2. Objective
Developed means to generate large scale arrays of
silicon micro-electrodes from bulk wafers
Tested the sensitivity of ion selective electrodes (ISE)
for targeted ions.
3. Technical Approach
For biological application, soft and stretchable
platforms were used to offer high degrees of
mechanical flexibility.
For a higher concentration gradient, a larger electrode
spatial layout was used.
4. Technical Accomplishments
• 150nm thin gold plated electrodes from bulk silicon
wafers were created with an electron beam deposition.
• An array of thin micro-electrodes were fabricated
followed by transfer printing on silicone surfaces.
tape
stamp
Source
wafer
Pick and
place
microelectrodes Receiving stretchable
substrate
5. Technical Accomplishment
A spin coater distributed even surface of
polydimethylsiloxane(PDMS) and photoresist.
A mask aligning created complex patterns on gold
coated silicon wafers.
7. Represented Results
The ISE were designed for Na+ as the target ion and
sensitivity of the ISE was tested with K+, a non-
targeting ion.
100μL of 1M NaCl was added four times, consecutively,
in 1L of standard solution. Next, 100μL of 1M of KCl
was added three times consecutively.
10. Conclusion
The results showed that ISE could detected Na+ ions at
low concentration however, when K+ was present there
was some interference in the potential.