AG Associates is one of the most famous RTP equipment manufacturers. Many Integrated Chip companies, R&D centers, Institutes all over the world have been using AG Heatpulse Systems. We are the exclusive licensed manufacturer of AG Associates Heatpulse 610 Rapid Thermal Processor. We are manufacturing the AccuThermo AW 410, AccuThermo AW 610, AccuThermo AW 810, AccuThermo AW 820, AccuThermo AW 830 , which are AtmosPress Rapid Thermal Processors and AccuThermo AW 610V, AccuThermo AW 820V, AccuThermo AW 860V , which are Vacuum Rapid Thermal Processors. Compared with traditional RTP system, our AccuThermo AW RTPs have the following key advantages.
Unique process uniformity,system stability and consistent process cycle repeatability;
Incomparable integrated process control system;
30 years proven product with thousands of customer-based installation;
Customer-installation design;
2 to 4 weeks lead time guarantee;
Patented Extended Range Pyrometer for precise temperature measurement;
Advance AW Software with Power Summary Function;
Much easy ERP Pyrometer calibration
Real time GUI display;
Programmed comprehensive calibration and analysis;
Precise time-temperature profiles tailored to suit specific process requirement;
Closed-loop temperature control with ERP Pyrometer or thermocouple temperature sensor;
Fast heating and cooling rates unobtainable in conventional technologies;
Elimination of external contamination;
Small footprint and energy efficiency
We also provide spare parts and professional technical service and support for AG Associates Heatpulse 210, Heatpulse 410, Minipulse 310, Heatpulse 610, Heatpulse 610 I desktop manual Rapid Thermal Annealing systems for end users all over the world. Please e-mail ( ) us for more information.
We do not sell any used/refurbished AG Heatpulse 210,AG Heatpulse 410,AG Heatpulse 610 any more due to the linked reasons.
sales@ag-rtp.com
1. AccuThermo AW 610 Rapid Thermal Anneal,Original AG Associates Heatpulse 610 Page 1 of 1
Home | Parts | Service | RTA RTP RTO RTN Articles | Contact Us | Site Map
AccuThermo AW 410 | AccuThermo AW 610 | AccuThermo AW 810 | AccuThermo AW 820 | AccuThermo AW 830 | AccuThermo AW 610V | AccuThermo AW
Home AccuThermo AW 610 Atmosphere RTA RTP
Equipment
AccuThermo AW 410
AccuThermo AW 610 AccuThermo AW 610 is a desktop rapid thermal processor for 2 to 6 inch wafer, which uses high-intensity, visible radiation to heat single wafer for shor
AccuThermo AW 810 at precisely controlled temperatures. These capabilities, combined with the heating chamber's cold-wall design, superior heating uniformity advanced te
AccuThermo AW 820 control technology and AW 900 new software, provide significant advantages over conventional furnace processing and conventional RTP systems.
AccuThermo AW 830
AccuThermo AW 610V
AccuThermo AW 820V
AccuThermo AW 860V
Parts
Heatpulse 210 Spare Parts
Heatpulse210 Manual
Minipulse 310 Spare Parts
Minipulse310 Manual
Heatpulse 410 Spare Parts
Heatpulse410 Manual
Heatpulse 610 Spare Parts
Heatpulse610 Manual
Heatoulse 610 I Spare
Parts
Heatpulse610I Manual
Service
Heatpulse 210 Service
Heatpulse210
Specification.
Refurbishment
Heatpulse210 Upgrade 1.1 Wafer Size 4 inch to 6 inch configuration(Option 2 inch -4 inch)
Minipulse 310 Service 1.2 Single Wafer Process.
Minipulse310 1.3 Aluminum chamber with water cooling and gold plating for better uniformity
Refurbishment 1.4 Extended Range Pyrometer(ERP) for high temperature sensor
Minipulse 310 RTA 1.5 Isolated Quartz Tube for clean environment for wafer
Upgrade 1.6 Bottom and top heating with Radiation heating lamp module
Heatpulse 410 Service 1.7 Precise Temperature/Time control, Temperature measuring precision b 1b¤ C.
Heatpulse 410 1.8 Multiple cycle processing capability
Refurbishment
AG Associates 1.9 Steady Temp Range: 600b¤ C to 1250b¤ C for ERP pyrometer sensor(Optional), 100b¤ C to 800b¤ C for Thermocouple(Can not use thermoc
Heatpulse410 Upgrade to 750b¤ C for Si wafer due to the reaction between Si
Heatpulse 610 Service wafer and thermocouple).
Heatpulse610 1.10 Steady state process time 0 to 3000 sec programmable
Refurbishment 1.11 Temp Ramp-up Speed: 10b¤ C to 100b¤ C for wafer, Programmable
AG 610 Rapid Thermal
1.12 Ramp down speed 10b¤ C - 100b¤ C for wafer,Non-Progammable.
Process Upgrate
Heatpulse 610 I Service 1.13 Pentium Computer with 17¡± LCD Monitor, standard keyboard and mouse.
Heatpulse610I 1.14 Software calibration and easy to be done.
Refurbishment 1.15 More functions and I/O hardware ¡°exposed¡± for easier maintenance and trouble shooting.
AG 610I Rapid Thermal 1.16 It is easy to edit recipe with GUI and graph display.
Anneal Upgrade 1.17 Save all process data on the computer hard disk.
RTA RTP RTO RTN 1.18 A/D and D/A precision is 14 to 16 bits.
Articles 1.19 Detect in process and with color curve displayed on the screen.
Rapid Thermal Process 1.20 Software has power summary function to detect either lamp failure or sensor failure.
Atmospheric Rapid 1.21 Software watch dogto eliminate machine damage duo to the computer locks up or freeze.
Thermal Processors
Vacuum Rapid Thermal
Processors
Why not sell used
Hearpulse 210/410/610
RTA
Temperature Measured vs.
Actual
Contact Us
Site Map
Home | Equipment | Parts | Service | RTA RTP RTO RTN Articles | Contact Us | Site Map
AG-RTP is owned by Allwin21 Corp.
www.ag-rtp.com is powered by eCommerce Website Builder (Sell Products Online)
http://www.ag-rtp.com/rapid-thermal-processor-accuthermo-aw-610.htm 12/16/2012
