Crystallography orientations of Silicon wafers (<100> and <110>) with different primary flats, the positions of <111> planes, and the visualization of etching profiles in crystal level.

1. Omid Adljuy
(omid.adljuy@ieee.org)
Faculty of Electrical and Computer Engineering
University of Tabriz, Tabriz, Iran
Dec. 2011

2. Contents
 Brief Review of Si Crystallographic Planes
 Possible Types of Si Wafers
 <100> Wafer ( Primary Flat : <110> )
 Different Views
 <111> Planes
 Mask Openings for Etching
 More Details in Crystal Level
 <110> Wafer ( Primary Flat : <100> )
 Different Views
 <111> Planes
 Mask Openings for Etching
 More Details in Crystal Level
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3. Crystal Planes of Silicon
z
z
z
y
x
(100)
y
y
x
(110)
x
(111)
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MEMS Course
Dr Steve Beeby

4. Possible Types of Si Wafers
 <100> Wafer
 Primary Flat : <100>
 Primary Flat : <110>
 Primary Flat : <111>
 <110> Wafer
 Primary Flat : <100>
 Primary Flat : <110>
 Primary Flat : <111>
 <111> Wafer
 Primary Flat : <100>
 Primary Flat : <110>
 Primary Flat : <111>
dfg
OK
OK
dfg
OK
OK
OK
dfg
OK
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5. <100> Wafer ( Primary Flat : <110> )
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6. <100> Wafer
Top View
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7. <100> Wafer
Side View
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8. <100> Wafer
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9. <100> Wafer
<111> Planes
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10. <100> Wafer
<111> Planes
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11. <100> Wafer
<111> Planes
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12. <100> Wafer
<111> Planes
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13. <100> Wafer
<111> Planes
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14. <100> Wafer Etched Feature
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15. <100> Wafer Etched Feature
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16. <100> Wafer
Detailed View
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17. <100> Wafer
Detailed View
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18. <100> Wafer
Detailed View
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19. <100> Wafer
Detailed View
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20. <110> Wafer ( Primary Flat : <100> )
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21. <110> Wafer
Front View
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22. <110> Wafer
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23. <110> Wafer
<111> Planes
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24. <110> Wafer
<111> Planes
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25. <110> Wafer
<111> Planes
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26. <110> Wafer
<111> Planes
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27. <110> Wafer
<111> Planes
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28. <110> Wafer
<111> Planes
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29. <110> Wafer
<111> Planes
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30. <110> Wafer
<111> Planes
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31. <110> Wafer
<111> Planes
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32. <110> Wafer
<111> Planes
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33. <110> Wafer
<111> Planes
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34. <110> Wafer
<111> Planes
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35. <110> Wafer Etched Feature
35

36. <110> Wafer Etched Feature
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37. <110> Wafer Etched Feature
37

38. <110> Wafer Etched Feature
38

39. <110> Wafer
Detailed View
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40. <110> Wafer
Detailed View
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41. <110> Wafer
Detailed View
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42. <110> Wafer
Detailed View
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43. <110> Wafer
Detailed View
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44. <110> Wafer
Detailed View
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45. Thanks
For Your Attention
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46. Omid Adljuy
(omid.adljuy@ieee.org)
Faculty of Electrical and Computer Engineering
University of Tabriz, Tabriz, Iran
Dec. 2011
46