• An actuator is a device that produces a motion by converting energy and signals going
into the system. The motion it produces can be either rotary or linear.
• For example opening a valve. In simple terms it is a mover.
Type of Microactuators
• Electrostatics
• Electro-magnet based
• Thermal
• Chemical
• Piezo-electric
• Shape memory alloy (SMA)
• Smart material-based
• Light-induced
• Biological
• Micro valves
• Micro pumps
Actuators

Electrostatic Actuators
A voltage is applied between metal plates to induce opposite charges and coulomb
attraction.
Parallel plate actuators
• The parallel plate actuator is a parallel plate capacitor with one movable plate and
one fixed plate. Due to the opposite charges on the two plates, there is a force of
attraction between the plates.
• The value of the capacitance, C, between the two plates is define as
C = Q/V

Applications
• Material handling. This is universal need for every type of manufacturing
operation.
• Robotics.
• Food and beverage manufacturing
• Agricultural machinery
• Valve operation
• Cutting equipment

Advantages
• Low power dissipations.
• High power density at micro scale.
• Easy to fabricate.
• Can be designed to dissipate no power while exerting a force.