MEMS are tiny integrated devices that combine mechanical and electrical components on a micro scale. They are able to sense, control and actuate on a micro scale but generate effects on a macro scale. MEMS utilize various fields including design, engineering, materials science and electrical engineering. Current MEMS devices include sensors in airbags, inkjet printer heads, and blood pressure sensors. MEMS are fabricated using deposition, patterning, and etching processes and are used in applications such as automotive, medical, military, and consumer electronics.

1. MICRO ELECTRO MECHANICAL
SYSTEMS [MEMS]
BY
ABHIJITH C
S7 MECHATRONICS

2. What is MEMS???
• MEMS is a process technology used to create
tiny integrated devices or systems that
combine mechanical and electrical
components.
• These devices (or systems) have the ability to
sense, control and actuate on the micro scale,
and generate effects on the macro scale.

3. • The interdisciplinary nature of MEMS
utilizes: Design, engineering and
manufacturing. Integrated circuit fabrication
technology Mechanical engineering,
Materials science, Electrical engineering,
Chemistry and chemical engineering, as well
as Fluid engineering, Optics, Instrumentation
and packaging.

4. • Current MEMS devices include
accelerometers for airbag sensors, inkjet
printer heads, computer disk drive read/write
heads, projection display chips, blood pressure
sensors, optical switches, microvalves,
biosensors and many other products that are all
manufactured and shipped in high commercial
volumes.

5. MEMS Components...

6. MEMS Classification...

7. Fabrication of MEMS
Deposition Patterning Etching
Physical Chemical Lithography Dry Wet
Photolithography
Electron beam lithography
Ion beam lithography
Ion track technology
X-ray lithography.

8.  Deposition–
 Physical deposition :
Physical deposition consists of a process in which a material is removed from a
target, and deposited on a surface
 Chemical deposition :
Chemical deposition techniques include chemical vapor deposition, in which a
stream of source gas reacts on the substrate to grow the material desired.
 Patterning –
• Patterning of mems is the transfer of a pattern into a material.
• Lithography is a widely used process in patterning of mems .
• Examples of lithography are– Photolithography, Electron beam lithography, Ion
beam lithography, Ion track technology, X-ray lithography.

9. Etching
Wet Etching :
• Wet chemical etching
consists in selective removal
of material by dipping a
substrate into a solution that
dissolves it.
• The chemical nature of this
etching process provides a
good selectivity
Dry Etching :
• Dry etching can be done in
three ways and they are –
a) Reactive ion etching (RIE)
b) Sputter etching
c) Vapor phase etching.

10. • Application of photo resist
• Optical exposure to print an image of the mask
onto the resist
• Immersion in an aqueous developer solution to
dissolve the exposed resist
LITHIOGRAPHY:

11. • Materials are the basic things required to develop
micro sensors
• Metals
• Polymers
• Ceramic materials
• Semiconductors
• Composite materials
MATERIALS FOR MEMS:

12. • Process of shaping silicon or other materials to
realise 3-D mechanical in miniature form and
the mechanical devices that are compatible
with the micro electronic devices
MICRO MACHINING TECHNOLOGY:

13. • BULK micromachining:
• SURFACE micromachining:
• LIGA process:
TYPES OF MICROMACHINING:

14. Applications of mems

15. • A MEMS is a device that can be implanted in the
human body.
• MEMS surgical tools provide the flexibility and
accuracy to perform surgery.
• In medicine
• Biomems
• Bio-mems are used to refer to the science and
technology of operating at the micro scale for
biological and biomedical applications.

16. • In automotives :
• As gyroscope:
Heavy use of mems is found in air bag
systems, vehicle security system, inertial
brake lights, rollover detection, automatic
door locks etc.
Inexpensive vibrating structure gyroscopes
manufactured with mems technology have
become widely available. These are
packaged similarly to other integrated
circuits and may provide either analog or
digital outputs.

17. • In microphones:
Micro-electro mechanical system (MEMS) technology
help projectiles to reach their targets accurately.
• In military :
The mems microphone also called as
microphone Chip is widely used in the
present day communication world.

18. • In accelerometers:
• MEMS accelerometers are widely used in cars for
airbag deployment and in consumer electronics
applications such as smart phones, gaming devices for
sensing motion
• In sensors:
• A sensor is a device which receives and responds
to a signal when touched.A micro sensor reaches a
significantly higher speed and sensitivity compared
with microscopic approaches.

19. • Apart from these applications mems are also used in many fields in the present
world
• They are used to detect earth quakes, in gas shut off, in shock and tilt sensing
• Inkjet printers and micro scanners also involve the use of mems.
• Mems is used in Optical switching technology in which, switching technology and
alignment for data communications is done.

20. Advantages and disadvantages
 Minimize energy and
materials.
Improved
reproducibility.
 Improved accuracy and
reliability.
 Increased selectivity
and sensitivity.
 Farm establishment
requires huge
investments.
 Micro-components are
costly compared to
macro components.
 Design includes very
much complex
procedures

21. Conclusion
• This enabling technology
promises to create entirely new
categories of products.
• Mems will be the indispensible
factor in advancing technology
• As with all emerging
technologies had been
predicted to revolutionize
technology and our lives

23. Queries???