BioMEMS Market and Technology 2020

From Technologies to Markets
© 2020
BioMEMS
MEMS devices for
healthcare applications
Market and Technology
Report 2020
Sample

22BioMEMS – Market & Technology 2020 | Sample | www.yole.fr | ©2020
BIOMEMS APPLICATIONS TRACKED BYYOLE (1/2)
Pressure sensors
Pressure sensors for blood monitoring
disposable
Pressure sensors for blood
monitoring equipment
Pressure sensors for
respiratory equipment
Pressures sensors for smart
inhalers
Others
Invasive blood pressure monitoring devices
Non-invasive blood pressure equipment
(cuff-based)
Hospital ventilators,
Home respiratory equipment (i.e.
CPAP,…)
Inhalers for delivery of medication
dose
Anaesthesia systems,
Nebulizer,
Infusion pumps,
Dialysis equipment,…
Si Microphones
Hearing aids Cochlear implants
Non-invasive hearing aid devices prescribed or
over-the-counter, medical hearables
External devices linked to implant for people
suffering from deafness
Inertial devices
Accelerometers for pacemakers Other accelerometers
IMU for activity
tracking
Other IMU
Implanted devices for CRT, CRT-D, defibrilators Medical wearables for fall detection, smart patches,…
Fall detection, activity
tracking
Pain monitoring, rehabilitation

BIOMEMS APPLICATIONS TRACKED BYYOLE (2/2)
Optical MEMS
Optical MEMS for Medical
Microspectrometers
HMDs
Microfluidics
Microfluidic chip for
Clinical & veterinary
diagnostics
Microfluidic chip for Point
of Care diagnostics
Pharmaceutical and life
science research
Analytical devices
Industrial and
environmental testing
xxx xxx xxx xxx xxx
Thermopiles
Thermometers
Spot thermometers, medical wearables/hearables
Microdispensers
Micro-nozzles Micropumps Microneedles
Spray and inhaler delivery
Micro-pumps and valve for
drug delivery and liquid
handling
Drug delivery through smart
patches, fluids collection…
Flowmeter
Flow meter
Ventilation, infusion pumps, delivery
Emerging MEMS
Humidity & gas sensors Neural implants
Humidity for medical
Neurological tips / probes
implanted
Micromachined ultrasound technology
Ultrasound probes IVUS
Medical ultrasonography probes for
carts, portable or handheld systems
Intravascular catheters

44
• Glossary and definition 2
• Table of contents 6
• Report objectives 8
• Report scope 9
• Report methodology 10
• About the authors 12
• Companies cited in this report 13
• What we got right, What we got wrong 14
• Executive summary 18
o Summary of the report
• Context 48
o Medical technology market
o Classification of medical devices and IVD tools
o Healthcare industry trends
o Healthcare time to market comparison
o Medical device and consumer healthcare concept
o Merger and acquisition activity
• Covid-19 Impact 80
o Different impact in the medical field
o Different market dynamics by BioMEMS devices
o Fostering telehealth
o Covid-19 outbreak impact on our market forecast
BioMEMS – Market & Technology 2020 | Sample | www.yole.fr | ©2020
TABLE OF CONTENTS
Part 1/2
• Market forecasts 90
o BioMEMS market data and forecasts 2019-2025 (value and units) by BioMEMS
devices
o BioMEMS market dynamics on the forecast period 2019-2025 and related
analysis
o BioMEMS market dynamics by sensors
o Comparison with the last BioMEMS report
o BioMEMS market data and forecasts 2019-2025(value) at the segment level
• Market trends 105
o Pressure sensors
o MEMS microphones
o Inertial MEMS
o Microfluidic chips
o Microdispensers
o Thermopiles
o Flowmeters
o Micromachined Ultrasound Transducers
o Emerging BioMEMS
o Optical MEMS
o Gas and humidity sensors

TABLE OF CONTENTS
Part 2/2
• Market shares and supply chain 219
o TOP BioMEMS market
o BioMEMS players market shares
o BioMEMS company - sensor breakdown
o MEMS foundries and offering
o Supply chain and business models
• Technology trends 239
o Technology trends by devices
o Technology challenges for the healthcare sector
o Technologies roadmap
o Focus on emerging MEMS and related challenges
• Outlooks 262
o Conclusions / incl. 2-3 pages Take away
o What is coming next? What could happen?
o Key parameters to look at? Metrics?
o Other sub title
• Related reports 266
• Bibliography 267
• How to use our data? 268
• Yole Corporate Presentation 269

66
• The BioMEMS report is a comprehensive overview of MEMS devices including pressure sensors,
microphones, inertial MEMS, microfluidic chips, microdispensers, optical MEMS, MUT flow meters,
gas and humidity sensors integrated or used in the life science and healthcare domains
• It provides the latest main information and key facts of the BioMEMS industry
• It forecasts the BioMEMS market from 2019 to 2025 with graphics and market trends explanations
• The report helps to understand the dynamics of the market and the competitive landscape for
strategic decision making
• It enables readers to understand the challenges for MEMS companies who want to serve the
healthcare sector at the economic and technological level
REPORT OBJECTIVES

77
The objectives of this report are to provide:
oA global view about future of BioMEMS, sensors and actuators, including
microfluidic chips
oAn understanding of the MEMS, sensors, and actuators markets and applications
oMEMS and sensor players’ dynamics and ranking
oMEMS market data in $M, units for 2019 - 2025
oInformation on MEMS technology trends
oA presentation of MEMS game-changers and industry trends
SCOPE OFTHE REPORT
Yours needs are
out of the report’
scope?
Contact us for a custom:

8
REPORT METHODOLOGY
Yole’s methodology for building market forecasts is different from that of other market research
companies:
o Our approach is to build a model where all the data from product shipments, module sales, sensor production and
market share of players is collectively linked with detailed assumptions
We collect data from several sources, including:
o Primary data from direct interviews/visits with key players
o Direct contacts and surveys with equipment & materials suppliers
o Direct cost analysis from teardown reports conducted by System Plus Consulting
o Comparisons between publicly-available secondary data
As a result, we can present synthetic market metrics intrinsic to a specific industry:
o The main advantage of our approach is the delivery of homogeneous data, ranging from unit shipments and system
sales to players’ market share
o We continuously update the market information presented in this report

METHODOLOGIES & DEFINITIONS
Market
Volume (in Munits)
ASP (in $)
Revenue (in $M)
Yole’s market forecast model is based on the matching of several sources:
Information
Aggregation
Preexisting
information

10
Sebastien Clerc
Sébastien Clerc is a Technology & Market Analyst in Microfluidics, Sensing & Actuating at Yole Développement (Yole). As part of the Photonics &
Sensing team, Sébastien has authored a collection of market and technology reports dedicated to microfluidics and other micro-devices for both
market segments: medical (including diagnostics, pharmaceutical, biotechnology, drug delivery, medical devices) and industrial (including
environment, agro-food). At the same time, he is involved in custom projects such as strategic marketing, technology scouting and technology
evaluation to help academic and industrial players in their innovation processes. Thanks to his technology & market expertise, Sébastien has
spoken in more than 20 industry conferences worldwide over the last 4 years. Sébastien Clerc graduated from Grenoble Institute of Technology
(Grenoble INP - Grenoble, France) with a Master’s degree in Biomedical Technologies. He then completed his academic studies with a Master’s
degree in Innovation and Technology Management in the same institute.
Email: sebastien.clerc@yole.fr
Jérôme Mouly
Jerôme Mouly serves as a Senior Technology & Market Analyst & Business Developer specialized in microtechnologies for inkjet & bioMEMS
sensors. Since 2000, he has participated in more than 100 marketing and technological analyses for industrial groups, start-ups and institutes.
Previously, Jerome was involved in a support action for value creation of smart miniaturized systems research projects at Yole Finance Innovation,
part of Yole Développement. Jérôme holds a Master of Physics from the University of Lyon (France).
Email: Jerome.mouly@yole.fr
ABOUT THE AUTHORS
Biographies & contacts

1111
10X Genomics,Abaxis,AEMtec,Affymetrix,Agilent Technologies,Amazon,Amphenol,Amplifon,Analog Devices,
Apple,Azbil, BioFire (Biomérieux), Biotronik, Boehringer Ingelheim, Bosch Sensortec, Boston Scientific, Butterfly
Network, Capital Bio, Cepheid (Danaher), CiDRA Precision Services, Cochlear, Demant, Excelitas, Facebook, Food
& Drugs Administration (FDA), First sensors, Fitbit, Fraunhofer, GN Resound, Google, Heimann Sensors, Hitachi,
Honeywell, Illumina, IMEC, IMT MEMS, IMTAG, Invenios, IonTorrent, Knowles, Medspray, Medtronic, Melexis, Merit
Sensors, Micro Liquid, Microfluidic ChipShop, Micronit Technologies, Microsoft, MiniFab (Schott), Murata, NXP,
Omron, Oxford Nanopore, Perkin Elmer, Philips Innovation Services, Quidel Corp., Renesas, Robert Bosch, Roche
Diagnostics, RogueValley Microdevices, Sensirion, Siargo, Siemens, Silex Microsystems, Sivantos, Si-Ware, Sonova,
Sony, Starkey, STMicroelectronics, Stratec Consumables,TDK,TDK Invensense,TDKTronics Microsystems,TE
Connectivity,Teledyne Dalsa,Teledyne Micralyne,Thermofisher Scientific,ThinXXS,Tong Hsing Electronic
Industries,TSMC,Withings, X-Fab,
And many others…
COMPANIES CITED IN THIS REPORT

CLASSIFICATION OF MEDICAL DEVICES AND IVD TOOLS
Patient
Monitoring
IVD
Testing
Medical
Imaging
Patient
Care
Drug
Delivery
Pharmaceutical
Research
Microtechnologies find many applications in Healthcare

1313
A convergence of factors explains the transformation of healthcare happening now. These
factors are inextricably linked together:
HEALTHCARE MEGATREND:THE CHANGES ARE BENEFICIALTO THE MEMS INDUSTRY
IT Environment and
telecommunication
infrastructure –
Mobile healthcare
and data exploitation
Advanced sensors
and
microtechnologies –
Ready for wearables
and connected
devices
Cost pressure on
healthcare – Need to
investigate new
solutions while
chronic disease
prevalence increases
HEALTHCARE
TRANSFORMATION

COST PRESSURE ON HEALTHCARE
Health
Severe
illness
Fitness & wellness Chronic diseases
Complex chronic
disease
Acute care
10x 100x 1000x1x
Prevention - monitoring
Monitoring & care
Keep patient at home
Possible un-diagnosed people Possible failure in self-monitoring

TIME TO MARKET
For medical devices, 2 times to consider – Development and approval times (2/2)
Medical device development
Medical device
development
Pre-clinical
engineering
development
Class I
Clinical trials
Class II
Classe
III
510(k)
approval
Reimbursement
assignment
~1 year ~1 - 3 years
~1 – 9 months
~1 – 3 year
PMA
approval
~9 – 36 months
510(k) exempt
Longer development phase for sensor
integrated in medical devices:
• Needs for bio-compatible materials
• Sensor accuracy (compatible with IEC
requirements)
• Increased sensor lifetime (requirement per
applications)
Medical device production timeline

AT THE SENSOR LEVEL,WHO IS SERVING THESE MARKETS?
Regulated systems
Not regulated system
Cost sensitive sensor (~1$)
Higher sensor cost(~100$)
Medical devices
• Interventional
• Diagnostics
• Monitoring
Consumer healthcare
• Blood pressure monitors
• Wearables
• Fall detection
Consumer devices
• Fitness and wellness wearables
MEMS companies
serving medical and
industrial sector
mainly
MEMS companies
serving consumer
sector mainly
Advantages:
• Volumes
• Cost
Bottleneck:
• Possible low accuracy
Advantages:
• High reliability / high accuracy
• Regulation friendly
Bottleneck:
• Cost
• Small volumes

17
COVID-19 IMPACT – DIFFERENT DYNAMICS BY BIOMEMS DEVICES
The positive
and negative
impacts on
short term
market
dynamics from
2019 to 2020.
MEMS devices
+90%
+50%
-20%
0%
Thermopiles
YoY 90.5%
Micromachined ultrasound
transducer
YoY 40.6%
Optical MEMS
YoY 23%
Microfluidic chips
YoY 8.3%
MEMS microphones
YoY 8%
IMU
YoY -19.6%
Accelerometers
YoY -10.7%
Pressure sensors
YoY 7.3%
Flowmeters
YoY 5.1%
Gas and
humidity sensors
YoY 4.9%
Growth rate 2019-2020
(in units)
Microdispensers
YoY 7.5%

18
COVID-19 IMPACTS
Pressure on healthcare systems – fostering telehealth
• Crisis are always leading to innovation, or accelerating adoption of newly developed products and services. Telehealth is one of
the innovations that has been revealed as a key requirement during this Covid-19 pandemic:
• It has already shown interest from patients for ease of use and from healthcare systems to lower costs.
• Covid-19 pandemic request distancing and lower contact possible. It accelerates the interest for telehealth.
Before infections –
no prescriptions
• Monitoring at home /
everywhere
• Mainly using wearables and
thermometers to monitor
changes in body temperature
Infection suspicion /
diagnostics
• Point of care devices
(ultrasound PoC, diagnostic
test) at the patient side / GPs
office
• Tele consultation
Patient infected
•Severe infections: patients at
hospitals, monitoring with
body patches
•Non-critical infections:
patients at home to avoid
contacts, remote monitoring
with body patches, tele-
transmited data, tele-
consultation
Post infection
• Post severe infection: patient
monitored with their vital
signs – data tele-transmited
• Non-critical: own surveillance
possible with wearables
Best scenario using wearable and Point of care systems

1919
BIOMEMS AND MEMS FOR MEDICAL MARKET
Global
BioMEMS and
MEMS for
medical
market is
expected to
grow at a
CAGR2019-2025
of 9,2% in
value
BioMEMS – MEMS devices for Healthcare applications| Report | www.yole.fr | ©2020
Impact of Covid-19 with combined positive and negative impacts
are expected to show a 12,4% growth from 2019 to 2020 (value)
*Microfluidics non-silicon: Polymer, glass

BIOMEMS MARKET DYNAMICS – 2019-2025 FORECAST BYVALUE
$3,034M
$273M
Pressure sensors
$100M
CAGR13.6%
Silicon microphones
Accelerometers
IMU
Optical MEMS
Thermopiles
$5,239M
CAGR 9.5%
$341M
CAGR 3.7%
Microfluidics silicon
Flowmeters
$83M
CAGR
5.4%
$56M
$60M
Microdispensers
Micromachined ultrasound
Gas and humidity sensors
$41M
CAGR
29%
2019
$3.7B
2025
$6.3B
Microfluidics non-silicon
$282M
CAGR 13.4%
$132M
$1.3M
$4.1M
$5.5M
$9M
$44M$46M
$48M
$70M
CAGR
6.9%
$9,3M
CAGR 9.2%
$22M
CAGR 32.2%
$1.7M
CAGR 4.5%
$59M
CAGR
3.3%
$74M
CAGR
4.7%

2121
MARKET TRENDS BY BIOMEMS DEVICE
Market trends:
set of slides
by bioMEMS
device.

2222
BIOMEMS MARKET SHARE 2019 – SILICON CHIPS
TOP 5
BioMEMS
players are
representing
nearly half the
global
BioMEMS
market.
$676.87M
2019

23
TOP SILICON BIOMEMS PLAYERS – SENSOR OFFER BREAKDOWN
In the
BioMEMS
market, a vast
majority of
MEMS
companies are
providing just
one sensor on
healthcare
market.
0%
20%
40%
60%
80%
100%
TEConnectivity
Amphenol
BoehringerIngelheim
Abbott
Honeywell
Omron
Affymetrix
Knowles
NXP
Murata
Excelitas
Sensirion
Merit
STMicroelectronics
Melexis
Azbil
AnalogDevices
TDK
IonTorrent
BoschSensortec
HeimannSensors
Siargo
ButterflyNetwork
OxfordNanopore
Illumina
Renesas
Si-Ware
Hitachi
Medspray
Others
Micromachined
Ultrasound Transducers
Microdispensers
Gas sensors
Flowmeter
Microfluidics
PIR, Thermopiles,
Thermodiodes
Optical MEMS
Inertial MEMS
Silicon Microphones
Pressure sensors

24
BUSINESS MODELS AND REVENUE* FROM MEMS COMPANIES IN 2019**
* Silicon bioMEMS revenue only: glass and polymer
microfluidics not considered here
** Non-exhaustive list – top companies only

2525
Implantable
Ingestible
MEDICAL DEVICES – USE CASE AND TECHNICAL CHALLENGES (1/2)
From hospital
to anywhere
care, 2 major
development
ways: invasive
and non-
invasive ways.
Time
Hospital and
Lab Care
Home Care
Point of
care
Anywhere
Care
Medical
wearables
Mobility
Medical requirements
Only for chronic diseases
and for medical safety reasons
Ease of use
Near Patient
Quality
of Life
Miniaturizationandintegrationlevel
Ventilators
Anaesthesia
Kidney dialysis
…
CPAP – sleep apnea
Blood pressure homecare
Portable oxygenator
…
Smartwatch
Hearables
Smartpatches
…
Pacemakers
Implanted neurostimulators
…
Smart pills
…

MEDICAL DEVICES – USE CASE AND TECHNICAL CHALLENGES (2/2)
Key criteria
Hospital / Lab
care
Homecare /
Point of care
Medical
wearables
Implantable Ingestible
Miniaturization
Low power
consumption
Lifespan
Measurement
accuracy
Biocompatibility
Connectivity
Cost-pressure
Embedded
intelligence
= High requirement
= Requirement
= Not key requirement / Not applicable

2727
Butterfly Network has unveiled its first probe in 2017
and the is the first handheld system for ultrasound
medical imaging based on MEMS technology.
Butterfly has chosen CMUT (capacitive micromachined
ultrasonic transducer technology) for its probe.
Butterfly has shown a 300mm wafer size to produce
CMUT chip (between 70 to 85 single chip on a wafer),
estimating that foundry partner isTSMC inTaiwan.
The specific approach of Butterfly network is a MEMS
and CMOS wafer bonded together to get the
transducer and ASIC together.
ULTRASONIC TRANSDUCERS TECHNOLOGY
First MEMS on 12-inch wafer?
Butterfly Network presentation of the
300mm wafer for CMUT chip
From Butterfly IQ CMUT die report;
Source: System Plus Consulting
Butterfly IQ probe and chip
details ; Source: Butterfly
Network

TECHNOLOGY TRENDS
Point-of-Need instrument type roadmap
Level of
portability
Time2000 2010 2020 2030
Handheld
Benchtop
Large benchtop
Light benchtop
Handheld
Instrument-free
consumable
Test complexity
Increasingly complex tests
required increasingly
complex instrumentation
Now companies miniaturize
this instrumentation
Integration of silicon parts in the consumable
bring intelligence, and lead to instrument
miniaturization and simplification

29
TECHNOLOGY TRENDS
Different detection methods for microfluidic products
The detection of
analytes is mainly
done optically
and
electrochemically
BioMEMS – MEMS devices for Healthcare applications| Report | www.yole.fr | ©2020
Microfluidic tests
Optical detection
(microscopy,
fluorescence, etc.)
Electrochemical
detection
Acoustic detection
Combination of
detection methods
Existing detection methods
Emerging detection methods
Acoustic detection platforms are now reaching commercialization.

30
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SalesTeam
for more
information
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SalesTeam
for more
information
Artificial Intelligence for
Medical Imaging 2020
Point-of-Need 2020 –
Including PCR-Based Testing
Thermal Imagers and Detectors
2020 – COVID-19 Outbreak
Impact – Preliminary Report
YOLE GROUP OF COMPANIES RELATED REPORTS
Yole Développement

31
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SalesTeam
for more
information
31
Contact our
SalesTeam
for more
information
Status of the MEMS
Industry 2019
MedicalWearables: Market
and TechnologyTrends 2019
Status of the Microfluidics
Industry 2019
Yole Développement

32
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SalesTeam
for more
information
32
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SalesTeam
for more
information
Butterfly Network iQ
CMUT Sensor
System Plus Consulting

33
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