Low K Dielectrics

Low- k Dielectrics: Materials and Process Technology Pawan Mishra Roll No: 07PH6207 Dept: Physics & Meteorology IIT Kharagpur

Outline ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Why Low- k Dielectrics? ,[object Object],[object Object],[object Object],[object Object],[object Object]

Required Properties of Low- k Dielectrics

Silica Based (SiOF):k~3.5 ,[object Object],[object Object],[object Object]

SSQ ( Silsesquioxane ) Based: HSQ&MSQ ( k = 2.8) ,[object Object],[object Object],[object Object]

Organic: Parylene-F ,[object Object],[object Object],[object Object],http://www.paryleneinc.com

Organic: PTFE ( k = 1.9) ,[object Object],[object Object],[object Object],[object Object]

Porous Organics and Inorganics ,[object Object],[object Object],(1) “Low- k Dielectrics.” http://fcs.itc.it/

Disadvantages of Porous Materials ,[object Object],[object Object],[object Object],[object Object]

Air Gaps ( k = 1.0) ,[object Object],[object Object],[object Object],[object Object]

CVD vs. Spin-on Deposition ,[object Object]

CVD vs. Spin-on Deposition ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Conclusions ,[object Object],[object Object],[object Object],[object Object]

References ,[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],[object Object]

Low K Dielectrics

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