The EddyCus® TF lab 4040 is designed for contactless, real-time measurement of sheet resistance and thickness of thin films. It can measure both low and high conductive thin films on materials like glass, wafer, plastics or foils. Measurements are obtained using easy-to-use EddyCus® TF lab control software connected to a tablet or notebook. The device allows single-point sheet resistance measurements of conductive layers and determination of layer thicknesses in multilayer systems.

1. DATA SHEET - EddyCus® TF lab 4040
Measuring Sheet Resistance & Thickness
The EddyCus® TF lab 4040 (Thin-Film)
4040 is designed to conduct real-time
is especially designed for contactless
testing of high sensitive thin-films,
real-time
concealed
thickness
and
sheet
conductive
layers
and
resistance determination of low and
encapsulated layers in the industrial
high conductive thin-films on glass,
conditions. The device also allows to
wafer, plastics or foils as well as for
determine
sheet
wall thickness measurements of metal
multilayer
systems.
foils and sheets. The desktop device is
measurements are obtained using the
applied
sheet
easy-to-use EddyCus® TF lab control
resistance measurement and for quick
software, which is connected to a
non-contact film characterization in
tablet or a notebook via WLAN or LAN
laboratories, R&D centers and Quality
SURAGUS GmbH
Maria-Reiche-Str. 1
01109 Dresden
Germany
with the device.
assurance
for
single-point
departments
manufacturing firms.
EddyCus®
resistance
The
in
real-time
E-Mail: info@suragus.com
Phone: +49 (0) 351 273 598 01
Fax:
+49 (0) 351 329 920 58
www.suragus.com
www.sheet-resistance-measurement.com
Testing of
conductive layers.
of
TF lab
Certified
ISO 9001

2. DATA SHEET
EddyCus® TF lab 4040 - Measuring Sheet Resistance & Thickness
EddyCus® TF lab 4040
Eddy current sensor
Sheet resistance measurement
on request
Substrate thickness measurement
400 x 400 mm²
Substrate area
Max Sample thickness
(defines distances)
5 / 15 / 25 / 45 / 60 mm
(defined by the thickest sample)
Sheet resistance range
0.001 – 10 Ohm/sq < 2 % accuracy
10 – 100 Ohm/sq < 3 % accuracy
100 – 1,000 Ohm/sq < 5 % accuracy
In accordance with sheet resistance
Thickness measurement of thin-films (e.g. cooper)
760 / 660 / 310 mm (w/h/d)
Device dimension
20 kg
Weight
CHARACTERIZATION MODE
SOFTWARE AND HANDLING

Real time depiction of sheet resistance or thickness

Collection of data sets, saving and data export function
[Ohm/sq]

Single-point sheet resistance measurement of
conductive layers on non-conducting substrates


Software shows immediately sheet resistance, thickness
Sheet resistance measurement of multilayer systems on
and substrate thickness
request (feasibility study)

Layer and substrate thickness monitoring [nm]
THIN-FILMS CHARACTERIZATION

Architectural glass

Packaging materials

Touch screens and flat monitors

LED/OLED & Smart-Glass applications

Semiconductor

De-icing and heating applications
SURAGUS GmbH | Maria-Reiche-Str. 1 | D-01109 Dresden | Germany | Phone +49 351 273 598 - 01 | Fax + 49 351 329 920 - 58 | info@suragus.com | www.suragus.com