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Introducing


Tony Green

        http://www.tonygreen.name
            © Tony Green 2011
                                    Introducing…
At 7:30 P.M. in the
    evening I was born the
 youngest identical twin on
     May 19, 1969 at the
University of Pennsylvania
    in Philadelphia, PA.
     Photo courtesy of http://www.pennmedicine.org/health-
     system/patient/hospitals-locations/


            http://www.tonygreen.name
            © Tony Green 2011
                                                             Birth
I grew up in West
                                                        Philadelphia near
                                                        Fairmount Park.


Photo: Courtesy of author’s personal collection




I attended Central High
       graduating
        in 1987

                                                            Photo: Courtesy of author’s personal collection


                                         http://www.tonygreen.name
                                         © Tony Green 2011
                                                                                                     Youth
Attended the
    University of
     Delaware

  From 1987-1993
       1987-

Chemical Engineering
       Major
                             Source of photos http://www.udel.edu/udphotos/


                       http://www.tonygreen.name
                       © Tony Green 2011                                      College
Undergraduate Research –Department of Chemistry

Hydrophobic surface laser(laser is light
amplification stimulated emission of radiation) to
measure relaxation
My contribution – Measured Contact Angles
Applications – Resistance of Phone cable to
corrosion
Publication – in May 1992 edition of Journal of
Analytical Chemistry




                    http://www.tonygreen.name
                    © Tony Green 2011
                                                  College
Yes I have sported different looks through my college years…….




Relaxing in Dickinson B
       Dormitory
                                                                 Halloween party in
                                                                 Wilbur street




                                  Graduation day!




                      Source of photos: Tony Green’s personal photo collection


                                   http://www.tonygreen.name
                                   © Tony Green 2011
                                                                                 College
Before arriving at my sea command. I went
through Nuke Training pipeline 1994 – 1996, which
consisted of Nuclear Field “A” School, Naval
Nuclear power school NNPS and finally Prototype
(NPTU)




                                                            Photo Courtesy of Tony Green’s personal collection




Photo Courtesy of Tony Green’s personal collection




                                           http://www.tonygreen.name
                                               © Tony Green 2011
                                                                                                Navy Nuke
Was assigned as a Reactor operator to the U.S.S.
Topeka S.S.N. 754 stationed (at the time) in Pearl
Harbor, Hawaii.




Photo Courtesy of Tony Green’s personal collection




                                                          Photo Source http://www.submarinebaseph.com/intropage1.html




                                              http://www.tonygreen.name
                                                  © Tony Green 2011
                                                                                                    Navy Nuke
This is Topeka
                                           underway.
                                           Just can’t say
                                           where…..
Photo Courtesy of Tony Green’s personal collection




  Life underway during
  deployment, I don’t
  look bad with my
  head shaven!

                                                              Photo Courtesy of Tony Green’s personal collection




                                               http://www.tonygreen.name
                                                   © Tony Green 2011
                                                                                                    Navy Nuke
Who could serve in the Navy without any
                  port calls? …..

                                    Visit to Esquimalt,
                                    British Columbia

Sipping Cider in Hong Kong




                             Roppongi,
                               Tokyo
                               Japan



                                                               Downtown Hong Kong

                                Photos Courtesy of Tony Green’s personal collection



                               http://www.tonygreen.name
                                   © Tony Green 2011
                                                                                      Navy Nuke
Serve in the Navy, see the world!




Pusan, South Korea



                                                               Hong Kong
                                                               From the sea




           Cruising topside off of Lahiana, Maui
         Photos Courtesy of Tony Green’s personal collection



                         http://www.tonygreen.name
                             © Tony Green 2011
                                                                   Navy Nuke
Great to be home from another deployment!!!




                                                                          Photo Courtesy of Dreamstime.com




                                                                 Realities of a nuclear
Photo Courtesy Tony Green’s personal collection                  work environment


                                              http://www.tonygreen.name
                                                  © Tony Green 2011
                                                                                                 Navy Nuke
Here I am about to go to “Westpac” One of
  three Pacific six-month deployments in 4
  years…




Of course all good things must come to an
 end…




                 http://www.tonygreen.name
                     © Tony Green 2011       Navy Nuke
Ever wonder how a nuclear reactor can provide propulsion to a
                      naval vessel ?




               Source : http://www.fas.org/man/dod-101/sys/ship/eng/reactor.html


                         http://www.tonygreen.name
                             © Tony Green 2011
                                                                      Navy Nuke
Just how is a reactor put together?




    Source: Yun Po Ok’s Nuclear Power Electro Ceramics Lab Presentation
    http://www.slideshare.net/viet4777/nuclear-power




                          http://www.tonygreen.name
                              © Tony Green 2011
                                                                          Navy Nuke
What materials makes
    this reactor go?

 You guessed it, Uranium
  more specifically U235
        not U238

Chain reactions do not occur in uranium ore deposits.
Fission occurs mainly for the rare isotope U-235.
Only 0.7% or 1 part in 140 of uranium is U-235. The prevalent
isotope, U-238, absorbs neutrons but does not undergo fission.
A chain reaction stops as the U-238 absorbs neutrons.

    Source: http://www.slideshare.net/Sarah17/nuclear-fission-and-fusion



                             http://www.tonygreen.name
                                 © Tony Green 2011
                                                                  Navy Nuke
In a typical example of nuclear fission, one neutron
  starts the fission of the uranium atom and three
  more neutrons are produced when the uranium
                         fissions




                Source: http://www.slideshare.net/Sarah17/nuclear-fission-and-fusion



                     http://www.tonygreen.name
                         © Tony Green 2011
                                                                           Navy Nuke
Note that one neutron starts the fission of the uranium atom, and, in the
example shown, three more neutrons are produced.
    • Most nuclear fission reactions produce two or three neutrons.
    • These neutrons can, in turn, cause the fissioning of two or three other
       nuclei, releasing from four to nine more neutrons.
    • If each of these succeeds in splitting an atom, the next step will
       produce between 8 and 27 neutrons, and so on.




                     Source: http://www.slideshare.net/Sarah17/nuclear-fission-and-fusion


                                  http://www.tonygreen.name
                                      © Tony Green 2011
                                                                                       Navy Nuke
What happens when Uranium undergoes fission?
Well, you get energy, fission fragments and more
neutrons to cause more reactions….




                    Source: Applied Engineering Principles

                     http://www.tonygreen.name
                         © Tony Green 2011
                                                             Navy Nuke
Just what happens when the remaining Uranium decays?




    The interaction of these radiations with the DNA in our bodies
     is where problems, i.e. cancer and radiation sickness result
                          Source: http://www.atral.com/U2381.html


                           http://www.tonygreen.name
                               © Tony Green 2011
                                                                    Navy Nuke
After I left the Navy I joined Gasonics
 International as Technical Support Engineer




Gasonics manufactures ashers and etchers for
      the that are used to manufacture
            Semiconductor chips

Tony Green
Tony Green           http://www.tonygreen.name
                         © Tony Green 2011       Novellus
Early in 2001 Gasonics was acquired by Novellus
                        Gamma 2310 Strip/Clean




              Source: Peter J. Woytowitz’s 2004 Virtual Prototyping of
                Semiconductor Processing Equipment presentation



  My title changed to Product Support Engineer
           but the job was still the same…..
 Tony Green
 Tony Green                      http://www.tonygreen.name
                                 © Tony Green 2011                       Novellus
What does Novellus do?
           Vector PECVD




                                       Founded in 1984, Novellus Systems is a
                                        supplier of manufacturing systems used
                                              to create integrated circuits.

                                        Within the semiconductor machinery
                                          manufacturing market, the company
                                            builds equipment and develops
                                           processes used to manufacture the
Source: Peter J. Woytowitz’s 2004
                                        interconnect structures that tie together
Virtual Prototyping of Semiconductor
Processing Equipment presentation        the transistors within a semiconductor
                                                           chip
                                       Source: IBIS World

                                           http://www.tonygreen.name
                                               © Tony Green 2011         Novellus
What does Novellus do?
                                                                           Speed HDP
The company is maker of semiconductor
production equipment, including chemical vapor
deposition systems that layer dielectric (insulating)
material on semiconductor wafers, physical vapor
deposition systems that layer conductive metals, and
electro-fill systems that deposit copper layers. It also
makes surface preparation systems that clean wafers
before each round of deposition.

Novellus markets its products worldwide to
manufacturers of semiconductor devices including,
customers with captive fabrication lines, who
produce semiconductors primarily for internal
consumption; and merchant semiconductor
manufacturers, who produce semiconductors
primarily for sales to third party customers.

 How does this relate to chip making in general?                Source: Peter J. Woytowitz’s 2004
                                                                Virtual Prototyping of Semiconductor
                                                                Processing Equipment presentation
                            Source: IBIS World

                                    http://www.tonygreen.name
                                    © Tony Green 2011                                   Novellus
What about these chips/where
does silicon fit in??
• Simply, silicon is beach sand processed
  in high temperature so it’s cheep and
  available

• Easily oxidized to form electrical
  insulator

• Has excellent mechanical properties,
  it’s strength exceeds high-strength
  steel
    Silicon is used to create transistors
           Source: Integrated Circuits and MEMS fabrication Presentation by Amna Z. Shawwa
              http://www.cecs.csulb.edu/~hill/ee330/Semiconductor%20Devices%20(Amna).ppt

                           http://www.tonygreen.name
                           © Tony Green 2011                                     Novellus
Now that we have silicon…a
semiconductor is
   A Semiconductor is a material with
 properties in between conductors (allows
 current to pass) and insulators (allows
 little/no current to pass).

  In the end it is all about how many free
 electrons available to conduct current. A
 feature of semiconductors is that the
 supply of conduction electrons can be
 controlled.

                Source: Applied Engineering Principles Naval Training document


                     http://www.tonygreen.name
                     © Tony Green 2011                                           Novellus
Now that we have
   silicon…valance electrons
 The most popular elements are Silicon and Germanium
both use 4 valance electrons. (outer shell electrons)
Doping can be done with elements that have 3,
(example boron) or 5, (example arsenic) valance
electrons. Doping can alter the properties of these
materials by affecting the available supply of conduction
electrons.
The materials doped with 3 valance electrons will form
holes since there will now be holes where there were
electrons while the materials doped 5 valance electrons
will form carriers are electrons since there will now be
excess electrons.

                      Source: Applied Engineering Principles Naval Training document


                    http://www.tonygreen.name
                    © Tony Green 2011                                         Novellus
Now that we have silicon…doping
to make p and n type materials
 Materials doped with 3 electrons elements are referred
 to as p type while material doped with 5 electrons are
 referred as n type.
 Devices are made of p and n type of materials to
 perform specific electrical functions.
 When pieces of n type materials are brought in contact
 with n type materials a p-n junction is formed.
 The movement of electrons across these two materials
 is called a Depletion zone is for which can be controlled
 by the amount of bias or voltage that is applied.


                       Source: Applied Engineering Principles Naval Training document


                             http://www.tonygreen.name
                             © Tony Green 2011                                  Novellus
Now that we have a P/N Junction
                           Depletion Zone




         p type material                        n type material




                               Voltage




 A p/n junction is a one way device allowing
 current to flow in one direction and no
 current flow in the other direction by
 creating/removed of the depletion zone by
 the application of current.
                           Source: Applied Engineering Principles Naval Training document


                           http://www.tonygreen.name
                           © Tony Green 2011                                                Novellus
Now that we can put to P/N
junctions together
 Transistors are comprised of three regions
 of p and n type materials. This forms two
 P/N junctions.

      p type material             n type material               p type material
         Emitter                       Base                        Collector




                        Voltage
                                                      Voltage

                           Source: Applied Engineering Principles Naval Training document

                                    http://www.tonygreen.name
                                    © Tony Green 2011                                 Novellus
Our PNP junctions form the basic
          Transistor
The center region is the base while the two outer
sections each of an opposite material type than the
base are referred as the collector and emitter.

The current can be controlled by the amount of
current supplied to the base.

This allows for a fair of crucial functionalities. One to
act as a amplifier, or to increase the strength of
current and the other is to act as a switch or the
ability to be in a “on” state or an “off” state. Both
functions are very useful in the assembly of more
complex components
                       Source: Applied Engineering Principles Naval Training document

                           http://www.tonygreen.name
                           © Tony Green 2011                                      Novellus
Where do transistors come into play??
• Transistor is a semiconductor element, Has three terminals,
  & a small current or voltage applied to one terminal controls
  the current through the other two
• It is the key component in all modern electronics
• In   digital circuits
   –   Very fast electrical switch
   –   Function as logic gate
   –   RAM-type memory
• In   analog circuits
   –   Amplify current signals
   –   Amplify voltage signals
 These are made to create the chips that are
        use in electronics we all enjoy
                    Source: Integrated Circuits and MEMS fabrication Presentation by Amna Z. Shawwa
                       http://www.cecs.csulb.edu/~hill/ee330/Semiconductor%20Devices%20(Amna).ppt

                                    http://www.tonygreen.name
                                    © Tony Green 2011                                     Novellus
Semiconductor hierarchy – Top level

 Silicon
  Analog discrete compounds
  Combinations into simple digital
 circuits
  Combinations into larger complex
 digital circuits, microprocessors


        Source: The essential guide to Semiconductors by Jim Turley

                     http://www.tonygreen.name
                     © Tony Green 2011                     Novellus
Semiconductor family tree
   This table provides an overview of the items made in
               the Semiconductor industry……
                  Discrete Components    Integrated Circuits (IC)
                                                                                           FPGA
                                                                     Prog. Logic
                                                                                            PLD
                                                                     Peripherals
                                                                                            CPU
                                                                      Graphics
                                                                                           MPU
                                                 Logic Gate
                         Resistors
                                                                     Processors            MCU
                                                 Converters
                        Capacitors                                   Networking
                                                                                            DSP
                                                   Optical            Comms
     Silicon             Diodes
                                                                                           NPU
      +                 Inductors                  Sensors

Other Materials                                                        SRAM
                       Transistors                  Other
                                                                                           PROM
                                                 Memories             DRAM
                                                                                          EPROM
   = digital                                                           ROM
   = analog                                                                               EEPROM

                                                                                           Flash




                             Source: Adapted from the Essential Guide to Semiconductors by Jim Turley


                                         http://www.tonygreen.name
                                         © Tony Green 2011                                   Novellus
Where are Semiconductors used??
The Top 5 supporting industries with their corresponding
end use are:
 Data Processing - PC notebook and servers as well as
peripheral devices as printers and monitors

 Communication - Mobile networks and Smart Phones

 Consumer Electronics - Games consoles (Wii, Xbox,
Game Station), Digital TV, MP3 players, DVD recorders,
photo and video cameras

 Automotive - engine control, instrument panel, safety
and driving dynamics, navigation and entertainment

 Industrial - control and power electronics
                Source: Price Water Coopers November 2009 Report titled Changing the
                Pace of Semiconductor
                             http://www.tonygreen.name
                             © Tony Green 2011                                 Novellus
Where are Semiconductors used??
These electronic components in these industries are
                      as follows:
Data Processing - Main products are Microprocessor,
          DRAM and SRAM memory elements
Communication - Main products memory elements,
    DAC converters, DSP processors, MCU, optical
              semiconductors for displays
     Consumer Electronics - Main products are
   processors, graphic chips, memory modules, and
                    analogue chips
Automotive - Main products are sensors, MCU, DSP,
  power electronics (IGBT) and analogue components
 Industrial - Main products are MCU, DSP, and logic
              Source: Price Water Coopers November 2009 Report titled Changing the
              Pace of Semiconductor
                          http://www.tonygreen.name
                          © Tony Green 2011                                  Novellus
Semiconductors Industry Application Data
    Application             2006              2007             2008            2009
  Data Processing           96.6              99.4             95.0            79.6
  Communication             64.6              64.9             63.4            48.6
Consumer Electronics        42.9              45.8             45.2            39.4
    Automotive              17.6              18.9             19.2            11.9
     Industrial             26.0              26.6             25.8            21.6
       Total                247.7             255.6           248.6            210.1
      Growth                8.9%              3.2%            -2.8%           -19.1%

   Semiconductor sales in billions of dollars by application
                 Source: Price Water Coopers November 2009 Report titled Changing the Pace
                 of Semiconductors
                               http://www.tonygreen.name
                               © Tony Green 2011                                Novellus
Semiconductors Industry Component Data
   Component              2006              2007            2008             2009
    Memories              56.4              54.0             43.4            38.6
 MPU's and MCU's          51.8              52.5             53.3            47.5
      Logic               63.2              69.3             71.4            57.7
    Digital IC            171.4             175.8           168.1            143.8
   Analog IC's            40.2              41.1             41.0            29.7
    Total IC's            211.6             216.9           209.1            173.5
    Discrete              16.2              17.0             16.5            10.5
     Optical              16.3              17.7             18.9            14.1
     Sensors               3.6               4.0              4.1             3.0
      Total               247.7             255.6           248.6            201.1
     Growth               8.9%              3.2%            -2.8%           -19.1%

   Semiconductor sales in billions of dollars by component
                Source: Price Water Coopers November 2009 Report titled Changing the Pace of
                Semiconductors
                             http://www.tonygreen.name
                             © Tony Green 2011                                  Novellus
Semiconductors Industry Country Data

    Region          2006              2007             2008              2009
   America          44.9              42.3              37.9              33.4
    Europe           39.9              41.0             38.2              30.8
     Japan           46.4              48.8             48.5              35.4
Asia(ex Japan)      116.5             123.5            124.0             101.5
      Total         247.7             255.6            248.6             201.1
   Growth           8.9%              3.2%             -0.3%            -19.1%

          Semiconductor Sales by Region
             Source: Price Water Coopers November 2009 Report titled Changing the Pace of
             Semiconductors
                          http://www.tonygreen.name
                          © Tony Green 2011                                  Novellus
How are Semiconductors
manufactured??
 Create our wafer
                                                Speed Process
             Sand - silicon dioxide             chamber
             Melted at high temperature
             Purified to 99.9999% purity
             Grown into ingot – crystal
             orientation
Inova: PVD   Sliced into thin wafers
             Wafer polished via CMP to
             smooth one side
             Epitaxial layer added in many
             cases

                    http://www.tonygreen.name
                    © Tony Green 2010               Novellus
How are Semiconductors
      manufactured??
Add insulator

      Insulating layer of SiO2 (later
     other )is added by Oxidation or
     CVD

       Done in a high temp furnace



                http://www.tonygreen.name
                © Tony Green 2010           Novellus
How are Semiconductors
     manufactured??
Apply Photo-resist


     Light resist material is applied
     over wafer to allow desired
     pattern to be burned into
     wafer



                     http://www.tonygreen.name
                     © Tony Green 2011           Novellus
How are Semiconductors
      manufactured??
Photo Resist is exposed
    Reticle projects image of chip layout onto
    wafer
    Exposed photo-resist to Light
    Photo-resist hardens as a result
    As a result all are exposed to light has
    crust while part that are not are still soft –
    in accordance to desired pattern
    Step to work through entire wafer (not
    done at once due to focus of light)
    Doping with ion implanter to create p and
    n areas

                    http://www.tonygreen.name
                    © Tony Green 2011           Novellus
How are Semiconductors
manufactured??
Etch
   Cut away unwanted material (soft
  parts of resist not exposed to light)
   Can be wet (acid bath) or dry(plasma)
   Hardened resist will protect insulating
  layer beneath keeping in intact by
  design
   Leaves desires pattern after harden
  resist cleaned via ashing process
   Now design in place ready to inter
  connecting metal

                 http://www.tonygreen.name
                 © Tony Green 2011           Novellus
How are Semiconductors
     manufactured??
Metal deposition
   • Metal (aluminum and later copper )
     will be added on top of insulting
     layer which will be from
     interconnects
   • Added by deposition processes




                   http://www.tonygreen.name
                   © Tony Green 2011           Novellus
How are Semiconductors
   manufactured??
     Overall of Front End




    Source: Semiconductor Device Fabrication Presentation lecture 11 05 May 2003
    http://lpc1.clpccd.cc.ca.us/lpc/tswain/lect11.pdf


                   http://www.tonygreen.name
                   © Tony Green 2011                                  Novellus
How are Semiconductors
      manufactured??
Test
  First, several dozen basic measurements, called
 parametric tests, are made on individual transistors
 and other test structures in test patterns on the wafers.
 This is the first check on proper fabrication.

   The second test is a circuit function test. Each chip is
 tested with a probe that has many tiny electrodes. A
 computerized system performs many tests on the chip
 and collects statistical data on the product. The test
 system keeps a map of passed and failed die on every
 wafer. Failed die are often marked with an ink dot or
 “inked out.”
                            Source: Demystifying Chipmaking

                       http://www.tonygreen.name
                       © Tony Green 2011                  Novellus
How are Semiconductors
      manufactured??
Die Test and Wire Bonding
      The good die are removed from the adhesive and attached
   to a chip package. The dual inline package is the most
   common and contains a lead frame to which the chip is
   attached. The lead frame is a mounting that has the
   appropriate number and configuration of contacts or “leads”
   to attach to other electrical devices, circuit boards and the
   like.

     The chip itself is attached to the lead frame using
   special solder such as goldgermanium alloy or epoxy.
   Then the tiny gold or aluminum wires that connect to
   the bonding pads on the chip are attached using special
   techniques that do not damage the pads.
                         Source: Demystfying Chipmaking

                         http://www.tonygreen.name
                         © Tony Green 2011                Novellus
How are Semiconductors
       manufactured??
Cut/Dicing
  The chips on the wafer are
separated with a diamond saw to
form individual integrated circuits

 Quality assurance; test series

              Source: Demystifying Chipmaking

               http://www.tonygreen.name
               © Tony Green 2011                Novellus
How are Semiconductors
     manufactured??
Packaging
   Encapsulation is the process of putting the chips
 into protective packages. Many packages are
 available for chips.

  The intended use of the part is key in deciding
 how to encapsulate it. Military hardware is
 exposed to harsh environments so tough
 packaging is used.

  Simple plastic packages, such as the dual inline
 package, suffice for many chips. Metal, ceramic
 and composite packaging material are all used.
                     Source: Demystifying Chipmaking
                     http://www.tonygreen.name
                     © Tony Green 2011                 Novellus
Moved on to Brooks Instrument,
Formerly a division of Emerson
 Process Management as an
  Technical Response Center
          Manager
             June 2003


       http://www.tonygreen.name
       © Tony Green 2011
                                   Brooks Instrument
What are the Emerson Groups?




        http://www.tonygreen.name
        © Tony Green 2011
                                    Brooks Instrument
What are the some of the Emerson Brands?
Perhaps you have worked with one of them…




             http://www.tonygreen.name
             © Tony Green 2011
                                         Brooks Instrument
What does Brooks Instrument do?
“In industries as diverse as bio
  pharmaceuticals, oil and gas, fuel cell, solar,
  chemicals, medical devices, analytical
  instrumentation, and semiconductors, Brooks
  provides the broadest array of flow products
  in the market”


I worked with mass flow devices

           Source: http://www.brooksinstrument.com/brooks-
           overview.html
                http://www.tonygreen.name   Brooks Instrument
                © Tony Green 2011
What is a Technical Response
  Center Manager?

Manager of the operation of
                                                Overseer of all aspects of
  the Fremont Response
                                                  local staffing to ensure
         Center
                                                     effective, accurate
                                                 inventory management
                                                 and order processing to
    Provider to customers and                          meet customer
   local sales staff of product                      demands for rapid
       application support                          turnaround product
  throughout the entire sales                            availability.
             process.


                    http://www.tonygreen.name
                    © Tony Green 2011                      Brooks Instrument
What about Mass flow?……
 The processes used to manufacture high
 technical products such an integrated chips used
 in everyday life involve chemical reactions.
 These reactions require that the mass be tracked
 in order measure and control the flow of
 material.
 Since Mass flow is independent of material,
 temperature, and pressure and is useful for
 measure the component of a reaction.
  Mass Flow Controller technology is typically
 utilized whenever the precise delivery of material
 is required when a reaction is needed



                http://www.tonygreen.name   Brooks Instrument
                © Tony Green 2011
What is Mass Flow controller?……
 A mass flow controller is a device used to
 measure and control the flow of gasses.
 A mass flow controller is designed and
 calibrated to control a specific type of gas at
 a particular range of flow rates and inlet and
 outlet pressures.
 The mass flow controller can be given a set-
 point from 0 to 100% of its full scale range
 but is typically operated in the 10 to 90% of
 full scale.
 MFCs can controlled be either analog(in up
 DC voltage or digital (serial communication).


               http://www.tonygreen.name   Brooks Instrument
               © Tony Green 2011
What is Mass Flow inside a
controller?(Schematic)……
                                           Communication port if       Input AC
                                                digital               /DC Power

                  Amplifier

             Wheatstone                                                          0-5 VDC
             Bridge                                                              Output
                                                     IC Board


                                                                      Solenoid
                                                                      Valve
               Sensor            Heater
                                  Coil
   Flow In                                                         Flow Out



                  ByPass                                Orifice




                    http://www.tonygreen.name                   Brooks Instrument
                    © Tony Green 2011
What is Mass Flow inside a
controller?(Valve)……
                           Valve body


                           Compression O ring


                           Spring


                           Small Spring


                           Core

                           Large Spring


                           Valve Seat



                           Valve O ring



                           Orifice



                           Orifice o ring




                                     Block




        http://www.tonygreen.name               Brooks Instrument
        © Tony Green 2011
What is a Gas Box?……
 Gas delivery systems control the flow, pressure,
sequencing and mixing of specialty gases into and out
of the reaction chambers of semiconductor
manufacturing tools

A typical gas delivery system consists of one or more
gas lines, comprised of several filters, mass flow
controllers, regulators, pressure transducers and valves,
associated interconnect tubing and an integrated
electronic and/or pneumatic control system.

  These systems are mounted on a pallet and are
typically enclosed in a sheet metal encasing. Many gas
delivery system designs are developed in collaboration
with end users are customized to meet the needs of
specific OEMs.


                        Source: Ultra Clean Technology 2009
                        10-K

                 http://www.tonygreen.name                    Brooks Instrument
                 © Tony Green 2011
What types of equipment use Gas
Boxes?……
Semiconductor equipment that flows gasses
 for processes required to make chips

 CVD

          Etch

                               Ashing

                                             PVD

             http://www.tonygreen.name   Brooks Instrument
             © Tony Green 2011
What is a representation of a Gas
                       Box?……

Gas 1




Gas 2




Gas 3




Gas 4




   Purge




                                Legend
  MFC              Regulator
  Filter           Manual Valve




                  http://www.tonygreen.name   Brooks Instrument
                  © Tony Green 2011
What some of these processes?
Depositing of metal(interconnect) , oxide
 (insulator), nitride (barrier)

Etch photo-resist

Ashing photo-resist

Adding epitaxial layer

Thermal oxidation


              http://www.tonygreen.name   Brooks Instrument
              © Tony Green 2011
What does Mass Flow have to do with
Semiconductors?
            Gas Name       Category                Gas Name         Category                 Gas Name           Category
  He   Helium                Inert      N2O Nitrous Oxide             Inert     Si2H6 Disilane                    Inert
  Ne   Neon                  Inert      CH4 Methane                Toxic/Corr    SF6 Sulfur Hexafluoride          Inert
  Ar   Argon                 Inert      NH3 Ammonia                Toxic/Corr    C2F6 Hexafluoroethane (Freon-116)nert
                                                                                                                  I
  Xe   Xenon                 Inert      PH3 Phosphine              Toxic/Corr    WF6 Tungsten Hexafluoride Toxic/Corr
  H2   Hydrogen            Toxic/Corr CH3F Methyl Fluoride         Toxic/Corr    C3F8 Perfluoropropane            Inert
 CO    Carbon Monoxide     Toxic/Corr C2H4 Ethylene                   Inert      C4F8 Octafluorocyclobutane       Inert
 HBr   Hydrogen Bromide    Toxic/Corr  SiH4 Silane                 Toxic/Corr SiHCl3 Trichlorosilane            Toxic/Corr
 HCl   Hydrogen Chloride   Toxic/Corr GeH4 Germane                 Toxic/Corr C2H2F4 Tetrafluoroethane            Inert
  N2   Nitrogen              Inert     CHF3 Fluoroform (Freon-23)     Inert     CH2F2 Difluoromethane           Toxic/Corr
 O2    Oxygen                Inert      NF3 Nitrogen Trifluoride   Toxic/Corr (CH3)3SiHTrimethylsilane (TMSi) Toxic/Corr
 NO    Nitric Oxide        Toxic/Corr C2H6 Ethane                  Toxic/Corr    C5F8 Octafluorocyclopentene      Inert
  HI   Hydrogen Iodide     Toxic/Corr B2H6 Diborane                Toxic/Corr    C4F6 Hexafluoro-2-butyne       Toxic/Corr
  F2   Fluorine            Toxic/Corr   CF4 Carbon Tetrafluoride (Freon-14)
                                                                      Inert     C4F6-q Hexafluoro Butadiene-1,3 Toxic/Corr
 Cl2   Chlorine            Toxic/Corr SiH2Cl2 Dichlorosilane       Toxic/Corr    C3H6 Cyclopropane              Toxic/Corr
 H2S   Hydrogen Sulfide    Toxic/Corr  BCl3 Boron Trichloride      Toxic/Corr     O3 Ozone                      Toxic/Corr
 CO2   Carbon Dioxide      Toxic/Corr  SiF4 Silicon Tetrafluoride Toxic/Corr

   The Gasses used in Wafer Processing need to controlled
   and measured accurately!!! MFC’s allow this to happen
                                                   Source: Brooks Instrument Semiconductor Training presentation


                                         http://www.tonygreen.name                         Brooks Instrument
                                         © Tony Green 2011
Crowning achievement
 Key Performance Indicators(KPI)
 measures
 Question: what is the FRC here to do?
  Production, rapid turn MFC, to run a efficient
  operation, support of critical semi OEM and
  Integrators
 What measure will tell us if we are
 meeting that goal?




               http://www.tonygreen.name
               © Tony Green 2011           Brooks Instrument
Crowning achievement
   “Those who fail to plan, plan to fail”                                               -
                  Proverb
KPI inform and guide the business process.

They give you a rational method, based on objective
 data and results, for making business decisions

You first set the goals then establish how you
  measure the progress towards those Goals

Thus you will be able to answer the question: What
 is working? and What needs to be changed?

               Source: Key Performance Indicator (KPIs) for Search Engine Marketing by Andrea Ramos and
                               Roslyn Layton of Axicom {Chapter from Search Engine Marketing}


                     http://www.tonygreen.name
                     © Tony Green 2011                                  Brooks Instrument
Crowning achievement
Question: what is the FRC here to do?
 Production, rapid turn MFC, to run a efficient
  operation, support of critical semi OEM and
  Integrators

What measure will tell us if we are meeting
 that goal?




               http://www.tonygreen.name
               © Tony Green 2011           Brooks Instrument
Crowning achievement
     After much discussion the flowing five
      KPI’s were selected for the Fremont
               Response Center
       Chosen Key Performance Indicators(KPI)
       were

1.    On time delivery - 80%
2.    Critical Repairs within 1 day
3.    Inventory counts – 90 % accurate
4.    Inventory accurately - 100% goal
5.    Turnaround time – 1 day

                          How do we do?
                 http://www.tonygreen.name
                 © Tony Green 2011           Brooks Instrument
Crowning achievement/On Time
                                Delivery
                      Fremont Response Center On-Time Delivery

                     100                                                    30

                     90
                                                                            25




                                                                                 Number of Service Orders
                     80
On-Time Percentage




                     70                                                                                     On Time Percentage
                                                                            20
                     60
                     50                                                     15                              Number of Service Orders

                     40
                                                                            10
                     30

                     20
                                                                            5
                     10
                      0                                                     0




                                            Month




                           On average we were at 80% or higher

                                                http://www.tonygreen.name
                                                © Tony Green 2011                                           Brooks Instrument
Crowning achievement/Inventory
                              Accuracy
                    Fremont Response Center Inventory Accuracy


                   90                                                       80
                   80                                                       70
                   70




                                                                                 Number of counts
Percent Accurate




                                                                            60
                   60
                                                                            50                         Accurate Count Percentage
                   50
                                                                            40
                   40
                                                                            30                         Number of Counts
                   30
                   20                                                       20

                   10                                                       10
                    0                                                       0




                                               Month




                        We had some work to do on this one…..

                                                http://www.tonygreen.name
                                                © Tony Green 2011                                   Brooks Instrument
Crowning achievement/Critical
                                  Account
                            FRC Critical Account Response

                      100                                                      16
                       98                                                      14
Percentage On-time




                       96




                                                                                    Number of orders
                                                                               12
                       94
                       92                                                      10
                       90                                                      8
                       88                                                                              On Time Percentage
                                                                               6
                       86                                                                              Number of Service Orders
                                                                               4
                       84
                       82                                                      2
                       80                                                      0




                                              Month




                     August was a tough month but after that the team
                                       stepped up….

                                                   http://www.tonygreen.name
                                                   © Tony Green 2011                                   Brooks Instrument
Crowning achievement/Turnaround
              Time
                   Fremont Response Center Turnaround Time


               9                                                   30
               8




                                                                        Number of Service Orders
                                                                   25
               7
Average Days




               6                                                   20
               5
                                                                   15                              Average Days   Number of Service Orders
               4
               3                                                   10
               2
                                                                   5
               1
               0                                                   0




                                   Month



   As a service manager Turnaround time can never be
                    fast enough….
                                       http://www.tonygreen.name
                                       © Tony Green 2011                                                Brooks Instrument
Crowning achievement/Invoicing
                        Fremont Response Center Invoicing within 1 Day


                        80                                                    30




                                                                                   Numbers of Service Orders
                        70
Percentage with 1 day




                                                                              25
                        60
                                                                              20
                        50                                                                                     Invoicing within a day One Day Percentage

                        40                                                    15
                                                                                                               Invoicing within a day Number of Service
                        30                                                                                     orders
                                                                              10
                        20
                                                                              5
                        10

                        0                                                     0




                                              Month




From this plot we could have invoiced a bit faster


                                                  http://www.tonygreen.name
                                                  © Tony Green 2011                                                    Brooks Instrument
In the sprit of always improving
my self I went back to school….


     I became a Phoenix!
          Completed
      M.B.A. Technology
        Management
         2003 - 2005
                 http://www.tonygreen.name
                     © Tony Green 2011       Phoenix
Technology Management is….
 Technology Management is a set of management
   disciplines that allows organizations to manage
   its technological fundamentals to create
   competitive advantage.
 Typical concepts used in technology management
   are:
    technology strategy (a logic or role of technology in
    organization)
    technology mapping (identification of possible relevant
    technologies for the organization)
    technology road-mapping (a limited set of technologies
    suitable for business)
    technology project portfolio (a set of projects under
    development) and
    technology portfolio (a set of technologies in use).

                                                 Source: Wikipedia.com

                     http://www.tonygreen.name
                         © Tony Green 2011                     Phoenix
Coursework - Traditional




         What is in a traditional MBA
               program?
 Finance, Marketing, Accounting, Operations,
   Statistics, Economics, Human Relations,
                  Business Law



                                            Photos courtesy of dreamstime.com

                http://www.tonygreen.name
                © Tony Green 2011                                Phoenix
Course – Non-Traditional
         Non-
Technology Management Focus
 R&D and Innovation
  Project Management
  E –Commerce
  Capstone Project
  Introduction to Information
 Systems
 Strategy Formulation                    Photo courtesy of dreamstime.com

 Technology Transfer
            Now what did our Capstone
                 Project entail?
             http://www.tonygreen.name
             © Tony Green 2011                             Phoenix
Capstone project - Overall

              GOTV: PROJECT
               EXPANSION
           THE DELIVERY OF
   ENTERTAINMENT TO TRANSPORTATION
                  PRESENTED BY: TEAM MBA INC.


SHANNON CARTER                                PROCESS MANAGER
BARRY CHIARELLO                               PROJECT MANAGER
TONY GREEN                                    ENGINEERING MANAGER
MARK REIBOLDT                                 INFRASTRUCTURE MANAGER
JOHN PETERNEL                                 DISTRIBUTION MANAGER
THOMAS ZIER                                   TARGET MANAGER



                  http://www.tonygreen.name
                  © Tony Green 2010                             Phoenix
Capstone project - highlights
 The GoTV ‘s vision was to provide cutting edge media
 entertainment products for mobile applications. GoTV
 provided “on-the-go” consumers with an unmatched
 transportable video-viewing experience with the best
 performance and best value available.
 GoTV’s proprietary service platform delivered entertainment
 to mobile devices; particularly automobiles, trains, and
 planes, and stores this content to make it available to the
 consumer on their demand.




                                              Source of photo: TEAM MBA
                                              capstone project paper



                  http://www.tonygreen.name
                  © Tony Green 2011                                Phoenix
Capstone project – highlights
(Continued)
GoTV has developed a proprietary set of video codecs,
scheduling algorithms, storage and playback applications,
and antenna technology that leverage existing
infrastructures and technologies. Existing technologies
include TV broadcast, WiFi, mobile telephony and satellite
media. GoTV cooperates and interoperates with established
infrastructure, manufacturing and distribution players




                     Source of photo: TEAM MBA
                     capstone project paper

                  http://www.tonygreen.name
                  © Tony Green 2011                   Phoenix
Capstone project - Business Model

The GoTV distribution business model
 addresses three principle topics: focus,
 customers, and goals.

The GoTV sales team is made up of two sales
 channels: pre-production sales (PS), and
 distribution sales (DS).




              http://www.tonygreen.name
              © Tony Green 2011           Phoenix
Capstone project - Business
      Model(Continued)

       Revenue Streams

Revenues from service agreements for the
            user equipment
 Usage agreements for the GoTV service
  New Product Sales, Pay-Per View, and
              Advertising



            http://www.tonygreen.name
            © Tony Green 2011           Phoenix
With my Technology
Management studies
completed it was time to
apply these concepts to the
real world.

Here are my three favorite
concepts out of the
technology management
toolbox…
        http://www.tonygreen.name
        © Tony Green 2011           Phoenix
Coined by the
The Hype Cycle                                                Gartner Group

                                                              It suggests that our
                                                              modern approach to
                                                              marketing
                                                              technology results in
                                                              the technology being
                                                              over hyped in the
                                                              early stages of
                                                              growth.

www.slideshare.net/.../gartner-hype-cycle-emerging-
technologies-2010                                             Give examples:
                                                              Dot.com boom then
                                                              bust
                                  http://www.tonygreen.name
                                  © Tony Green 2011                           Phoenix
The Technology Adoption Life Cycle
                                                   Introduced in Geoffery’s Moore
                                                   book Crossing the Chasm

                                                   As far as I am concerned this is
                                                   the high technology marketing
                                                   bible

                                                   Difference from typical life cycle
                                                   due to presence of a “chasm” in
                                                   the early adopter
                                                   stage which must be crossed if
http://en.wikipedia.org/wiki/Crossing_the_Chasm
                                                   mainstream acceptance of a
                                                   product is going to occur

                                                   Current examples: alternative
                                                   energy as a whole


                                http://www.tonygreen.name
                                © Tony Green 2011                             Phoenix
Bass Diffusion                                       Developed by Frank
                                                     Bass in 1969

                                                     It describes the process
                                                     of how new products
                                                     get adopted as an
                                                     interaction between
                                                     users(Imitators) and
                                                     potential users
                                                     (Innovators)

                                                     Example: adoption of
http://en.wikipedia.org/wiki/Bass_diffusion
                                                     Mobile phones and more
_model                                               recently on line social
                                                     networks

                              http://www.tonygreen.name
                              © Tony Green 2011                         Phoenix
Opportunity as Sales and
Marketing as Manager at Nagase
           America
         in June 2008

  Tasking : to penetrate North
American market with our Epoxy
 products in Automotive, Heavy
Electric and wind turbine blades

            http://www.tonygreen.name
                © Tony Green 2011
                                        Nagase
What were my responsibilities as a
  Sales and Marketing manager?
Built new business by searching new
   business seeds; by selecting and
         contacting potential
suppliers/customers to determine their
   needs, make persuasive business
  discussion about our products and
   services; and by focusing on the
   activities required to close deals.
               http://www.tonygreen.name
                   © Tony Green 2011
                                           Nagase
Automotive Tier One Structure
OEM/System




Tier I/Sub-
System




Tier II/
Component

  Source: Automotive Electrical and
  Electromechanical System Design presentation by Ansoft Corporation




                                            http://www.tonygreen.name
                                                © Tony Green 2011
                                                                        Nagase
NAGASE AMERICA
               Activity in Automotive Hybrid/Electric Vehicles
                              HEV
  Flex Fuel                                                             Power         Air-Flow
  Sensor
                  IGBT        Battery            Condenser
                                                                        Module        Sensor
                              Packs


   Power-
   Wind                                                                               Alternator
   Motor


                                                                                       Ignition
Transmission


                                                                                        Clutch
  Air
  Pressure
                              Power                                                ECU
  Sensor        Battery(Lit                       Airbag             Power
                              Stirring                                             (Engine
                hium Ion)                         Sensor             Distributor   Control Unit)
                              Motor


                                         http://www.tonygreen.name
                                             © Tony Green 2011                           Nagase
Overview of Electric Transmission
Power Generation     Transmission      Distribution        Additional Distribution    End User
           125- 765 KV       ~ 69 KV           7.2 KV-13.8 KV                   110/220 V



Wind

                                                                                     Commercial
Nuclear

                    Power                                     Distribution
Oil/Coal                            Distribution                                     Industrial
                    Substatio                                 points/Trans
                                    Substation                formers
                    n
Solar
                                                                                     Residential

Geotherm
al

                   Switc        GIS            CT/P               Bush      Insul
                   hgear                       T                  ings      ators



                                      http://www.tonygreen.name
                                          © Tony Green 2011
                                                                                         Nagase
Wind Turbines Blade/Molding Assembly
     A wind turbine blade is typically manufactured as follows:
     A mold made form Epoxy is used to create the
     top and bottom portion of the blades




                  A wind turbine blade is formed of a fiberglass
                  reinforced
                  material that is comprised of a carbon or
                   glass or carbon fiber and an epoxy resin




Once cured two portions of the blade and bonded together
using an adhesive

                               http://www.tonygreen.name
                                   © Tony Green 2011
                                                                  Nagase
Wind Turbines Blade/Molding
Nagase currently works with our customers to:

Providing the epoxy resin that forms the
Fiberglass Reinforced Plastic (FRP)

    -AND-




The molds that are used to create the pieces that are
bonded together to produce wind turbine blades

            Using a variety of processes including:
               Hand Wet Lay-up and vacuum infusion

                         http://www.tonygreen.name
                             © Tony Green 2011       Nagase
As of the end of 2009 the Wind Turbine manufacturers by installed capacity
 in the United States were listed below: (35169 MW) Acciona
                                                                 AOC
               Installed Capacity in MW                          Atlantic Orient Co.
                                                                 AWE
                                                                 Bergey Windpower
                                                                 Clipper
                                                                 Clipper Windpower
                                                                 Danwin
                                                                 DES
                                                                 DeWind
                                                                 EMS
                                                                 Enertech
                                                                 Entegrity
                                                                 Fuhrlander
                                                                 Gamesa
                                                                 GE Energy
                                                                 Howden
                                                                 Integrity Wind Systems
                                                                 Jacobs
                                                                 Mitsubishi
                                                                 Nedwind
                                                                 NEG Micon
                                                                 Nordex
                                                                 Nordtank
                                                                 Nordtank 65
                                                                 Northern Power Systems
                                                                 refurbished Nordtanks
                                                                 REPower
                                                                 Siemens
                                                                 Silver Eagle
                                                                 Suzlon
                                                                 Tacke
                                                                 Unspecified
                                                                 Vanguard Windmatic
                                                                 Various
                                                                 Vestas
                                                                 Wind Turbine Co.
                                                                 Windmaster
                                                                 Windmatic
                                          Source: AWEA Website   WindWorld


                              http://www.tonygreen.name
                                  © Tony Green 2011
                                                                                          Nagase
NAGASE AMERICA

What does this mean?

To make a long story short GE
Energy holds the lion’s share with over
40% of the capacity followed by
Mitsubishi, Vestas, and Siemens.

The top 4 have over 80% of the total
capacity installed.


              http://www.tonygreen.name
                  © Tony Green 2011
                                                Nagase
NAGASE AMERICA
 Now a look at lithium, what is the big deal
                with lithium?

For starters Lithium is:

1. The lightest of all materials
                                                         Name: Lithium
                                                         Symbol: Li
2. High electrochemical potential                        Atomic Number: 3
                                                         Atomic Mass: 6.941 amu
                                                         Melting Point: 180.54 ° (453.69 °
                                                                                C        K,
                                                         356.972 °F)
3. High Thermodynamic Voltage                            Boiling Point: 1347.0 ° (1620.15 °
                                                                               C           K,
                                                         2456.6 °
                                                                F)


4. Largest Energy density for weight                        Source: CRC Handbook of
                                                            Chemistry and Physics



5. A cell voltage of 3.6 Volts(highest of all types)




                             http://www.tonygreen.name
                             © Tony Green 2011                                  Nagase
NAGASE AMERICA
What about Lithium ion batteries that has
    made them a household name?
 High Energy Density

 Low Maintenance

 High Specific Power

 High specific energy                Drawing courtesy of “LiFePO4 for a Large Sized
                                           Lithium Secondary Battery” Dated
                                                     2006. 12. 12




 Ideal for very high current applications



                  http://www.tonygreen.name
                  © Tony Green 2011                                            Nagase
NAGASE AMERICA
        What about Lithium ion batteries? Just who
                   are making these?
                           Millions of Lithium Ion Battery Cells Shipped
        800

        700

        600

        500

        400

        300

        200

        100

          0




                                                 LiB Manufacturer by Year

                                                               2007    2008     2009


Source: IIT LIB Related Study Program 08-09 Chapter 1 LIB Related Market bulletin http://wenku.baidu.com/view/188e7d1810a6f524ccbf8561.html




                                                               http://www.tonygreen.name
                                                               © Tony Green 2011                                               Nagase
NAGASE AMERICA
         And what applications are they being used
                            for?
    1600
                                      Millions of Lithium Ion Batteries Cells shipped
    1400

                                                                               NBPC               Notebook/Personal Computer
    1200
                                                                               Cell               Cellular/Mobile Phones
                                                                               PT                 Power Tools
    1000
                                                                               DSC                Digital Cameras
                                                                               CAM                Camcorders/Video Cameras
     800
                                                                               DMP                Digital Music Players

     600                                                                       Game               Game Consoles


     400


     200


        0
                 NBPC             Cell             PT             DSC                 CAM           DMP             Game          Other

                                                   LiB use by Application by Year
                                                               2007     2008    2009


Source: IIT LIB Related Study Program 08-09 Chapter 1 LIB Related Market bulletin     http://wenku.baidu.com/view/188e7d1810a6f524ccbf8561.html




                                                                 http://www.tonygreen.name
                                                                 © Tony Green 2011
                                                                                                                                  Nagase
NAGASE AMERICA
If you are wondering why there Automotive
is not listed as an application for lithium ion
batteries that is my point. It would be
covered in others but currently the
numbers are very small which will change if
EV, PHEV, HEV’s to gain large scale global
adoption!!




              Source: Tony Green’s Personal Photos
                       http://www.tonygreen.name
                       © Tony Green 2011                 Nagase
And last but not lest of course there were trade shows to attend in order to
get out and meet Prospective customers…. Here is an example of a booth
                                    I did…




                     Source: Tony Green’s Personal Photos



                               http://www.tonygreen.name
                                   © Tony Green 2011
                                                                     Nagase
Who am I??
  Husband
                                                Ex Submariner
            M.B.A. educated                     Father
Engineering knowledge                              Ex Navy Nuke

               Professional Certified
                Marketer P.C.M.
                          Inbound Marketing
Navy veteran              Certified Professional (IMCP)


                  Chemical trained
                    http://www.tonygreen.name
                        © Tony Green 2011                Summary
How can this help you?
  Are you seeking someone with
    background in the following
             industries?
Contract Manufacturing
Electronics
Chemicals
Marketing/Sales,
Alternative Energy
High Technology
Tony Green
Tony Green    http://www.tonygreen.name
              © Tony Green 2011           Summary
NAGASE AMERICA
Let me hear for you. Contact
         me!!!!!!!




  Other websites: http://www.ExNavyNuke.com
  Personal Blog:
  http://www.markanthonygreen.blogspot.com
  Other blogs:
  http://www.exanavynuke.blogspot.com
  http://www.greenpowerresearch.com


                http://www.tonygreen.name
                © Tony Green 2011                Summary

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Tony Green professional presentation 03122011 draft

  • 1. Introducing Tony Green http://www.tonygreen.name © Tony Green 2011 Introducing…
  • 2. At 7:30 P.M. in the evening I was born the youngest identical twin on May 19, 1969 at the University of Pennsylvania in Philadelphia, PA. Photo courtesy of http://www.pennmedicine.org/health- system/patient/hospitals-locations/ http://www.tonygreen.name © Tony Green 2011 Birth
  • 3. I grew up in West Philadelphia near Fairmount Park. Photo: Courtesy of author’s personal collection I attended Central High graduating in 1987 Photo: Courtesy of author’s personal collection http://www.tonygreen.name © Tony Green 2011 Youth
  • 4. Attended the University of Delaware From 1987-1993 1987- Chemical Engineering Major Source of photos http://www.udel.edu/udphotos/ http://www.tonygreen.name © Tony Green 2011 College
  • 5. Undergraduate Research –Department of Chemistry Hydrophobic surface laser(laser is light amplification stimulated emission of radiation) to measure relaxation My contribution – Measured Contact Angles Applications – Resistance of Phone cable to corrosion Publication – in May 1992 edition of Journal of Analytical Chemistry http://www.tonygreen.name © Tony Green 2011 College
  • 6. Yes I have sported different looks through my college years……. Relaxing in Dickinson B Dormitory Halloween party in Wilbur street Graduation day! Source of photos: Tony Green’s personal photo collection http://www.tonygreen.name © Tony Green 2011 College
  • 7. Before arriving at my sea command. I went through Nuke Training pipeline 1994 – 1996, which consisted of Nuclear Field “A” School, Naval Nuclear power school NNPS and finally Prototype (NPTU) Photo Courtesy of Tony Green’s personal collection Photo Courtesy of Tony Green’s personal collection http://www.tonygreen.name © Tony Green 2011 Navy Nuke
  • 8. Was assigned as a Reactor operator to the U.S.S. Topeka S.S.N. 754 stationed (at the time) in Pearl Harbor, Hawaii. Photo Courtesy of Tony Green’s personal collection Photo Source http://www.submarinebaseph.com/intropage1.html http://www.tonygreen.name © Tony Green 2011 Navy Nuke
  • 9. This is Topeka underway. Just can’t say where….. Photo Courtesy of Tony Green’s personal collection Life underway during deployment, I don’t look bad with my head shaven! Photo Courtesy of Tony Green’s personal collection http://www.tonygreen.name © Tony Green 2011 Navy Nuke
  • 10. Who could serve in the Navy without any port calls? ….. Visit to Esquimalt, British Columbia Sipping Cider in Hong Kong Roppongi, Tokyo Japan Downtown Hong Kong Photos Courtesy of Tony Green’s personal collection http://www.tonygreen.name © Tony Green 2011 Navy Nuke
  • 11. Serve in the Navy, see the world! Pusan, South Korea Hong Kong From the sea Cruising topside off of Lahiana, Maui Photos Courtesy of Tony Green’s personal collection http://www.tonygreen.name © Tony Green 2011 Navy Nuke
  • 12. Great to be home from another deployment!!! Photo Courtesy of Dreamstime.com Realities of a nuclear Photo Courtesy Tony Green’s personal collection work environment http://www.tonygreen.name © Tony Green 2011 Navy Nuke
  • 13. Here I am about to go to “Westpac” One of three Pacific six-month deployments in 4 years… Of course all good things must come to an end… http://www.tonygreen.name © Tony Green 2011 Navy Nuke
  • 14. Ever wonder how a nuclear reactor can provide propulsion to a naval vessel ? Source : http://www.fas.org/man/dod-101/sys/ship/eng/reactor.html http://www.tonygreen.name © Tony Green 2011 Navy Nuke
  • 15. Just how is a reactor put together? Source: Yun Po Ok’s Nuclear Power Electro Ceramics Lab Presentation http://www.slideshare.net/viet4777/nuclear-power http://www.tonygreen.name © Tony Green 2011 Navy Nuke
  • 16. What materials makes this reactor go? You guessed it, Uranium more specifically U235 not U238 Chain reactions do not occur in uranium ore deposits. Fission occurs mainly for the rare isotope U-235. Only 0.7% or 1 part in 140 of uranium is U-235. The prevalent isotope, U-238, absorbs neutrons but does not undergo fission. A chain reaction stops as the U-238 absorbs neutrons. Source: http://www.slideshare.net/Sarah17/nuclear-fission-and-fusion http://www.tonygreen.name © Tony Green 2011 Navy Nuke
  • 17. In a typical example of nuclear fission, one neutron starts the fission of the uranium atom and three more neutrons are produced when the uranium fissions Source: http://www.slideshare.net/Sarah17/nuclear-fission-and-fusion http://www.tonygreen.name © Tony Green 2011 Navy Nuke
  • 18. Note that one neutron starts the fission of the uranium atom, and, in the example shown, three more neutrons are produced. • Most nuclear fission reactions produce two or three neutrons. • These neutrons can, in turn, cause the fissioning of two or three other nuclei, releasing from four to nine more neutrons. • If each of these succeeds in splitting an atom, the next step will produce between 8 and 27 neutrons, and so on. Source: http://www.slideshare.net/Sarah17/nuclear-fission-and-fusion http://www.tonygreen.name © Tony Green 2011 Navy Nuke
  • 19. What happens when Uranium undergoes fission? Well, you get energy, fission fragments and more neutrons to cause more reactions…. Source: Applied Engineering Principles http://www.tonygreen.name © Tony Green 2011 Navy Nuke
  • 20. Just what happens when the remaining Uranium decays? The interaction of these radiations with the DNA in our bodies is where problems, i.e. cancer and radiation sickness result Source: http://www.atral.com/U2381.html http://www.tonygreen.name © Tony Green 2011 Navy Nuke
  • 21. After I left the Navy I joined Gasonics International as Technical Support Engineer Gasonics manufactures ashers and etchers for the that are used to manufacture Semiconductor chips Tony Green Tony Green http://www.tonygreen.name © Tony Green 2011 Novellus
  • 22. Early in 2001 Gasonics was acquired by Novellus Gamma 2310 Strip/Clean Source: Peter J. Woytowitz’s 2004 Virtual Prototyping of Semiconductor Processing Equipment presentation My title changed to Product Support Engineer but the job was still the same….. Tony Green Tony Green http://www.tonygreen.name © Tony Green 2011 Novellus
  • 23. What does Novellus do? Vector PECVD Founded in 1984, Novellus Systems is a supplier of manufacturing systems used to create integrated circuits. Within the semiconductor machinery manufacturing market, the company builds equipment and develops processes used to manufacture the Source: Peter J. Woytowitz’s 2004 interconnect structures that tie together Virtual Prototyping of Semiconductor Processing Equipment presentation the transistors within a semiconductor chip Source: IBIS World http://www.tonygreen.name © Tony Green 2011 Novellus
  • 24. What does Novellus do? Speed HDP The company is maker of semiconductor production equipment, including chemical vapor deposition systems that layer dielectric (insulating) material on semiconductor wafers, physical vapor deposition systems that layer conductive metals, and electro-fill systems that deposit copper layers. It also makes surface preparation systems that clean wafers before each round of deposition. Novellus markets its products worldwide to manufacturers of semiconductor devices including, customers with captive fabrication lines, who produce semiconductors primarily for internal consumption; and merchant semiconductor manufacturers, who produce semiconductors primarily for sales to third party customers. How does this relate to chip making in general? Source: Peter J. Woytowitz’s 2004 Virtual Prototyping of Semiconductor Processing Equipment presentation Source: IBIS World http://www.tonygreen.name © Tony Green 2011 Novellus
  • 25. What about these chips/where does silicon fit in?? • Simply, silicon is beach sand processed in high temperature so it’s cheep and available • Easily oxidized to form electrical insulator • Has excellent mechanical properties, it’s strength exceeds high-strength steel Silicon is used to create transistors Source: Integrated Circuits and MEMS fabrication Presentation by Amna Z. Shawwa http://www.cecs.csulb.edu/~hill/ee330/Semiconductor%20Devices%20(Amna).ppt http://www.tonygreen.name © Tony Green 2011 Novellus
  • 26. Now that we have silicon…a semiconductor is A Semiconductor is a material with properties in between conductors (allows current to pass) and insulators (allows little/no current to pass). In the end it is all about how many free electrons available to conduct current. A feature of semiconductors is that the supply of conduction electrons can be controlled. Source: Applied Engineering Principles Naval Training document http://www.tonygreen.name © Tony Green 2011 Novellus
  • 27. Now that we have silicon…valance electrons The most popular elements are Silicon and Germanium both use 4 valance electrons. (outer shell electrons) Doping can be done with elements that have 3, (example boron) or 5, (example arsenic) valance electrons. Doping can alter the properties of these materials by affecting the available supply of conduction electrons. The materials doped with 3 valance electrons will form holes since there will now be holes where there were electrons while the materials doped 5 valance electrons will form carriers are electrons since there will now be excess electrons. Source: Applied Engineering Principles Naval Training document http://www.tonygreen.name © Tony Green 2011 Novellus
  • 28. Now that we have silicon…doping to make p and n type materials Materials doped with 3 electrons elements are referred to as p type while material doped with 5 electrons are referred as n type. Devices are made of p and n type of materials to perform specific electrical functions. When pieces of n type materials are brought in contact with n type materials a p-n junction is formed. The movement of electrons across these two materials is called a Depletion zone is for which can be controlled by the amount of bias or voltage that is applied. Source: Applied Engineering Principles Naval Training document http://www.tonygreen.name © Tony Green 2011 Novellus
  • 29. Now that we have a P/N Junction Depletion Zone p type material n type material Voltage A p/n junction is a one way device allowing current to flow in one direction and no current flow in the other direction by creating/removed of the depletion zone by the application of current. Source: Applied Engineering Principles Naval Training document http://www.tonygreen.name © Tony Green 2011 Novellus
  • 30. Now that we can put to P/N junctions together Transistors are comprised of three regions of p and n type materials. This forms two P/N junctions. p type material n type material p type material Emitter Base Collector Voltage Voltage Source: Applied Engineering Principles Naval Training document http://www.tonygreen.name © Tony Green 2011 Novellus
  • 31. Our PNP junctions form the basic Transistor The center region is the base while the two outer sections each of an opposite material type than the base are referred as the collector and emitter. The current can be controlled by the amount of current supplied to the base. This allows for a fair of crucial functionalities. One to act as a amplifier, or to increase the strength of current and the other is to act as a switch or the ability to be in a “on” state or an “off” state. Both functions are very useful in the assembly of more complex components Source: Applied Engineering Principles Naval Training document http://www.tonygreen.name © Tony Green 2011 Novellus
  • 32. Where do transistors come into play?? • Transistor is a semiconductor element, Has three terminals, & a small current or voltage applied to one terminal controls the current through the other two • It is the key component in all modern electronics • In digital circuits – Very fast electrical switch – Function as logic gate – RAM-type memory • In analog circuits – Amplify current signals – Amplify voltage signals These are made to create the chips that are use in electronics we all enjoy Source: Integrated Circuits and MEMS fabrication Presentation by Amna Z. Shawwa http://www.cecs.csulb.edu/~hill/ee330/Semiconductor%20Devices%20(Amna).ppt http://www.tonygreen.name © Tony Green 2011 Novellus
  • 33. Semiconductor hierarchy – Top level Silicon Analog discrete compounds Combinations into simple digital circuits Combinations into larger complex digital circuits, microprocessors Source: The essential guide to Semiconductors by Jim Turley http://www.tonygreen.name © Tony Green 2011 Novellus
  • 34. Semiconductor family tree This table provides an overview of the items made in the Semiconductor industry…… Discrete Components Integrated Circuits (IC) FPGA Prog. Logic PLD Peripherals CPU Graphics MPU Logic Gate Resistors Processors MCU Converters Capacitors Networking DSP Optical Comms Silicon Diodes NPU + Inductors Sensors Other Materials SRAM Transistors Other PROM Memories DRAM EPROM = digital ROM = analog EEPROM Flash Source: Adapted from the Essential Guide to Semiconductors by Jim Turley http://www.tonygreen.name © Tony Green 2011 Novellus
  • 35. Where are Semiconductors used?? The Top 5 supporting industries with their corresponding end use are: Data Processing - PC notebook and servers as well as peripheral devices as printers and monitors Communication - Mobile networks and Smart Phones Consumer Electronics - Games consoles (Wii, Xbox, Game Station), Digital TV, MP3 players, DVD recorders, photo and video cameras Automotive - engine control, instrument panel, safety and driving dynamics, navigation and entertainment Industrial - control and power electronics Source: Price Water Coopers November 2009 Report titled Changing the Pace of Semiconductor http://www.tonygreen.name © Tony Green 2011 Novellus
  • 36. Where are Semiconductors used?? These electronic components in these industries are as follows: Data Processing - Main products are Microprocessor, DRAM and SRAM memory elements Communication - Main products memory elements, DAC converters, DSP processors, MCU, optical semiconductors for displays Consumer Electronics - Main products are processors, graphic chips, memory modules, and analogue chips Automotive - Main products are sensors, MCU, DSP, power electronics (IGBT) and analogue components Industrial - Main products are MCU, DSP, and logic Source: Price Water Coopers November 2009 Report titled Changing the Pace of Semiconductor http://www.tonygreen.name © Tony Green 2011 Novellus
  • 37. Semiconductors Industry Application Data Application 2006 2007 2008 2009 Data Processing 96.6 99.4 95.0 79.6 Communication 64.6 64.9 63.4 48.6 Consumer Electronics 42.9 45.8 45.2 39.4 Automotive 17.6 18.9 19.2 11.9 Industrial 26.0 26.6 25.8 21.6 Total 247.7 255.6 248.6 210.1 Growth 8.9% 3.2% -2.8% -19.1% Semiconductor sales in billions of dollars by application Source: Price Water Coopers November 2009 Report titled Changing the Pace of Semiconductors http://www.tonygreen.name © Tony Green 2011 Novellus
  • 38. Semiconductors Industry Component Data Component 2006 2007 2008 2009 Memories 56.4 54.0 43.4 38.6 MPU's and MCU's 51.8 52.5 53.3 47.5 Logic 63.2 69.3 71.4 57.7 Digital IC 171.4 175.8 168.1 143.8 Analog IC's 40.2 41.1 41.0 29.7 Total IC's 211.6 216.9 209.1 173.5 Discrete 16.2 17.0 16.5 10.5 Optical 16.3 17.7 18.9 14.1 Sensors 3.6 4.0 4.1 3.0 Total 247.7 255.6 248.6 201.1 Growth 8.9% 3.2% -2.8% -19.1% Semiconductor sales in billions of dollars by component Source: Price Water Coopers November 2009 Report titled Changing the Pace of Semiconductors http://www.tonygreen.name © Tony Green 2011 Novellus
  • 39. Semiconductors Industry Country Data Region 2006 2007 2008 2009 America 44.9 42.3 37.9 33.4 Europe 39.9 41.0 38.2 30.8 Japan 46.4 48.8 48.5 35.4 Asia(ex Japan) 116.5 123.5 124.0 101.5 Total 247.7 255.6 248.6 201.1 Growth 8.9% 3.2% -0.3% -19.1% Semiconductor Sales by Region Source: Price Water Coopers November 2009 Report titled Changing the Pace of Semiconductors http://www.tonygreen.name © Tony Green 2011 Novellus
  • 40. How are Semiconductors manufactured?? Create our wafer Speed Process Sand - silicon dioxide chamber Melted at high temperature Purified to 99.9999% purity Grown into ingot – crystal orientation Inova: PVD Sliced into thin wafers Wafer polished via CMP to smooth one side Epitaxial layer added in many cases http://www.tonygreen.name © Tony Green 2010 Novellus
  • 41. How are Semiconductors manufactured?? Add insulator Insulating layer of SiO2 (later other )is added by Oxidation or CVD Done in a high temp furnace http://www.tonygreen.name © Tony Green 2010 Novellus
  • 42. How are Semiconductors manufactured?? Apply Photo-resist Light resist material is applied over wafer to allow desired pattern to be burned into wafer http://www.tonygreen.name © Tony Green 2011 Novellus
  • 43. How are Semiconductors manufactured?? Photo Resist is exposed Reticle projects image of chip layout onto wafer Exposed photo-resist to Light Photo-resist hardens as a result As a result all are exposed to light has crust while part that are not are still soft – in accordance to desired pattern Step to work through entire wafer (not done at once due to focus of light) Doping with ion implanter to create p and n areas http://www.tonygreen.name © Tony Green 2011 Novellus
  • 44. How are Semiconductors manufactured?? Etch Cut away unwanted material (soft parts of resist not exposed to light) Can be wet (acid bath) or dry(plasma) Hardened resist will protect insulating layer beneath keeping in intact by design Leaves desires pattern after harden resist cleaned via ashing process Now design in place ready to inter connecting metal http://www.tonygreen.name © Tony Green 2011 Novellus
  • 45. How are Semiconductors manufactured?? Metal deposition • Metal (aluminum and later copper ) will be added on top of insulting layer which will be from interconnects • Added by deposition processes http://www.tonygreen.name © Tony Green 2011 Novellus
  • 46. How are Semiconductors manufactured?? Overall of Front End Source: Semiconductor Device Fabrication Presentation lecture 11 05 May 2003 http://lpc1.clpccd.cc.ca.us/lpc/tswain/lect11.pdf http://www.tonygreen.name © Tony Green 2011 Novellus
  • 47. How are Semiconductors manufactured?? Test First, several dozen basic measurements, called parametric tests, are made on individual transistors and other test structures in test patterns on the wafers. This is the first check on proper fabrication. The second test is a circuit function test. Each chip is tested with a probe that has many tiny electrodes. A computerized system performs many tests on the chip and collects statistical data on the product. The test system keeps a map of passed and failed die on every wafer. Failed die are often marked with an ink dot or “inked out.” Source: Demystifying Chipmaking http://www.tonygreen.name © Tony Green 2011 Novellus
  • 48. How are Semiconductors manufactured?? Die Test and Wire Bonding The good die are removed from the adhesive and attached to a chip package. The dual inline package is the most common and contains a lead frame to which the chip is attached. The lead frame is a mounting that has the appropriate number and configuration of contacts or “leads” to attach to other electrical devices, circuit boards and the like. The chip itself is attached to the lead frame using special solder such as goldgermanium alloy or epoxy. Then the tiny gold or aluminum wires that connect to the bonding pads on the chip are attached using special techniques that do not damage the pads. Source: Demystfying Chipmaking http://www.tonygreen.name © Tony Green 2011 Novellus
  • 49. How are Semiconductors manufactured?? Cut/Dicing The chips on the wafer are separated with a diamond saw to form individual integrated circuits Quality assurance; test series Source: Demystifying Chipmaking http://www.tonygreen.name © Tony Green 2011 Novellus
  • 50. How are Semiconductors manufactured?? Packaging Encapsulation is the process of putting the chips into protective packages. Many packages are available for chips. The intended use of the part is key in deciding how to encapsulate it. Military hardware is exposed to harsh environments so tough packaging is used. Simple plastic packages, such as the dual inline package, suffice for many chips. Metal, ceramic and composite packaging material are all used. Source: Demystifying Chipmaking http://www.tonygreen.name © Tony Green 2011 Novellus
  • 51. Moved on to Brooks Instrument, Formerly a division of Emerson Process Management as an Technical Response Center Manager June 2003 http://www.tonygreen.name © Tony Green 2011 Brooks Instrument
  • 52. What are the Emerson Groups? http://www.tonygreen.name © Tony Green 2011 Brooks Instrument
  • 53. What are the some of the Emerson Brands? Perhaps you have worked with one of them… http://www.tonygreen.name © Tony Green 2011 Brooks Instrument
  • 54. What does Brooks Instrument do? “In industries as diverse as bio pharmaceuticals, oil and gas, fuel cell, solar, chemicals, medical devices, analytical instrumentation, and semiconductors, Brooks provides the broadest array of flow products in the market” I worked with mass flow devices Source: http://www.brooksinstrument.com/brooks- overview.html http://www.tonygreen.name Brooks Instrument © Tony Green 2011
  • 55. What is a Technical Response Center Manager? Manager of the operation of Overseer of all aspects of the Fremont Response local staffing to ensure Center effective, accurate inventory management and order processing to Provider to customers and meet customer local sales staff of product demands for rapid application support turnaround product throughout the entire sales availability. process. http://www.tonygreen.name © Tony Green 2011 Brooks Instrument
  • 56. What about Mass flow?…… The processes used to manufacture high technical products such an integrated chips used in everyday life involve chemical reactions. These reactions require that the mass be tracked in order measure and control the flow of material. Since Mass flow is independent of material, temperature, and pressure and is useful for measure the component of a reaction. Mass Flow Controller technology is typically utilized whenever the precise delivery of material is required when a reaction is needed http://www.tonygreen.name Brooks Instrument © Tony Green 2011
  • 57. What is Mass Flow controller?…… A mass flow controller is a device used to measure and control the flow of gasses. A mass flow controller is designed and calibrated to control a specific type of gas at a particular range of flow rates and inlet and outlet pressures. The mass flow controller can be given a set- point from 0 to 100% of its full scale range but is typically operated in the 10 to 90% of full scale. MFCs can controlled be either analog(in up DC voltage or digital (serial communication). http://www.tonygreen.name Brooks Instrument © Tony Green 2011
  • 58. What is Mass Flow inside a controller?(Schematic)…… Communication port if Input AC digital /DC Power Amplifier Wheatstone 0-5 VDC Bridge Output IC Board Solenoid Valve Sensor Heater Coil Flow In Flow Out ByPass Orifice http://www.tonygreen.name Brooks Instrument © Tony Green 2011
  • 59. What is Mass Flow inside a controller?(Valve)…… Valve body Compression O ring Spring Small Spring Core Large Spring Valve Seat Valve O ring Orifice Orifice o ring Block http://www.tonygreen.name Brooks Instrument © Tony Green 2011
  • 60. What is a Gas Box?…… Gas delivery systems control the flow, pressure, sequencing and mixing of specialty gases into and out of the reaction chambers of semiconductor manufacturing tools A typical gas delivery system consists of one or more gas lines, comprised of several filters, mass flow controllers, regulators, pressure transducers and valves, associated interconnect tubing and an integrated electronic and/or pneumatic control system. These systems are mounted on a pallet and are typically enclosed in a sheet metal encasing. Many gas delivery system designs are developed in collaboration with end users are customized to meet the needs of specific OEMs. Source: Ultra Clean Technology 2009 10-K http://www.tonygreen.name Brooks Instrument © Tony Green 2011
  • 61. What types of equipment use Gas Boxes?…… Semiconductor equipment that flows gasses for processes required to make chips CVD Etch Ashing PVD http://www.tonygreen.name Brooks Instrument © Tony Green 2011
  • 62. What is a representation of a Gas Box?…… Gas 1 Gas 2 Gas 3 Gas 4 Purge Legend MFC Regulator Filter Manual Valve http://www.tonygreen.name Brooks Instrument © Tony Green 2011
  • 63. What some of these processes? Depositing of metal(interconnect) , oxide (insulator), nitride (barrier) Etch photo-resist Ashing photo-resist Adding epitaxial layer Thermal oxidation http://www.tonygreen.name Brooks Instrument © Tony Green 2011
  • 64. What does Mass Flow have to do with Semiconductors? Gas Name Category Gas Name Category Gas Name Category He Helium Inert N2O Nitrous Oxide Inert Si2H6 Disilane Inert Ne Neon Inert CH4 Methane Toxic/Corr SF6 Sulfur Hexafluoride Inert Ar Argon Inert NH3 Ammonia Toxic/Corr C2F6 Hexafluoroethane (Freon-116)nert I Xe Xenon Inert PH3 Phosphine Toxic/Corr WF6 Tungsten Hexafluoride Toxic/Corr H2 Hydrogen Toxic/Corr CH3F Methyl Fluoride Toxic/Corr C3F8 Perfluoropropane Inert CO Carbon Monoxide Toxic/Corr C2H4 Ethylene Inert C4F8 Octafluorocyclobutane Inert HBr Hydrogen Bromide Toxic/Corr SiH4 Silane Toxic/Corr SiHCl3 Trichlorosilane Toxic/Corr HCl Hydrogen Chloride Toxic/Corr GeH4 Germane Toxic/Corr C2H2F4 Tetrafluoroethane Inert N2 Nitrogen Inert CHF3 Fluoroform (Freon-23) Inert CH2F2 Difluoromethane Toxic/Corr O2 Oxygen Inert NF3 Nitrogen Trifluoride Toxic/Corr (CH3)3SiHTrimethylsilane (TMSi) Toxic/Corr NO Nitric Oxide Toxic/Corr C2H6 Ethane Toxic/Corr C5F8 Octafluorocyclopentene Inert HI Hydrogen Iodide Toxic/Corr B2H6 Diborane Toxic/Corr C4F6 Hexafluoro-2-butyne Toxic/Corr F2 Fluorine Toxic/Corr CF4 Carbon Tetrafluoride (Freon-14) Inert C4F6-q Hexafluoro Butadiene-1,3 Toxic/Corr Cl2 Chlorine Toxic/Corr SiH2Cl2 Dichlorosilane Toxic/Corr C3H6 Cyclopropane Toxic/Corr H2S Hydrogen Sulfide Toxic/Corr BCl3 Boron Trichloride Toxic/Corr O3 Ozone Toxic/Corr CO2 Carbon Dioxide Toxic/Corr SiF4 Silicon Tetrafluoride Toxic/Corr The Gasses used in Wafer Processing need to controlled and measured accurately!!! MFC’s allow this to happen Source: Brooks Instrument Semiconductor Training presentation http://www.tonygreen.name Brooks Instrument © Tony Green 2011
  • 65. Crowning achievement Key Performance Indicators(KPI) measures Question: what is the FRC here to do? Production, rapid turn MFC, to run a efficient operation, support of critical semi OEM and Integrators What measure will tell us if we are meeting that goal? http://www.tonygreen.name © Tony Green 2011 Brooks Instrument
  • 66. Crowning achievement “Those who fail to plan, plan to fail” - Proverb KPI inform and guide the business process. They give you a rational method, based on objective data and results, for making business decisions You first set the goals then establish how you measure the progress towards those Goals Thus you will be able to answer the question: What is working? and What needs to be changed? Source: Key Performance Indicator (KPIs) for Search Engine Marketing by Andrea Ramos and Roslyn Layton of Axicom {Chapter from Search Engine Marketing} http://www.tonygreen.name © Tony Green 2011 Brooks Instrument
  • 67. Crowning achievement Question: what is the FRC here to do? Production, rapid turn MFC, to run a efficient operation, support of critical semi OEM and Integrators What measure will tell us if we are meeting that goal? http://www.tonygreen.name © Tony Green 2011 Brooks Instrument
  • 68. Crowning achievement After much discussion the flowing five KPI’s were selected for the Fremont Response Center Chosen Key Performance Indicators(KPI) were 1. On time delivery - 80% 2. Critical Repairs within 1 day 3. Inventory counts – 90 % accurate 4. Inventory accurately - 100% goal 5. Turnaround time – 1 day How do we do? http://www.tonygreen.name © Tony Green 2011 Brooks Instrument
  • 69. Crowning achievement/On Time Delivery Fremont Response Center On-Time Delivery 100 30 90 25 Number of Service Orders 80 On-Time Percentage 70 On Time Percentage 20 60 50 15 Number of Service Orders 40 10 30 20 5 10 0 0 Month On average we were at 80% or higher http://www.tonygreen.name © Tony Green 2011 Brooks Instrument
  • 70. Crowning achievement/Inventory Accuracy Fremont Response Center Inventory Accuracy 90 80 80 70 70 Number of counts Percent Accurate 60 60 50 Accurate Count Percentage 50 40 40 30 Number of Counts 30 20 20 10 10 0 0 Month We had some work to do on this one….. http://www.tonygreen.name © Tony Green 2011 Brooks Instrument
  • 71. Crowning achievement/Critical Account FRC Critical Account Response 100 16 98 14 Percentage On-time 96 Number of orders 12 94 92 10 90 8 88 On Time Percentage 6 86 Number of Service Orders 4 84 82 2 80 0 Month August was a tough month but after that the team stepped up…. http://www.tonygreen.name © Tony Green 2011 Brooks Instrument
  • 72. Crowning achievement/Turnaround Time Fremont Response Center Turnaround Time 9 30 8 Number of Service Orders 25 7 Average Days 6 20 5 15 Average Days Number of Service Orders 4 3 10 2 5 1 0 0 Month As a service manager Turnaround time can never be fast enough…. http://www.tonygreen.name © Tony Green 2011 Brooks Instrument
  • 73. Crowning achievement/Invoicing Fremont Response Center Invoicing within 1 Day 80 30 Numbers of Service Orders 70 Percentage with 1 day 25 60 20 50 Invoicing within a day One Day Percentage 40 15 Invoicing within a day Number of Service 30 orders 10 20 5 10 0 0 Month From this plot we could have invoiced a bit faster http://www.tonygreen.name © Tony Green 2011 Brooks Instrument
  • 74. In the sprit of always improving my self I went back to school…. I became a Phoenix! Completed M.B.A. Technology Management 2003 - 2005 http://www.tonygreen.name © Tony Green 2011 Phoenix
  • 75. Technology Management is…. Technology Management is a set of management disciplines that allows organizations to manage its technological fundamentals to create competitive advantage. Typical concepts used in technology management are: technology strategy (a logic or role of technology in organization) technology mapping (identification of possible relevant technologies for the organization) technology road-mapping (a limited set of technologies suitable for business) technology project portfolio (a set of projects under development) and technology portfolio (a set of technologies in use). Source: Wikipedia.com http://www.tonygreen.name © Tony Green 2011 Phoenix
  • 76. Coursework - Traditional What is in a traditional MBA program? Finance, Marketing, Accounting, Operations, Statistics, Economics, Human Relations, Business Law Photos courtesy of dreamstime.com http://www.tonygreen.name © Tony Green 2011 Phoenix
  • 77. Course – Non-Traditional Non- Technology Management Focus R&D and Innovation Project Management E –Commerce Capstone Project Introduction to Information Systems Strategy Formulation Photo courtesy of dreamstime.com Technology Transfer Now what did our Capstone Project entail? http://www.tonygreen.name © Tony Green 2011 Phoenix
  • 78. Capstone project - Overall GOTV: PROJECT EXPANSION THE DELIVERY OF ENTERTAINMENT TO TRANSPORTATION PRESENTED BY: TEAM MBA INC. SHANNON CARTER PROCESS MANAGER BARRY CHIARELLO PROJECT MANAGER TONY GREEN ENGINEERING MANAGER MARK REIBOLDT INFRASTRUCTURE MANAGER JOHN PETERNEL DISTRIBUTION MANAGER THOMAS ZIER TARGET MANAGER http://www.tonygreen.name © Tony Green 2010 Phoenix
  • 79. Capstone project - highlights The GoTV ‘s vision was to provide cutting edge media entertainment products for mobile applications. GoTV provided “on-the-go” consumers with an unmatched transportable video-viewing experience with the best performance and best value available. GoTV’s proprietary service platform delivered entertainment to mobile devices; particularly automobiles, trains, and planes, and stores this content to make it available to the consumer on their demand. Source of photo: TEAM MBA capstone project paper http://www.tonygreen.name © Tony Green 2011 Phoenix
  • 80. Capstone project – highlights (Continued) GoTV has developed a proprietary set of video codecs, scheduling algorithms, storage and playback applications, and antenna technology that leverage existing infrastructures and technologies. Existing technologies include TV broadcast, WiFi, mobile telephony and satellite media. GoTV cooperates and interoperates with established infrastructure, manufacturing and distribution players Source of photo: TEAM MBA capstone project paper http://www.tonygreen.name © Tony Green 2011 Phoenix
  • 81. Capstone project - Business Model The GoTV distribution business model addresses three principle topics: focus, customers, and goals. The GoTV sales team is made up of two sales channels: pre-production sales (PS), and distribution sales (DS). http://www.tonygreen.name © Tony Green 2011 Phoenix
  • 82. Capstone project - Business Model(Continued) Revenue Streams Revenues from service agreements for the user equipment Usage agreements for the GoTV service New Product Sales, Pay-Per View, and Advertising http://www.tonygreen.name © Tony Green 2011 Phoenix
  • 83. With my Technology Management studies completed it was time to apply these concepts to the real world. Here are my three favorite concepts out of the technology management toolbox… http://www.tonygreen.name © Tony Green 2011 Phoenix
  • 84. Coined by the The Hype Cycle Gartner Group It suggests that our modern approach to marketing technology results in the technology being over hyped in the early stages of growth. www.slideshare.net/.../gartner-hype-cycle-emerging- technologies-2010 Give examples: Dot.com boom then bust http://www.tonygreen.name © Tony Green 2011 Phoenix
  • 85. The Technology Adoption Life Cycle Introduced in Geoffery’s Moore book Crossing the Chasm As far as I am concerned this is the high technology marketing bible Difference from typical life cycle due to presence of a “chasm” in the early adopter stage which must be crossed if http://en.wikipedia.org/wiki/Crossing_the_Chasm mainstream acceptance of a product is going to occur Current examples: alternative energy as a whole http://www.tonygreen.name © Tony Green 2011 Phoenix
  • 86. Bass Diffusion Developed by Frank Bass in 1969 It describes the process of how new products get adopted as an interaction between users(Imitators) and potential users (Innovators) Example: adoption of http://en.wikipedia.org/wiki/Bass_diffusion Mobile phones and more _model recently on line social networks http://www.tonygreen.name © Tony Green 2011 Phoenix
  • 87. Opportunity as Sales and Marketing as Manager at Nagase America in June 2008 Tasking : to penetrate North American market with our Epoxy products in Automotive, Heavy Electric and wind turbine blades http://www.tonygreen.name © Tony Green 2011 Nagase
  • 88. What were my responsibilities as a Sales and Marketing manager? Built new business by searching new business seeds; by selecting and contacting potential suppliers/customers to determine their needs, make persuasive business discussion about our products and services; and by focusing on the activities required to close deals. http://www.tonygreen.name © Tony Green 2011 Nagase
  • 89. Automotive Tier One Structure OEM/System Tier I/Sub- System Tier II/ Component Source: Automotive Electrical and Electromechanical System Design presentation by Ansoft Corporation http://www.tonygreen.name © Tony Green 2011 Nagase
  • 90. NAGASE AMERICA Activity in Automotive Hybrid/Electric Vehicles HEV Flex Fuel Power Air-Flow Sensor IGBT Battery Condenser Module Sensor Packs Power- Wind Alternator Motor Ignition Transmission Clutch Air Pressure Power ECU Sensor Battery(Lit Airbag Power Stirring (Engine hium Ion) Sensor Distributor Control Unit) Motor http://www.tonygreen.name © Tony Green 2011 Nagase
  • 91. Overview of Electric Transmission Power Generation Transmission Distribution Additional Distribution End User 125- 765 KV ~ 69 KV 7.2 KV-13.8 KV 110/220 V Wind Commercial Nuclear Power Distribution Oil/Coal Distribution Industrial Substatio points/Trans Substation formers n Solar Residential Geotherm al Switc GIS CT/P Bush Insul hgear T ings ators http://www.tonygreen.name © Tony Green 2011 Nagase
  • 92. Wind Turbines Blade/Molding Assembly A wind turbine blade is typically manufactured as follows: A mold made form Epoxy is used to create the top and bottom portion of the blades A wind turbine blade is formed of a fiberglass reinforced material that is comprised of a carbon or glass or carbon fiber and an epoxy resin Once cured two portions of the blade and bonded together using an adhesive http://www.tonygreen.name © Tony Green 2011 Nagase
  • 93. Wind Turbines Blade/Molding Nagase currently works with our customers to: Providing the epoxy resin that forms the Fiberglass Reinforced Plastic (FRP) -AND- The molds that are used to create the pieces that are bonded together to produce wind turbine blades Using a variety of processes including: Hand Wet Lay-up and vacuum infusion http://www.tonygreen.name © Tony Green 2011 Nagase
  • 94. As of the end of 2009 the Wind Turbine manufacturers by installed capacity in the United States were listed below: (35169 MW) Acciona AOC Installed Capacity in MW Atlantic Orient Co. AWE Bergey Windpower Clipper Clipper Windpower Danwin DES DeWind EMS Enertech Entegrity Fuhrlander Gamesa GE Energy Howden Integrity Wind Systems Jacobs Mitsubishi Nedwind NEG Micon Nordex Nordtank Nordtank 65 Northern Power Systems refurbished Nordtanks REPower Siemens Silver Eagle Suzlon Tacke Unspecified Vanguard Windmatic Various Vestas Wind Turbine Co. Windmaster Windmatic Source: AWEA Website WindWorld http://www.tonygreen.name © Tony Green 2011 Nagase
  • 95. NAGASE AMERICA What does this mean? To make a long story short GE Energy holds the lion’s share with over 40% of the capacity followed by Mitsubishi, Vestas, and Siemens. The top 4 have over 80% of the total capacity installed. http://www.tonygreen.name © Tony Green 2011 Nagase
  • 96. NAGASE AMERICA Now a look at lithium, what is the big deal with lithium? For starters Lithium is: 1. The lightest of all materials Name: Lithium Symbol: Li 2. High electrochemical potential Atomic Number: 3 Atomic Mass: 6.941 amu Melting Point: 180.54 ° (453.69 ° C K, 356.972 °F) 3. High Thermodynamic Voltage Boiling Point: 1347.0 ° (1620.15 ° C K, 2456.6 ° F) 4. Largest Energy density for weight Source: CRC Handbook of Chemistry and Physics 5. A cell voltage of 3.6 Volts(highest of all types) http://www.tonygreen.name © Tony Green 2011 Nagase
  • 97. NAGASE AMERICA What about Lithium ion batteries that has made them a household name? High Energy Density Low Maintenance High Specific Power High specific energy Drawing courtesy of “LiFePO4 for a Large Sized Lithium Secondary Battery” Dated 2006. 12. 12 Ideal for very high current applications http://www.tonygreen.name © Tony Green 2011 Nagase
  • 98. NAGASE AMERICA What about Lithium ion batteries? Just who are making these? Millions of Lithium Ion Battery Cells Shipped 800 700 600 500 400 300 200 100 0 LiB Manufacturer by Year 2007 2008 2009 Source: IIT LIB Related Study Program 08-09 Chapter 1 LIB Related Market bulletin http://wenku.baidu.com/view/188e7d1810a6f524ccbf8561.html http://www.tonygreen.name © Tony Green 2011 Nagase
  • 99. NAGASE AMERICA And what applications are they being used for? 1600 Millions of Lithium Ion Batteries Cells shipped 1400 NBPC Notebook/Personal Computer 1200 Cell Cellular/Mobile Phones PT Power Tools 1000 DSC Digital Cameras CAM Camcorders/Video Cameras 800 DMP Digital Music Players 600 Game Game Consoles 400 200 0 NBPC Cell PT DSC CAM DMP Game Other LiB use by Application by Year 2007 2008 2009 Source: IIT LIB Related Study Program 08-09 Chapter 1 LIB Related Market bulletin http://wenku.baidu.com/view/188e7d1810a6f524ccbf8561.html http://www.tonygreen.name © Tony Green 2011 Nagase
  • 100. NAGASE AMERICA If you are wondering why there Automotive is not listed as an application for lithium ion batteries that is my point. It would be covered in others but currently the numbers are very small which will change if EV, PHEV, HEV’s to gain large scale global adoption!! Source: Tony Green’s Personal Photos http://www.tonygreen.name © Tony Green 2011 Nagase
  • 101. And last but not lest of course there were trade shows to attend in order to get out and meet Prospective customers…. Here is an example of a booth I did… Source: Tony Green’s Personal Photos http://www.tonygreen.name © Tony Green 2011 Nagase
  • 102. Who am I?? Husband Ex Submariner M.B.A. educated Father Engineering knowledge Ex Navy Nuke Professional Certified Marketer P.C.M. Inbound Marketing Navy veteran Certified Professional (IMCP) Chemical trained http://www.tonygreen.name © Tony Green 2011 Summary
  • 103. How can this help you? Are you seeking someone with background in the following industries? Contract Manufacturing Electronics Chemicals Marketing/Sales, Alternative Energy High Technology Tony Green Tony Green http://www.tonygreen.name © Tony Green 2011 Summary
  • 104. NAGASE AMERICA Let me hear for you. Contact me!!!!!!! Other websites: http://www.ExNavyNuke.com Personal Blog: http://www.markanthonygreen.blogspot.com Other blogs: http://www.exanavynuke.blogspot.com http://www.greenpowerresearch.com http://www.tonygreen.name © Tony Green 2011 Summary