Focal Plane Array characterization and side wall morphology through confocal imaging optical sectioning using Scanning Confocal Microscope

1. FPA (focal plane array) Optical Sectioning
Optical sectioning was performed on FPA to extract the topography of FPA side walls
using Acto-S confocal microscope
FPA
FPA side wall image FPA side wall profile achieved through optical sectioning

2. FPA Optical Sectioning Details
• FPA (focal plane array; real sample) optical sectioning
was achieved through confocal reflection imaging using
Acto-S confocal microscope
• Images were taken with blue laser 405nm, single mode
fiber P-1-405A-FC-5 on laser side and P-1-460A-FC-5
on detection side with 100x objective
• Images were take over the valley between 4 pixels at
every 250nm slice from top to bottom of the pixel over
8 to 10um range in Z (Z is the depth along sectioning
was performed)
• Images were 18X18um and 512X512px

3. FPA Optical Sectioning Experiment Setup

4. Acto-S Confocal Microscope
Acto-S

5. FPA Optical Sectioning Experiment Location

6. Pixel top .25µm
Data
.75µm.5µm
1.75µm1.5µm1.25µm1µm

7. 2.5µm2.25µm
3µm
2.75µm2µm
3.5µm3.25µm
4µm
3.75µm
4.75µm4.5µm4.25µm

8. 5µm
6µm
5.75µm5.5µm5.25µm
6µm
7.25µm
6.75µm6.25µm
7µm
6.5µm
7.75µm7.5µm

9. 8.75µm8.5µm8.25µm8µm
The data was acquired using CP research system piezo scanner. Scanner performed raster scan
from one corner to the other (diagonal corner) of the image and then came back to the starting
position in next scan. During this scanner had shifted so the two consecutive images were
slightly displaced (same features have different pixel numbers). Every odd and even number
images have same pixel positions. To construct 3D image the features had to be crosscorrelated
with pixel numbers in all the images.

10. Pixel top (1) .5µm (3) 1.5µm (7)1µm (5)
.25µm (2) .75µm (4) 1.75µm (8)1.25µm (6)
Images with similar shift (odd and even number)

11. FPA 3D image produced by the slices

13. Intersection: Line profiles along X-axis

14. Line profile (I vs X) at every micron (odd number data set)

15. Line profile (I vs X) at every .5 micron (odd number data sets)

16. Line profile (I vs X) at every micron detailed view

23. Intensity I(X,Z) vs X every data set corresponds to different Z slice, each slice is
half micron apart in Z
Pixel top
Pixel top.5um
1um
1.5um
2um
2.5um
3.5um
3um
4um
5um
4.5um
5.5um

24. FPA pixel side wall I(Z) vs X (correspond the data points to slide 10)
X

25. Intersection: Line profiles along Y-axis

26. Line profile (I vs Y) at every 1 micron (odd number data set)

27. Line profile (I vs Y) at every .5 micron (odd number data sets)

28. Line profile (I vs Y) at every 1 micron detailed view

35. Intensity I(X,Z) vs Y every data set corresponds to different Z slice, each slice is
half micron apart in Z
Pixel top
Pixel top
.5um
1um
1.5um
2um
2.5um 3um 5.5um
Y
Pixel top
Pixel top
.5um
1um
1.5um
2um
2.5um 3um 5.5um

36. (correspond the intensities in slide 24)
Pixel Pixel
~1µm
~4.5µm
Wall
FPA pixel side wall I(Z) vs Y

37. (correspond the data points to slide 35)
Pixel Pixel
~1µm
~4.5µm
Wall
FPA pixel side wall I(Z) vs Y

38. Making of FPA pixel side wall I(Z) vs Y (slide 37)
Steps
1. Select the slope change
point on the first line
profile
2. Note down the pixel
number
3. Put down the slope on
the next line profile and
note down the pixel
number of the endpoint
of slope
4. Do the same for the next
consecutive line profiles
5. Do this for all lines on
both sides of the profiles
6. Plot pixel numbers with
line profile depths (depth
at which the profile was
acquired)
7. Plot depth vs pixel
number
Slope

39. FPA Multimedia files

40. Software used: Lab VIEW V 2009 and 2011
Confocal Image Confocal Image processing softwareVI

41. FPA line profile (I vs X) extraction softwareVI

42. FPA side wall (I(X,Z) vs X) profile softwareVI