Completion of the project

1. MICROMIRROR DESIGN USING SANDIA SUMMIT TOOLS
GE 4230: Design and Fabrication of MEMS
Dr. Osama Jadaan
University of Wisconsin – Platteville
Jon Zickermann
December 12, 2011
Abstract: Structural and modal finite element analysis (FEA) simulations were ran on the micromirror
created in the previous project using ANSYS Workbench. The structural simulation determined the
stresses and deformation of the mirror at 10° and if the mirror will fail at 5°. The modal analysis
determined six resonant frequencies and corresponding modal shapes for each frequency.

2. 1
TABLE OF CONTENTS
Objective ....................................................................... 2
Development ...................................................................... 2
Models ........................................................... 3
Mesh .................................................................... 3
Loads .................................................................... 4
Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Discussion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Appendix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

3. 2
OBJECTIVE
Although the Sandia SUMMiT V tools allowed for the creation of a MEMS device, there is
no certainty how the device will behave when a load is applied. To avoid high costs in real -
world testing, the 3d model generated in AutoCAD can be imported into ANSYS workbench and
real-world physics can be applied. For the torsional micromirror, a structural simulation was
needed to determined the stresses and deformation of the mirror at 10° and if the mirror will fail at 5°.
The modal analysis was needed to determine six resonant frequencies and corresponding modal shapes
and deformation at each frequency.
DEVELOPMENT
The first step to creating the simulation was to create a mesh for the model. Originally,
the imported model contained over 100,000 nodes, which was far too many for a simulation
requiring a simple load for a design that would not be used in production; t oo many nodes for
model only used to demonstrate the knowledge of using ANSYS Workbench. To reduce the
number of nodes, mapped face shaping and body sizing operations were applied to cut down on
the number of nodes from to about 50,000. The body sizes were around 100 µm for the
substrate and closer to 10 µm for more vital structures such as the supports for the spring.
Since the spring was the main focus of the simulation, the spring only received mapped face
meshing.
The next was to fix the connections automatically generated by Workbench. By default,
there were too many connections between objects that never made contact, such as the Poly0
layer to the spring. After, the contact tool was run and many connections were manually fixed
since the simulation considered the connections to lack contact even if the two bodies were
touching. This proved to fix problems with the simulation reporting errors with structures not
initial contact.
Afterwards, the loads and supports were applied. For the static stru ctural analysis, the
Poly 0 layer was used as the fixed support to simplify and reduce the time to solve. The load
was determined to be a 0.36117µN*µN moment. A moment was chosen since using a force
resulted in the mirror bending downwards in both directions. The 0.36117µN*µN moment was
determined experimentally from 3 separate moments and their deformations and the equation
determined from the linear regression in excel (see appendix fig 1). For the modal analysis, the
spring supports were assumed to be a fixed load due to the rigid body motion that resulted with
only the substrate acting as a fixed support.

4. 3
3D MODEL:
MESH:

5. 4
STRESS IMAGES:

6. 5

7. 6
DEFORMATION IMAGES:

8. 7
MODAL DEFORMATION RESULTS:

9. 8

10. 9

11. 10
RESULTS
Static Structural Results:
Maximum Maximum Maximum Maximum Total
Object Name
Principal Stress Principal Stress 2 Principal Stress 3 Principal Stress 4 Deformation
Scope
Scoping
Geometry Selection
Method
Geometry All Bodies 1 Body 2 Bodies All Bodies
Results
-1.5729e-003 -2.2717e-004 -1.5729e-003 -5.3634e-004
Minimum 0. µm
MPa MPa MPa MPa
1.1628e-003 1.5247e-003
Maximum 6.277e-003 MPa 6.277e-003 MPa 19.164 µm
MPa MPa
Minimum
Spring Part 6 Poly0
Occurs On
Maximum
Spring Part 6 Plate
Occurs On
Modal Results:
Type Total Deformation
Mode 1. 2. 3. 4. 5.
Identifier
Results
Minimum 0. µm
1.3285e+005 1.4596e+005 2.0527e+005 2.1181e+005 2.1742e+005
Maximum
µm µm µm µm µm
Minimum Occurs
Substrate
On
Maximum Occurs
Plate
On
Information
Reported 2.7379e-004 3.7744e-004 5.2514e-004 5.624e-004 9.1669e-004
Frequency MHz MHz MHz MHz MHz
DISCUSSION
In the static structural tests, the maximum observed stresses were only 6Pa, far below
the yield of any material used in MEMS if the mirror was deformed to 10 degrees. Therefore,
the mirror should not fracture at 5 degrees under normal operation. Looking at the images
from the moment tests, the mirror will not be able to work since the mirror does not bend
uniformly; the mirror looks like it twists rather than rotates. This is a result from
oversupporting the spring to the Poly1 layer below. Originally t here was a concern about the
first design’s spring sagging without any loads, however the simulation could not be run in the
design phase of the first project one due to lack of experience with ANSYS Workbench. If this
design was to be used in real life, the supports would have to be removed to allow the mirror to
rotate.
In the modal analysis, each frequency had a unique shape following one of three
patterns: bending at the sides that were perpendicular to the supporting Poly1 layer structure ,
bending at the corners and bending both at the sides and corners. The shapes of the

12. 11
deformation became more extreme as the frequency increased, slowing turning from a simple
deformation similar to the static force where both sides deformed in the downward direction,
to a complex deformation where all corners and both sides were deformed. In addition, the
resonant frequencies occurred only at extremely high frequencies, where the lowest was
reported at 2.7GHz, far lower than any mechanical vibration in a typical envi ronment. This
could possibly be a result from the over-engineering done on the spring’s support structure.
CONCLUSION
The results from Workbench conformed to the primary concern of the design - would
the design be strong enough to withstand a load strong enough to bend the mirror 10 degrees?
From the FEA simulation, the answer was yes. However, the design would not be practical since
the mirror does not rotate – instead, it bends and twists. This would not allow the mirror to
reflect the total amount of light emitted. Looking at the animations and images from the
simulation from both the structural and modal modes, the mirror was over-engineered from the
fear of fracture. Therefore, the design needs to be re -considered with less support, requiring
more testing and redesigns before this mirror should be considered for production .
APPENDIX
Fig 1: Moment Calculation:
Distance for 10 degree angle:
Moment calculation:
Torque vs Deformation
Deformation Moment
12 0.23 Torque vs Deformation
15.98 0.3 0.4
19 0.36
y = 0.0185x + 0.0056
Deformation (μm)
0.35
0.3
Required Moment
0.25
19.22 0.36117
0.2
10 12 14 16 18 20
Moment (μN* μm)
Fig 2: Preprocessing Data:
Units

13. 12
TABLE 1
Unit System Metric (µm, kg, µN, s, V, mA) Degrees rad/s Celsius
Angle Degrees
Rotational Velocity rad/s
Temperature Celsius
Mirror (A4, B4)
Geometry
TABLE 2
Mirror (A4, B4) > Geometry
Object Name Geometry
State Fully Defined
Definition
Source J:GE423Micromirror3d63d6.sat
Type ACIS
Length Unit Micrometers
Element Control Manual
Display Style Part Color
Bounding Box
Length X 330. µm
Length Y 252. µm
Length Z 15.73 µm
Properties
Volume 4.0907e+005 µm³
Mass 9.5314e-010 kg
Scale Factor Value 1.
Statistics
Bodies 20
Active Bodies 20
Nodes 63251
Elements 20598
Mesh Metric None
Preferences
Import Solid Bodies Yes
Import Surface Bodies Yes
Import Line Bodies No
Parameter Processing Yes
Personal Parameter Key DS
CAD Attribute Transfer No
Named Selection Processing No
Material Properties Transfer No
CAD Associativity Yes
Import Coordinate Systems No
Reader Save Part File No
Import Using Instances Yes
Do Smart Update No
Attach File Via Temp File Yes
Temporary Directory C:Documents and SettingsStudentApplication DataAnsysv121
Analysis Type 3-D
Mixed Import Resolution None

14. 13
Enclosure and Symmetry Processing Yes
TABLE 3
Mirror (A4, B4) > Geometry > Parts
Object Name Substrate Thermal Electrical
State Meshed
Graphics Properties
Visible Yes
Transparency 1
Definition
Suppressed No
Stiffness Behavior Flexible
Brick Integration Scheme Full
Coordinate System Default Coordinate System
Reference Temperature By Environment
Material
Assignment Silicon Anisotropic
Nonlinear Effects Yes
Thermal Strain Effects Yes
Bounding Box
Length X 330. µm
Length Y 252. µm
Length Z 1. µm 0.63 µm 0.8 µm
Properties
Volume 83160 µm³ 52391 µm³ 66528 µm³
Mass 1.9376e-010 kg 1.2207e-010 kg 1.5501e-010 kg
Centroid X 2212.2 µm
Centroid Y 1511.1 µm
Centroid Z 0.5 µm 1.315 µm 2.03 µm
Moment of Inertia Ip1 1.0254e-006 kg·µm² 6.46e-007 kg·µm² 8.2032e-007 kg·µm²
Moment of Inertia Ip2 1.7584e-006 kg·µm² 1.1078e-006 kg·µm² 1.4067e-006 kg·µm²
Moment of Inertia Ip3 2.7838e-006 kg·µm² 1.7538e-006 kg·µm² 2.227e-006 kg·µm²
Statistics
Nodes 287 5888
Elements 32 800
Mesh Metric None
TABLE 4
Mirror (A4, B4) > Geometry > Body Groups
Object Name Part 4 Part 5 Part 6 Base
State Meshed
Graphics Properties
Visible Yes
Definition
Suppressed No
Assignment Silicon Anisotropic
Coordinate System Default Coordinate System
Bounding Box
Length X 330. µm 310. µm 294. µm 310. µm
Length Y 252. µm 232. µm 226. µm 232. µm
Length Z 0.3 µm 3. µm 1.61 µm 3.5 µm

15. 14
Properties
Volume 24947 µm³ 20793 µm³ 129.29 µm³ 29970 µm³
Mass 5.8127e-011 kg 4.8448e-011 kg 3.0124e-013 kg 6.9831e-011 kg
Centroid X 0. µm 2335.5 µm 2212.2 µm
Centroid Y 0. µm 1511.6 µm
Centroid Z 0. µm 5.1149 µm 4.535 µm 6.4504 µm
Moment of Inertia Ip1 0. kg·µm² 9.1465e-008 kg·µm² 2.2198e-009 kg·µm² 2.6271e-007 kg·µm²
Moment of Inertia Ip2 0. kg·µm² 1.393e-008 kg·µm² 5.3446e-009 kg·µm² 1.1088e-006 kg·µm²
Moment of Inertia Ip3 0. kg·µm² 1.0538e-007 kg·µm² 7.5643e-009 kg·µm² 1.3715e-006 kg·µm²
Statistics
Nodes 12071 5533 2784 4118
Elements 1664 2471 272 1918
Mesh Metric None
TABLE 5
Mirror (A4, B4) > Geometry > Part 4 > Parts
Object Name Poly0
State Meshed
Graphics Properties
Visible Yes
Transparency 1
Definition
Suppressed No
Stiffness Behavior Flexible
Brick Integration Scheme Full
Coordinate System Default Coordinate System
Reference Temperature By Environment
Material
Assignment Silicon Anisotropic
Nonlinear Effects Yes
Thermal Strain Effects Yes
Bounding Box
Length X 330. µm
Length Y 252. µm
Length Z 0.3 µm
Properties
Volume 24947 µm³
Mass 5.8127e-011 kg
Centroid X 2212.2 µm
Centroid Y 1511.1 µm
Centroid Z 2.58 µm
Moment of Inertia Ip1 3.076e-007 kg·µm²
Moment of Inertia Ip2 5.2749e-007 kg·µm²
Moment of Inertia Ip3 8.3509e-007 kg·µm²
Statistics
Nodes 12071
Elements 1664
Mesh Metric None
TABLE 6
Mirror (A4, B4) > Geometry > Part 5 > Parts

16. 15
Object Name Part 5 Part 6
State Fully Defined
Graphics Properties
Visible Yes
Transparency 1
Definition
Suppressed No
Stiffness Behavior Flexible
Brick Integration Scheme Full
Coordinate System Default Coordinate System
Reference Temperature By Environment
Material
Assignment Silicon Anisotropic
Nonlinear Effects Yes
Thermal Strain Effects Yes
Bounding Box
Length X 110. µm
Length Y 232. µm
Length Z 3. µm
Properties
Volume 10397 µm³
Mass 2.4224e-011 kg
Centroid X 2088.9 µm 2335.5 µm
Centroid Y 1511.6 µm
Centroid Z 5.1149 µm
Moment of Inertia Ip1 9.1268e-008 kg·µm² 9.1465e-008 kg·µm²
Moment of Inertia Ip2 1.393e-008 kg·µm²
Moment of Inertia Ip3 1.0518e-007 kg·µm² 1.0538e-007 kg·µm²
Statistics
Nodes 2759 2774
Elements 1233 1238
Mesh Metric None
TABLE 7
Mirror (A4, B4) > Geometry > Part 6 > Parts
Object Name Part 7 Part 8 Part 9 Part 10 Part 11
State Fully Defined
Graphics Properties
Visible Yes
Transparency 1
Definition
Suppressed No
Stiffness Behavior Flexible
Brick Integration Scheme Full
Coordinate System Default Coordinate System
Reference Temperature By Environment
Material
Assignment Silicon Anisotropic
Nonlinear Effects Yes
Thermal Strain Effects Yes

17. 16
Bounding Box
Length X 19.859 µm 1.9998 µm 19.859 µm
Length Y 1.9999 µm
Length Z 1.61 µm
Properties
Volume 15.518 µm³ 2.5727 µm³ 15.518 µm³
Mass 3.6156e-014 kg 5.9944e-015 kg 3.6156e-014 kg
Centroid X 2079.7 µm 2344.7 µm 2358.2 µm 2079.7 µm
Centroid Y 1401.6 µm 1621.6 µm 1456.6 µm 1511.6 µm 1456.6 µm
Centroid Z 4.535 µm
Moment of Inertia Ip1 3.4886e-014 kg·µm² 4.4923e-015 kg·µm² 3.4886e-014 kg·µm²
Moment of Inertia Ip2 1.3623e-012 kg·µm² 4.4934e-015 kg·µm² 1.3623e-012 kg·µm²
Moment of Inertia Ip3 1.3816e-012 kg·µm² 6.3961e-015 kg·µm² 1.3816e-012 kg·µm²
Statistics
Nodes 324 96 324
Elements 32 8 32
Mesh Metric None
TABLE 8
Mirror (A4, B4) > Geometry > Part 6 > Parts
Object Name Part 12 Part 13 Part 14 Part 15 Part 16
State Fully Defined
Graphics Properties
Visible Yes
Transparency 1
Definition
Suppressed No
Stiffness Behavior Flexible
Brick Integration Scheme Full
Coordinate System Default Coordinate System
Reference Temperature By Environment
Material
Assignment Silicon Anisotropic
Nonlinear Effects Yes
Thermal Strain Effects Yes
Bounding Box
Length X 19.859 µm 1.9998 µm 19.859 µm
Length Y 1.9999 µm
Length Z 1.61 µm
Properties
Volume 15.518 µm³ 2.5727 µm³ 15.518 µm³
Mass 3.6156e-014 kg 5.9944e-015 kg 3.6156e-014 kg
Centroid X 2344.7 µm 2079.7 µm 2066.2 µm 2344.7 µm
Centroid Y 1566.6 µm 1511.6 µm 1623.6 µm 1399.6 µm
Centroid Z 4.535 µm
Moment of Inertia Ip1 3.4886e-014 kg·µm² 4.4923e-015 kg·µm² 3.4886e-014 kg·µm²
Moment of Inertia Ip2 1.3623e-012 kg·µm² 4.4929e-015 kg·µm² 1.3623e-012 kg·µm²
Moment of Inertia Ip3 1.3816e-012 kg·µm² 6.3956e-015 kg·µm² 1.3816e-012 kg·µm²
Statistics
Nodes 324 96 324

18. 17
Elements 32 8 32
Mesh Metric None
TABLE 9
Mirror (A4, B4) > Geometry > Base > Parts
Object Name Right Left
State Fully Defined
Graphics Properties
Visible Yes
Transparency 1
Definition
Suppressed No
Stiffness Behavior Flexible
Brick Integration Scheme Full
Coordinate System Default Coordinate System
Reference Temperature By Environment
Material
Assignment Silicon Anisotropic
Nonlinear Effects Yes
Thermal Strain Effects Yes
Bounding Box
Length X 110. µm
Length Y 232. µm
Length Z 3.5 µm
Properties
Volume 14985 µm³
Mass 3.4915e-011 kg
Centroid X 2088.4 µm 2336.1 µm
Centroid Y 1511.6 µm
Centroid Z 6.4504 µm
Moment of Inertia Ip1 1.3129e-007 kg·µm² 1.3142e-007 kg·µm²
Moment of Inertia Ip2 1.897e-008 kg·µm²
Moment of Inertia Ip3 1.5024e-007 kg·µm² 1.5037e-007 kg·µm²
Statistics
Nodes 2088 2030
Elements 979 939
Mesh Metric None
TABLE 10
Mirror (A4, B4) > Geometry > Parts
Object Name Spring Plate
State Meshed
Graphics Properties
Visible Yes
Transparency 1
Definition
Suppressed No
Stiffness Behavior Flexible
Brick Integration Scheme Full
Coordinate System Default Coordinate System
Reference Temperature By Environment

19. 18
Material
Assignment Silicon Anisotropic
Nonlinear Effects Yes
Thermal Strain Effects Yes
Bounding Box
Length X 300. µm 216. µm
Length Y 60. µm 218. µm
Length Z 4.25 µm
Properties
Volume 28294 µm³ 1.0286e+005 µm³
Mass 6.5925e-011 kg 2.3966e-010 kg
Centroid X 2212.2 µm
Centroid Y 1511.6 µm
Centroid Z 10.299 µm 14.561 µm
Moment of Inertia Ip1 2.0043e-008 kg·µm² 9.4902e-007 kg·µm²
Moment of Inertia Ip2 2.6827e-007 kg·µm² 9.0172e-007 kg·µm²
Moment of Inertia Ip3 2.8824e-007 kg·µm² 1.8505e-006 kg·µm²
Statistics
Nodes 13590 13092
Elements 6602 6039
Mesh Metric None
Coordinate Systems
TABLE 11
Mirror (A4, B4) > Coordinate Systems > Coordinate System
Object Name Global Coordinate System
State Fully Defined
Definition
Type Cartesian
Ansys System Number 0.
Origin
Origin X 0. µm
Origin Y 0. µm
Origin Z 0. µm
Directional Vectors
X Axis Data [ 1. 0. 0. ]
Y Axis Data [ 0. 1. 0. ]
Z Axis Data [ 0. 0. 1. ]
Connections
TABLE 12
Mirror (A4, B4) > Connections
Object Name Connections
State Fully Defined
Auto Detection
Generate Contact
Yes
On Update
Tolerance Type Slider
Tolerance Slider 0.
Tolerance Value 1.0388 µm
Face/Face Yes

20. 19
Face/Edge No
Edge/Edge No
Priority Include All
Group By Bodies
Search Across Bodies
Revolute Joints Yes
Fixed Joints Yes
Transparency
Enabled Yes
Analysis Data Management
Solver Files C:Documents and
Directory SettingsStudentDesktopwbwb_filesdp0globalMECHSYSContact Tool
TABLE 13
Mirror (A4, B4) > Connections > Contact Regions
Bonded - Bonded -
Bonded - Thermal Bonded - Part 5 Bonded - Part 5
Object Name Substrate To Electrical To
To Electrical To Part 11 To Part 13
Thermal Poly0
State Fully Defined
Scope
Scoping
Geometry Selection
Method
Contact 1 Face 5 Faces
Target 1 Face 5 Faces
Contact
Substrate Thermal Electrical Part 5
Bodies
Target
Thermal Electrical Poly0 Part 11 Part 13
Bodies
Definition
Type Bonded
Scope Mode Automatic
Behavior Symmetric
Suppressed No
Advanced
Formulation Pure Penalty
Normal
Program Controlled
Stiffness
Update
Never
Stiffness
Pinball
Program Controlled
Region
TABLE 14
Mirror (A4, B4) > Connections > Contact Regions
Bonded - Part 5 Bonded - Part 6 Bonded - Part 6 Bonded - Part 6 Bonded - Part 7
Object Name
To Right To Part 12 To Part 15 To Part 16 To Right
State Fully Defined
Scope
Scoping
Geometry Selection
Method
Contact 26 Faces 5 Faces
Target 46 Faces 5 Faces

21. 20
Contact
Part 5 Part 6 Part 7
Bodies
Target Bodies Right Part 12 Part 15 Part 16 Right
Definition
Type Bonded
Scope Mode Automatic
Behavior Symmetric
Suppressed No
Advanced
Formulation Pure Penalty
Normal
Program Controlled
Stiffness
Update
Never
Stiffness
Pinball
Program Controlled
Region
TABLE 15
Mirror (A4, B4) > Connections > Contact Regions
Bonded - Part 8 Bonded - Part 9 Bonded - Part Bonded - Part 11 Bonded - Part
Object Name
To Right To Left 10 To Left To Right 12 To Left
State Fully Defined
Scope
Scoping
Geometry Selection
Method
Contact 5 Faces
Target 5 Faces
Contact
Part 8 Part 9 Part 10 Part 11 Part 12
Bodies
Target Bodies Right Left Right Left
Definition
Type Bonded
Scope Mode Automatic
Behavior Symmetric
Suppressed No
Advanced
Formulation Pure Penalty
Normal
Program Controlled
Stiffness
Update
Never
Stiffness
Pinball
Program Controlled
Region
TABLE 16
Mirror (A4, B4) > Connections > Contact Regions
Bonded - Part 13 Bonded - Part 14 Bonded - Part Bonded - Part Bonded - Right
Object Name
To Right To Right 15 To Left 16 To Left To Spring
State Fully Defined
Scope
Scoping
Geometry Selection
Method

22. 21
Contact 5 Faces 1 Face
Target 5 Faces 3 Faces
Contact
Part 13 Part 14 Part 15 Part 16 Right
Bodies
Target Bodies Right Left Spring
Definition
Type Bonded
Scope Mode Automatic
Behavior Symmetric
Suppressed No
Advanced
Formulation Pure Penalty
Normal
Program Controlled
Stiffness
Update
Never
Stiffness
Pinball
Program Controlled
Region
TABLE 17
Mirror (A4, B4) > Connections > Contact Regions
Bonded - Left Bonded - Spring Bonded - Part 5 Bonded - Part 6 Bonded - Part 7
Object Name
To Spring To Plate To Poly0 To Poly0 To Part 5
State Fully Defined
Scope
Scoping
Geometry Selection
Method
Contact 1 Face 7 Faces 4 Faces
Target 3 Faces 1 Face 5 Faces
Contact
Left Spring Part 5 Part 6 Part 7
Bodies
Target Bodies Spring Plate Poly0 Part 5
Definition
Type Bonded
Scope Mode Automatic Manual
Behavior Symmetric
Suppressed No
Advanced
Formulation Pure Penalty
Normal
Program Controlled
Stiffness
Update
Never
Stiffness
Pinball
Program Controlled
Region
TABLE 18
Mirror (A4, B4) > Connections > Contact Regions
Bonded - Part 14 To Bonded - Part 5 To Bonded - Left To Bonded - Left To
Object Name
Part 5 Part 8 Multiple Part 6
State Fully Defined
Scope

23. 22
Scoping
Geometry Selection
Method
Contact 4 Faces 12 Faces 1 Face
Target 4 Faces 12 Faces 1 Face
Contact Bodies Part 14 Part 5 Left
Target Bodies Part 5 Part 8 Multiple Part 6
Definition
Type Bonded
Scope Mode Manual
Behavior Symmetric
Suppressed No
Advanced
Formulation Pure Penalty
Normal
Program Controlled
Stiffness
Update
Never
Stiffness
Pinball Region Program Controlled
TABLE 19
Mirror (A4, B4) > Connections > Contact Tools
Object Name Contact Tool
State Solved
Scope
Scoping Method Worksheet
Mirror (A4, B4) > Connections > Contact Tool
Name Contact Side
Bonded - Substrate To Thermal Both
Bonded - Thermal To Electrical Both
Bonded - Electrical To Poly0 Both
Bonded - Part 5 To Part 11 Both
Bonded - Part 5 To Part 13 Both
Bonded - Part 5 To Right Both
Bonded - Part 6 To Part 12 Both
Bonded - Part 6 To Part 15 Both
Bonded - Part 6 To Part 16 Both
Bonded - Part 7 To Right Both
Bonded - Part 8 To Right Both
Bonded - Part 9 To Left Both
Bonded - Part 10 To Left Both
Bonded - Part 11 To Right Both
Bonded - Part 12 To Left Both
Bonded - Part 13 To Right Both
Bonded - Part 14 To Right Both
Bonded - Part 15 To Left Both
Bonded - Part 16 To Left Both
Bonded - Right To Spring Both
Bonded - Left To Spring Both
Bonded - Spring To Plate Both
Bonded - Part 5 To Poly0 Both

24. 23
Bonded - Part 6 To Poly0 Both
TABLE 20
Mirror (A4, B4) > Connections > Contact Tool > Contact Data Tables
Object Name Initial Information
State Solved
Mirror (A4, B4) > Connections > Contact Tool > Initial Information
Number Gap Geometric Geometri Resultin Real
Contac Penetratio
Name Type Status Contactin (µm Penetratio c Gap g Pinball Constan
t Side n (µm)
g ) n (µm) (µm) (µm) t
Bonded
-
Contac Bonde Close 2.2204e- 2.2204e-
Substrat 32. 0. 0. 3.7529 21.
t d d 016 016
e To
Thermal
Bonded
-
Bonde Close 2.2204e- 2.2204e-
Substrat Target 800. 0. 0. 0.7604 22.
d d 016 016
e To
Thermal
Bonded
-
Thermal Contac Bonde Close 4.4409e- 4.4409e-
800. 0. 0. 0.76912 23.
To t d d 016 016
Electrica
l
Bonded
-
Thermal Bonde Close 4.4409e- 4.4409e-
Target 800. 0. 0. 0.7604 24.
To d d 016 016
Electrica
l
Bonded
-
Contac Bonde Close 4.4409e- 8.8818e-
Electrica 800. 0. 0. 0.76912 25.
t d d 016 016
l To
Poly0
Bonded
-
Bonde Close 1.3323e- 8.8818e-
Electrica Target 1664. 0. 0. 0.49999 26.
d d 015 016
l To
Poly0
Bonded
- Part 5 Contac Bonde Close 6.8212e- 9.0949e-
20. 0. 0. 0.31581 27.
To Part t d d 013 013
11
Bonded
- Part 5 Bonde Close 4.5475e- 2.2737e-
Target 60. 0. 0. 0.26989 28.
To Part d d 013 013
11
Bonded
- Part 5 Contac Bonde Close 4.5475e- 4.5475e-
20. 0. 0. 0.31581 29.
To Part t d d 013 013
13
Bonded Target Bonde Close 60. 0. 0. 4.5475e- 4.5475e- 0.26989 30.

25. 24
- Part 5 d d 013 013
To Part
13
Bonded
Contac Bonde Close 2.2737e-
- Part 5 342. 0. 0.325 0.2251 0.68128 31.
t d d 013
To Right
Bonded
Bonde Close 2.2737e-
- Part 5 Target 266. 0. 0.33066 0.2251 1.0985 32.
d d 013
To Right
Bonded
- Part 6 Contac Bonde Close 9.0949e- 4.5475e-
20. 0. 0. 0.31803 33.
To Part t d d 013 013
12
Bonded
- Part 6 Bonde Close 2.2737e- 9.0949e-
Target 60. 0. 0. 0.26989 34.
To Part d d 013 013
12
Bonded
- Part 6 Contac Bonde Close 9.0949e- 4.5475e-
20. 0. 0. 0.31774 35.
To Part t d d 013 013
15
Bonded
- Part 6 Bonde Close 4.5475e- 4.5475e-
Target 60. 0. 0. 0.26989 36.
To Part d d 013 013
15
Bonded
- Part 6 Contac Bonde Close 9.0949e- 9.0949e-
20. 0. 0. 0.31774 37.
To Part t d d 013 013
16
Bonded
- Part 6 Bonde Close 4.5475e- 9.0949e-
Target 60. 0. 0. 0.26989 38.
To Part d d 013 013
16
Bonded
Contac Bonde Close 4.5475e- 2.2737e-
- Part 7 52. 0. 0. 0.30566 39.
t d d 013 013
To Right
Bonded
Bonde Close 4.5475e- 4.5475e-
- Part 7 Target 16. 0. 0. 1.4671 40.
d d 013 013
To Right
Bonded
Contac Bonde Close 4.5475e- 2.2737e-
- Part 8 52. 0. 0. 0.29754 41.
t d d 013 013
To Right
Bonded
Bonde Close 4.5475e- 4.5475e-
- Part 8 Target 16. 0. 0. 1.2457 42.
d d 013 013
To Right
Bonded
Contac Bonde Close 2.2737e- 4.5475e-
- Part 9 52. 0. 0. 0.30566 43.
t d d 013 013
To Left
Bonded
Bonde Close 9.0949e- 9.0949e-
- Part 9 Target 16. 0. 0. 1.8976 44.
d d 013 013
To Left
Bonded Contac Bonde Close 4.5475e- 9.0949e-
16. 0. 0. 0.25178 45.
- Part 10 t d d 013 013

26. 25
To Left
Bonded
Bonde Close 9.0949e- 4.5475e-
- Part 10 Target 36. 0. 0. 0.16123 46.
d d 013 013
To Left
Bonded
Contac Bonde Close 4.5475e- 4.5475e-
- Part 11 52. 0. 0. 0.30566 47.
t d d 013 013
To Right
Bonded
Bonde Close 9.0949e- 4.5475e-
- Part 11 Target 16. 0. 0. 1.8932 48.
d d 013 013
To Right
Bonded
Contac Bonde Close 2.2737e- 4.5475e-
- Part 12 52. 0. 0. 0.29754 49.
t d d 013 013
To Left
Bonded
Bonde Close 9.0949e- 9.0949e-
- Part 12 Target 16. 0. 0. 1.6997 50.
d d 013 013
To Left
Bonded
Contac Bonde Close 4.5475e- 4.5475e-
- Part 13 52. 0. 0. 0.30566 51.
t d d 013 013
To Right
Bonded
Bonde Close 9.0949e- 9.0949e-
- Part 13 Target 16. 0. 0. 1.9022 52.
d d 013 013
To Right
Bonded
Contac Bonde Close 4.5475e- 4.5475e-
- Part 14 16. 0. 0. 0.25178 53.
t d d 013 013
To Right
Bonded
Bonde Close 9.0949e- 4.5475e-
- Part 14 Target 36. 0. 0. 0.17247 54.
d d 013 013
To Right
Bonded
Contac Bonde Close 2.2737e- 4.5475e-
- Part 15 52. 0. 0. 0.30566 55.
t d d 013 013
To Left
Bonded
Bonde Close 1.3642e- 4.5475e-
- Part 15 Target 16. 0. 0. 1.7209 56.
d d 012 013
To Left
Bonded
Contac Bonde Close 4.5475e- 4.5475e-
- Part 16 52. 0. 0. 0.29754 57.
t d d 013 013
To Left
Bonded
Bonde Close 9.0949e- 4.5475e-
- Part 16 Target 16. 0. 0. 1.8058 58.
d d 013 013
To Left
Bonded
- Right Contac Bonde Close 8.8818e- 1.7764e-
6. 0. 0. 1.2151 59.
To t d d 016 015
Spring
Bonded
- Right Bonde Close 1.7764e- 8.8818e-
Target 98. 0. 0. 0.28404 60.
To d d 015 016
Spring
Bonded
Contac Bonde Close 8.8818e-
- Left To 6. 0. 0. 0. 1.2295 61.
t d d 016
Spring
Bonded Bonde Close 8.8818e- 8.8818e-
Target 98. 0. 0. 0.27719 62.
- Left To d d 016 016

27. 26
Spring
Bonded
Contac Bonde Close 5.3291e- 1.7764e-
- Spring 189. 0. 0. 0.5566 63.
t d d 015 015
To Plate
Bonded
Bonde Close 1.7764e- 7.1054e-
- Spring Target 224. 0. 0. 0.48926 64.
d d 015 015
To Plate
Bonded
Contac Bonde Close 4.4409e- 1.3323e-
- Part 5 50. 0. 0. 0.42916 65.
t d d 016 015
To Poly0
Bonded
Bonde Close 4.4409e- 8.8818e-
- Part 5 Target 28. 0. 0. 0.49999 66.
d d 016 016
To Poly0
Bonded
Contac Bonde Close 8.8818e- 1.3323e-
- Part 6 50. 0. 0. 0.42916 67.
t d d 016 015
To Poly0
Bonded
Bonde Close 8.8818e-
- Part 6 Target 28. 0. 0. 0. 0.49999 68.
d d 016
To Poly0
Mesh
TABLE 21
Mirror (A4, B4) > Mesh
Object Name Mesh
State Solved
Defaults
Physics Preference Mechanical
Relevance 0
Sizing
Use Advanced Size Function Off
Relevance Center Medium
Element Size Default
Initial Size Seed Active Assembly
Smoothing High
Transition Fast
Span Angle Center Fine
Minimum Edge Length 0.30 µm
Inflation
Use Automatic Tet Inflation None
Inflation Option Smooth Transition
Transition Ratio 0.272
Maximum Layers 5
Growth Rate 1.2
Inflation Algorithm Pre
View Advanced Options No
Advanced
Shape Checking Standard Mechanical
Element Midside Nodes Program Controlled
Straight Sided Elements No
Number of Retries Default (4)
Rigid Body Behavior Dimensionally Reduced

28. 27
Mesh Morphing Disabled
Pinch
Pinch Tolerance Please Define
Generate on Refresh No
Statistics
Nodes 63251
Elements 20598
Mesh Metric None
TABLE 22
Mirror (A4, B4) > Mesh > Mesh Controls
Object Name Mapped Face Meshing Body Sizing Body Sizing 2 Body Sizing 3
State Ignored Fully Defined
Scope
Scoping Method Geometry Selection Geometry Selection
Geometry 6 Faces 1 Body 4 Bodies 1 Body
Definition
Suppressed No No
Constrain Boundary No
Type Element Size
Element Size 100. µm 50. µm 10. µm
Behavior Soft
Advanced
Specified Sides None
Specified Corners None
Specified Ends None
FIGURE 1
Mirror (A4, B4) > Mesh > Image
Static Structural (A5)
TABLE 23
Mirror (A4, B4) > Analysis
Object Name Static Structural (A5)
State Solved
Definition
Physics Type Structural
Analysis Type Static Structural
Solver Target ANSYS Mechanical
Options
Environment Temperature 22. °C
Generate Input Only No
TABLE 24
Mirror (A4, B4) > Static Structural (A5) > Analysis Settings
Object Name Analysis Settings
State Fully Defined
Step Controls
Number Of Steps 1.
Current Step Number 1.
Step End Time 1. s
Auto Time Stepping Program Controlled
Solver Controls

29. 28
Solver Type Program Controlled
Weak Springs Off
Large Deflection Off
Inertia Relief Off
Nonlinear Controls
Force Convergence Program Controlled
Moment Convergence Program Controlled
Displacement Convergence Program Controlled
Rotation Convergence Program Controlled
Line Search Program Controlled
Output Controls
Calculate Stress Yes
Calculate Strain Yes
Calculate Contact No
Calculate Results At All Time Points
Analysis Data Management
Solver Files Directory C:Documents and SettingsStudentDesktopwbwb_filesdp0SYSMECH
Future Analysis Prestressed analysis
Scratch Solver Files Directory
Save ANSYS db Yes
Delete Unneeded Files Yes
Nonlinear Solution No
Solver Units Active System
Solver Unit System µmks
TABLE 25
Mirror (A4, B4) > Static Structural (A5) > Loads
Object Name Moment Fixed Support 4
State Fully Defined
Scope
Scoping Method Geometry Selection
Geometry 1 Face
Definition
Type Moment Fixed Support
Define By Components
Coordinate System Global Coordinate System
X Component -0.36117 µN·µm (ramped)
Y Component 0. µN·µm (ramped)
Z Component 0. µN·µm (ramped)
Suppressed No
Behavior Deformable
Advanced
Pinball Region All