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Organic Electronics –
Introduction to OTFT & Plastic Logic’s
Flexible Display Technology


Dr. Octavio Trovarelli | 12th Dresden Microelectronics Academy | September 7, 2012
Introduction to Organic Electronics
                                 Outline

 ● Organic Electronics – Key Milestones
 ● Principles of organic semiconductors and materials
 ● OTFT and properties
 ● Plastic Logic - Introduction
 ● Challenges in Establishing Volume Manufacturing
 ● Technical achievements and potential applications




                      12th Dresden Microelectronics Academy   September 7, 2012   2
Organic Electronics – Some Key Milestones
● First organic TFT demonstrated (1986): low mobility <10-4 cm2/Vs
● First demonstration of clean field-effect mobilities within an order
  of magnitude to that of a-Si: pentacene (1995), poly-3-
  hexylthiophene (1997)
Current status:
● Mobilities of 0.1 – 1 cm2/Vs achievable now in a range of solution
                                                                                             PARC
  processed OSCs (p-type & n-type)
● Reliability comparable to a-Si (p-type)
Demonstrators / Applications:
● First demonstration of integration of OTFT backplane with e-paper
  (Lucent / E-Ink 1998)                                                                      PolyIC
● Demonstration of 13.56 MHz (non-standard) RFID tag (Philips,
  PolyIC 2007)
● QQVGA of flexible OLED display driven by OTFT backplane
  (Sony 2007)
● 2007: Announcements by Polymer Vision and Plastic Logic to
  commercialise OTFT technology in e-paper displays
                                                                                                 Sony

                               12th Dresden Microelectronics Academy     September 7, 2012   3
Why Organic Electronics?
Some advantages
● Organic transistors can be manufactured at relative low-T
  compared to single-crystalline Si (>800°C) or a-Si:H
  (>200°C), and
● On flexible plastic substrates (and even paper) on large
  scales!
● Enabling novel products             foldable, bendable, rollable, thin,
  ultra-light, robust…


Comparison to conventional Si-based electronics
● Basic operation of OTFTs and MOSFET have similarities
  and differences (see next pages)
● Materials, device structures and performance are very
  different
● Plastic circuits not expected to replace silicon but…
   … one should instead look for new and emerging applications
   where inorganic transistors cannot be used due to their mechanical properties or cost.


                                    12th Dresden Microelectronics Academy              September 7, 2012   4
Organic Material Characteristics
  ● Organic Semiconductors: formed by conjugated organic materials – alternating single and
    double bonds between covalently bound C- atoms
  ● Delocalised π-electrons provide both conduction and valence bands

            Example: Benzene                   poly (p-phenylene)
                                                     t0
                                                                  t1




                           + -
                       -       +                                                 Energy
                           + -

                 + -                   -
                 - +               +
                                       -
                                           +                            4 t1
                                                                                                            LUMO
                                                                                                  π* “conduction” band
                                                           2 t0

                                                                                                  π “valence” band
                  +
                                   +       -                            4 t1
                  -
                                                                                                            HOMO
                            +


                                                                                  Density of States                      H. Sirringhaus
Unique attributes of organic semiconductors:
  ● Science: Low-dimensional, molecular semiconductors with strong electron – ion and electron
    - electron interactions
  ● Technology: Compatible with solution-processing and direct-write printing; low-T processing

                                                  12th Dresden Microelectronics Academy                   September 7, 2012               5
Examples of “p-type” Organic Semiconductors


              µ = 1-5 cm2/Vs




                                   µ = 0.1 cm2/Vs

             µ = 15-20 cm2/Vs




                                                    µ = 0.6 cm2/Vs
                                                                                   H. Sirringhaus

                12th Dresden Microelectronics Academy          September 7, 2012         6
Low-Temperature Solution Processing




                        Challenges:

                           ● Control of molecular self-assembly from solution

                           ● Understanding of defects

                           ● Effect of dynamic disorder on electronic properties


            S. Tretiak, LANL

               12th Dresden Microelectronics Academy    September 7, 2012   7
Organic Thin Film Transistors
● Organic Transistors are Field-Effect-Transistors (FET)
● Typical Structures:




                                                                                      H. Klauk

                          12th Dresden Microelectronics Academy   September 7, 2012    8
Organic Thin Film Transistors
                                                                         Typical material
● Typical contacting for p-type OTFT:                                     thicknesses:

                                                                            ~0.1µm

                                                                            ~1µm




● Example of typical I-V characteristic curves of Pentacene-based p-type OTFT:




                                                                                            H. Klauk

                         12th Dresden Microelectronics Academy   September 7, 2012           9
Transport in Organic Semiconductors
                                                                            Polycrystalline Pentacene


Factors influencing mobility in organic semiconductors:
  ● Overlapping degree of conjugated π-systems
  ● Chemical purity
  ● Neighbour molecules
  ● Degree of molecular order (crystallinity)
  ● Energy density and distribution of localized states


Typical values of mobilities of organic materials (RT):
                    10-5 – 10 cm2/Vs


Comparison: channel carrier mobilities in FET
Polycrystalline
                    a-Si:H             Poly-Si            Crystalline Si
  Pentacene
                                                        ~500 cm2/Vs (e-)
0.1 – 1 cm2/Vs    ~0.5 cm2/Vs        >50 cm2/Vs
                                                        ~200 cm2/Vs (h+)
                                                                                                         H. Klauk

                                12th Dresden Microelectronics Academy      September 7, 2012            10
Mobility & Transistor Performance
      limitations                                                                                  Logic

                                                                                                             PolyIC


                                                                                                     OLED displays




                                                                                                                      Sony


                                                           A. Salleo
                                                                               Flexible E-paper displays


                                                                         Vsd
                                   I sd = W ⋅ µFET ⋅ Ci ⋅ (Vg − VT ) ⋅
                                                                          L
Material challenges:
                                                                                                           Plastic Logic
  ●   High mobility
  ●   Purity, stability in air, not toxic, solution processing
  ●   Cost effective, high-volume availability, manufacturability
  ●   Reliability: stable I_sat, V_th during product life-time
                                    12th Dresden Microelectronics Academy                September 7, 2012        11
OTFT – Basic Differences to MOSFET
● OTFT: “intrinsic” semiconductor in the channel and in the S / D contact region
● OTFTs operate in accumulation and not in inversion mode
● No selective doping    no p-n junctions as in Si-MOSFETs
● “Shottky”-type barriers existing at the contacts:



                                                          Example of p-type OTFT:
                                                          barrier (ϕm >> EA) blocks e-
                                                          injection from D contact to LUMO




                                                                                         H. Klauk

                          12th Dresden Microelectronics Academy      September 7, 2012   12
OTFT – Work Function Matching
● In general, HOMO-LUMO energy difference is large                     only one carrier type can
     be efficiently injected / extracted
● Difficulty of CMOS technology with organic materials




                                                                                                      H. Klauk
                         p-type                                             n-type
                                                    Copper-Phthalocyanin                  F16CuPc
                                                          (CuPc)


 Work function of       Pentacene
 some metals (eV)

  Au      5.1 – 5.47

  Pd      5.22 – 5.6
                        X = 3eV
                        IP = 4.9eV
  Ca        2.87                                         X = 2.7eV                       X = 4.5eV
                                                         IP = 4.8eV                      IP = 6.3eV

                              12th Dresden Microelectronics Academy          September 7, 2012        13
Origins of Plastic Logic
Cambridge became a scientific epicentre for the field of plastic electronics:

A research group of top scientists headed by Prof. Sir Richard Friend and Prof. Henning
Sirringhaus has a track record of world-leading innovations:

  ● Discovery of polymer electroluminescence in 1989
  ● Discovery of polymer electroluminescence in 1989
  ● First polymer FET (1988)
  ● First integration of polymer FET with polymer LED (1998)
  ● First polymer FET with mobility of 0.1 cm2/Vs (1999)
  ● Inkjet printing process for polymer FETs (2000)
  ● First n-type polymer FET (organic CMOS) (2005)
  ● First ambipolar light emitting transistor (2006)
  ● First ambipolar polymer FET with mobility > 2 cm2/Vs (2011)




                                    12th Dresden Microelectronics Academy   September 7, 2012   14
The Company Plastic Logic


          12th Dresden Microelectronics Academy   September 7, 2012   15
Plastic Electronics Technology
● Uses plastic instead of traditional silicon semiconductor and glass
● Fully industrialized flexible displays based on organic electronics
● Enables a revolutionary design and form-factor



   Shatterproof, Thin, Large and Light Display




                             12th Dresden Microelectronics Academy   September 7, 2012   16
Display Development History (Plastic Logic)
    2002: 4x4 TFT                2003: 80x60 50 PPI           2004: 80x60 50PPI        2005: 80x60 100PPI
        Array




2008: 1280x960 150PPI         2006: 800x600 100PPI            2005: 80x60 300PPI        2005: 80x60 10PPI




                    2011: 1920x1440 225PPI              2011: 75PPI Colour         2012: 75PPI Video (b/w & colour)




                                         12th Dresden Microelectronics Academy        September 7, 2012          17
Plastic Logic - Company History
                                    Technology Development




10+ transistors         100+ transistors     1.2 M transistors         Colour EPD          2.8 M transistors



               Research, Process Development and Manufacturing




                                        Cambridge Technology                 Dresden display factory
      Cambridge University             Center translating research           First plastic electronics
  Research in organic electronics             into products                    factory in the world



                                     12th Dresden Microelectronics Academy          September 7, 2012     18
Backplane: OTFT, Pixel and Matrix Array
                                                       Pixel Design
      Pixel Design                                     (top-down view)
      (cross-section)




 Display Pixel Array
   (top-down view)


                                                      Example: S2G2, S4G4, S4G3 pixels addressed


                        12th Dresden Microelectronics Academy         September 7, 2012      19
Front plane: Electrophoretic Display Media
                                                                        ™




                      Principles of Operation
                        ●   Oppositely charged reflective submicron pigments are
                            encapsulated in a clear liquid

                        ●   Particles move in opposite directions in an electric field

                        ●   Partial capsule imaging is possible enabling high
                            resolution capability

                        ●   Bi-stable, turn the power off – the image stays!


              12th Dresden Microelectronics Academy          September 7, 2012      20
Establishing Volume Manufacturing


          12th Dresden Microelectronics Academy   September 7, 2012   21
Dresden – Center for Organic Electronics




                                    see also: http://www.oes-net.de/en/home.html
             12th Dresden Microelectronics Academy    September 7, 2012   22
Plastic Logic Dresden FAB – Timeline – Major Milestones

● Groundbreaking                  May 2007

● Fab and Office Buildings Completed
                                  January 2008

● Clean Room
    Validation / handover April 2008



● Equipment Move-in,
  Installation and Start
    April 2008 to August 2008


● Process Installation and Development

    September 2008 to December 2009

●   Production ramp in 2010


                                12th Dresden Microelectronics Academy   September 7, 2012   23
R&D and Production Set-Up

                                Technology

                                  Transfer
   Cambridge R&D
  Prototype Line (14”)


             Cambridge R&D Prototype Line
                                                ●   Proof of concepts
                                                ●   Highly configurable process
                                                ●   New designs in < 1 month
                                                ●   1” Chips to A4 displays
                                                ●   R&D Engineers




                         12th Dresden Microelectronics Academy      September 7, 2012   24
R&D and Production Set-Up

                     Technology

                       Transfer

                                            Dresden Factory (Gen 3.5)


          Dresden Gen. 3.5 Pilot and Production Facility
                                 ●   Fully automated backplane manufacturing
                                 ●   Qualified volume process
                                 ●   Equipment development with suppliers
                                 ●   Process and Test development
                                 ●   Large scale reliability work
                                 ●   Technology transfer
                                 ●   Thousands of displays/week

              12th Dresden Microelectronics Academy      September 7, 2012   25
Competence in Organic and Printed Electronics
              Manufacturing of OTFTs
               ●   World’s largest flexible OE display (10.7”)

               ●   High density (1.2 m OTFTs per display)

               ●   Large area (Gen 3.5 | 780 x 650 mm | ~11 m OTFTs per glass plate)

               ●   Full scale (24/7)

              Development of OTFTs
               ●   Process and stack development for the manufacture of flexible displays

               ●   Material development with suppliers

               ●   Strong IP position

               ●   Unique tool development with suppliers

              Broad network
               ●   Wide portfolio of co-operations with suppliers, universities and institutes


               12th Dresden Microelectronics Academy          September 7, 2012      26
Organic Electronic Volume Production Set-Up: Challenges
Adaptation of equipment from the pilot-line set up in Cambridge
●   From Lab to standard production equipment for flat panel Gen 3.5
●   Industrialization of new specified and developed equipment prototypes

Verification of process specification for stable volume production

●   Size of the backplane differs by factor 10!   impact on processes


Test of new materials in volume production
●   Specifications to be developed
●   Selection and qualification of suppliers

Installation of production control and test concept
●   Test structures to be developed
●   Failure analysis to be developed

Identification of yield- and defects- key drivers

Training, know how for a new team

●   with experience in silicon and volume production for new equipment, materials and process flows


                                           12th Dresden Microelectronics Academy            September 7, 2012   27
Process Differences have Consequences for Equipment

 The key differentiators of our technology for organic and flexible
 electronics are:
  ●   Solution processing
  ●   Direct-write fabrication techniques to avoid mask-alignment
  ●   Combination of wet coating and dry patterning
  ●   Low process temperatures to permit use of cheap flexible substrates


 Our key focus areas for equipment and process know how are:
  ●   Printing, spraying and other deposition of organic and inorganic materials
  ●   Cleaning and conditioning of the layers
  ●   Laser processing for printable electronics


 We focus on the manufacturability
 of these processes such as:
  ●    Reproducibility
  ●    Homogeneity




                                         12th Dresden Microelectronics Academy     September 7, 2012   28
Equipment / Process Differences



+ 400nm
     Layer thickness [nm]




                                                                        Equipment /
                                                                        process 1
                                                                        Equipment /
                                                                        process 2




- 400nm




                            12th Dresden Microelectronics Academy   September 7, 2012   29
Process Learning & Development
       Printing process
                                                                                     Year 1
Thickness mean




                                                                                                Year 2




                            Thickness mean
       Deposition process
                                                                                Year 1
Thickness mean




                                                                                          Year 2
                                             Thickness mean




                                             12th Dresden Microelectronics Academy            September 7, 2012   30
OTFT On-Resistance Improvement
                                         Reduction of OTFT On-Resistance by factor of 5 over a year
                                            ●   Always using the same materials and processes
                                            ●   „Just“ optimising processing and handling conditions
OTFT Ron – Relative to current target




                                        12th Dresden Microelectronics Academy             September 7, 2012   31
Yield Enhancement Including Defect Density Improvement

●   Defect density analysis throughout all process steps


●   Factory and equipment design analysis


●   Optical inspections
with defect analysis



                                       Very small         Embedded      Embedded            Surface
                                       embedded            particles     residues           particles




                                12th Dresden Microelectronics Academy   September 7, 2012     32
Material Analysis and in-situ Measurements
New organic materials are normally
  still analyzed separately in a laboratory

Production requires analysis of:
    ●   Complex samples with layer stacks
    ●   Thickness analysis of layers with
                 similar composition or behaviour
    ●   In-situ measurements in the production flow
    ●   Local material analysis in µm areas




                             Layer stacks




State of the art Failure Analysis techniques for Si had to be developed again
                               12th Dresden Microelectronics Academy   September 7, 2012   33
Display Testing and Reliability
Test development for transistor and display parameters
      ●   Definition of test specifications
      ●   Electrical and Optical tests for production
      ●   Test methods for OTFT and other characterisation structures




Testing includes handling and alignment of flexible displays


Reliability test development for quality and lifetime behavior
     ● Accelerated test under different environmental conditions for lifetime projections
     ● Based on existing models for Si-based integrated circuits
     ● Parameters adapted to organic materials in terms of
                        temperature sensitivities and reaction to cycling




                                       12th Dresden Microelectronics Academy   September 7, 2012   34
Reliability Testing

           Name                 Test                                 Purpose
Thermo cycling                  TST            Mechanical robustness & CTE mismatch
High Temperature Storage        HTS            Storage of transport conditions
Advance Humidity Storage        AHS            Stability against moisture ingress
Low Temperature Storage          LTS           Storage of transport conditions
Real World Usage                RWU            Display use in non accelerated mode
Advance Humidity Operation      AHO            Accelerated operation at high humidity
Low Temperature Operation       LTO            Accelerated operation at low temperature
Ambient Operation                AO            Accelerated operation at ambient conditions
Solar storage                   SOR            Solar robustness
Altitude test                    ALT           Pressure sensitivity




                             12th Dresden Microelectronics Academy      September 7, 2012   35
Reliability Problems During the Development Phase
                                         Defects-driven fails
                                            Line outs during operation




                                 Equipment / Process-driven fails
Delamination during climatic tests     Dead pixels during operational stress   Inhomogeneity during operational stress




                                      12th Dresden Microelectronics Academy          September 7, 2012        36
Display Qualification Achieved in 2011




               12th Dresden Microelectronics Academy   September 7, 2012   37
Technical Achievements


          12th Dresden Microelectronics Academy   September 7, 2012   38
Flexible, robust, thin, lightweight and daylight readable OTFT-based displays




      Transmissive display

                              Ultrathin display




            Lightweight




                             12th Dresden Microelectronics Academy   September 7, 2012   39
Plastic Logic’s Technology in Action
 ● Flexible Colour Plastic e-paper Display (LINK)
 ● Incredibly Robust Display: The Stomp Test! (LINK)
 ● Displays can be literally “cut” in half and they still work! (LINK)
 ● Demonstrator: Video-Rate Animation (LINK)


… and many more at: http://www.youtube.com/plasticlogic




                         12th Dresden Microelectronics Academy   September 7, 2012   40
41

World Class Leading Investors & Support




 Additionally, we also acknowledge financial support from the German “Federal Ministry of
                     Education and Research“, grant number 13N10225.

                             12th Dresden Microelectronics Academy   September 7, 2012   41
Thank You!
     Contact: Octavio.Trovarelli@plasticlogic.com



                                                                       www.plasticlogic.com

                                                              Further enquires: info@plasticlogic.com




Follow Plastic Logic!:




Especial thanks to Henning Sirringhaus and Hagen Klauk for some of the illustrations used in this presentation

                                    12th Dresden Microelectronics Academy        September 7, 2012     42

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Organic Electronics – Introduction to OTFT and Flexible Display Tech

  • 1. Organic Electronics – Introduction to OTFT & Plastic Logic’s Flexible Display Technology Dr. Octavio Trovarelli | 12th Dresden Microelectronics Academy | September 7, 2012
  • 2. Introduction to Organic Electronics Outline ● Organic Electronics – Key Milestones ● Principles of organic semiconductors and materials ● OTFT and properties ● Plastic Logic - Introduction ● Challenges in Establishing Volume Manufacturing ● Technical achievements and potential applications 12th Dresden Microelectronics Academy September 7, 2012 2
  • 3. Organic Electronics – Some Key Milestones ● First organic TFT demonstrated (1986): low mobility <10-4 cm2/Vs ● First demonstration of clean field-effect mobilities within an order of magnitude to that of a-Si: pentacene (1995), poly-3- hexylthiophene (1997) Current status: ● Mobilities of 0.1 – 1 cm2/Vs achievable now in a range of solution PARC processed OSCs (p-type & n-type) ● Reliability comparable to a-Si (p-type) Demonstrators / Applications: ● First demonstration of integration of OTFT backplane with e-paper (Lucent / E-Ink 1998) PolyIC ● Demonstration of 13.56 MHz (non-standard) RFID tag (Philips, PolyIC 2007) ● QQVGA of flexible OLED display driven by OTFT backplane (Sony 2007) ● 2007: Announcements by Polymer Vision and Plastic Logic to commercialise OTFT technology in e-paper displays Sony 12th Dresden Microelectronics Academy September 7, 2012 3
  • 4. Why Organic Electronics? Some advantages ● Organic transistors can be manufactured at relative low-T compared to single-crystalline Si (>800°C) or a-Si:H (>200°C), and ● On flexible plastic substrates (and even paper) on large scales! ● Enabling novel products foldable, bendable, rollable, thin, ultra-light, robust… Comparison to conventional Si-based electronics ● Basic operation of OTFTs and MOSFET have similarities and differences (see next pages) ● Materials, device structures and performance are very different ● Plastic circuits not expected to replace silicon but… … one should instead look for new and emerging applications where inorganic transistors cannot be used due to their mechanical properties or cost. 12th Dresden Microelectronics Academy September 7, 2012 4
  • 5. Organic Material Characteristics ● Organic Semiconductors: formed by conjugated organic materials – alternating single and double bonds between covalently bound C- atoms ● Delocalised π-electrons provide both conduction and valence bands Example: Benzene poly (p-phenylene) t0 t1 + - - + Energy + - + - - - + + - + 4 t1 LUMO π* “conduction” band 2 t0 π “valence” band + + - 4 t1 - HOMO + Density of States H. Sirringhaus Unique attributes of organic semiconductors: ● Science: Low-dimensional, molecular semiconductors with strong electron – ion and electron - electron interactions ● Technology: Compatible with solution-processing and direct-write printing; low-T processing 12th Dresden Microelectronics Academy September 7, 2012 5
  • 6. Examples of “p-type” Organic Semiconductors µ = 1-5 cm2/Vs µ = 0.1 cm2/Vs µ = 15-20 cm2/Vs µ = 0.6 cm2/Vs H. Sirringhaus 12th Dresden Microelectronics Academy September 7, 2012 6
  • 7. Low-Temperature Solution Processing Challenges: ● Control of molecular self-assembly from solution ● Understanding of defects ● Effect of dynamic disorder on electronic properties S. Tretiak, LANL 12th Dresden Microelectronics Academy September 7, 2012 7
  • 8. Organic Thin Film Transistors ● Organic Transistors are Field-Effect-Transistors (FET) ● Typical Structures: H. Klauk 12th Dresden Microelectronics Academy September 7, 2012 8
  • 9. Organic Thin Film Transistors Typical material ● Typical contacting for p-type OTFT: thicknesses: ~0.1µm ~1µm ● Example of typical I-V characteristic curves of Pentacene-based p-type OTFT: H. Klauk 12th Dresden Microelectronics Academy September 7, 2012 9
  • 10. Transport in Organic Semiconductors Polycrystalline Pentacene Factors influencing mobility in organic semiconductors: ● Overlapping degree of conjugated π-systems ● Chemical purity ● Neighbour molecules ● Degree of molecular order (crystallinity) ● Energy density and distribution of localized states Typical values of mobilities of organic materials (RT): 10-5 – 10 cm2/Vs Comparison: channel carrier mobilities in FET Polycrystalline a-Si:H Poly-Si Crystalline Si Pentacene ~500 cm2/Vs (e-) 0.1 – 1 cm2/Vs ~0.5 cm2/Vs >50 cm2/Vs ~200 cm2/Vs (h+) H. Klauk 12th Dresden Microelectronics Academy September 7, 2012 10
  • 11. Mobility & Transistor Performance limitations Logic PolyIC OLED displays Sony A. Salleo Flexible E-paper displays Vsd I sd = W ⋅ µFET ⋅ Ci ⋅ (Vg − VT ) ⋅ L Material challenges: Plastic Logic ● High mobility ● Purity, stability in air, not toxic, solution processing ● Cost effective, high-volume availability, manufacturability ● Reliability: stable I_sat, V_th during product life-time 12th Dresden Microelectronics Academy September 7, 2012 11
  • 12. OTFT – Basic Differences to MOSFET ● OTFT: “intrinsic” semiconductor in the channel and in the S / D contact region ● OTFTs operate in accumulation and not in inversion mode ● No selective doping no p-n junctions as in Si-MOSFETs ● “Shottky”-type barriers existing at the contacts: Example of p-type OTFT: barrier (ϕm >> EA) blocks e- injection from D contact to LUMO H. Klauk 12th Dresden Microelectronics Academy September 7, 2012 12
  • 13. OTFT – Work Function Matching ● In general, HOMO-LUMO energy difference is large only one carrier type can be efficiently injected / extracted ● Difficulty of CMOS technology with organic materials H. Klauk p-type n-type Copper-Phthalocyanin F16CuPc (CuPc) Work function of Pentacene some metals (eV) Au 5.1 – 5.47 Pd 5.22 – 5.6 X = 3eV IP = 4.9eV Ca 2.87 X = 2.7eV X = 4.5eV IP = 4.8eV IP = 6.3eV 12th Dresden Microelectronics Academy September 7, 2012 13
  • 14. Origins of Plastic Logic Cambridge became a scientific epicentre for the field of plastic electronics: A research group of top scientists headed by Prof. Sir Richard Friend and Prof. Henning Sirringhaus has a track record of world-leading innovations: ● Discovery of polymer electroluminescence in 1989 ● Discovery of polymer electroluminescence in 1989 ● First polymer FET (1988) ● First integration of polymer FET with polymer LED (1998) ● First polymer FET with mobility of 0.1 cm2/Vs (1999) ● Inkjet printing process for polymer FETs (2000) ● First n-type polymer FET (organic CMOS) (2005) ● First ambipolar light emitting transistor (2006) ● First ambipolar polymer FET with mobility > 2 cm2/Vs (2011) 12th Dresden Microelectronics Academy September 7, 2012 14
  • 15. The Company Plastic Logic 12th Dresden Microelectronics Academy September 7, 2012 15
  • 16. Plastic Electronics Technology ● Uses plastic instead of traditional silicon semiconductor and glass ● Fully industrialized flexible displays based on organic electronics ● Enables a revolutionary design and form-factor Shatterproof, Thin, Large and Light Display 12th Dresden Microelectronics Academy September 7, 2012 16
  • 17. Display Development History (Plastic Logic) 2002: 4x4 TFT 2003: 80x60 50 PPI 2004: 80x60 50PPI 2005: 80x60 100PPI Array 2008: 1280x960 150PPI 2006: 800x600 100PPI 2005: 80x60 300PPI 2005: 80x60 10PPI 2011: 1920x1440 225PPI 2011: 75PPI Colour 2012: 75PPI Video (b/w & colour) 12th Dresden Microelectronics Academy September 7, 2012 17
  • 18. Plastic Logic - Company History Technology Development 10+ transistors 100+ transistors 1.2 M transistors Colour EPD 2.8 M transistors Research, Process Development and Manufacturing Cambridge Technology Dresden display factory Cambridge University Center translating research First plastic electronics Research in organic electronics into products factory in the world 12th Dresden Microelectronics Academy September 7, 2012 18
  • 19. Backplane: OTFT, Pixel and Matrix Array Pixel Design Pixel Design (top-down view) (cross-section) Display Pixel Array (top-down view) Example: S2G2, S4G4, S4G3 pixels addressed 12th Dresden Microelectronics Academy September 7, 2012 19
  • 20. Front plane: Electrophoretic Display Media ™ Principles of Operation ● Oppositely charged reflective submicron pigments are encapsulated in a clear liquid ● Particles move in opposite directions in an electric field ● Partial capsule imaging is possible enabling high resolution capability ● Bi-stable, turn the power off – the image stays! 12th Dresden Microelectronics Academy September 7, 2012 20
  • 21. Establishing Volume Manufacturing 12th Dresden Microelectronics Academy September 7, 2012 21
  • 22. Dresden – Center for Organic Electronics see also: http://www.oes-net.de/en/home.html 12th Dresden Microelectronics Academy September 7, 2012 22
  • 23. Plastic Logic Dresden FAB – Timeline – Major Milestones ● Groundbreaking May 2007 ● Fab and Office Buildings Completed January 2008 ● Clean Room Validation / handover April 2008 ● Equipment Move-in, Installation and Start April 2008 to August 2008 ● Process Installation and Development September 2008 to December 2009 ● Production ramp in 2010 12th Dresden Microelectronics Academy September 7, 2012 23
  • 24. R&D and Production Set-Up Technology Transfer Cambridge R&D Prototype Line (14”) Cambridge R&D Prototype Line ● Proof of concepts ● Highly configurable process ● New designs in < 1 month ● 1” Chips to A4 displays ● R&D Engineers 12th Dresden Microelectronics Academy September 7, 2012 24
  • 25. R&D and Production Set-Up Technology Transfer Dresden Factory (Gen 3.5) Dresden Gen. 3.5 Pilot and Production Facility ● Fully automated backplane manufacturing ● Qualified volume process ● Equipment development with suppliers ● Process and Test development ● Large scale reliability work ● Technology transfer ● Thousands of displays/week 12th Dresden Microelectronics Academy September 7, 2012 25
  • 26. Competence in Organic and Printed Electronics Manufacturing of OTFTs ● World’s largest flexible OE display (10.7”) ● High density (1.2 m OTFTs per display) ● Large area (Gen 3.5 | 780 x 650 mm | ~11 m OTFTs per glass plate) ● Full scale (24/7) Development of OTFTs ● Process and stack development for the manufacture of flexible displays ● Material development with suppliers ● Strong IP position ● Unique tool development with suppliers Broad network ● Wide portfolio of co-operations with suppliers, universities and institutes 12th Dresden Microelectronics Academy September 7, 2012 26
  • 27. Organic Electronic Volume Production Set-Up: Challenges Adaptation of equipment from the pilot-line set up in Cambridge ● From Lab to standard production equipment for flat panel Gen 3.5 ● Industrialization of new specified and developed equipment prototypes Verification of process specification for stable volume production ● Size of the backplane differs by factor 10! impact on processes Test of new materials in volume production ● Specifications to be developed ● Selection and qualification of suppliers Installation of production control and test concept ● Test structures to be developed ● Failure analysis to be developed Identification of yield- and defects- key drivers Training, know how for a new team ● with experience in silicon and volume production for new equipment, materials and process flows 12th Dresden Microelectronics Academy September 7, 2012 27
  • 28. Process Differences have Consequences for Equipment The key differentiators of our technology for organic and flexible electronics are: ● Solution processing ● Direct-write fabrication techniques to avoid mask-alignment ● Combination of wet coating and dry patterning ● Low process temperatures to permit use of cheap flexible substrates Our key focus areas for equipment and process know how are: ● Printing, spraying and other deposition of organic and inorganic materials ● Cleaning and conditioning of the layers ● Laser processing for printable electronics We focus on the manufacturability of these processes such as: ● Reproducibility ● Homogeneity 12th Dresden Microelectronics Academy September 7, 2012 28
  • 29. Equipment / Process Differences + 400nm Layer thickness [nm] Equipment / process 1 Equipment / process 2 - 400nm 12th Dresden Microelectronics Academy September 7, 2012 29
  • 30. Process Learning & Development Printing process Year 1 Thickness mean Year 2 Thickness mean Deposition process Year 1 Thickness mean Year 2 Thickness mean 12th Dresden Microelectronics Academy September 7, 2012 30
  • 31. OTFT On-Resistance Improvement Reduction of OTFT On-Resistance by factor of 5 over a year ● Always using the same materials and processes ● „Just“ optimising processing and handling conditions OTFT Ron – Relative to current target 12th Dresden Microelectronics Academy September 7, 2012 31
  • 32. Yield Enhancement Including Defect Density Improvement ● Defect density analysis throughout all process steps ● Factory and equipment design analysis ● Optical inspections with defect analysis Very small Embedded Embedded Surface embedded particles residues particles 12th Dresden Microelectronics Academy September 7, 2012 32
  • 33. Material Analysis and in-situ Measurements New organic materials are normally still analyzed separately in a laboratory Production requires analysis of: ● Complex samples with layer stacks ● Thickness analysis of layers with similar composition or behaviour ● In-situ measurements in the production flow ● Local material analysis in µm areas Layer stacks State of the art Failure Analysis techniques for Si had to be developed again 12th Dresden Microelectronics Academy September 7, 2012 33
  • 34. Display Testing and Reliability Test development for transistor and display parameters ● Definition of test specifications ● Electrical and Optical tests for production ● Test methods for OTFT and other characterisation structures Testing includes handling and alignment of flexible displays Reliability test development for quality and lifetime behavior ● Accelerated test under different environmental conditions for lifetime projections ● Based on existing models for Si-based integrated circuits ● Parameters adapted to organic materials in terms of temperature sensitivities and reaction to cycling 12th Dresden Microelectronics Academy September 7, 2012 34
  • 35. Reliability Testing Name Test Purpose Thermo cycling TST Mechanical robustness & CTE mismatch High Temperature Storage HTS Storage of transport conditions Advance Humidity Storage AHS Stability against moisture ingress Low Temperature Storage LTS Storage of transport conditions Real World Usage RWU Display use in non accelerated mode Advance Humidity Operation AHO Accelerated operation at high humidity Low Temperature Operation LTO Accelerated operation at low temperature Ambient Operation AO Accelerated operation at ambient conditions Solar storage SOR Solar robustness Altitude test ALT Pressure sensitivity 12th Dresden Microelectronics Academy September 7, 2012 35
  • 36. Reliability Problems During the Development Phase Defects-driven fails Line outs during operation Equipment / Process-driven fails Delamination during climatic tests Dead pixels during operational stress Inhomogeneity during operational stress 12th Dresden Microelectronics Academy September 7, 2012 36
  • 37. Display Qualification Achieved in 2011 12th Dresden Microelectronics Academy September 7, 2012 37
  • 38. Technical Achievements 12th Dresden Microelectronics Academy September 7, 2012 38
  • 39. Flexible, robust, thin, lightweight and daylight readable OTFT-based displays Transmissive display Ultrathin display Lightweight 12th Dresden Microelectronics Academy September 7, 2012 39
  • 40. Plastic Logic’s Technology in Action ● Flexible Colour Plastic e-paper Display (LINK) ● Incredibly Robust Display: The Stomp Test! (LINK) ● Displays can be literally “cut” in half and they still work! (LINK) ● Demonstrator: Video-Rate Animation (LINK) … and many more at: http://www.youtube.com/plasticlogic 12th Dresden Microelectronics Academy September 7, 2012 40
  • 41. 41 World Class Leading Investors & Support Additionally, we also acknowledge financial support from the German “Federal Ministry of Education and Research“, grant number 13N10225. 12th Dresden Microelectronics Academy September 7, 2012 41
  • 42. Thank You! Contact: Octavio.Trovarelli@plasticlogic.com www.plasticlogic.com Further enquires: info@plasticlogic.com Follow Plastic Logic!: Especial thanks to Henning Sirringhaus and Hagen Klauk for some of the illustrations used in this presentation 12th Dresden Microelectronics Academy September 7, 2012 42