upRÕN†gÐN›Š-Šf/T&gTŒSŸ|û}qŠ- QvˆýzmAzY‚WN”b@y:0g,hHO‹N&—^ˆýz ŠNvø[¹ ? b€x4XÞN†SŸO†˜¨–ªŠUO0v„[Œet e¹0dÍOh•Nöb€j_SðŠ-P™–ö}DNöv„‹ŠT , `'‚kcxº`' ? W(g*PZ•N•iuvv„[‰Qh[égåb_q €‚SÍaÉ[Œ_ŒNKSÍaÉ•T_Œnm (post-clean) —ÿŠUO0f/q!lÕxºŠ•v„0€_€_€Y'•èNý‹ŠfôhH g•Ü0eâgv„ CVD _Œnmc¡u(‚N~‡UR;˜^ Nö•ýgfBzXÓR› , Y'[¶pºN†d6fB•“€•ó•NN† O<v„l#šÔ : CF4 , Sbì 0 C2 `e0 C4Fs {I , € Š1Y_ʼn•v„{¡tz^• , Vàkd• bN†Š1Yo[W( ( perfluorin- •N›l#šÔ•ýf/b@‹v„•Nl#Sri , u"im ated compounds, `'v„˜¨–ª0OFšØyÑb€u"imv„]è˜Mb•ŒÇ PFC) , , —^^8zi[š c’e> 114 S]å {, 48 Sw{, 5 g (2001)
  • 13. 0wO‡‚ ŽÍ••–ã 00‚¯ •Êa7‚¯ `dUf0PSë–?RSëj9 Sã00•è˜¨ , v}0TJ0Å aöj9`e^%]è^E]èQúŽÍ •ñ€}šÿ<€á†?RrƒI€pPÅPÅyÑè|Öd, f‡ìubšc§R6ffw>•èfBYÐYЕf•ûQi|Ö•Ü NW 0c•“«í›oR6•Isþ€}Pu1waaödûSë fp•wYÐ0P EU T00 o ,HE Qöv„ •è—WfQú ff•“•ŠRouTSë•“}0€rbm€ý~=PZ 0OF}0zïe—šÔ€}V¼•wfìP a wPSë•“€}€}`dbÖbÉ‘j ) Šq0"v„Tu0 8 wm [x•/ UHUQE €}ŠªŠq—óSë‡ìcÖš|ÖPþR[ø ( lã R6•ñ›%^ÿ^cšENSë—˜•DbA•á -bEh NöNˆ@•ecÖšbÉUï`•^b^bþRP ~=u|Ê EAHD TÁv„wO}DSã•ë‡ì`i|ÖP 2. vîv„ vîwª•w EHE ( ,HE Qö" 0 .Sã 0^E€}väväSENÔ}0 vî /Ehw _ë••VÞNŽc›šE 0–?bÉ€}Pqg ) d Åv„0 RZ `‰•bÉešÔ•Ü Mm ,HE VÚv„ väšE—-e½yÑ ( [®0 ( 0TRv„q0 -N-N S ) ›%u_Ã0" ,S 0Y‚€ý ) šÔ}0ŽÍ E cÖiËwa (SïÙ EhH) HO eì gnMDV Së ) .S ." .- -m .0 -a Qú`Ü€FväS@ C'I •wSëPOá Å W UJ]Þ fNR6•/ T rFH _ØNäYÐ0y>väN•“e·`dN_ N|— N•‰]ò0Sïw–;`efzv„ N0 N† NcЀýuvSxv„N80Pw–;•€PWNšÔ‰À^3ŽÍ™Ð|— NP<N_ NT–;[®€}qYN_•I–x|— fòfòRr•êl»v~cÖ–sN , NvçR[•/“/bATu•è—bmbmš 0w³•ÜR7R7rL0]ò pºPIP–±fB[œf •l€}|!ffz`•šEvôTéubšþR_à 0–±fBryšE••z–œ}D‡‚‘j0‹wyVvä–DR yÑíŽþfBfìR R -E ‘lŽ9T€V¼ƒI–œR6R6 ( •ê]ñUJ‡‚Vi}Ýdz–œR6 OH -E •/`¶•Pÿ<|ç—v}¿•w •/g·^}–c–cY‚‡ìŽ•w¬þR0 HEOåTåU®–D•ÜNN0Sï T |ÊP€}€}WfŽø 0cÐSé•‹Së–?bÉvÔvãrF‡t 0cЖdry‡ì•ècáN-•>] 1mm R[•/ B PU®fBuv R R6•ñNû~= E T±PIP E šÔcášþRP 0•ãQúyß–ÖP Em |ÊP R EH d-PþRT6 "v}[® n PP0 ™ñ EE .Sï .S + N 11 • ‘‹•wÿ<`d QŠšÔwO0P<vø[œ ,}DU h O ^}R6‡ŠÖSëPN ERN Qö _à 0N;šÔŠfŠf–? W ˜FqYN_ U˜U˜R Mm •w -R €}eE Mt SëPOá M Së–?ƒ’0SëcÖš amE 0Së d Sëv„d NR .- -N ŠÅ¹vßW€}þR•€ Ž•Ž•š npdRZHRS d T±v„qYƒI WS@SëPOá €}y>g·xR6Së}U w600U•bÉ}Ý0"þRP–xžÑ qOF€¯X1–?bÉ Nwf€}€}Qú^= —bT=T]Ý0T½0 0 •´ 0 MC •/Žø`C 0vߊþ ) h!è ( íU1•w d Sëv„ 0€} d OUv„ a `„`„P€}€}Žþ•ï .Sï h -N wfvøNSëe™O› |çw³SëfB•ý |-O P0–?S’ê`ódúbmbmd- ‘l}Ý–; ERZREn-- ‘jV·w³‚9ÿ<—ÓR }€rÿ<uu UE ˆ@^}D u •ïW ˆ@ yßŽÊ H.-omO –?S S]å {, 48 Sw{, 5 g (2001) 115
  • 14. 40 35 31 30 SãšØ^¦ j_ 25 þRN-^¦ W‹ ex 20 W{ ^¦ 15 10 5 O DIFF T/F PHOTO ETCH FAC j_SðSq[³z^¦ i WVÛ RkeSq[³Rg•}qŠ{ÄO‹ Exhaust Exl1aust Exhaust I I I I I I VMB/P Gas Box Tool | e— i !’ J Central Local Fan Scrubber Scrubber Line NÀ | !•0 Exhaust I I WN” S[xl#vøl‰zMj_Sðj!}DmAz , •óY'l#N-ˆp‰ã•s‡—^^8}éab Vàkdf/_bbn« (Local Scrubber) •2ˆLc¢Š0ˆhSANf/ CVD , [¤eHaÉv„Và} ˆ«RpºSJšÔˆý• ]åimt°OÝ ˆýzSÊ RF _Œnm‚_®lâ–ûo?_Œnmv„kÔ• n‘Ïv„Œa0€vîRMˆ«^ãlÛaÉu(v„fÿNãz^• ˆh ; ˆhSANŒf/TW‹@•èc’l#mn8Vhv„N;‰•dÍ f/_®lâ–ûo?_Œnm , SÖNãv„l#šÔf/Nl#Sl. Oh•Nö0 ( nitrogen trifluoride) 'NF 3 0OFf/S{Vàkd RM•ðNKˆýz‹Šfô–ÖNm‰SÊSÍaÉ‘Me¹‚SÍ €•ôO•gÐN›^âl#†Ut|û}qv„l'SqÃqÒ{¡SÊ> , OFNÍ_QeN†e°v„SŸrie™ aÉdÍOh•Nö , Vàkd l#b½˜¨{¡x4ˆÂm)o0g,O‹N-bP‘Ý Burn N¦le¼ˆýzb€ˆS‹Šfô0g•£v„f/Š1YfvW^à Box 0 CDO 0DAS {INW‹@•èc’l#mn8Vh W(•K•IdÍONQw NH3 ‘Me¹v„h•NöN , H2/ 116 S]å {, 48 Sw{, 5 g (2001)
  • 15. ˆhSAN S[xl#vøl‰zM‚_Œnme¹lÕ CVDlDeposition SiHJTEOS Bum Box RF Chamber Clean CFJC2F.,IC4Fs CDO DAS Microwave Chamber Clean NF3 ˆh SANŒ @•èc’l#mn8Š-P™NKN;‰•dÍOh•Nö j_W‹ RŸAS@ vîS n«^¦ O›aÉl#šÔ Bum Box l'S 25°C N~zzl# l'S @e¼800°C CDO N~zzl# m0n8 ONe¼50°C qÃqÒ @e¼1400°C DAS N~zzl#‚LNG md« ONe¼50°C Burn Box ‚ CDO |û}q•ýv|uN†ol#sþŒa , CDO without ad it on of H2/ NH3 : OFc¡u( AS D |û}q€S{g*QúN‹0€v|um) , Oxidation ov„|û}qv„>l#•2ˆLSÖj#Rg• v|sþN† F2 NF3 (g) + O2 (g) NÊ F 2 (g) up^8POšØ0kdN‹Nö}“vø•ÜŠ-P™O›aÉUFaÉu(gP Partial Scrubbing e™QlSøv„Š¿gåxzvb~R0N†Sï€ýv„S[xSÍaÉj_ NÊF H (aq) + OF2 (g) iË ,CDO W(NQwN_ /NH3 ˆýz‘Me¹v„h•Nö H e a n ob Rû Heatin g N , •NYv„_Œnml#šÔ NF3 g‚Qvb@O›Qe Sø 00v} rr ,h ( Ã0 , F /H r -N-o -nb -a -e -UE -v Ln -e -nLV v„l'l#l'SSÍaÉu"u F2 ' €}“l4m_ŒPÅ•è NýF2 ˆ«SÍaÉbiuONoÃ^¦v„l4n¶m²aK HF, Và DAS: kd|û}qQg[XW(•NYv„ F2 e¼fn«S×q±_Œgˆ« Burning , c~ŒS×q±SÈgˆ«•„SŸpºb@Nå NF3 (g) + O2 (g) + CH4 (g) SŸ[PS F2 ' F Scrubbing 2 W(|û}qN-Ne·ˆ«}/zM•ôšØoÃ^¦0 F2 R q± H EI NÊF H (aq) v„l'SVhN“á’ü{¡ggPe™•S[T‡UeHaÉ , ghG , Så 00 Burning F þR CH4 PP gPŒêv„>l#b½˜¨{¡fôgR[Pz••eHaÉ EI ,- + (g) •N›•ýf/• bm)ov„SŸVà0Sæ OF2 v„ub , Burning HF (g) QvkÒ`'N¦šØe¼' F2 • bV´‘ÍNK]å[‰N‹eE0 H þR Scavenger '0 O•u( DAS |û}qv„^àUFW(SÍaÉ•NzN- NF3 N¦ , , : gl'SSÍaÉub F2 ' fn«S×q±_Œˆ«SŸ[PS g,hHO‹v„‰ãlze¹hH_ˆ|!U® Sbì OFY)q6l#N-v„u2: –bR[PW(kdbnoN†n•SY+v„(1) •¨‹XSÊ~.wí CDO l'SVh’ü{¡v„}-Oî‚fô ‰Ò‚rbŠl#SŸ[Pbÿc‰ , F2 gNe·v„ˆ«mˆ€ , Ri cÛ˜;s‡0 ™_®‘Ïv„F2 qÃqÒSÍaÉpº HF, g_Œˆ«l4m (2) Nå DAS bQvNÖ@•èc’l#mn8Š-P™SÖNã c‰0SÍaÉj_iËy:aY‚N : CDO 0 S]å {, 48 Sw{, 5 g (2001) 117
  • 16. (3) PP gPŒêv„>l#b½˜¨{¡Qh•èfôcÛpº Teflon {¡tv„Tt{¡R6{ÄWNK[š•© , Sʘ¨–ªŠUO0v„ Qg‰ov„N“á’ü{¡0 e¹lÕ , ˆhSANf/bP^ú‹pšØyÑb€^àb?W(`€ (4) NH3/ H2 _Qe CDO ’ü{¡ , SÍaÉj_iË ^úR6‹Šfô{¡tR6^¦fBSïNå€anv„{ÄW , N¦Sï bpº : OpºRke˜¨–ªŠUO0v„j¢h8ˆh0 Heating N]0šØyÑb€^àb?Y‚OU•KO‹Šfô{¡t NF3 (g) + O2 (g) + H2 (g) , ™–QH ‰•^úzËNYWSïˆLv„‹Šfô{¡tR6^¦ Scrubbing HF NÊF H (aq) (g) ‰•€ýN†‰ãR0g•£N›Và} Sï€ýg• b‹Šfô{¡t •KOVð–ã0bP_žN‚,N‹imU®OMbˆýz]å^à W(kdbP‰•c¢Šv„•Ü“u`P`•„Nf/kdb€ , Y'}Sïkx}pºNå }“qß{¡td—bONN›RVg• , ˆSd—bv„UO˜L €f/{¡tNv„vòžÞ0bP•ý N^~žÞ: N†‰ãSJšÔˆý• ]åimsþˆLv„NºTá}èR6O•RŸ€ý (1) eâgv„N‹imU®OMb]å^à•KOe‡SN-im Rpºˆýz0Š-P™0^àRÙ0]å[‰{I , g,hHO‹N- NºTábim]åz^+}“^8bno‚•³•‘Ív„ v„SŸrie™‹Šfô‚b€ˆS‹Šfô`P`Sêgˆýz]åz ‰Ò‚r , Y‚Qv€ý}“u1e9‚omAz0Š¿etŠ-P™ ^+N†‰ã , Š-P™]åz^+ˆ«TJwå‘MT , €^àRÙ]å O†^úzËQvPNºimkZfôXž_7kdz.‰Ò z^+Y'i‚Pň«TJwåO›l# , ]å[‰]åz^+Sï€ýSê ‚r , €R6^¦Sv„‹Šfô{¡tgO•NºŠ¤gNÖ g{IR0N‹eEv|u_ŒQ•O†Š¿gå•ýn¯N†0•f/_ˆ Sï€ýY1S»kZ0 f˜ov„{¡t|û}qetTv„UO˜L0bŠ1gNºgŠ• (2) u1RMe‡N-‹Šfô{¡tbˆýzOîe9[‰QhŠuk pº•N˜^v„‹ŠfôY‚W(Nå_€[ŒQhl’g}“šWv„`Å v„‰•lB , a‰ºN—‰•XžR Š1Ye‡fø]å lÁNSï€ýiu–ã}“u1[‰QhŠUO0N-j¢ŠQúO†0OF O0 Y‚gœl’g‹Šfô{¡tv„j_R6 , RG•#NûOUVàkd€ , ^~NN]å^àN- (3) ‹Šfô{¡tVàR6^¦Nv„—‰• , u"uv„e°˜¨–ª•ýl’gˆ«•¨‹Xb”QR%v„j_g T–Žd0T•è•€v„Nº•ýSï€ým‰Qe Vàkd N†0 €šW{¡t–Žd‚dÍO / }-OîPÚl•“v„N’ RÕ•ÜOÂ0 Qk0‹Šfô{¡tmAz (4) W(N‚,]å^àv„dÍOe‡SN-‹Šfôf/}“^8`' ‹Šfô{¡tN-g‘͉•v„NPSŸRGpº : v„Nf/_Řv„ , —^^8˜;~A0 (1) ••Nkc_v„u3ŠËz^• , }“•N[‰Qhˆ[u_q—ÿ (5) {¡t–ŽdSÊQvŒÇn•v„b•ŠþNY 0 ŠUO0b˜¨–ªŠUO0xºŠ•Ngu"ue°v„˜¨–ª , (6) l’gsþˆLv„ˆýz[‰QhŒÇŠ‚dÍOz^•b Q•u1•iuvˆ«cˆkv„NºTáh8QÆ‹ŠT0 QvN[Œet0 (2) W(kc_‹Šfôebu(OimRM , vø•ÜNºTራ•i^¦ (7) fB•“NY -‹Šfô{¡t^ö•r]åOv„[Œb0 v„Š}ôbTJwåNåQMŠ¤u(bŠ¤dÍO€SqSÊNº , ‰•Y‚OUO•‹Šfô{¡t•KO[¹fSï€anv„ Vàkd Tá[‰Qh‚Pe^·0 e¹Tg : (3) vø•Üv„b€ˆSŒÇe™0Wˆh0e‡Nö[šgfôe° , (1) O•u(eâgv„}D~T0{¡t0]åOj!_0O Nå}-c‚sþX4v„N•ô`'0 immAz‚n••e¹_O†•KO‹Šfô{¡t0 WQmf/bPO•kdNPSŸRG , SÀbWSq (2) fôe°ˆýz[‰QhŒÇŠ , Sbì : {¡}ÚQVhW –ª`']åOX4b@[égåf¨j¢g啦lÕ0•ŽW OSHA (P & ID) 0Š-P™b€ˆSe‡Nö0‘M•nW PSM lÕ‰•SÊg•¦QlSø MOC [æRÙN•KOv„e¹ {I0 , (3) nfpNfxºv„[š•©NÀž¼f/ ‹Šfô lÕ _YetN&|!SpºN‚,im€Sï€ýSïNåW÷ˆLv„ " NÀ j!_0q6€QvN-v„•Ü“u`'UO˜LaÉŠr•„f/‹Šfô ž¼f/ TW‹fÿcÛ " ( N—‹Šfô{¡t ) 0 118 S]å {, 48 Sw{, 5 g (2001)
  • 17. {,N–Žkµ}PhH Šfu( / ƒIdìdÍ Šfu(gnÿ Oz^•føSÊ_Å eH€ýŠUO0 ‰•NK]åzƒIW [æe½‹Šfô / Oî e9 vø•ÜNºTáŠ}ô kc_NKb€ˆSŒÇ VÞ_© / TJwå e™ISO e‡Nöfô e° •‹ŽÊRM euu( / {,NŒ–Žkµ}PhH RM[‰Qhj¢gå WQm ‹Šfô{¡tmAzW S]å {, 48 Sw{, 5 g (2001) 119