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Silicon Carbide (SiC) LED Chip to Reach
        High Performance and Low Cost

                        mark_mcclear@cree.com

                             November 1, 2012
An LED Lamp is a Complex System

LED Chip:
   – Determines raw
       brightness and efficacy
Phosphor system:
   – Determines color point,
       color quality and color
       point stability           SC3
Package:
   – Protects the chip and
     phosphor
   – Helps with light and heat
     extraction
   – Primary in determining LED
     lifetime

  Copyright © 2012 Cree, Inc.          pg. 3
Why We Grow GaN on SiC

                                          Simple* 2D ** Cartoon


GaN                                 GaN




  SiC                               Al2O3

         GaN on SiC                         GaN on Sapphire
          1: 0.967                             1: 1.148
(3.3% mismatch)                       (14.8% mismatch)                       • Lattice Mismatch
        370W/m°K                             23W/m°K
                                                                             • >15x Thermal
                                                                              conductivity
* Drawn to scale.
** SiC, GaN, and Al2O3 are actually 3D Hexagonal crystalline structures
      Copyright © 2012 Cree, Inc.                                    pg. 4
Lattice Mismatch Drives Chip Defects

• Minor imperfections
  are merely dark
  spots
    – Fewer defects = brighter
      chips
    – Brighter chips = lower system
      cost


• Major defects
  affect production
  yield and reliability
  in the field
    – Yield is strongest driver of
         LED cost

  Copyright © 2012 Cree, Inc.         pg. 5
Reliability Impact of an Epi Defect

 LED Chip                                        LED Chip
 Side View                                       Top View




  • Normal operation, no defects, current spreads
    evenly across the chip surface, uniform light
  • Undetected epi defect, point loss of light begins
  • Over time, current begins to flow into the
    defect, causing it to grow
  • Ultimately, the defect causes a cascading failure
    of the chip
  Copyright © 2012 Cree, Inc.     pg. 6
Testing For Defects – Before They Are a Problem
                                SiC        I
                                Sapphire
      Latent epi defects
      can be tested for;
       screened out by                            V
     Reverse Voltage test




                                                 SiC




                                               Sapphire



  Copyright © 2012 Cree, Inc.   pg. 7
US DOE Roadmap

                               DOE LED Roadmap




      US DOE MYPP, April 2012, p.68

 Copyright © 2012 Cree, Inc.                pg. 8
How the Roadmap Really Works

                                 LED Chip/Product Architecture
                                      Development History
                                                                                Chip Gen 3
                       200
                                                                                   SC3
     Lumens Per Watt




                       150

                                                                        Chip Gen 2
                       100



                       50


                               Chip Gen 1
                             2002 2004      2006   2008 2010           2012 2014
                                                    Time




 Copyright © 2012 Cree, Inc.                                   pg. 9
XB and EZ LED Chip Architectures
  XB Power Chip Architecture    EZ Power Chip Architecture


 ~2002                                                    ~2006




    •   SiC substrate              •   SiC substrate
    •   InGaN epi MQW growth       •   InGaN epi MQW growth
    •   Mirror                     •   Mirror
    •   Contact                    •   Bonding Metal
    •   Flip                       •   Flip
    •   Top-side Contact           •   Add Si substrate
    •   Bevel saw cut              •   Remove SiC substrate
                                   •   Bottom-side Contact
                                   •   Surface roughening
                                   •   Top-side Contact
  Copyright © 2012 Cree, Inc.     pg. 10
Better Epi, not More Epi
                                      Direct Attach (DA) SiC Chip
 2011




                                                             SC3
     •   SiC Substrate
     •   InGaN epi MQW growth
     •   Mirror
     •   Isolation layer
     •   Contacts and vias
                                Best combination of
     •   Flip                     –   Light extraction
     •   Under-fill               –   Robust, reliable design
     •   Bevel cut
                                  –   High Yielding, Manufacturable
     •   Surface cut
                                  –   Low cost

  Copyright © 2012 Cree, Inc.             pg. 11
DA: Robust, Low Cost Flip Chip Architecture
                                                   >25x

                                Flip Chip X         EZ             DA     units

 Chip Thickness                     12             125             335    µm
 Under-fill area                   0.81             0              0.08   mm2
  Die Attach/
                                   0.19             1.0            0.92   mm2
  Thermal Path
  Wire Bonds                        0               3               0      --
                                              5x           0.1x


• Direct Attach SiC Chip:                           SC3
    – 25x thicker chip  robust, manufacturable (= low cost)
    – 1/10th the amount of under-fill  less CTE mis-match,
      more robust, higher assembly yield (= low cost)
    – 5x more die attach area – better thermals, lower RTH,
      higher reliably (= lower system cost)

  Copyright © 2012 Cree, Inc.                             pg. 12
What About GaN on Silicon?

GaN                                 GaN                          GaN

SiC                                 Al2O3                         Si

        GaN on SiC                        GaN on Sapphire              GaN on Silicon
           1: 0.967                         1: 1.148                       1: ??

Most analysis assumes GaN on Si will achieve:
       – Same yield as SiC/Sapphire
       – Same performance as SiC/Sapphire
       – Same reliability as SiC/Sapphire                                   Are
       – Wafer bowing and other technical
         challenges are cheaply/easily solved
                                                                        these good
       – 8” Si fabs are fully depreciated and can                      assumptions?
         deal with Compound Semi complexities
       – LED fabs are somehow not depreciated at all
       – Giant LED companies are asleep, have not
         fully analyzed this technology also
      Copyright © 2012 Cree, Inc.                       pg. 13
But Silicon Substrates are Really Cheap!

                                • True. $200-300 cheaper
                                  (currently; 6”, 150mm)
                                • But…
                                  – There are >17,000 1*1mm chips
                                    on a 150mm wafer
                                  – 5% better yield on SiC – or even
                                    sapphire – could completely offset
                                    this difference in substrate cost

                                • And, GaN on Si may also
                                  – …require additional materials and
                                    process steps to fabricate
                                  – …have poorer chip reliability
                                  – …have lower lumen output, LPW
                                    performance due to higher defect
                                    rates… (dimmer chips = higher
                                    system cost)
  Copyright © 2012 Cree, Inc.             pg. 14
Higher Performance LEDs Saving Money –
At The System Level
• SiC LEDs can be driven
  harder, run hotter
• You are paying for the
  lumens anyway, SiC allows
  you to use them (= low cost)




   http://ledsmagazine.com/features/9/2/3
  Copyright © 2012 Cree, Inc.               pg. 15
Higher Performance LEDs Means Fewer LEDs




    Reducing LED count is a much stronger lever on
    reducing system cost than cutting LED ASP...
 Copyright © 2012 Cree, Inc.    pg. 16
Hypothetical Example of the Cost Impact of Increasing
LED Performance, Fully Utilizing LED Capacity




                                         • 4000 lm LED Area
                                           Light
                                         • Includes optics, LED
                                           cost, reduction of LED
                                           count, driver, housing
                                         • Driving harder reduces
                                           system level cost
                      LED      Optic
                      Driver   Housing




 Copyright © 2012 Cree, Inc.                 pg. 17
Real Example of the Cost Impact of Increasing LED
Performance, Fully Utilizing LED Capacity


  2007                                                   2011
• 42 LEDs                                              • 8 LEDs
• 650 lm                                               • 575 lm
• 12W                                                  • 10.5W




                      >$100 Commercial   $<25 Retail
                         Wholesale


  Copyright © 2012 Cree, Inc.            pg. 18
Get all the Lumens You are Paying For

                                      Drive hard, run hot, save money


                                  •   > 1100 lumens (hot)
                                  •   < 20 Watts
                                  •   > 55 lumens/Watt
                                  •   ≥ 80 CRI
                                  •   > .90 Power Factor
                                  •   Energy Star light
                                      distribution




                                            Omni-directional, same cost as
                                                LP/MP snow cone!!!

                                http://www.cree.com/ref
  Copyright © 2012 Cree, Inc.                       pg. 19
SiC: Reliably Driving Harder, Saving Money




   TM-21
  Lumen
Maintenance
 Projection




  Copyright © 2012 Cree, Inc.   pg. 20
Same Performance, 60% Lower LED Cost

• Identical downlights:
  Same flux, CCT, CRI, light
  distribution
• Both exceed Energy Star
  LPW and lifetime
  requirements

                                                                     √
                                                                     √
                                                                     √




                                                                     √
                                                                     √

 http://www.cree.com/products/pdf/XLamp_XPG_Operating_Capacity.pdf
 Copyright © 2012 Cree, Inc.                    pg. 21
Next 2x Lumen/$ Product Platform Coming Soon

         350                                                                      2011
                                                                                Platforms
         300                                                            SC3
                                        2013 NextGen          2012 SC³
         250                              Platforms            Platforms         XM-L


         200        200 LPW                                    XT-E
Lumens




                     in 2012
         150
                                                       XB-D              XP-G

         100


          50                                            XP-E


           0
                                                  Cost (log)


          Copyright © 2012 Cree, Inc.                          pg. 22
SiC  Highest Performance, Low Cost
                                                         SC3
                                                   XLamp Discrete
 • Low LED cost                                             XB-D
       – Lowest defects, highest yields
                                                            XT-E
       – Shipping billions. TODAY.
 • Highest reliability                                     XP-G2


       – Fewer defects                                      NEW
       – Robust screen for field defects
       – 2-15x better thermal conductivity
                                                    XLamp HVW
         than silicon, sapphire
       – Higher reliable operating temperatures           XM-L HVW


 • Lowest overall system cost                             XT-E HVW

       – Higher drive currents, higher lumens      XLamp Arrays
       – Fewer LEDs per system                             MT-G2




  Copyright © 2012 Cree, Inc.             pg. 23
Taiwan Led Forum 2012 Mc Clear Cree (R2 2)

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Taiwan Led Forum 2012 Mc Clear Cree (R2 2)

  • 1. Silicon Carbide (SiC) LED Chip to Reach High Performance and Low Cost mark_mcclear@cree.com November 1, 2012
  • 2. An LED Lamp is a Complex System LED Chip: – Determines raw brightness and efficacy Phosphor system: – Determines color point, color quality and color point stability SC3 Package: – Protects the chip and phosphor – Helps with light and heat extraction – Primary in determining LED lifetime Copyright © 2012 Cree, Inc. pg. 3
  • 3. Why We Grow GaN on SiC Simple* 2D ** Cartoon GaN GaN SiC Al2O3 GaN on SiC GaN on Sapphire 1: 0.967 1: 1.148 (3.3% mismatch) (14.8% mismatch) • Lattice Mismatch 370W/m°K 23W/m°K • >15x Thermal conductivity * Drawn to scale. ** SiC, GaN, and Al2O3 are actually 3D Hexagonal crystalline structures Copyright © 2012 Cree, Inc. pg. 4
  • 4. Lattice Mismatch Drives Chip Defects • Minor imperfections are merely dark spots – Fewer defects = brighter chips – Brighter chips = lower system cost • Major defects affect production yield and reliability in the field – Yield is strongest driver of LED cost Copyright © 2012 Cree, Inc. pg. 5
  • 5. Reliability Impact of an Epi Defect LED Chip LED Chip Side View Top View • Normal operation, no defects, current spreads evenly across the chip surface, uniform light • Undetected epi defect, point loss of light begins • Over time, current begins to flow into the defect, causing it to grow • Ultimately, the defect causes a cascading failure of the chip Copyright © 2012 Cree, Inc. pg. 6
  • 6. Testing For Defects – Before They Are a Problem SiC I Sapphire Latent epi defects can be tested for; screened out by V Reverse Voltage test SiC Sapphire Copyright © 2012 Cree, Inc. pg. 7
  • 7. US DOE Roadmap DOE LED Roadmap US DOE MYPP, April 2012, p.68 Copyright © 2012 Cree, Inc. pg. 8
  • 8. How the Roadmap Really Works LED Chip/Product Architecture Development History Chip Gen 3 200 SC3 Lumens Per Watt 150 Chip Gen 2 100 50 Chip Gen 1 2002 2004 2006 2008 2010 2012 2014 Time Copyright © 2012 Cree, Inc. pg. 9
  • 9. XB and EZ LED Chip Architectures XB Power Chip Architecture EZ Power Chip Architecture ~2002 ~2006 • SiC substrate • SiC substrate • InGaN epi MQW growth • InGaN epi MQW growth • Mirror • Mirror • Contact • Bonding Metal • Flip • Flip • Top-side Contact • Add Si substrate • Bevel saw cut • Remove SiC substrate • Bottom-side Contact • Surface roughening • Top-side Contact Copyright © 2012 Cree, Inc. pg. 10
  • 10. Better Epi, not More Epi Direct Attach (DA) SiC Chip 2011 SC3 • SiC Substrate • InGaN epi MQW growth • Mirror • Isolation layer • Contacts and vias Best combination of • Flip – Light extraction • Under-fill – Robust, reliable design • Bevel cut – High Yielding, Manufacturable • Surface cut – Low cost Copyright © 2012 Cree, Inc. pg. 11
  • 11. DA: Robust, Low Cost Flip Chip Architecture >25x Flip Chip X EZ DA units Chip Thickness 12 125 335 µm Under-fill area 0.81 0 0.08 mm2 Die Attach/ 0.19 1.0 0.92 mm2 Thermal Path Wire Bonds 0 3 0 -- 5x 0.1x • Direct Attach SiC Chip: SC3 – 25x thicker chip  robust, manufacturable (= low cost) – 1/10th the amount of under-fill  less CTE mis-match, more robust, higher assembly yield (= low cost) – 5x more die attach area – better thermals, lower RTH, higher reliably (= lower system cost) Copyright © 2012 Cree, Inc. pg. 12
  • 12. What About GaN on Silicon? GaN GaN GaN SiC Al2O3 Si GaN on SiC GaN on Sapphire GaN on Silicon 1: 0.967 1: 1.148 1: ?? Most analysis assumes GaN on Si will achieve: – Same yield as SiC/Sapphire – Same performance as SiC/Sapphire – Same reliability as SiC/Sapphire Are – Wafer bowing and other technical challenges are cheaply/easily solved these good – 8” Si fabs are fully depreciated and can assumptions? deal with Compound Semi complexities – LED fabs are somehow not depreciated at all – Giant LED companies are asleep, have not fully analyzed this technology also Copyright © 2012 Cree, Inc. pg. 13
  • 13. But Silicon Substrates are Really Cheap! • True. $200-300 cheaper (currently; 6”, 150mm) • But… – There are >17,000 1*1mm chips on a 150mm wafer – 5% better yield on SiC – or even sapphire – could completely offset this difference in substrate cost • And, GaN on Si may also – …require additional materials and process steps to fabricate – …have poorer chip reliability – …have lower lumen output, LPW performance due to higher defect rates… (dimmer chips = higher system cost) Copyright © 2012 Cree, Inc. pg. 14
  • 14. Higher Performance LEDs Saving Money – At The System Level • SiC LEDs can be driven harder, run hotter • You are paying for the lumens anyway, SiC allows you to use them (= low cost) http://ledsmagazine.com/features/9/2/3 Copyright © 2012 Cree, Inc. pg. 15
  • 15. Higher Performance LEDs Means Fewer LEDs Reducing LED count is a much stronger lever on reducing system cost than cutting LED ASP... Copyright © 2012 Cree, Inc. pg. 16
  • 16. Hypothetical Example of the Cost Impact of Increasing LED Performance, Fully Utilizing LED Capacity • 4000 lm LED Area Light • Includes optics, LED cost, reduction of LED count, driver, housing • Driving harder reduces system level cost LED Optic Driver Housing Copyright © 2012 Cree, Inc. pg. 17
  • 17. Real Example of the Cost Impact of Increasing LED Performance, Fully Utilizing LED Capacity 2007 2011 • 42 LEDs • 8 LEDs • 650 lm • 575 lm • 12W • 10.5W >$100 Commercial $<25 Retail Wholesale Copyright © 2012 Cree, Inc. pg. 18
  • 18. Get all the Lumens You are Paying For Drive hard, run hot, save money • > 1100 lumens (hot) • < 20 Watts • > 55 lumens/Watt • ≥ 80 CRI • > .90 Power Factor • Energy Star light distribution Omni-directional, same cost as LP/MP snow cone!!! http://www.cree.com/ref Copyright © 2012 Cree, Inc. pg. 19
  • 19. SiC: Reliably Driving Harder, Saving Money TM-21 Lumen Maintenance Projection Copyright © 2012 Cree, Inc. pg. 20
  • 20. Same Performance, 60% Lower LED Cost • Identical downlights: Same flux, CCT, CRI, light distribution • Both exceed Energy Star LPW and lifetime requirements √ √ √ √ √ http://www.cree.com/products/pdf/XLamp_XPG_Operating_Capacity.pdf Copyright © 2012 Cree, Inc. pg. 21
  • 21. Next 2x Lumen/$ Product Platform Coming Soon 350 2011 Platforms 300 SC3 2013 NextGen 2012 SC³ 250 Platforms Platforms XM-L 200 200 LPW XT-E Lumens in 2012 150 XB-D XP-G 100 50 XP-E 0 Cost (log) Copyright © 2012 Cree, Inc. pg. 22
  • 22. SiC  Highest Performance, Low Cost SC3 XLamp Discrete • Low LED cost XB-D – Lowest defects, highest yields XT-E – Shipping billions. TODAY. • Highest reliability XP-G2 – Fewer defects NEW – Robust screen for field defects – 2-15x better thermal conductivity XLamp HVW than silicon, sapphire – Higher reliable operating temperatures XM-L HVW • Lowest overall system cost XT-E HVW – Higher drive currents, higher lumens XLamp Arrays – Fewer LEDs per system MT-G2 Copyright © 2012 Cree, Inc. pg. 23