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Susceptibility of different slurry types to agglomeration
- 1. Susceptibility of Different Slurry Types to Agglomeration Mark Litchy 1 , Don Grant 1 , and Reto Schoeb 2 1 CT Associates, Inc. 2 Levitronix GmbH Levitronix CMP Users Conference 2009 February 10, 2009
- 10. S1 slurry: Working PSD measurements (DLS)
- 11. A1 slurry: Working PSD measurements (DLS)
- 12. Summary of changes in working PSD
- 13. Large Particle Tail PSDs in As-Received Slurry
- 14. S1 slurry: BPS-200/BPS-600 Pumps
- 15. S1 slurry: BPS-4, bellows, and diaphragm pumps
- 16. S2 slurry
- 17. S3 slurry
- 18. S4 slurry
- 19. S5 slurry
- 20. A1 slurry
- 21. A2 slurry
- 22. C1 slurry
- 23. C2 slurry
- 24. Concentration increases measured after 100 turnovers
- 25. Concentration increases measured after 100 turnovers (cont’d)
- 26. Concentration increases measured after 100 turnovers (cont’d)
- 27. Concentration increases measured after 1,000 turnovers
- 28. Concentration increases measured after 1,000 turnovers (cont’d)
- 29. Concentration increases measured after 1,000 turnovers (cont’d)
- 30. Summary of changes in large particle concentrations