Development of tribological PVD coatings

Development of tribological PVD coatings Roberto M. Souza . Laboratório de Fenômenos de Superfície Departamento de Engenharia Mec ânica Escola Politécnica da Universidade de São Paulo [email_address]

Outline ,[object Object],[object Object],[object Object],[object Object],[object Object]

PVD ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[http://www.bccresearch.com/report/MFG015C.html]

Development of PVD Coatings ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Thin film development [Donnet & Erdemir Surf. Coat. Technol. v.257, 2004] ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Examples – Materials and Structures ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[Muratore & Voevodin Ann. Rev. Mat. Res. 39 ( 2009) 297-324]

Examples - Processing ,[object Object],[object Object],[object Object],Al 2 O 3 films DC reactive sputtering Pulsed reactive sputtering [ P.J. Kelly et al. Surf Coat Technol 86-87 (1996) 28-32 ] [P.J. Kelly and D.R. Arnell, Vacuum 56 (2000) 159-172]

Examples - Processing ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[Courtesy: J.J. Moore, ACSEL, Colorado School of Mines ] Side View Top View Hiden electrostatic quadrupole plasma mass spectrometer (EQP) Al Cr

Examples - Processing ,[object Object],[object Object],[J. Lin et al., Surface and Coatings Technology 201 (2007) 4640]

Examples - Processing ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Examples - Processing ,[object Object],[Courtesy: J.J. Moore, ACSEL, Colorado School of Mines ]

Examples - Materials ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Surface Phenomena Laboratory ,[object Object],Thin Film Characteristics Hardness Fracture Toughness Residual Stresses Adhesion Evaluation Modeling     Experimental     Analytical    Wear x characteristic   Material Processing   

Residual Stresses ,[object Object],Thin Film Characteristics Hardness Fracture Toughness Residual Stresses Adhesion Evaluation Modeling     Experimental     Analytical    Wear x characteristic   Material Processing   

Residual Stresses in Thin Films ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],In the contents

Residual Stresses in Thin Films ,[object Object],[object Object],[object Object],[object Object],[object Object],[J.A. Thornton, D.W. Hoffman, Thin Solid Films , 171 (1989) 5-31. ] PVD CVD

Residual Stresses in Thin Films ,[object Object],[object Object],[object Object],T d /T m Evaporation [ B.A. Movchan, A.V. Demchishin, Phys. Met. Metallogr. , 28 (1969) 83-90. ] Close-field Unbalanced MS [ P.J. Kelly, R.D. Arnell, Vacuum , 56 (2000) 159-172 . ] T d /T m Sputtering [ J.A. Thornton, Ann. Rev. Mater. Sci. , 7 (1977) 239-260. ]

Residual Stresses in Thin Films ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[ Y. Pauleau, Vacuum 61 , 2001, 175-181 ]

First set of TiN specimens Pulsed Magnetron Sputtering

First Set of TiN Specimens ,[object Object],[object Object],[ M. Benegra et al. Thin Solid Films 494 (2006) 146-150 ] ,[object Object],[object Object],[ R.C. Cozza et al. Surf. Coat. Technol. 201 (2006) 4242-4246 ]

First Set of TiN Specimens ,[object Object],[object Object]

Second set of TiN specimens Gradient stresses

Second set of TiN specimens ,[object Object],[object Object],[object Object],Reduce wear Improve adhesion [ E. Uhlman & K. Klein , Surf. Coat. Technol. 131 (2000) ] ,[object Object],[object Object],[object Object]

Second set of TiN specimens ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Second set of TiN specimens ,[object Object],Increasing bias Decreasing bias Constant bias Specimen Layer Time (min) Bias (V) G1D2 1 45 -20 2 45 -40 3 45 -100 4 45 -150 5 45 -200 G2D2 1 45 -200 2 45 -150 3 45 -100 4 45 -40 5 45 -20 S1 1 120 -20 S2 1 120 -40 S3 1 120 -100 S4 1 120 -150 S5 1 120 -200

Second set of TiN specimens ,[object Object],Increasing bias Decreasing bias Specimen Layer Time (min) Bias (V) G3M2 1 45 -20 2 45 -40 3 45 -80 4 45 -100 G4M2 1 45 -100 2 45 -80 3 45 -40 4 45 -20

Second set of TiN specimens ,[object Object],[object Object],[object Object],[object Object],[object Object]

Second set of TiN specimens ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object], 1  2  3  4  5

Second set of TiN specimens ,[object Object],[object Object],[object Object],[object Object],[object Object], 1 ,  2 ,  3 ,  4 ,  5 

Second set of TiN specimens ,[object Object],[object Object],[object Object],[object Object],[object Object], 1 ,  2 ,  3 ,  4 

Second set of TiN specimens ,[object Object],– Increasing bias – Decreasing bias – Constant bias – Differences in curvature: initial bias determined the curvature even if the average bias value was equal Increasing Const. Decr.

Ensaios de Deslizamento – Pression Alta (2) ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Second set of TiN specimens ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],Constant Increasing Decreasing

Second set of TiN specimens ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],Hole ( trou ) Rupture

Second set of TiN specimens ,[object Object],– 594 sectional profiles – Average of profiles Increasing bias Constant bias Decreasing bias Increasing 100 nm 100 nm 100 nm Track width

Second set of TiN specimens ,[object Object],[object Object],[object Object],[object Object]

Concluding Remarks ,[object Object],[object Object],[object Object]

Acknowledgements ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Second set of TiN specimens ,[object Object],[object Object],Catastrophic failure before significant plastic deformation of the substrate Film fracture was not observed during the test Impossible to compare the deposition conditions F F

Second set of TiN specimens ,[object Object],« particles » Third body oxidation First body

Second set of TiN specimens ,[object Object],Trou Rupture

Second set of TiN specimens ,[object Object],Increasing bias, hole – Observation of iron oxyde on track surface: Free and agglomarated particles

Second set of TiN specimens ,[object Object],Increasing bias Constant bias Rupture Hole

Second set of TiN specimens ,[object Object],Pol. Croissante - Trou

Development of tribological PVD coatings

Recommandé

Recommandé

Contenu connexe

Tendances

Tendances (20)

En vedette

En vedette (15)

Similaire à Development of tribological PVD coatings

Similaire à Development of tribological PVD coatings (20)

Plus de Instituto Nacional de Engenharia de Superfícies

Plus de Instituto Nacional de Engenharia de Superfícies (20)

Dernier

Dernier (20)

Development of tribological PVD coatings