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 Recentdevelopments in temperature
 measurement have encouraged
 researchers to develop
     low-cost
     simple structure
     computerized generic transducers for
      environmental monitoring
     industrial process control.
Acoustic
Temperature
      Transducer


   QUITEVIS, Mary Francis(Enguero)
Agenda
Definition

Principle

Sensor  Technology
Application
ATT?
Device based on the
 characteristics of sound waves
 in a wave- guided media, in
 which sound wave is guided
 physically
Basic Principle
 Speed  of sound is proportional to the
  absolute temperature, which is also
  related to the frequency of the sound
  wave, assuming existence of a constant
  wavelength.
C = f . λ

 v = 331m/s + 0.6m/s/C * T
 Speed   of
 Sound

 358.0 m/s




 343.6 m/s




 330.4 m/s
Status Quo:
                      Problem?
 Predominant     market need for sensors
 that are
     competitively priced due to mature and
      established manufacturing methodologies
     inherently rugged because of the
      implementation of advanced packaging
      techniques
     very sensitive and intrinsically reliable.
Greater Problem?
   Sensors need to be of a
       very small size, not influenced by magnetic fields,
       contribute to emerging market needs of being able
        to support data
       monitoring functions wirelessly
       complementing additional functionalities such as
        low power requirements
       being passively and wirelessly interrogated (no
        sensor power source required).
Solution:
                         ATT
Abilityto fulfill the above market
 requirements
   high performance
   small size

   high reproducibility
Fig. 1. ( а ) Diagram of the experimental setup for detecting
heated bodies placed in biological media; (b) result of
detection of the heated body placed in gelatine.
Distinction
 The  acoustic temperature sensor
  provides temperature measurement
  that is independent of wafer
  emissivity conditions and lamp
  radiation levels.
 It does not require thermal contacts
  on the wafer and is compatible with
  the reactive conditions of rapid
  thermal processing.
Fig. 2. Two-dimensional tomogram of a heated sample placed in
water. The tomogram was obtained by antenna focus scanning
in depth and along the transverse coordinate.
Importance of
Acoustic Techniques
 Used   to monitor the temperature of
  silicon wafers during rapid thermal
  processing from room temperature to
  1000 C with tolerance 5 C accuracy.
 Acoustic transducers are mounted at
  the bases of the quartz pins that
  hold up the silicon wafer during rapid
  thermal processing.
Security System
 Abilityto detect the range of the person
  way from the sensor
 Effective monitoring system enabling the
  knowledge of a moving body’s
  prescence
Telecommunications
           Industry
Largest  volume application -
 accounting for filters and
 oscillators in mobile cell phones
 and base stations.
SAW?
 Surface  acoustic wave devices and
 Function as band-pass filters in both the
  radio frequency and intermediate
  frequency sections of the transceiver
  electronics..
Applications

 Automotive applications (tire pressure
 and oil condition monitoring sensors)
 and industrial and commercial
 applications (temperature in
 ovens, pressure in tanks).
References
 http://www.directindustry.com/prod/dytra
  n-instruments/acoustic-sensors-37504-
  342307.html
 http://www.processindustryinformer.com
  /Editorial-Feature-Archive/WIRELESS-
  TEMPERATURE-SENSING-BY-
  ACOUSTIC-WAVE-SENSORS
 http://www.sensorsportal.com/HTML/DI
  GEST/august_2010/P_656.pdf

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Acoustics

  • 1.  Recentdevelopments in temperature measurement have encouraged researchers to develop  low-cost  simple structure  computerized generic transducers for environmental monitoring  industrial process control.
  • 2. Acoustic Temperature Transducer QUITEVIS, Mary Francis(Enguero)
  • 4. ATT? Device based on the characteristics of sound waves in a wave- guided media, in which sound wave is guided physically
  • 5. Basic Principle  Speed of sound is proportional to the absolute temperature, which is also related to the frequency of the sound wave, assuming existence of a constant wavelength. C = f . λ  v = 331m/s + 0.6m/s/C * T
  • 6.  Speed of Sound 358.0 m/s 343.6 m/s 330.4 m/s
  • 7. Status Quo: Problem?  Predominant market need for sensors that are  competitively priced due to mature and established manufacturing methodologies  inherently rugged because of the implementation of advanced packaging techniques  very sensitive and intrinsically reliable.
  • 8. Greater Problem?  Sensors need to be of a  very small size, not influenced by magnetic fields,  contribute to emerging market needs of being able to support data  monitoring functions wirelessly  complementing additional functionalities such as low power requirements  being passively and wirelessly interrogated (no sensor power source required).
  • 9. Solution: ATT Abilityto fulfill the above market requirements  high performance  small size  high reproducibility
  • 10. Fig. 1. ( а ) Diagram of the experimental setup for detecting heated bodies placed in biological media; (b) result of detection of the heated body placed in gelatine.
  • 11. Distinction  The acoustic temperature sensor provides temperature measurement that is independent of wafer emissivity conditions and lamp radiation levels.  It does not require thermal contacts on the wafer and is compatible with the reactive conditions of rapid thermal processing.
  • 12. Fig. 2. Two-dimensional tomogram of a heated sample placed in water. The tomogram was obtained by antenna focus scanning in depth and along the transverse coordinate.
  • 13. Importance of Acoustic Techniques  Used to monitor the temperature of silicon wafers during rapid thermal processing from room temperature to 1000 C with tolerance 5 C accuracy.  Acoustic transducers are mounted at the bases of the quartz pins that hold up the silicon wafer during rapid thermal processing.
  • 14.
  • 15. Security System  Abilityto detect the range of the person way from the sensor  Effective monitoring system enabling the knowledge of a moving body’s prescence
  • 16. Telecommunications Industry Largest volume application - accounting for filters and oscillators in mobile cell phones and base stations.
  • 17. SAW?  Surface acoustic wave devices and  Function as band-pass filters in both the radio frequency and intermediate frequency sections of the transceiver electronics..
  • 18. Applications  Automotive applications (tire pressure and oil condition monitoring sensors) and industrial and commercial applications (temperature in ovens, pressure in tanks).
  • 19.
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  • 22. References  http://www.directindustry.com/prod/dytra n-instruments/acoustic-sensors-37504- 342307.html  http://www.processindustryinformer.com /Editorial-Feature-Archive/WIRELESS- TEMPERATURE-SENSING-BY- ACOUSTIC-WAVE-SENSORS  http://www.sensorsportal.com/HTML/DI GEST/august_2010/P_656.pdf