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Based upon Brooks award-winning GF100 Series, the GF40 Series is a performance/value MFC platform designed for OEM applications, delivering the following class leading features:
• MultiFloTM process gas and flow range programmability, enabling customers to re-configure the MFC for new gases and full scale flow rates for unparalleled process flexibility.
• A high-performance, corrosion-resistant flow measurement sensor delivers improved reproducibility and stability.
• A variety of elastomer options enable customers to select the optimum and most cost effective mix of products for their application.
• Full range of industrial communication protocols (DeviceNet, Profibus DP-V1, and EtherCAT).
• An independent service/diagnostic port enables on-tool reconfiguration/ optimization, data logging, and troubleshooting without having to remove the MFC from the gas line.