1. MICRO-ELECTRO-MECHANICAL SYSTEMS Shashank Uttarwar Atul Jethmalani S.E Electronics T.E Mechanical

2. Aim of the presentation Introduction to MEM’S Introduction to MEM’S Technology Study its advantages, disadvantages and applications

3. What MEM’S Means ? Micro- Small size, micro fabricated structures. Electro- Electrical control signal (in/op) Mechanical- Mechanical functionality (op/in) Systems- Structures and devices.

4. MEM’S MEM’S is integration of mechanical and electronic elements. Fabrication of Electronic components. Mechanical components.

5. MEM’S Technology It is based on tools and methodologies that are used to form small devices. It comprises of three basic tools.

6. Building Blocks Ability to deposit thin film on substrate. Apply patterned mask on top of film. Etch film selective to mask.

7. EXAMPLE OF MEM’S

8. Advantages And Disadvantages

9. Applications Biotechnology - PCR, STM are some examples. Communication - Improvising the electronic components. Accelerometers - Low cost accelerometers can be manufactured.

10. Conclusion MEM’S promises to revolutionize each and every product. Few fields will benefit greatly from MEM’s. So MEM’S is future of modern era.

11. References IEEE Explore: http://ieee.org/Xplore/DynWel.jsp PDF files: http://www.scribd.com/mems Introduction to micro engineering: http://www.dbanks.demon.co.uk/ueng Mems clearing house: http://www.memsnet.org/

12. THANK YOU