1. OPTICAL METROLOGY & POLARIMETRY
Micro and Nano-Technology-Scientific Consulting and
Expertise
Expertise / consulting development &
technology monitoring on metrology optics
technologies and applications using
Polarimetry
Protocol establishment /Assistance interface with industrial
problems undergoing Optical characterization requests (thin
layers thickness, new materials properties, nanotechnology
in line and off line Ellipsometry/ Polarimetry set up).
These projects receive expert attention with
A research environment inside SERMA Technologies /LETI
Unique metrology potential with MINATEC and SERMA option
with complete characterization analyses (TEM, SIMS,..)
The ability to be introduced inside the last innovative
optical instruments technologies with Polarimetry and
spectroscopic ellipsometers instruments available in the
Serma Technologies / LETI clean room environnement.
. 23.11.2010 Micro and Nano-Technology-Scientific Consulting and
1
F.Ferrieu Expertise OMP _S.I.R.E.T 52230889900015
2. OPTICAL METROLOGY & POLARIMETRY
Micro and Nano-Technology-Scientific Consulting and
Expertise
Expertise, contribution of experience and guidance on the
possibilities for realization of measures to facilitate the
implementation of an industrial project.
Assistance in the selection of proposals made by suppliers
of instruments best suited to the needs of metrology
research.
Optimization of data acquisition from instruments.
Support mounting of European or regional programs on the
feasibility and the relevance of a scientific project
Parallel education & training: seminars in instrumentation
optics and applications.
OMP _S.I.R.E.T Micro and Nano-Technology-Scientific
23.11.2010
Consulting and Expertise OMP _S.I.R.E.T 52230889900015 2
F.Ferrieu
52230889900015
3. OPTICAL METROLOGY & POLARIMETRY
Micro and Nano-Technology-Scientific Consulting and
Expertise
References
More than 50 publications in Ellipsometrie Polarimetrie.
Reviewer in various scientific journals TSF1, JOSA2 EJAP3.
Participation in various industrial projects (first spectroscopic
ellipsometers in visible, infrared and extreme ultraviolet ranges
in France)
Knowledge within NDA interactions with different groups at
the global level Ellipsometrie and reflectometry Polarimetry: KLA
Tencor, j. Woollam, Horiba Scientific and SemiLab Sopra
1ThinSolid Films,
2Journal ofThe Optical Society of America,
3European Journal of Applied Physics
OMP _S.I.R.E.T Micro and Nano-Technology-Scientific
23.11.2010
Consulting and Expertise OMP _S.I.R.E.T 52230889900015 3
F.Ferrieu
52230889900015
4. OPTICAL METROLOGY & POLARIMETRY
Micro and Nano-Technology-Scientific Consulting and Expertise
Nanotechnology measurement ex and
in situ processing for new materials
new Multi layers stackings and surface
properties
Polarimetrie Photonic Structures and
lithography
adsorption of surface porosimetrie
studies
OMP _S.I.R.E.T Micro and Nano-Technology-Scientific Consulting and Expertise OMP
_S.I.R.E.T 52230889900015
23.11.2010 52230889900015 1