Selecting the right Silicon Wet Etching equipment is critical for supporting your process. Modutek provides a full range of highly reliable semiconductor manufacturing equipment and wet bench solutions. Visit www.modutek.com
2. Semiconductor manufacturing processes involves different
processing steps that require fabrication facilities to utilize the
right processing equipment. So, it’s vital for a fabrication
facility to choose equipment that supports all their application
and meets their requirement.
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3. At Modutek Corporation, we carry a wide range of high
quality semiconductor manufacturing equipment and other
reliable products that suit all silicon wet etching applications.
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4. QUARTZ BATHS
Quartz baths are designed for safety and reliability. These
baths support a variety of etching, cleaning and stripping
processes including SC1 cleaning, RCA clean and SPM clean.
Made of semiconductor grade, flame polished quartz, they
come in a variety of sizes to meet your requirement.
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5. TEMPERATURE CONTROLLED CIRCULATORS
Temperature controlled circulator units feature a compact
design and stainless steel fluid paths for a high level of safety
and reliability. With a heating capacity of 1500 W, these
circulators are suitable for etching, plating and developing
applications and constant temperature baths.
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6. QUICK DUMP RINSERS
The unique specialty of quick dump rinsers is that they
provide efficient process rinsing without particle entrapment
and reduced use of de-ionized water. Other features include
bottom filling, well-located D.I water spray nozzles and N2
agitation.
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7. TEFLON TANKS
The modular design of Teflon tanks is easy to integrate into
new silicon wet etching stations or incorporate into existing
stations. This equipment is available in different sizes for
single or double capacity and they support KOH Etching and
TMAH applications.
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8. Visit www.modutek.com to find a full range of
semiconductor manufacturing and silicon wet
etching products.
Call: 408 362-2000
E-mail: modutek@modutek.com
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