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Jestr                                      Journal of Engineering Science and Technology Review 2 (2009) 1-7

                                                                                    Lecture Note
                                                                                                                                 JOURNAL OF
                                                                                                                                 Engineering Science and
                                                                                                                                 Technology Review

                                                                                                                                                 www.jestr.org

                                        Galvanomagnetic Effects ¨Sensors based on Hall Effect¨
                                                             Vlassis N. Petousis* , Panagiotis D. Dimitropoulos

                                      Department of Computer & Communication Engineering, University of Thessaly, Volos, Hellas
                                                                Received 18 April 2008; Accepted 16 February 2009

                   ___________________________________________________________________________________________

                   Abstract

                   The Hall effect is the generation of a transverse electromotive force in a sample carrying an electric current and exposed
                   to perpendicular magnetic field. Depending on the sample geometry, this electromotive force may cause the appearance
                   of a transverse voltage across the sample, or a current deflection in the sample. The generation of this transverse voltage,
                   called Hall voltage, is the generally known way for the of the appearance of the Hall effect.
                           The resistance of this sample increasing under influence of the magnetic field, this called magnetoresistance
                   effect. Both the Hall effect and the magnetoresistance effect belong to the more general class of phenomena called
                   galvanomagnetic effects. Galvamomagnetic effects are the manifestations of charge transport phenomena in condensed
                   matter in the presence of a magnetic field.
                           The sensor applications of Hall effect became important only with the development of semiconductor
                   technology. For one thing, the Hall effect is only strong enough for this propose in some semiconductors. Therefore, the
                   first Hall effect magnetic sensor became commercially available in the mid 1950s, a few year after the discovery of high-
                   mobility compound semiconductors. Our goal in this paper is to understand the physically background of the Hall and
                   the magnetoresistance effects. We are going to discuss the effect of parameters in those phenomena and how we can
                   make better our technology to improve better efficiency.

                   Keywords: Hall Effect , Galvanomagnetic Effect, Hall Sensors, Wheel Hall Sensor, MR Effects.
                   ___________________________________________________________________________________________


1.1 Approximate analysis of Hall effect                                                             In our analysis we use Smooth-drift approximation, this
                                                                                                approximation consist of assumption that charge carriers
In this section we will see the Hall effect. That give us an                                    move uniformly as a result of an electric field or other
idea for the Hall effect and for magnetoconcetration effect                                     driving forces, the velocity of the movement being the same
and help us to understand much more about solid state                                           for all carriers and equal to the appropriate drift velocity. So
physics.                                                                                        we can replace the carrier velocity of each individual carrier,
     To simplify the analysis, we also assume equilibrium                                       in υ (Equation (1.1)), by the average drift velocity of all
carrier concentrations in samples, and thus neglect diffusion                                   carriers. We neglect completely the thermal motion of the
currents.                                                                                       carriers and the energy dissipation effect of scattering by a
     All galvanomagnetic effects come about as a                                                smooth friction.
manifestation of the action of the Lorentz force on quasi-
free charge carriers in condensed matter. The Lorentz force
is the force acting on a charged particle in a electromagnetic                                  1.2 The (original) Hall effect
field. Moreover, the existence of the Lorentz force is
fundamental indication of a very presence of an electric and                                    We shall first study the Hall effect in the form in which
/ or magnetic fields. It is give by                                                             Hall[1] discovered. Hall’s experimental device was a long
                                                                                                gold leaf. We shall also consider a long flat sample; but in
                                                                                                order to quickly come modern applications of Hall effect, we
 F = eE + e(υ × B)                                                                 (1.1)
                                                                                                shall study it in semiconductor samples.
                                                                                                    Let us consider the transport of carriers in a long and
    Here e denotes the particle charge (for electrons e=-q                                      thin semiconductor strips, such as those shown in figures
and for holes e=q where q is he magnitude of an electron                                        1.1a and 1.1b.(Long strip means that the length of a strip l is
charge) E is the electric field, υ is the carrier velocity and B                                much larger than w).
the magnetic induction. The first term on the right hand side                                       Suppose that in the strips, along the x direction, an
of (1.1) is often referred to as electrostatic force, and the                                   external electric field Εe(Ex,0,0) is established, and the
second term as the Lorentz force.                                                               magnetic field is zero. Then in the Lorentz force (Equation
                                                                                                (1.1)) only the first term, witch is the electrical force exists.
______________
    * E-mail address: petousis@inf.uth.gr                                                       As we know the electrical force causes the drift of charge
ISSN: 1791-2377 © 2008 Kavala Institute of Technology. All rights reserved.                     carriers. In the present case, charge carriers drift along the
V. N. Petousis , P. D. Dimitropoulos / Journal of Engineering Science and Technology Review 2 (2009) 1 -7


strip in two opposite directions. The drift velocities are given                       These forces push carriers towards the upper edges of the
by:                                                                                strips. Consequently the carrier concentration at these upper
                                                                                   edges of the strips start to increase, while the carrier
                                                                                   concentration at the lower edges start to decrease.
υ dp = μ p Ee      ,   υ dn = μ n Ee                                  (1.2)

where μp and μn are the mobilities of holes and electrons,                         1.4 Hall voltage
respectively. The associated current densities are given by :
                                                                                   A more tangible effect with associated with Hall field is the
J p = qμ p pEe         ,   J n = qμ n nE e                            (1.3)        appearance of transverse voltage between the edges of a
                                                                                   strip. This voltage is known as Hall voltage. Let us choose
                                                                                   two points M and N at the opposite edges of the strip, under
where p and n denote the hole and the electron density in p-                       the condition that both points lie in the same equipotential
type and n-type strip, respectively.                                               plane when B=0(figure 1.1). Then the Hall voltage is given
                                                                                   by

1.3 Hall electric field                                                                     N


Let us now expose the current – carrying strip to a magnetic
                                                                                   VH =
                                                                                           M
                                                                                            ∫E   H   dz                                                 (1.9)
field. Let the magnetic induction B be collinear with the y-
axis(figure 1.1). Now on each charge carrier in the samples
                                                                                   and
both parts of Lorentz force (Equation((1.1)) act. Since we
assumed a uniform directional velocity of all carriers in the
sample, the magnetic forces acting on a carriers are give by:                      VHp = μ p Ex By w          ,   VHn = μn Ex By w                     (1.10)


Fp = e[υ dp × B]           ,       Fp = e[υ dp × B]                   (1.4)        for our p-type and n-type strips, respectively. Here the
                                                                                   negative sign has been omitted and w denotes the width of
                                                                                   the strips. The generation of the transverse Hall electric field
                                                                                   and the associated Hall Voltage under the experimental
                                                                                   conditions similar to that shown in figure 1.1 are usually
                                                                                   referred to as the Hall effect. However, there is another,
                                                                                   more fundamental feature of the Hall effect: the Hall angle.


                                                                                   1.5 Hall angle

                                                                                   In the presence of a magnetic field, the total electric field in
                                                                                   the sample E=Ee+EH is not collinear with the external
                                                                                   electric field Ee. In the present case the current in the sample
                                                                                   is confined to the direction of the external electric field, and
                                                                                   the current density is collinear with the external electric field
                                                                                   (figure 1.1). Hence the total electric field is not collinear
                                                                                   with the current density either. Therefore, the Hall effect in a
                                                                                   long sample shows up through the tilting of the total electric
                                                                                   field relative to the external electric field and the current
                                                                                   density in the sample. With the aid of figure 1.2, the
Fig. 1.1: The Hall effect in a long plate of p-type (p) and n-type (n)
                                                                                   magnitude of the Hall angle is given by
material. Ee is the external electric field, B the magnetic induction, υd he                         ΕΗ
drift velocity of carriers, F the magnetic force, J the current density and        tan ΘΗ =                                                            (1.11)
EH the Hall electric field. The magnetic forces press both positive and                              Εe
negative carriers towards the upper boundary of a strip. The Hall
voltage appears between the charged edges of the strip.

in the samples p and n respectively. These forces have the
same direction in both strips : since e=q and e =-q for hols
and electrons respectively, from equations(1.2) and (1.4) it
follows that:

Fp = qμ p [ Ee × B]            ,    Fn = qμ n [Ee × B ]               (1.5)

    For our particular geometry the magnetic forces are
collinear with the z-axis:
                                                                                   Fig. 1.2 The vector diagrams of electric fields and current densities in
Fp = (0,0, qμ p E x B y )             ,   Fn = (0,0, qμ n E x B y )   (1.6)
                                                                                   long samples: (p), in a p-type material; (n), in n-type material J is the
                                                                                   current density, Ee the external electric field, EH the Hall electric field,
                                                                                   E the total electric field and ΘH the Hall angle.

                                                                               2
V. N. Petousis , P. D. Dimitropoulos / Journal of Engineering Science and Technology Review 2 (2009) 1 -7


                                                                             induction perpendicular to the device plane. We omit the
    For the reason which will become clear later, it is                      negative sign.
convenient to measure the Hall angle with respect to the                         Equation (1.16) shows why a plate is a preferential shape
direction of the total electric field, as shown in figure 1.2.               of the Hall device with voltage output : for a given biasing
Then we may define the Hall angle as the angle of                            current and magnetic induction, the thinner the sample, the
inclination of the current density J with respect to the total               higher the resulting Hall voltage.
electric field E. According to this definition and (1.11), we
obtain for the two particular cases from figures 1.1 and 1.2
                                                                             1.7 The current deflaction effect
tan ΘΗp = μ p By         ,   tan ΘΗn = − μn By                  (1.12)
                                                                             Consider now the Hall effect in a very short Hall plate. A
                                                                             sample for a Hall effect experiment is called short if its
   For p-type and n-type semiconductor strip, respectively.                  dimension in the current direction is much smaller than that
The value of the Hall angle depends only on the applied                      in the direction of the magnetic force acting on carriers. As
magnetic induction and the mobility of the charge carriers.                  example of a short sample is the short strip shown in figure
The sign of the Hall angle coincides with the sign of the                    1.3. the basic shape of this device, its position relative to the
charge carriers.                                                             coordinate system, and the notation are the same as in case
                                                                             of the long strips in figure 1.3. Now, however, the strip is
                                                                             short ,l<<w, and it is laterally sandwiched between two large
1.6 Hall coefficient                                                         current contacts. In such short samples the Hall effect takes a
                                                                             form which is sometimes called current deflection effect.
From equations (1.3) and (1.8) we can find the relationship
between the current density and the Hall field:

           1                               1
EHp = −       [ J × B]        ,    EHn =      [ J × B]          (1.13)
           qp                              qn

The equations can be rewritten as

EH = − RH [ J × B ]                                             (1.14)

where RH is a parameter called the Hall coefficient. Equation
(1.14) is a modern representation of the conclusions made by
Hall after his experimental findings.
     The Hall coefficient is a material parameter that
characterizes the intensity and the sign of the Hall effect in a
particular material. The unit of the Hall coefficient is VmA-                  Fig. 1.3 A short Hall plate. The distance between the current contacts
1 -1
 T , which is sometimes expressed in a more compact form                     is smaller than the distance between the insulating boundaries (ib). (The
as ΩmT-1 or, equivalently, m-3C-1.                                           picture was taken from P.S Popović “ Hall Effect Devices (Sensor
     From a comparison of equations (1.13) and (1.14), we                    Series) Swiss Federal Institute of Technology Lausanne (E.P.F.L) 2nd
can find the Hall coefficients of strongly extrinsic                         Edition IoP 2004)
semiconductors
                                                                                 Let us now find a quantitative relationship between the
                                                                             electric field and the current density in a short sample. We
          1                   1
RHp =          ,     RHn =                                      (1.15)       shall again use the approximation which we introduced
         qp                   qn                                             above: we neglect the thermal motion of the carriers, and
                                                                             assume that carriers move uniformly under the action of the
for p-type and n-type, respectively. The sign of the Hall                    Lorentz force.
coefficient coincides with the sign of the majority carriers,
and the magnitude of the Hall coefficient is inversely                       Fp = qE + q[υ p × B]           ,   Fn = − qE − q[υn × B ]        (1.17)
proportional to the majority carriers concentration. In the
practical applications of the Hall effect it is convenient to
                                                                             for holes and electrons, respectively. The densities of the
operate with pure macroscopic and integral quantities
                                                                             carriers are:
characterizing a Hall device. To this end, for a long Hall
device we obtain from equations (1.11) and (3.14) the Hall
voltage :                                                                    J p ( B) = J p (0) + μ p [ J p ( B) × B]

              IB⊥                                                            J p ( B) = J p (0) + μ p [ J p ( B) × B]                         (1.18)
VH = RH                                                         (1.16)
               t
                                                                                Here Jp(B) and Jn(B) are the hole and electron current
                                                                             densities respectively in the presence of the magnetic
    Here t is the thickness of the strip, I is the device current
                                                                             induction B.
given by I = Jwt and B⊥ the component of the magnetic


                                                                         3
V. N. Petousis , P. D. Dimitropoulos / Journal of Engineering Science and Technology Review 2 (2009) 1 -7




J p ( B) = qμ p pE p = μ p pFp = qpυ p

J n ( B ) = q μ n nEn = μ n nFn = − qnυn                          (1.19)

    And Jp(0) and Jn(0) are the drift current densities due to
the electric field E when B=0:

 J p (0) = qμ p pE
J n (0) = q μn nE                                                 (1.20)

    Equations (1.17),(1.18) and (1.20) are graphically
represented in figure 1.4. In a short sample, a magnetic field                   Fig. 1.5 The current lines deflection effect in a short Hall plate, biased
deflects the current from its usual way along the electrical                     by a constant voltage (a) and a constant current (b). The broken lines are
field. Moreover using the diagrams in figure 1.4, we find                        the current lines at B=0, whereas the full lines are the current lines at
                                                                                  B ≠ 0.
tan Θ Hp = μ p B⊥         ,   tan Θ Hn = − μn B⊥                  (1.21)
                                                                                 J p ( B) = σ pB E + σ pB μ p [ E × B ]
                                                                                 J n ( B) = σ nB E − σ nB μ n [ E × B ]                            (1.22)

                                                                                 where

                                                                                                σ p0                                σ n0
                                                                                 σ pB =                         and   σ nB =                       (1.23)
                                                                                           [1 + ( μ p B ) 2 ]                  [1 + ( μn B ) 2 ]

                                                                                 are the effective conductivities of p-type and n-type
                                                                                 materials in the presence of the magnetic induction B and,
                                                                                 σp0 and σn0 are the conductivities at B=0. Note that, at a given
                                                                                 electric field, the coefficients σΒ determine the longitudinal
                                                                                 current density in a infinitely short sample. Since a
                                                                                 materialization of the infinitely short sample is Corbino[2]
                                                                                 disc, we shall call the conductivity the coefficients σΒ the
                                                                                 Corbino conductivity.
Fig. 1.4 The graphical representation of the vector equations
(1.17),(1.18) and (1.20) that hold in a short Hall plates: (p) of a p-type            The first term on the right-hand side of equation (1.22)
semiconductor ; (n) of a n-type semiconductor.(The picture was taken             represent the lateral current densities. The integral of this
from P.S Popović “ Hall Effect Devices (Sensor Series) Swiss Federal             current density over the contact surface is the device current.
Institute of Technology Lausanne (E.P.F.L) 2nd Edition IoP 2004)                 From equations (1.22) and (1.23) we deduce that the device
                                                                                 current decreases as the magnetic field, increases. Therefore,
                                                                                 if a sample exposed in magnetic field, everything happens as
2. The magnetoresistance effect                                                  if the conductivity of the sample material were decreased.
                                                                                 The corresponding relative increase in the effective material
By inspecting the diagrams in figure 1.4, we notice that the                     resistivity is given by
current density vector J(B) are smaller than J(0). This means
that in short Hall Plates a magnetic field also has additional
                                                                                 ρ pB − ρ p 0
effect: it causes a reduction in current density.                                              = ( μ p B)2
    This current deflection is illustrated in figure 1.5. As                         ρ p0
sown in figure 1.5(a), current density in presence of a
magnetic field is smaller than that with no magnetic field.                      ρ nB − ρ n 0
The attenuation in the current density is a consequence of
                                                                                              = ( μn B)2                                           (1.24)
                                                                                     ρn0
the current deflection effect: the deflected current lines
between the sample contacts are longer (see figure 1.5(a)).
The longer current path means also greater effective                                 The increase in a material resistivity under the influence
resistance of the sample.                                                        of a magnetic field is called the magnetoresistance effect. In
    To find how much the current density decrease due to a                       particular, the just described increase in resistivity due to the
magnetic induction, we have to solve the equation (1.18)                         current deflection effect in a short samples is called the
with respect to J(B). We can solve this equation and for                         geometrical magnetoresistance effect. The attribute “
                                                                                 geometrical “ reflects the fact that the effect is related to the
perpendicular magnetic field, such that               E⋅B = 0,        the        geometry of the current lines, as illustrated in figure 1.5.
solutions of the equations (1.18) are


                                                                             4
V. N. Petousis , P. D. Dimitropoulos / Journal of Engineering Science and Technology Review 2 (2009) 1 -7


2.1 Galvanomagnetic current components                                           3. Geometrical factors

Up to now, in order to simplify our analysis, we have always                     Let us have a look at the distribution of the current density
assumed that our sample is plate-like, and that the magnetic                     and the electrical potential in a “realistic“ galvanomagnetic
field was perpendicular to the plate. Let us drop now this                       sample. Figure 1.7, shows such a two terminal rectangular
assumption and consider a general case. We only assume                           plate, which is somewhere between “ very long “ and “ very
that the vectors of electric field and magnetic induction have                   short “. By inspecting the current and the equipotential lines,
an angle and we seek the current density vector.                                 we notice the following. Near the two isolating boundaries,
    The basic equations relating the resulting current density                   current is forced to flow along the boundaries and the
J(E,B) with the electric field E and the magnetic induction B                    equipotential lines are strongly inclined: a Hall electric field
are given by                                                                     is generated.
                                                                                     The device such us assumed have intermediate
                                                                                 geometry. Then a factor to related from geometry can be
J ( B ) = σ E + μ[ J ( B ) × B ]                                  (1.25)
                                                                                 calculated. It is really that the Hall voltage of the Hall plate
                                                                                 with an arbitrary shape can de expressed as
where J ( E , B ) ≡ J ( B ) and σ is the material conductivity
at B=0 and μ is the mobility of the carriers. The total                                  VH
galvanomagnetic current density (figure 1.6) generally
                                                                                 GH =                                                     (1.28)
                                                                                         VH ∞
consists of three components :
                                                                                     Where GH is a parameter called the geometrical
J = J1 + J 2 + J 3                                              (1.25a)
                                                                                 correction factor of a Hall voltage, and VH ∞ denotes the
                                                                                 Hall voltage in a corresponding long strip.
                                                                                    The Hall geometrical factor is a number limited by 0<
                                                                                 GH<1. For a long Hall device GH=1; for the very short Hall
                                                                                 device GH=0. Similarly, for the resistance of the device
                                                                                 exposed to a magnetic field we may write:

                                                                                         R( B)
                                                                                 GR =                                                     (1.29)
                                                                                         R∞ ( B)

                                                                                    Where GH is a parameter called the geometrical factor of
                                                                                 magnetoresistance, R(B) is the resistance of a considered
Fig. 1.6 The current density components arising in the presence of an
electric field E and the magnetic induction B. The coordinate system is          magnetoresistor at an induction B, and R∞ ( B ) denotes the
so chosen so that E is collinear with the x axis and B lies in the xz            resistance of a corresponding part of an infinitely long strip.
plane. The E and B vectors are not mutually orthogonal. The total
current density is the sum J=J1+ J2 + J3 . J1 is collinear with E, J2 is
collinear with [ExB] (witch is here collinear with the y axis), and J3 is
collinear with B. Note that we tacitly assume positive charge carriers. In       3.1 Common shapes of a Hall plates and magneto-
the case of negative charge carriers, the component J2 being                     resistors
proportional to the mobility, would have an inversed direction (along
the +y axis). (The picture was taken from P.S Popović “ Hall Effect
Devices (Sensor Series) Swiss Federal Institute of Technology Lausanne
                                                                                 Generally, any piece of electrically conductive material,
(E.P.F.L) 2nd Edition IoP 2004)                                                  fitted with four electrical contacts, could be used as a Hall
                                                                                 device. However, to be reasonably efficient and convenient
and specially we can write                                                       for a practical applications, a Hall device should preferably
                                                                                 be made in the form of a plate. The contacts should be
                                                                                 positioned at the boundary of the plate, far away from each
              σ
J1 = (           )E                                                              other. The two contacts for sensing the Hall voltage should
      1 + μ 2 B2                                                                 be placed so as to attain approximately equal potentials at a
                                                                                 zero magnetic field. Then the potential difference at the
              σ
J2 = (           ) μ[ E × B ]                                                    sense contacts equals to Hall Voltage. The common
      1 + μ 2 B2                                                                 potential at the sensing contacts should roughly equal the
                                                                                 mid-potential of the current contacts. Then the largest Hall
              σ
J3 = (        ) μ 2 B[ E ⋅ B]                                     (1.26)         voltage can me measured. To simplify the design and
      1+ μ B
          2 2
                                                                                 fabrication of a Hall plate a highly symmetrical shape and a
                                                                                 uniform material and thickness of the plate are usual chosen.
And finally the total galvanomagnetic current density is:                        Some commonly used shapes of Hall plates are shown in
                                                                                 figure 1.7.

J     σ E (1 − μ 2 B2 ) + μσ [ E × B] + μ 2σ B( E ⋅ B)            (1.27)
                                                                                 3.2. Reducing offset voltage and 1/f noise

                                                                                 To removing ohmic offset we use, an elegant method that
                                                                                 exploits a property of the Hall-effect transducer to reduce
                                                                                 system offset. A four-way symmetric Hall-effect transducer
                                                                             5
V. N. Petousis , P. D. Dimitropoulos / Journal of Engineering Science and Technology Review 2 (2009) 1 -7


can be viewed as a Wheatstone bridge. Ohmic offsets can be                     model 1/f noise source by a fluctuating asymmetry
represented as a small ∆R, as shown in figure 1.8a. When                       resistance ΔR in figure 1.8. If the biasing current of a Hall
bias current is applied to the drive terminals, the output                     device spins fast enough so that the fluctuating voltage does
voltage appearing at the sense terminals is VH + VE, where                     not change essentially during one circle, then the system
VH is the Hall voltage and VE is the offset error voltage.                     shall not “see” the difference between the static and the
    Now consider what happens if we take the transducer                        fluctuating offset and shall cancel both of them. In order to
and reconnect the bias and sense terminals, as shown in                        completely eliminate the 1/f noise of a Hall device, we have
figure 1.8b. All of the terminal functions have been rotated                   to set the spinning current frequency well above the 1/f noise
clockwise by 90°(“Spinning Current technique”). The sense                      corner frequency. For a very small device, this may be a
terminals are now connected to bias voltage, and the former                    very high frequency.
drive terminals are now used as outputs. Because the
transducer is symmetric with rotation, we should expect to
see, and do see, the same Hall output voltage.                                 4. Our suggestion for a novel shape Hall device : The 3D-
                                                                               WHS

                                                                               The lasts few months we design and we are ready to
                                                                               developed a novel Hall sensor device which uses elaborate
                                                                               spinning current technique. The novel 3D Hall device that
                                                                               we call “3D Wheel Hall Senor” is presented in figures 1.9a
                                                                               and 1.9b. The current enters the device, as presented in the
                                                                               aforementioned figures, in two phases namely the even
                                                                               phase (PHASE-P) and the odd phase (PHASE-N).




Fig. 1.7 Various shapes of Hall plates. Current contacts are denoted by
C, sense contacts by S, and C/S indicates that the current and sense are
interchangeable                                                                              (a)                                (b)


    The transducer, however, is not symmetric with respect                     Fig. 1.9 The novel 3D Hall device that we call “3D Wheel Hall Senor”
to the location of ∆R. In effect, this resistor has moved from                 or 3DWHS. (a) The even phase (PHASE-P) ; (b) the odd phase
the lower right leg of the Wheatstone bridge to the upper                      (PHASE-N).
right leg, resulting in a polarity inversion of the ohmic offset                    The device exploits the signals attributed to Hall voltage,
voltage. The total output voltage is now VH – VE. One way to                   Hall current, and geometric MR effect. As a result the device
visualize this effect is to see the Hall voltage as rotating in                is equivalent to an “ideal” voltage or current Hall sensor
the same direction as the rotation in the bias current, while                  with geometrical factor of one (GH = 1). Moreover it
the ohmic offset rotates in the opposite direction. If one were                provides for high-speed spinning, given that the voltage
to take these two measurements to obtain VH + VE and VH –                      distribution changes moderately between different phases.
VE, one can then simply average them to obtain the true                        This is equivalent to minimum charge injection that 0 in turn
value of VH. For this technique to work, the only requirement                  – allows spinning frequency increase. The device senses all
on the Hall-effect transducer is that it be symmetric with                     3 filed dimensions, namely the flux-density of BZ is
respect to rotation. It is possible to build a circuit that is able            proportional to the DC component of the output signal,
to perform this “plate-switching” function automatically.                      whereas the BX and BY components are proportional to the
                                                                               first harmonic of the output signal. Finally the device can be
                                                                               made in a way to reuse the current, if integrated in a
                                                                               BiCMOS technology providing for matched JFETs.




Fig. 1.8 Effects of rotating bias and sense terminals on output. (The                         (a)                                 (b)
picture was taken from Edward Ramsden “Hall Effect Sensors : Theory
and Application” 2006)                                                         Fig. 1.10 The novel 3D Hall device that we call “3D Wheel Hall
                                                                               Senor” or 3DWHS. (a) The electric field and the equpotential lines in
                                                                               the even phase (PHASE-P) ; (b) The electric field and the equipotential
    Imagine that the 1/f noise (flicker) at the output terminals               lines in the odd phase (PHASE-N).
of a Hall device as a fluctuating offset voltage. Then we can
                                                                           6
V. N. Petousis , P. D. Dimitropoulos / Journal of Engineering Science and Technology Review 2 (2009) 1 -7


    We simulate in MatLab environment the electric field                   5. Acknowlegements
and the equipotential lines inclination on the 3D-WHS in a
presence of magnetic induction to see the behavior of the                  The authors gratefully acknowledge the Pr. R P. Popovic
device in a real Hall effect conditions and the results                    (EPFL) and E. Ramsden, M. Shur and S.S.Sze for the useful
represented in figures 1.10a and 1.10b.                                    bibliography and Pr. M. Vavalis for the useful discussion
                                                                           and his scientific support.



                                                       ______________________________
                                                               References


  1. Hall. E. H 1879, On a new action of the magnet on electric              2. Corbino O. M. 1911, Electromagnetische Effekte,die von der
     currents Am.J.Math. 1-p.287-292                                            Verzerrung herriihren, wehle ein       Feld an der Bahn der
                                                                                Ionen in Metallen hervobring. Phys. Z. 12. p.561



                                                 ______________________________
                                                           Bibliography
  1.P.S Popović “ Hall Effect Devices (Sensor Series) Swiss Federal          3.Michael Shur “Physics of Semiconductor Devices” (Prentice Hall
     Institute of Technology Lausanne (E.P.F.L) 2nd Edition IoP 2004            Series in Solid State Physical electronics 1991)
  2.Edward Ramsden “Hall Effect Sensors : Theory and Application”            4.Simon S. Sze “Physics of Semiconductor Devices” 3rd Edition
     2006                                                                       2006




                                                                       7

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Galvanomagnetic Effects Sensors Based On Hall Effect

  • 1. Jestr Journal of Engineering Science and Technology Review 2 (2009) 1-7 Lecture Note JOURNAL OF Engineering Science and Technology Review www.jestr.org Galvanomagnetic Effects ¨Sensors based on Hall Effect¨ Vlassis N. Petousis* , Panagiotis D. Dimitropoulos Department of Computer & Communication Engineering, University of Thessaly, Volos, Hellas Received 18 April 2008; Accepted 16 February 2009 ___________________________________________________________________________________________ Abstract The Hall effect is the generation of a transverse electromotive force in a sample carrying an electric current and exposed to perpendicular magnetic field. Depending on the sample geometry, this electromotive force may cause the appearance of a transverse voltage across the sample, or a current deflection in the sample. The generation of this transverse voltage, called Hall voltage, is the generally known way for the of the appearance of the Hall effect. The resistance of this sample increasing under influence of the magnetic field, this called magnetoresistance effect. Both the Hall effect and the magnetoresistance effect belong to the more general class of phenomena called galvanomagnetic effects. Galvamomagnetic effects are the manifestations of charge transport phenomena in condensed matter in the presence of a magnetic field. The sensor applications of Hall effect became important only with the development of semiconductor technology. For one thing, the Hall effect is only strong enough for this propose in some semiconductors. Therefore, the first Hall effect magnetic sensor became commercially available in the mid 1950s, a few year after the discovery of high- mobility compound semiconductors. Our goal in this paper is to understand the physically background of the Hall and the magnetoresistance effects. We are going to discuss the effect of parameters in those phenomena and how we can make better our technology to improve better efficiency. Keywords: Hall Effect , Galvanomagnetic Effect, Hall Sensors, Wheel Hall Sensor, MR Effects. ___________________________________________________________________________________________ 1.1 Approximate analysis of Hall effect In our analysis we use Smooth-drift approximation, this approximation consist of assumption that charge carriers In this section we will see the Hall effect. That give us an move uniformly as a result of an electric field or other idea for the Hall effect and for magnetoconcetration effect driving forces, the velocity of the movement being the same and help us to understand much more about solid state for all carriers and equal to the appropriate drift velocity. So physics. we can replace the carrier velocity of each individual carrier, To simplify the analysis, we also assume equilibrium in υ (Equation (1.1)), by the average drift velocity of all carrier concentrations in samples, and thus neglect diffusion carriers. We neglect completely the thermal motion of the currents. carriers and the energy dissipation effect of scattering by a All galvanomagnetic effects come about as a smooth friction. manifestation of the action of the Lorentz force on quasi- free charge carriers in condensed matter. The Lorentz force is the force acting on a charged particle in a electromagnetic 1.2 The (original) Hall effect field. Moreover, the existence of the Lorentz force is fundamental indication of a very presence of an electric and We shall first study the Hall effect in the form in which / or magnetic fields. It is give by Hall[1] discovered. Hall’s experimental device was a long gold leaf. We shall also consider a long flat sample; but in order to quickly come modern applications of Hall effect, we F = eE + e(υ × B) (1.1) shall study it in semiconductor samples. Let us consider the transport of carriers in a long and Here e denotes the particle charge (for electrons e=-q thin semiconductor strips, such as those shown in figures and for holes e=q where q is he magnitude of an electron 1.1a and 1.1b.(Long strip means that the length of a strip l is charge) E is the electric field, υ is the carrier velocity and B much larger than w). the magnetic induction. The first term on the right hand side Suppose that in the strips, along the x direction, an of (1.1) is often referred to as electrostatic force, and the external electric field Εe(Ex,0,0) is established, and the second term as the Lorentz force. magnetic field is zero. Then in the Lorentz force (Equation (1.1)) only the first term, witch is the electrical force exists. ______________ * E-mail address: petousis@inf.uth.gr As we know the electrical force causes the drift of charge ISSN: 1791-2377 © 2008 Kavala Institute of Technology. All rights reserved. carriers. In the present case, charge carriers drift along the
  • 2. V. N. Petousis , P. D. Dimitropoulos / Journal of Engineering Science and Technology Review 2 (2009) 1 -7 strip in two opposite directions. The drift velocities are given These forces push carriers towards the upper edges of the by: strips. Consequently the carrier concentration at these upper edges of the strips start to increase, while the carrier concentration at the lower edges start to decrease. υ dp = μ p Ee , υ dn = μ n Ee (1.2) where μp and μn are the mobilities of holes and electrons, 1.4 Hall voltage respectively. The associated current densities are given by : A more tangible effect with associated with Hall field is the J p = qμ p pEe , J n = qμ n nE e (1.3) appearance of transverse voltage between the edges of a strip. This voltage is known as Hall voltage. Let us choose two points M and N at the opposite edges of the strip, under where p and n denote the hole and the electron density in p- the condition that both points lie in the same equipotential type and n-type strip, respectively. plane when B=0(figure 1.1). Then the Hall voltage is given by 1.3 Hall electric field N Let us now expose the current – carrying strip to a magnetic VH = M ∫E H dz (1.9) field. Let the magnetic induction B be collinear with the y- axis(figure 1.1). Now on each charge carrier in the samples and both parts of Lorentz force (Equation((1.1)) act. Since we assumed a uniform directional velocity of all carriers in the sample, the magnetic forces acting on a carriers are give by: VHp = μ p Ex By w , VHn = μn Ex By w (1.10) Fp = e[υ dp × B] , Fp = e[υ dp × B] (1.4) for our p-type and n-type strips, respectively. Here the negative sign has been omitted and w denotes the width of the strips. The generation of the transverse Hall electric field and the associated Hall Voltage under the experimental conditions similar to that shown in figure 1.1 are usually referred to as the Hall effect. However, there is another, more fundamental feature of the Hall effect: the Hall angle. 1.5 Hall angle In the presence of a magnetic field, the total electric field in the sample E=Ee+EH is not collinear with the external electric field Ee. In the present case the current in the sample is confined to the direction of the external electric field, and the current density is collinear with the external electric field (figure 1.1). Hence the total electric field is not collinear with the current density either. Therefore, the Hall effect in a long sample shows up through the tilting of the total electric field relative to the external electric field and the current density in the sample. With the aid of figure 1.2, the Fig. 1.1: The Hall effect in a long plate of p-type (p) and n-type (n) magnitude of the Hall angle is given by material. Ee is the external electric field, B the magnetic induction, υd he ΕΗ drift velocity of carriers, F the magnetic force, J the current density and tan ΘΗ = (1.11) EH the Hall electric field. The magnetic forces press both positive and Εe negative carriers towards the upper boundary of a strip. The Hall voltage appears between the charged edges of the strip. in the samples p and n respectively. These forces have the same direction in both strips : since e=q and e =-q for hols and electrons respectively, from equations(1.2) and (1.4) it follows that: Fp = qμ p [ Ee × B] , Fn = qμ n [Ee × B ] (1.5) For our particular geometry the magnetic forces are collinear with the z-axis: Fig. 1.2 The vector diagrams of electric fields and current densities in Fp = (0,0, qμ p E x B y ) , Fn = (0,0, qμ n E x B y ) (1.6) long samples: (p), in a p-type material; (n), in n-type material J is the current density, Ee the external electric field, EH the Hall electric field, E the total electric field and ΘH the Hall angle. 2
  • 3. V. N. Petousis , P. D. Dimitropoulos / Journal of Engineering Science and Technology Review 2 (2009) 1 -7 induction perpendicular to the device plane. We omit the For the reason which will become clear later, it is negative sign. convenient to measure the Hall angle with respect to the Equation (1.16) shows why a plate is a preferential shape direction of the total electric field, as shown in figure 1.2. of the Hall device with voltage output : for a given biasing Then we may define the Hall angle as the angle of current and magnetic induction, the thinner the sample, the inclination of the current density J with respect to the total higher the resulting Hall voltage. electric field E. According to this definition and (1.11), we obtain for the two particular cases from figures 1.1 and 1.2 1.7 The current deflaction effect tan ΘΗp = μ p By , tan ΘΗn = − μn By (1.12) Consider now the Hall effect in a very short Hall plate. A sample for a Hall effect experiment is called short if its For p-type and n-type semiconductor strip, respectively. dimension in the current direction is much smaller than that The value of the Hall angle depends only on the applied in the direction of the magnetic force acting on carriers. As magnetic induction and the mobility of the charge carriers. example of a short sample is the short strip shown in figure The sign of the Hall angle coincides with the sign of the 1.3. the basic shape of this device, its position relative to the charge carriers. coordinate system, and the notation are the same as in case of the long strips in figure 1.3. Now, however, the strip is short ,l<<w, and it is laterally sandwiched between two large 1.6 Hall coefficient current contacts. In such short samples the Hall effect takes a form which is sometimes called current deflection effect. From equations (1.3) and (1.8) we can find the relationship between the current density and the Hall field: 1 1 EHp = − [ J × B] , EHn = [ J × B] (1.13) qp qn The equations can be rewritten as EH = − RH [ J × B ] (1.14) where RH is a parameter called the Hall coefficient. Equation (1.14) is a modern representation of the conclusions made by Hall after his experimental findings. The Hall coefficient is a material parameter that characterizes the intensity and the sign of the Hall effect in a particular material. The unit of the Hall coefficient is VmA- Fig. 1.3 A short Hall plate. The distance between the current contacts 1 -1 T , which is sometimes expressed in a more compact form is smaller than the distance between the insulating boundaries (ib). (The as ΩmT-1 or, equivalently, m-3C-1. picture was taken from P.S Popović “ Hall Effect Devices (Sensor From a comparison of equations (1.13) and (1.14), we Series) Swiss Federal Institute of Technology Lausanne (E.P.F.L) 2nd can find the Hall coefficients of strongly extrinsic Edition IoP 2004) semiconductors Let us now find a quantitative relationship between the electric field and the current density in a short sample. We 1 1 RHp = , RHn = (1.15) shall again use the approximation which we introduced qp qn above: we neglect the thermal motion of the carriers, and assume that carriers move uniformly under the action of the for p-type and n-type, respectively. The sign of the Hall Lorentz force. coefficient coincides with the sign of the majority carriers, and the magnitude of the Hall coefficient is inversely Fp = qE + q[υ p × B] , Fn = − qE − q[υn × B ] (1.17) proportional to the majority carriers concentration. In the practical applications of the Hall effect it is convenient to for holes and electrons, respectively. The densities of the operate with pure macroscopic and integral quantities carriers are: characterizing a Hall device. To this end, for a long Hall device we obtain from equations (1.11) and (3.14) the Hall voltage : J p ( B) = J p (0) + μ p [ J p ( B) × B] IB⊥ J p ( B) = J p (0) + μ p [ J p ( B) × B] (1.18) VH = RH (1.16) t Here Jp(B) and Jn(B) are the hole and electron current densities respectively in the presence of the magnetic Here t is the thickness of the strip, I is the device current induction B. given by I = Jwt and B⊥ the component of the magnetic 3
  • 4. V. N. Petousis , P. D. Dimitropoulos / Journal of Engineering Science and Technology Review 2 (2009) 1 -7 J p ( B) = qμ p pE p = μ p pFp = qpυ p J n ( B ) = q μ n nEn = μ n nFn = − qnυn (1.19) And Jp(0) and Jn(0) are the drift current densities due to the electric field E when B=0: J p (0) = qμ p pE J n (0) = q μn nE (1.20) Equations (1.17),(1.18) and (1.20) are graphically represented in figure 1.4. In a short sample, a magnetic field Fig. 1.5 The current lines deflection effect in a short Hall plate, biased deflects the current from its usual way along the electrical by a constant voltage (a) and a constant current (b). The broken lines are field. Moreover using the diagrams in figure 1.4, we find the current lines at B=0, whereas the full lines are the current lines at B ≠ 0. tan Θ Hp = μ p B⊥ , tan Θ Hn = − μn B⊥ (1.21) J p ( B) = σ pB E + σ pB μ p [ E × B ] J n ( B) = σ nB E − σ nB μ n [ E × B ] (1.22) where σ p0 σ n0 σ pB = and σ nB = (1.23) [1 + ( μ p B ) 2 ] [1 + ( μn B ) 2 ] are the effective conductivities of p-type and n-type materials in the presence of the magnetic induction B and, σp0 and σn0 are the conductivities at B=0. Note that, at a given electric field, the coefficients σΒ determine the longitudinal current density in a infinitely short sample. Since a materialization of the infinitely short sample is Corbino[2] disc, we shall call the conductivity the coefficients σΒ the Corbino conductivity. Fig. 1.4 The graphical representation of the vector equations (1.17),(1.18) and (1.20) that hold in a short Hall plates: (p) of a p-type The first term on the right-hand side of equation (1.22) semiconductor ; (n) of a n-type semiconductor.(The picture was taken represent the lateral current densities. The integral of this from P.S Popović “ Hall Effect Devices (Sensor Series) Swiss Federal current density over the contact surface is the device current. Institute of Technology Lausanne (E.P.F.L) 2nd Edition IoP 2004) From equations (1.22) and (1.23) we deduce that the device current decreases as the magnetic field, increases. Therefore, if a sample exposed in magnetic field, everything happens as 2. The magnetoresistance effect if the conductivity of the sample material were decreased. The corresponding relative increase in the effective material By inspecting the diagrams in figure 1.4, we notice that the resistivity is given by current density vector J(B) are smaller than J(0). This means that in short Hall Plates a magnetic field also has additional ρ pB − ρ p 0 effect: it causes a reduction in current density. = ( μ p B)2 This current deflection is illustrated in figure 1.5. As ρ p0 sown in figure 1.5(a), current density in presence of a magnetic field is smaller than that with no magnetic field. ρ nB − ρ n 0 The attenuation in the current density is a consequence of = ( μn B)2 (1.24) ρn0 the current deflection effect: the deflected current lines between the sample contacts are longer (see figure 1.5(a)). The longer current path means also greater effective The increase in a material resistivity under the influence resistance of the sample. of a magnetic field is called the magnetoresistance effect. In To find how much the current density decrease due to a particular, the just described increase in resistivity due to the magnetic induction, we have to solve the equation (1.18) current deflection effect in a short samples is called the with respect to J(B). We can solve this equation and for geometrical magnetoresistance effect. The attribute “ geometrical “ reflects the fact that the effect is related to the perpendicular magnetic field, such that E⋅B = 0, the geometry of the current lines, as illustrated in figure 1.5. solutions of the equations (1.18) are 4
  • 5. V. N. Petousis , P. D. Dimitropoulos / Journal of Engineering Science and Technology Review 2 (2009) 1 -7 2.1 Galvanomagnetic current components 3. Geometrical factors Up to now, in order to simplify our analysis, we have always Let us have a look at the distribution of the current density assumed that our sample is plate-like, and that the magnetic and the electrical potential in a “realistic“ galvanomagnetic field was perpendicular to the plate. Let us drop now this sample. Figure 1.7, shows such a two terminal rectangular assumption and consider a general case. We only assume plate, which is somewhere between “ very long “ and “ very that the vectors of electric field and magnetic induction have short “. By inspecting the current and the equipotential lines, an angle and we seek the current density vector. we notice the following. Near the two isolating boundaries, The basic equations relating the resulting current density current is forced to flow along the boundaries and the J(E,B) with the electric field E and the magnetic induction B equipotential lines are strongly inclined: a Hall electric field are given by is generated. The device such us assumed have intermediate geometry. Then a factor to related from geometry can be J ( B ) = σ E + μ[ J ( B ) × B ] (1.25) calculated. It is really that the Hall voltage of the Hall plate with an arbitrary shape can de expressed as where J ( E , B ) ≡ J ( B ) and σ is the material conductivity at B=0 and μ is the mobility of the carriers. The total VH galvanomagnetic current density (figure 1.6) generally GH = (1.28) VH ∞ consists of three components : Where GH is a parameter called the geometrical J = J1 + J 2 + J 3 (1.25a) correction factor of a Hall voltage, and VH ∞ denotes the Hall voltage in a corresponding long strip. The Hall geometrical factor is a number limited by 0< GH<1. For a long Hall device GH=1; for the very short Hall device GH=0. Similarly, for the resistance of the device exposed to a magnetic field we may write: R( B) GR = (1.29) R∞ ( B) Where GH is a parameter called the geometrical factor of magnetoresistance, R(B) is the resistance of a considered Fig. 1.6 The current density components arising in the presence of an electric field E and the magnetic induction B. The coordinate system is magnetoresistor at an induction B, and R∞ ( B ) denotes the so chosen so that E is collinear with the x axis and B lies in the xz resistance of a corresponding part of an infinitely long strip. plane. The E and B vectors are not mutually orthogonal. The total current density is the sum J=J1+ J2 + J3 . J1 is collinear with E, J2 is collinear with [ExB] (witch is here collinear with the y axis), and J3 is collinear with B. Note that we tacitly assume positive charge carriers. In 3.1 Common shapes of a Hall plates and magneto- the case of negative charge carriers, the component J2 being resistors proportional to the mobility, would have an inversed direction (along the +y axis). (The picture was taken from P.S Popović “ Hall Effect Devices (Sensor Series) Swiss Federal Institute of Technology Lausanne Generally, any piece of electrically conductive material, (E.P.F.L) 2nd Edition IoP 2004) fitted with four electrical contacts, could be used as a Hall device. However, to be reasonably efficient and convenient and specially we can write for a practical applications, a Hall device should preferably be made in the form of a plate. The contacts should be positioned at the boundary of the plate, far away from each σ J1 = ( )E other. The two contacts for sensing the Hall voltage should 1 + μ 2 B2 be placed so as to attain approximately equal potentials at a zero magnetic field. Then the potential difference at the σ J2 = ( ) μ[ E × B ] sense contacts equals to Hall Voltage. The common 1 + μ 2 B2 potential at the sensing contacts should roughly equal the mid-potential of the current contacts. Then the largest Hall σ J3 = ( ) μ 2 B[ E ⋅ B] (1.26) voltage can me measured. To simplify the design and 1+ μ B 2 2 fabrication of a Hall plate a highly symmetrical shape and a uniform material and thickness of the plate are usual chosen. And finally the total galvanomagnetic current density is: Some commonly used shapes of Hall plates are shown in figure 1.7. J σ E (1 − μ 2 B2 ) + μσ [ E × B] + μ 2σ B( E ⋅ B) (1.27) 3.2. Reducing offset voltage and 1/f noise To removing ohmic offset we use, an elegant method that exploits a property of the Hall-effect transducer to reduce system offset. A four-way symmetric Hall-effect transducer 5
  • 6. V. N. Petousis , P. D. Dimitropoulos / Journal of Engineering Science and Technology Review 2 (2009) 1 -7 can be viewed as a Wheatstone bridge. Ohmic offsets can be model 1/f noise source by a fluctuating asymmetry represented as a small ∆R, as shown in figure 1.8a. When resistance ΔR in figure 1.8. If the biasing current of a Hall bias current is applied to the drive terminals, the output device spins fast enough so that the fluctuating voltage does voltage appearing at the sense terminals is VH + VE, where not change essentially during one circle, then the system VH is the Hall voltage and VE is the offset error voltage. shall not “see” the difference between the static and the Now consider what happens if we take the transducer fluctuating offset and shall cancel both of them. In order to and reconnect the bias and sense terminals, as shown in completely eliminate the 1/f noise of a Hall device, we have figure 1.8b. All of the terminal functions have been rotated to set the spinning current frequency well above the 1/f noise clockwise by 90°(“Spinning Current technique”). The sense corner frequency. For a very small device, this may be a terminals are now connected to bias voltage, and the former very high frequency. drive terminals are now used as outputs. Because the transducer is symmetric with rotation, we should expect to see, and do see, the same Hall output voltage. 4. Our suggestion for a novel shape Hall device : The 3D- WHS The lasts few months we design and we are ready to developed a novel Hall sensor device which uses elaborate spinning current technique. The novel 3D Hall device that we call “3D Wheel Hall Senor” is presented in figures 1.9a and 1.9b. The current enters the device, as presented in the aforementioned figures, in two phases namely the even phase (PHASE-P) and the odd phase (PHASE-N). Fig. 1.7 Various shapes of Hall plates. Current contacts are denoted by C, sense contacts by S, and C/S indicates that the current and sense are interchangeable (a) (b) The transducer, however, is not symmetric with respect Fig. 1.9 The novel 3D Hall device that we call “3D Wheel Hall Senor” to the location of ∆R. In effect, this resistor has moved from or 3DWHS. (a) The even phase (PHASE-P) ; (b) the odd phase the lower right leg of the Wheatstone bridge to the upper (PHASE-N). right leg, resulting in a polarity inversion of the ohmic offset The device exploits the signals attributed to Hall voltage, voltage. The total output voltage is now VH – VE. One way to Hall current, and geometric MR effect. As a result the device visualize this effect is to see the Hall voltage as rotating in is equivalent to an “ideal” voltage or current Hall sensor the same direction as the rotation in the bias current, while with geometrical factor of one (GH = 1). Moreover it the ohmic offset rotates in the opposite direction. If one were provides for high-speed spinning, given that the voltage to take these two measurements to obtain VH + VE and VH – distribution changes moderately between different phases. VE, one can then simply average them to obtain the true This is equivalent to minimum charge injection that 0 in turn value of VH. For this technique to work, the only requirement – allows spinning frequency increase. The device senses all on the Hall-effect transducer is that it be symmetric with 3 filed dimensions, namely the flux-density of BZ is respect to rotation. It is possible to build a circuit that is able proportional to the DC component of the output signal, to perform this “plate-switching” function automatically. whereas the BX and BY components are proportional to the first harmonic of the output signal. Finally the device can be made in a way to reuse the current, if integrated in a BiCMOS technology providing for matched JFETs. Fig. 1.8 Effects of rotating bias and sense terminals on output. (The (a) (b) picture was taken from Edward Ramsden “Hall Effect Sensors : Theory and Application” 2006) Fig. 1.10 The novel 3D Hall device that we call “3D Wheel Hall Senor” or 3DWHS. (a) The electric field and the equpotential lines in the even phase (PHASE-P) ; (b) The electric field and the equipotential Imagine that the 1/f noise (flicker) at the output terminals lines in the odd phase (PHASE-N). of a Hall device as a fluctuating offset voltage. Then we can 6
  • 7. V. N. Petousis , P. D. Dimitropoulos / Journal of Engineering Science and Technology Review 2 (2009) 1 -7 We simulate in MatLab environment the electric field 5. Acknowlegements and the equipotential lines inclination on the 3D-WHS in a presence of magnetic induction to see the behavior of the The authors gratefully acknowledge the Pr. R P. Popovic device in a real Hall effect conditions and the results (EPFL) and E. Ramsden, M. Shur and S.S.Sze for the useful represented in figures 1.10a and 1.10b. bibliography and Pr. M. Vavalis for the useful discussion and his scientific support. ______________________________ References 1. Hall. E. H 1879, On a new action of the magnet on electric 2. Corbino O. M. 1911, Electromagnetische Effekte,die von der currents Am.J.Math. 1-p.287-292 Verzerrung herriihren, wehle ein Feld an der Bahn der Ionen in Metallen hervobring. Phys. Z. 12. p.561 ______________________________ Bibliography 1.P.S Popović “ Hall Effect Devices (Sensor Series) Swiss Federal 3.Michael Shur “Physics of Semiconductor Devices” (Prentice Hall Institute of Technology Lausanne (E.P.F.L) 2nd Edition IoP 2004 Series in Solid State Physical electronics 1991) 2.Edward Ramsden “Hall Effect Sensors : Theory and Application” 4.Simon S. Sze “Physics of Semiconductor Devices” 3rd Edition 2006 2006 7