Micro-electro-mechanical systems (MEMS) combine mechanical and electrical components at the microscale using microfabrication techniques. MEMS are fabricated using processes such as chemical and physical vapor deposition, photolithography, and wet or dry etching to create 3D mechanical structures. Common MEMS materials include metals, polymers, ceramics and semiconductors. MEMS have a wide variety of applications including in automotive, medical, military and consumer electronics as sensors, actuators and microsystems such as accelerometers and gyroscopes. Advantages of MEMS include miniaturization, improved accuracy and reliability while disadvantages include high initial costs and complex design processes.
2. Introduction
Mems process
Fabrication process
Materials for mems
Micro machining technology
Application of mems
Advantages and disadvantages
Conclusion
Reference
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3. MEMS: micro-electro-mechanical systems
Combination of mechanical functions
(sensing,moving,heating) and electrical
functions (switching ,deciding) on the
same chip using micro fabrication
technology.
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8. Application of photo resist
Optical exposure to print an image of
the mask onto the resist
Immersion in an aqueous developer
solution to dissolve the exposed resist
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11. Materials are the basic things required to develop
micro sensors
Metals
Polymers
Ceramic materials
Semiconductors
Composite materials
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12. Process of shaping silicon or other
materials to realise 3-D mechanical in
miniature form and the mechanical
devices that are compatible with the
micro electronic devices
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14. In Medical Field
• A MEMS device can be implanted in the human
body.
• MEMS surgical tools provide the flexibility and
accuracy to perform surgery.’
• Bio-mems
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15. An example of a bio-MEMS device is this
automated FISH microchip.
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16. In Automotives
•Air bag System
•Vehicle security system
• Inertial brake lights
•Rollover detection
•Automatic door locks.
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19. In accelerometers
MEMS accelerometers are widely used in
• cars for airbag deployment
• smart phones
• gaming devices for sensing motion.
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21. In military
Apart from these applications mems are also used
in many fields in the present world , like
They are used to detect earth quakes, in gas shut
off, in shock and tilt sensing.
Inkjet printers and micro scanners also involve
the use of mems.
Micro-electro mechanical system (MEMS) technology
help projectiles to reach their targets accurately.
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22. Minimize energy and materials.
Improved reproducibility.
Improved accuracy and reliability.
Increased selectivity and sensitivity.
ADVANTAGES
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23. DISADVANTAGES
Farm establishment requires huge
investments.
Micro-components are costly compared to
macro components.
Design includes very much complex procedures.
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24. This enabling technology promises to create
entirely new categories of products.
Mems will be the indispensible factor in
advancing technology.
As with all emerging technologies had been
predicted to revolutionize technology and our
lives.
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25. R. Ghodssi, P. Lin (2011). MEMS Materials and Processes
Handbook. Berlin:Springer
Waldner, Jean-Baptiste (2008). Nanocomputers and Swarm
Intelligence. London:ISTE John Wiley & Sons. p. 205.
McCord, M. A.; M. J. Rooks (2000). "2". SPIE Handbook of
Microlithography, Micromachining and Microfabrication.
Chang, Floy I-Jung (1995). Xenon difluoride etching of
silicon for MEMS (M.S.)
Williams, K.R.; Muller, R.S. (1996). "Etch rates for
micromachining processing".Journal of
Microelectromechanical Systems 5 (4): 256
en.wikipedia.org/wiki/Microelectromechanical_systems
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