Nano Electro Mechanical Systems (NEMS) and Micro Electro Mechanical Systems (MEMS) Progress of Integration in MEMS and New Industry Creation by Prof. Susumu Sugiyama

1. Sri Lanka Institute of Nanotechnology (SLINTEC)
organizes the 7th Knowledge Seminar on
Nano Electro Mechanical
Systems (NEMS) and
Micro Electro Mechanical
Systems (MEMS)
Speaker:
TITLE: Prof. Susumu Sugiyama
Director, Research Institute for
Progress of Integration in Nanomachine System Technology
MEMS and New Industry Professor, Ritsumeikan Global
Innovation Research Organization
Creation Ritsumeikan University Shiga, Japan
MEMS (Micro Electro Mechanical Systems) are the micro integrated systems of sensors, actuators, and
controlling microprocessor on a millimeter-scale silicon chip by applying and expanding the LSI (Large Scale
Integration) fabrication technology. Compared to the LSIs, in which both of the inputs and outputs are only
electric signals, MEMS, acting as the active devices, have the ability to process a wide variety of signals,
including: physical, chemical, biological, and the others, and are expected widely in the future applications,
living and culture, information technology, automobile, precision machines, biological, medical and well-
ness, energy harvesting, measurement equipments and the others. MEMS are becoming important as tech-
nology of employing the result of research and development of nanotechnology in the actual world
efficiently. It is expected that MEMS equipped with the communication function is as technology which
permeates into human society and lives a life rich by linking to the Internet. In this presentation the current
situation of MEMS technology and future prospects are surveyed.
Date, Time & Venue:
18th September, 2009 - 09.30 - 11.00 am
ITI Auditorium, 363, Bauddhaloka Mawatha, Colombo 07.
Target Audience:
Engineers, Managers & Decision makers of Telecommunication, Electronic, Electrical, Robotics, Automation,
Bio Medical , Automobile Industries and University Academia in Sri Lanka.
Inquiries:
Champa Gunathilake
Contact : 4650500 / 4741995 E-mail : champag@susnanotec.lk
Sri Lanka Institute of Nanotechnology
Lot No: 14, Zone 1, Biyagama Export Processing Zone, Walgama, Malwana www.susnanotec.lk