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A Surface Acoustic Wave Passive and Wireless Sensor for Magnetic
Fields, Temperature, and Humidity
Abstract:
In this paper, we report an integrated single-chip surface acoustic
wave sensor with the capability of measuring magnetic field, temperature,
and humidity. The sensor is fabricated using a thermally sensitive
LiNbO3 substrate, a humidity sensitive hydrogel coating, and a magnetic
field sensitive impedance load. The sensor response to individually and
simultaneously changing magnetic field, temperature and humidity is
characterized by connecting a network analyzer directly to the sensor.
Analytical models for each measurand are derived and used to compensate
noise due to cross sensitivities. The results show that all three measurands
can be monitored in parallel with sensitivities of 75 ppm/°C, 0.13 dB/%R.H.
(at 50%R.H.), 0.18dB/Oe and resolutions of 0.1 °C, 0.4%R.H., 1 Oe for
temperature, humidity and magnetic field, respectively. A
passive wireless measurement is also conducted on a current line using,
which shows the sensors capability to measure both temperature and
current signals simultaneously.

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A surface acoustic wave passive and wireless sensor for magnetic fields, temperature, and humidity

  • 1. A Surface Acoustic Wave Passive and Wireless Sensor for Magnetic Fields, Temperature, and Humidity Abstract: In this paper, we report an integrated single-chip surface acoustic wave sensor with the capability of measuring magnetic field, temperature, and humidity. The sensor is fabricated using a thermally sensitive LiNbO3 substrate, a humidity sensitive hydrogel coating, and a magnetic field sensitive impedance load. The sensor response to individually and simultaneously changing magnetic field, temperature and humidity is characterized by connecting a network analyzer directly to the sensor. Analytical models for each measurand are derived and used to compensate noise due to cross sensitivities. The results show that all three measurands can be monitored in parallel with sensitivities of 75 ppm/°C, 0.13 dB/%R.H. (at 50%R.H.), 0.18dB/Oe and resolutions of 0.1 °C, 0.4%R.H., 1 Oe for temperature, humidity and magnetic field, respectively. A passive wireless measurement is also conducted on a current line using, which shows the sensors capability to measure both temperature and current signals simultaneously.