Micro-XRF EDS can be used in a complementary manner with SEM/EDS to obtain semi-quantitative compositional analysis for identification of alloy types at elemental concentrations above 100 ppm (0.01 wt%). A presentation by Element Materials Technology expert Dan DeMiglio.
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The Use of Micro-X-ray Fluorescence in an SEM for Failure Analysis Investigations of Aerospace Materials
1. The Use of Micro-X-ray Fluorescence in an
SEM for Failure Analysis Investigations of
Aerospace Materials
Daniel S. DeMiglio
Senior Metallurgical Engineer, Element Charlotte
June 19, 2012 Aeromat 2012 Conference & Exhibition
3. Electron Beam Sample Interaction
June 19, 2012 Aeromat 2012 Conference & Exhibition
4. X-ray Sample Interaction
Sample
X-ray Spectra Acquisition for microXRF/EDS:
40 micron spot size
35°
35°
10 mm working distance
70° 60 secs acquisition
Sample 50 keV Incident X-ray Beam
(Ag Target 1.0 mA 50 W)
XRF
June 19, 2012 Aeromat 2012 Conference & Exhibition
5. Hitachi S-3700N SEM-IXRF Systems Digital Imaging and EDS Microanalysis
Micro-XRF/EDS Using Fundamental Parameter Software (FP)
June 19, 2012 Aeromat 2012 Conference & Exhibition
17. Summary
Micro-XRF EDS can be used in a complementary manner with SEM/EDS to obtain semi-
quantitative compositional analysis for identification of alloy types at elemental
concentrations above 100 ppm (0.01 wt%)
Greater sensitivity at high atomic numbers; low background
Aerospace microanalysis applications include: contamination analysis, wear debris
identification, alloy segregation, weld analysis, nondestructive coating thickness
measurement
For best results Micro-XRF EDS microanalysis must be performed with certified alloy
standards (IXRF Systems - FP EDS microanalysis software)
Small sample sizes (<1 gram) that cannot be otherwise analyzed by bulk chemistry
techniques (OES, ICP, WDS-XRF) are well-suited to Micro-XRF EDS microanalysis
Core particle compositions can be characterized by Micro-XRF EDS
Care must be taken to ignore scattering and artifact X-ray peaks that are not from the
area of interest
June 19, 2012 Aeromat 2012 Conference & Exhibition