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Double Patterning （4/2 update)

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Double Patterning Wai-Shing Luk
Background ,[object Object],[object Object]
光刻过程 ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]
Sub-wavelength Lithograph ,[object Object],[object Object],[object Object],[object Object],[object Object]
What is Double Patterning? ,[object Object]
TBUF_X16, Layer 9 ,[object Object]
TBUF_X16, Layer 11
SDFFRS_X2 Layer 9, 11
Random, 4K rectangles
fft_all.gds, 320K polygons
Current Status of Our SW ,[object Object],[object Object],[object Object],[object Object],[object Object]
Key Techniques ,[object Object],[object Object],[object Object],[object Object],[object Object]
New Polygon Cutting Algorithm ,[object Object],[object Object]
Dynamic Priority Search Tree ,[object Object],[object Object]
Splitting and Stitching ,[object Object]
Conflict Detection ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],A B C D E F b
Layout Splitting Problem Formulation ,[object Object],[object Object],[object Object],[object Object],[object Object]
Bi-connected Graph ,[object Object],[object Object],[object Object]
Bi-connected Components ,[object Object],[object Object],[object Object]
Tri-connected Graph ,[object Object],[object Object],[object Object]
Tri-connected Components ,[object Object]
SPQR-Tree virtual edge skeleton
 
Divide-and-Conquer Method ,[object Object],[object Object],[object Object],[object Object],[object Object]
Example
More Technical Details ,[object Object],[object Object]
Conclusions ,[object Object],[object Object],[object Object],[object Object],[object Object]

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Double Patterning （4/2 update)

Notes de l'éditeur

  1. the 820 million transistors of an Intel Core 2 Extreme chip can process nearly 72 billion instructions per second