Kensington Laboratories offers Performix a 300mm equipment front-end module (EFEM) wafer handling environment designed for ISO Class 1 specification, to address the growing constraints faced by the semiconductor industry.

1. H I G H P E R F O R M A N C E 3 0 0 m m E F E M
TM
© 2006 Kensington Laboratories. All rights reserved. Performix, MultiLink, and Automated Self Teach are trade-
marks of Kensington Laboratories. The Kensington logo is a registered trademark of Kensington Laboratories.
All other trademarks are property of their respective owners.
FM27207
+1.510.620.0235 ext. 718 • www.kensingtonlabs.com
K e n s i n g t o n L a b o r a t o r i e s
Kensington Laboratories is an advanced technology leader
committed to developing and manufacturing the highest
quality, most reliable, and cost effective automation solutions
in the industry. Our technical innovation along with investment
in capital infrastructure ensures that our customers receive
products with superior performance, high reliability, and low
cost of ownership. All Kensington Laboratories’ products are
backed by our global service and support network.
The Performix 300mm EFEM is an innovative, high quality
equipment front end solution that provides exceptional
throughput and world class tool availability.
M-04041
M-04041EFEM_Brochure8PG.qxd 8/31/06 3:34 PM Page 1

2. ADO-S 300mm load port with wafer mapper
Introduced in 1995, MultiLink robotic systems combine mature,
proven technology with state of the art performance. These robots
are mainstays in fabs throughout the industry.
• Exceptional throughput: Proprietary z axis design enables market
leading peak speeds of 55 inches/second and acceleration rates of
up to 200 inches/second2.
• Precision wafer placement: High performance design provides
precise motion control and eliminates structural deflection and creep.
• Fast swap times: Dual arm systems have demonstrated swap
times of less than 3 seconds and throughput greater than 360 wph on
a 4 port configuration.
• 300mm installed base: MultiLink robots are currently installed at
98% of all 300mm fabs.
• Best in class FOUP interoperability: Kensington Laboratories’
patented latchkey opening mechanism opens all SEMI standard FOUP
configurations, in any condition, ensuring excellent repeatability.
• Built to last: A robust design and precision assembly ensures
exceptional lifetime and performance.
• Superior reliability: Demonstrated MCBF >600,000 cycles at 90%
confidence level.
Performix combines the best of newly developed advanced robotic
technologies and industry-proven equipment. Available in 2, 3, and
4 port configurations, the Performix system’s monocoque construction,
a unibody frame, provides a sturdy foundation for the four major
components, each uniquely designed to provide the speed, accuracy,
and flexibility to meet your particular needs.
MultiLink Dual Arm robot,
track, and prealigner
Performix combines the best of newly
developed advanced robotic technologies
and industry-proven equipment.
MultiLink Robotic Systems
Performance Excellence
ADO Load Port
The ADO 300mm load port accesses the wafer in up to 6 seconds,
1.5 to over 3 times better than competitive products.
Stringent device requirements have forced IC manufacturers
to focus on increasingly complex process development, relying
on experts in the automation sector to provide the necessary
clean environment, system performance, and throughput. Managing
the higher cost of production mandates an unparalleled level
of automation. The Performix EFEM responds to that call with
an integrated sub-system for metrology and process equipment
that leverages Kensington Laboratories’ 25 years of advanced
robotic experience. The result is a product with high reliability,
world-class tool availability, and exceptional throughput needed
for volume production at the 90 nm technology node and below.
Performix is a self-contained mini-environment which utilizes
precision robotics in an ultra-clean wafer handling area. SEMI
compliant and configured for two to four BOLTS-compliant
ports, the Performix design facilitates interfacing among fab
equipment. The major automation components include the ADO
300mm load port, MultiLink™ robotic system for wafer handling,
prealigner, and optional central controller.
H i g h P e r f o r m a n c e 3 0 0 m m E F E M
3 Wide Performix EFEM
4 Wide Performix EFEM
Performix System
Kensington Laboratories offers Performix™, a 300mm equip-
ment front-end module (EFEM) wafer handling environment
designed for ISO Class 1 specifications, to address the growing
constraints faced by the semiconductor industry.
2 Wide Performix EFEM
Optional control rack and GUI
M-04041EFEM_Brochure8PG.qxd 8/31/06 3:34 PM Page 3

3. ADO-S 300mm load port with wafer mapper
Introduced in 1995, MultiLink robotic systems combine mature,
proven technology with state of the art performance. These robots
are mainstays in fabs throughout the industry.
• Exceptional throughput: Proprietary z axis design enables market
leading peak speeds of 55 inches/second and acceleration rates of
up to 200 inches/second2.
• Precision wafer placement: High performance design provides
precise motion control and eliminates structural deflection and creep.
• Fast swap times: Dual arm systems have demonstrated swap
times of less than 3 seconds and throughput greater than 360 wph on
a 4 port configuration.
• 300mm installed base: MultiLink robots are currently installed at
98% of all 300mm fabs.
• Best in class FOUP interoperability: Kensington Laboratories’
patented latchkey opening mechanism opens all SEMI standard FOUP
configurations, in any condition, ensuring excellent repeatability.
• Built to last: A robust design and precision assembly ensures
exceptional lifetime and performance.
• Superior reliability: Demonstrated MCBF >600,000 cycles at 90%
confidence level.
Performix combines the best of newly developed advanced robotic
technologies and industry-proven equipment. Available in 2, 3, and
4 port configurations, the Performix system’s monocoque construction,
a unibody frame, provides a sturdy foundation for the four major
components, each uniquely designed to provide the speed, accuracy,
and flexibility to meet your particular needs.
MultiLink Dual Arm robot,
track, and prealigner
Performix combines the best of newly
developed advanced robotic technologies
and industry-proven equipment.
MultiLink Robotic Systems
Performance Excellence
ADO Load Port
The ADO 300mm load port accesses the wafer in up to 6 seconds,
1.5 to over 3 times better than competitive products.
Stringent device requirements have forced IC manufacturers
to focus on increasingly complex process development, relying
on experts in the automation sector to provide the necessary
clean environment, system performance, and throughput. Managing
the higher cost of production mandates an unparalleled level
of automation. The Performix EFEM responds to that call with
an integrated sub-system for metrology and process equipment
that leverages Kensington Laboratories’ 25 years of advanced
robotic experience. The result is a product with high reliability,
world-class tool availability, and exceptional throughput needed
for volume production at the 90 nm technology node and below.
Performix is a self-contained mini-environment which utilizes
precision robotics in an ultra-clean wafer handling area. SEMI
compliant and configured for two to four BOLTS-compliant
ports, the Performix design facilitates interfacing among fab
equipment. The major automation components include the ADO
300mm load port, MultiLink™ robotic system for wafer handling,
prealigner, and optional central controller.
H i g h P e r f o r m a n c e 3 0 0 m m E F E M
3 Wide Performix EFEM
4 Wide Performix EFEM
Performix System
Kensington Laboratories offers Performix™, a 300mm equip-
ment front-end module (EFEM) wafer handling environment
designed for ISO Class 1 specifications, to address the growing
constraints faced by the semiconductor industry.
2 Wide Performix EFEM
Optional control rack and GUI
M-04041EFEM_Brochure8PG.qxd 8/31/06 3:34 PM Page 3

4. • Automated Self Teach™ is patented software that speeds system
start ups in a highly repeatable manner. To utilize Automated Self
Teach, an operator simply selects pre-programmed, approximate
locations for the load port, prealigner, and process equipment.
Kensington Laboratories’ patented, optical through-beam wafer
locating system automatically registers these locations and calibrates
the robot with high accuracy through a short motion operation.
• Largest installed base of edge grip end effectors is the result of
industry leading, proprietary edge grip wafer handling technology,
ensuring low backside wafer particle contamination.
• Simplified command set from the central controller allows for fast,
intuitive customer programming of the Performix EFEM automation.
• Embedded E-Diagnostics enable remote, high level functional testing
of components for fault isolation/detection, and provide software
teaching of automated material handling system drop off position.
PRECISION
Automated Self Teach robotics
Through-beam wafer mapper end effector
Ease of Use
The Performix system’s unique monocoque frame forms a rigid
enclosure that reduces vibration and enhances stability. This design
eliminates the need for a traditional skin-on-frame EFEM design.
A patented datum plane serves as a reference point to ensure precision
alignment of components and eliminate tolerance variability.
More importantly, the datum plane puts precision where it is needed –
in the automation components – thus eliminating high tolerance
requirements in auxiliary sub-systems. The prealigned, preleveled
Performix EFEM simplifies system integration, providing faster
installation and start up, and guaranteeing repeatable load port
and robotic alignment, and wafer position.
High-speed prealignment provides state of the art placement
accuracy in both vacuum chuck and edge contact configurations.
The optional central controller provides a simple single wire host
interface, coordinating all EFEM operations. A straightforward,
user-friendly command set makes interfacing and controlling the
Performix fast and easy.
Prealigner
Central Controller
System Features
SPEED
• Latchkey opening mechanism
opens all SEMI standard FOUP
configurations, in any condition
• FOUP latchkeys require no
vacuum door attachment
• Dual end effector, multiple link
robot arm system with corner
reach-around and extended
reach capabilities
• High torque, synchronously
operating multiple link robot
arm mechanism
• Continuously rotatable multiple
link robot arm mechanism
• Robot arm with specimen edge
gripping end effector
• Robot arm with specimen sensing
and edge gripping end effector
• Self-teaching robot arm position
method
• Through-beam wafer mapping
Key Patents
The Performix advantage resides in its ease of use. The impact is
superior system availability.
Zero Preventative Maintenance
is an integral part of all Kensington
robot systems. No periodic lubrication
or adjustments are required under
standard operating conditions.
M-04041EFEM_Brochure8PG.qxd 8/31/06 3:34 PM Page 5

5. • Automated Self Teach™ is patented software that speeds system
start ups in a highly repeatable manner. To utilize Automated Self
Teach, an operator simply selects pre-programmed, approximate
locations for the load port, prealigner, and process equipment.
Kensington Laboratories’ patented, optical through-beam wafer
locating system automatically registers these locations and calibrates
the robot with high accuracy through a short motion operation.
• Largest installed base of edge grip end effectors is the result of
industry leading, proprietary edge grip wafer handling technology,
ensuring low backside wafer particle contamination.
• Simplified command set from the central controller allows for fast,
intuitive customer programming of the Performix EFEM automation.
• Embedded E-Diagnostics enable remote, high level functional testing
of components for fault isolation/detection, and provide software
teaching of automated material handling system drop off position.
PRECISION
Automated Self Teach robotics
Through-beam wafer mapper end effector
Ease of Use
The Performix system’s unique monocoque frame forms a rigid
enclosure that reduces vibration and enhances stability. This design
eliminates the need for a traditional skin-on-frame EFEM design.
A patented datum plane serves as a reference point to ensure precision
alignment of components and eliminate tolerance variability.
More importantly, the datum plane puts precision where it is needed –
in the automation components – thus eliminating high tolerance
requirements in auxiliary sub-systems. The prealigned, preleveled
Performix EFEM simplifies system integration, providing faster
installation and start up, and guaranteeing repeatable load port
and robotic alignment, and wafer position.
High-speed prealignment provides state of the art placement
accuracy in both vacuum chuck and edge contact configurations.
The optional central controller provides a simple single wire host
interface, coordinating all EFEM operations. A straightforward,
user-friendly command set makes interfacing and controlling the
Performix fast and easy.
Prealigner
Central Controller
System Features
SPEED
• Latchkey opening mechanism
opens all SEMI standard FOUP
configurations, in any condition
• FOUP latchkeys require no
vacuum door attachment
• Dual end effector, multiple link
robot arm system with corner
reach-around and extended
reach capabilities
• High torque, synchronously
operating multiple link robot
arm mechanism
• Continuously rotatable multiple
link robot arm mechanism
• Robot arm with specimen edge
gripping end effector
• Robot arm with specimen sensing
and edge gripping end effector
• Self-teaching robot arm position
method
• Through-beam wafer mapping
Key Patents
The Performix advantage resides in its ease of use. The impact is
superior system availability.
Zero Preventative Maintenance
is an integral part of all Kensington
robot systems. No periodic lubrication
or adjustments are required under
standard operating conditions.
M-04041EFEM_Brochure8PG.qxd 8/31/06 3:34 PM Page 5

6. High Performance 300mm EFEM
Performix is backed by Kensington Laboratories’ reputation for
high quality design and high performance technology. With a large
installed base of robots and systems, Kensington Laboratories’
Performix sub-systems ensure faster start-up times and improved
placement accuracies, in an ISO Class 1 mini-environment.
Based upon a history of cutting-edge system design, Performix
integrates the highest quality components to achieve performance
unrivaled in the marketplace. Kensington has a large installed
base of robotic systems with robots numbering in the thousands
and wafer sorters exceeding 1,500.
Reputation for Leadership in Robotic Technology
Flexible load port and robotic components designed for
configurable solutions allow Performix to be easily tailored to
a variety of automation requirements. Features that make the
Performix EFEM configurable to your specific needs include:
• ADO load port with or without wafer mapping option.
• MultiLink Dual Arm (4 axes of motion) and MultiLink Single
Arm (3 and 4 axes of motion) robots.
• End effector options: 300mm edge grip, 300mm vacuum
grip, 300mm supinator wafer flipper, and 300mm batch
edge grip – all with through-beam wafer mapper. The
integrated through-beam wafer mapper uses an eye safe
LED that optically maps the entire FOUP and detects
common storage errors.
• Yaw axis robots (trackless) or Track configurations.
Configurable Solutions
Yaw axis robot (trackless) MultiLink Dual Arm robot with 300mm
batch edge grip end effector
300mm edge grip end effector
and supinator wafer flipper
Performix integrates the
highest quality components
based upon a history of
cutting-edge system design.
*Dimensions are approximate depending on your EFEM configuration.
Dimensions*
2 Wide EFEM 73.50" H x 49.81" W x 47.70" D
(1866.90 mm H x 1265.17 mm W x 1211.58 mm D)
3 Wide EFEM 90.55" H x 65.76" W x 49.53" D
(2299.97 mm H x 1670.30 mm W x 1258.06 mm D)
4 Wide EFEM 87.56" H x 83.18" W x 46.16" D
(2224.02 mm H x 2122.77 mm W x 1172.46 mm D)
Utility Connections
Electrical power supply 200 – 240 VAC, 50/60Hz, 1-phase, with a minimum
of 3.0kVA capacity
Vacuum
Load port None required
Robot 10 liter/min at 635 mm Hg (21 cft/hr at 25 in Hg)
Compressed air (input)
Load port Min. 60 psi, Max. 145 psi (relative) oil-free purified >5 µm
Consumption >1 m3/h for 10 cycles/hour
Connection One-touch fitting for 1/4" tubing
Robot None required
Ambient Conditions
Temperature Operation: +15 to +25°C (58 to 77°F)
Transport: –25 to +55°C (–13 to 181°F)
Humidity Operation: 10% to 95% relative humidity
Transport: 5% to 95% relative humidity
Cleanliness ISO Class 1
External Communications RS232 or TCP/IP
Compliance
E1.9 300 mm Cassette
E15.1 300 mm Tool Load Port
E47.1 300 mm Boxes and Pods
E57 Kinematic Couplings
E62 300 mm FIMS
E63 BOLTS Interface
E64 300 mm Cart Docking
E84 AMHS Parallel I/O Interface
E99 CIDRW
F47 Electrical Voltage Sag Standard
S2/S8/S14 Safety Guidelines
CE EMC, LVD, and MD Directives
Specifications
PERFORMIX SYSTEM
Kensington Laboratories:
The Leader in Robotic Technology
M-04041EFEM_Brochure8PG.qxd 8/31/06 3:34 PM Page 7

7. High Performance 300mm EFEM
Performix is backed by Kensington Laboratories’ reputation for
high quality design and high performance technology. With a large
installed base of robots and systems, Kensington Laboratories’
Performix sub-systems ensure faster start-up times and improved
placement accuracies, in an ISO Class 1 mini-environment.
Based upon a history of cutting-edge system design, Performix
integrates the highest quality components to achieve performance
unrivaled in the marketplace. Kensington has a large installed
base of robotic systems with robots numbering in the thousands
and wafer sorters exceeding 1,500.
Reputation for Leadership in Robotic Technology
Flexible load port and robotic components designed for
configurable solutions allow Performix to be easily tailored to
a variety of automation requirements. Features that make the
Performix EFEM configurable to your specific needs include:
• ADO load port with or without wafer mapping option.
• MultiLink Dual Arm (4 axes of motion) and MultiLink Single
Arm (3 and 4 axes of motion) robots.
• End effector options: 300mm edge grip, 300mm vacuum
grip, 300mm supinator wafer flipper, and 300mm batch
edge grip – all with through-beam wafer mapper. The
integrated through-beam wafer mapper uses an eye safe
LED that optically maps the entire FOUP and detects
common storage errors.
• Yaw axis robots (trackless) or Track configurations.
Configurable Solutions
Yaw axis robot (trackless) MultiLink Dual Arm robot with 300mm
batch edge grip end effector
300mm edge grip end effector
and supinator wafer flipper
Performix integrates the
highest quality components
based upon a history of
cutting-edge system design.
*Dimensions are approximate depending on your EFEM configuration.
Dimensions*
2 Wide EFEM 73.50" H x 49.81" W x 47.70" D
(1866.90 mm H x 1265.17 mm W x 1211.58 mm D)
3 Wide EFEM 90.55" H x 65.76" W x 49.53" D
(2299.97 mm H x 1670.30 mm W x 1258.06 mm D)
4 Wide EFEM 87.56" H x 83.18" W x 46.16" D
(2224.02 mm H x 2122.77 mm W x 1172.46 mm D)
Utility Connections
Electrical power supply 200 – 240 VAC, 50/60Hz, 1-phase, with a minimum
of 3.0kVA capacity
Vacuum
Load port None required
Robot 10 liter/min at 635 mm Hg (21 cft/hr at 25 in Hg)
Compressed air (input)
Load port Min. 60 psi, Max. 145 psi (relative) oil-free purified >5 µm
Consumption >1 m3/h for 10 cycles/hour
Connection One-touch fitting for 1/4" tubing
Robot None required
Ambient Conditions
Temperature Operation: +15 to +25°C (58 to 77°F)
Transport: –25 to +55°C (–13 to 181°F)
Humidity Operation: 10% to 95% relative humidity
Transport: 5% to 95% relative humidity
Cleanliness ISO Class 1
External Communications RS232 or TCP/IP
Compliance
E1.9 300 mm Cassette
E15.1 300 mm Tool Load Port
E47.1 300 mm Boxes and Pods
E57 Kinematic Couplings
E62 300 mm FIMS
E63 BOLTS Interface
E64 300 mm Cart Docking
E84 AMHS Parallel I/O Interface
E99 CIDRW
F47 Electrical Voltage Sag Standard
S2/S8/S14 Safety Guidelines
CE EMC, LVD, and MD Directives
Specifications
PERFORMIX SYSTEM
Kensington Laboratories:
The Leader in Robotic Technology
M-04041EFEM_Brochure8PG.qxd 8/31/06 3:34 PM Page 7

8. H I G H P E R F O R M A N C E 3 0 0 m m E F E M
TM
© 2006 Kensington Laboratories. All rights reserved. Performix, MultiLink, and Automated Self Teach are trade-
marks of Kensington Laboratories. The Kensington logo is a registered trademark of Kensington Laboratories.
All other trademarks are property of their respective owners.
FM27207
+1.510.620.0235 ext. 718 • www.kensingtonlabs.com
K e n s i n g t o n L a b o r a t o r i e s
Kensington Laboratories is an advanced technology leader
committed to developing and manufacturing the highest
quality, most reliable, and cost effective automation solutions
in the industry. Our technical innovation along with investment
in capital infrastructure ensures that our customers receive
products with superior performance, high reliability, and low
cost of ownership. All Kensington Laboratories’ products are
backed by our global service and support network.
The Performix 300mm EFEM is an innovative, high quality
equipment front end solution that provides exceptional
throughput and world class tool availability.
M-04041
M-04041EFEM_Brochure8PG.qxd 8/31/06 3:34 PM Page 1