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Mohammad Khooshebast / International Journal of Engineering Research and Applications
                    (IJERA) ISSN: 2248-9622 www.ijera.com
                   Vol. 3, Issue 2, March -April 2013, pp.633-636

    The Scattering Mechanisms and Electronic Properties of SiC
                         Semiconductor
                               M. Khooshebast and H. Arabshahi
                         Department of Physics, Payame Noor University, Tehran, Iran


Abstract
We have studied the band structure properties of          atoms by C atoms in wurtzite crystal structure. There
SiC in wurtzite crystal structures. In our                are two important parameters which should be
calculations we have adopted a pseudopotential            optimized correctly for saving time and also to have
approach based on the Density Functional Theory           an acceptable precision in calculations. These
(DFT). We have calculated the band structure and          parameters are cutoff-energy and kgrid-cutoff where
density of state (DOS). The result shows that the         their optimized values were chosen. SiC can
electronic band structure and density of state data       crystallize in zincblende, wurtzite and rombohedral
for SiC in wurtzite crystal structures are                structures, which have slightly different material
comparable with their experimental calculations.          properties and substantially different band structures
In the second part we have calculated the effective       [3]. However, the wurtzite phase of SiC is the more
mass of electron in three valley model. And finally       stable bulk form of the material and the common
in the third part of this survey we have studied          form for epitaxial layers. The wurtzite crystal
piezoelectric, deformation potential and optical          structure of SiC is shown in figure 1. It can be
phonon scattering mechanisms.                             regarded as an interpenetration of two hexagonally
                                                          close packed (HCP) sublattices with a relative
Key words: Pseudopotential; Density Functional            displacement along the c-axis by uc where u is the so
Theory; Effective Mass; Electron Scattering.              called internal parameter and c is the lattice constant
                                                          for the c-axis. The distance between in-plane atomic
Band Structure Calculation                                neighbors is denoted by a. For an ideal wurtzite
          First principles or ab-initio approaches        structure c/a=(8/3)1/2 =1.633 and u=3/8=0.375 and the
provide a method for modeling systems based solely        atoms have the regular tetrahedral coordination of
on their atomic coordinates and the Z numbers of the      nearest neighbors that occurs for the zincblende
different atoms. These techniques rely on the fact that   structure [4]. The difference between the two
there should be one unique charge density or              structures is in the next nearest neighbor
distribution which describes the ground state of a        arrangement. The first Brillouin zone of wurtzite SiC
system [1]. This reduces the problem of solving for       which is a hexagonal prism of volume is shown in
the electronic structure of a system from a 3N            figure 1 as well together with the locations of the
dimensional problem to one that only depends on the       high-symmetry points , K, M and U [5,6].
charge density. A number of approaches have been
developed to properly reduce a system to the
minimum energy electronic configuration and abinit
includes several of these. First principles codes such
as abinit have proved useful to topics ranging from
the composition of the planetary core to the electrical
properties of single molecule. Abinit can calculate
                                                                                    a)
the forces on atoms in a structure and use this
information to relax the system. This has provided
critical understanding in how surfaces reconstruct,
how absorbates interact with surface sites, and how
magnetic impurities affect neighbor lattice sites.
Typically calculations can consider 30-40 atoms
comfortably. Larger systems can be done, but for
fairly large systems (greater than 150 atoms), parallel
calculations are essential [2-6]. In addition to
minimizing the total energy of a structure, abinit can
also calculate band structures, density of states,
                                                                                      b)
magnetic properties, and phonon dispersion curves.
                                                          figure1. a) The crystal structure of wurtzite SiC and
We made a 6×6×6 super cell of the unit cell which
                                                          b) the first brillouin zone of a wurtzite.
contain 12 atoms and then substituted some of the Si



                                                                                                 633 | P a g e
Mohammad Khooshebast / International Journal of Engineering Research and Applications
                              (IJERA) ISSN: 2248-9622 www.ijera.com
                            Vol. 3, Issue 2, March -April 2013, pp.633-636
The calculated band structure of 2H-SiC in wurtzite  1. Effective Mass
crystal structure has been shown in figure 2. The                          In this section we shall present a general
obtained band gap for 2H-siC is about 2.2 eV. For                model for the band structure which enables us to
SiC the top of the valance band is at the K point, and           interpret the macroscopic properties of the
it has an indirect band gap. The real band gap in this           semiconductors of interest in devices.
crystal will be somewhat larger on the order of about                      The model consists of one conduction band,
1 eV.                                                            with three sets of minima in the region around the
                                                                 minima of the conduction band, the function
               25                                                 E (k ) can be approximated by a quadratic function
               20                                                of k :
                                                                                       2 1
               15
                                                                 E (k )                ( ) ij k i k j         (1)
  Energy(eV)




               10                                                               i, j   2 m
                                                                               1        1 2E
                                                                                 ) ij  2 (
               5
                                                                 Where (                           )            (2)
               0                                                               m        k i k j
               -5                                                Is the inverse effective mass tensor, and k is
                    A    G           K           L
                                                                 measured from the centers of the valleys. In the
                                                                 model considered here E (k ) is assumed in
figure2.                The   band   structure       of    2H-   following from [9]:
SiC
                                                                               2       k l2 k t2 
                                                                 E (k )                                     (3)
                                                                               2        ml mt 
                                                                          Equation (3) represents a band with
                                                                 ellipsoidal equi-energetic surfaces, with tensor
                                                                 effective mass. The ellipsoids have rotational
                                                                 symmetry around the crystallographic directions
                                                                 which contain the centers of the valleys. Here, k l
                                                                 and      kt       are     he    longitudinal    and      transverse
                                                                 components of k with respect to these directions;
                                                                 1      1
                                                                    and    are the longitudinal and transverse
                                                                 ml     mt
                                                   fi            components, respectively, of the inverse effective
gure 3. The calculated total density of states in 2H-            mass tensor. For values of k from the minima of
SiC.                                                             conduction band, the energy deviates from the simple
                                                                 quadratic expression, and nonparabolicity occurs. For
Table 1 summarizes the values of lowest indirect                 the conduction band, a simple analytical way of
forbidden gaps (Eg) for 2H-SiC from our model, as                introducing nonparabolicity is to consider an energy-
well as theoretical results from LDA, GW and                     wave vector relation of type [10]
experimental results. The discrepancies of the energy             E (1  E )   (k )      (4)
gap between the GW and experiment are around 0.01
                                                                          Where  (k ) is given by the right-had side
eV. Our result is in very good agreement with the
experimental data [7] and pseudopotential ab initio              of Eqs. (3).  is a nonparabolicity parameter [11-13].
results including the GW approximation [8] as listed                      By using equations (3) and (4) the effective
in Table 1.                                                      mass in conduction bad for 2H-SiC has been
                                                                 calculated in  ,  and U valleys and the result is
Table 1: Values of indirect gap (in eV) of SiC.                  shown in table (1)

   valley                                          U           Table1: Calculated effective mass for 2H-SiC in                 ,
Effective      0.08 m 0  0.16 m 0                    0.8 m 0
                                                                  and U valley.
mass
Method This         LDA     GW                   Experiment      3. Scattering Mechanisms
          Work                                                          As usual in semi-classical transport, the
Band      2.23      2.10    3.31                 3.30            dynamics of electron interactions is assumed to be
Gap



                                                                                                                      634 | P a g e
Mohammad Khooshebast / International Journal of Engineering Research and Applications
                    (IJERA) ISSN: 2248-9622 www.ijera.com
                   Vol. 3, Issue 2, March -April 2013, pp.633-636
independent of the applied field, and the collisions
are assumed to occur instantaneously.
All scattering calculations presented here will be
carried out with a first order perturbative approach,
consequently only two-body interactions will be
analyzed.
          The electronic transitions of interest for
charge transport in semiconductors can be classified
as intra valley when the initial and final states lie in
the same valley, or inter valley when they lie in
different valleys.
          The most important sources of scattering
that determine these transitions in the bulk of
homogeneous crystals are phonons and impurities.
The interaction of phonons with charge carriers is
due to the deformation of the otherwise perfect
crystal produced by phonons through the deformation
potential mechanism or through the electrostatic
forces produced by the polarization waves that                                                                   Fi
accompany the phonons. It is useful to present a           gure4. Energy dependence of the piezoelectric
physical discussion of the main features of each           scattering rate in gamma valley of SiC at different
scattering process with particular attention to their      temperatures.
influence on carrier transport.

a) Acoustic Scattering With Piezoelectric          and
Interaction Deformation Potential
         The maximum energy transfer for an
electronic interaction with acoustic phonons is, in
general, much smaller than the electron energy, and
thus very often acoustic scattering is treated as an
elastic process. The electrostatic nature of this
mechanism leads to a scattering efficiency that
decreases at increasing carrier energy; its importance
is restricted to low temperature and low field
situations, especially in high-purity materials. In
dealing with hot-electron problems, where its
influence is negligible, the piezoelectric scattering
should always be considered together with the                                                                     Fi
scattering due to deformation-potential interaction.       gure5. Energy dependence of the deformation-
As is shown in figures 4 and 5 you can see the                         potential scattering rate in gamma valley of
piezoelectric and deformation-potential scattering                                    SiC at different temperatures.
rates as a function of electron energy for acoustic        b) Optical-Phonon Scattering with Deformation-
phonons for SiC semiconductor in different                     Potential Interaction.
temperatures.                                                         Usually the equivalent temperature of the
         As is shown in figure 4, by increasing the        optical phonons s assumed to be constant since the
temperature the scattering rate increases and for high     dispersion relation of such kind of phonons is quite
energy electrons, the scattering rate decreases.           flat for the q values involved in electronic intra valley
As is shown in figure 5, by increasing the                 transitions. As we shall see, this kin of scattering is
temperature the scattering rate increases, and by          isotropic.
increasing the electron energy, the scattering rate
increases from 0 to 7  10
                           13                              c) Optical-Phonon        Scattering With Polar
                                in room temperature.
                                                               Interaction
                                                                     The electrostatic nature of interaction is such
                                                           that forward scattering is favored, so that this
                                                           mechanism is strongly anisotropic. The treatment of
                                                           this scattering is simplified by the constancy of the
                                                           phonon energy in the transition. At high electron
                                                           energies the total scattering rate for polar optical
                                                           scattering decreases with increasing energy.




                                                                                                    635 | P a g e
Mohammad Khooshebast / International Journal of Engineering Research and Applications
                    (IJERA) ISSN: 2248-9622 www.ijera.com
                   Vol. 3, Issue 2, March -April 2013, pp.633-636
Optical phonon scattering rate in phonon emission
and absorption as a function of energy in  valley for   References
2H-SiC are shown in figures 6 and 7 for different          [1]   X. Gonze, J.-M. Beuken, R. Caracas, F.
temperatures.                                                    Detraux, M. Fuchs, G.-M. Rignanese, L.
As you can see in figure 6 electron can absorb                   Sindic, M. Verstraete, G. Zerah, F. Jollet, M.
phonon in a high rate specially in low energies. By              Torrent, A. Roy, M. Mikami, Ph. Ghosez, J.-
increasing the temperature, the scattering rate                  Y. Raty, D. C. Allan, Comput. Mater. Sci.
increases too. By increasing the electron energy from            25, 478 (2002).
                                                          [2]    A. M. Rappe, K. M. Rabe, E. Kaxiras, J. D.
0 to 0.4 eV the scattering rate varies from 5.2  10
                                                   12
                                                                 Joannopoulos, Phys. Rev. B 41, 1227 (1990)
        12
to 3 10 .                                                [3]    Numerical       Data      and     Functional
As you can see in figure 7 the probability of emission           Relationships in Science and Technology,
is obviously zero when E   op , since the carrier
                                                                 edited by O.Madelung, Landolt-Bornstein,
                                                                 New Series, Group 3, vol. 17, Pt. a
does not have enough energy to emit the phonon. It is            (Springer-Verlag, New York), (1982)
also known that by increasing the temperature, the        [4]    A. R. Verma and P.Krishna, Polymorphism
scattering rate increases.                                       and Polytypism in Crystals (Wiley, New
                                                                 York, 1966), Chap. 5.
                                                          [5]    Properties of Advanced semiconductor
                                                                 Materials GaN, AlN, InN, BN, SiC, SiGe,
                                                                 M. E. Levinshtein, S. L. Rumyantsev, and
                                                                 M. S. Shur, Eds. New York: Wiley, 2001,
                                                                 pp. 31-47.
                                                          [6]    M. Ruff, H. Mitlehner, and R. Helbig, “SiC
                                                                 devices: hysics and numerical simulation”,
                                                                 IEEE Trans. Electron Dev., vol. 41, pp.
                                                                 1040-1053, 1994
                                                          [7]    K. H. Hellwege (ed.), Landolt-Börnstein,
                                                                 Numerical and Functional Relationships in
                                                                 Science and Technology (Springer-Verlag,
                                                                 Berlin, 1982).
                                                          [8]    B. Wenzien, P. Käckell, F. Bechstedt, and
                                                                 G. Cappellini, Phys. Rev. B 52, 10897
                                                                 (1995).
Figure6. Energy dependence of the optical phonons
                                                           [9]   Smith, R. A.: Semiconductors. Cambridge:
scattering rate in gamma valley of SiC at different
                                                                 Cambridge University Press 1964.
temperatures for phonon absorption.
                                                          [10]   Conwell, E. M., Vassel, M.O.: Phys. Rev.
                                                                 166,797(1968).
                                                          [11]   Fawcett, W., Boardman, D. A., Swain, S.: J.
                                                                 Phys. 55, 645 (1983).
                                                          [12]   Paige, E. G. S.: The Electrical Conductivity
                                                                 of Germanium (Gibson, A. F., Burgess, R.
                                                                 E., eds.). London: Heywood. 1964.




Figure7. Energy dependence of the optical phonon
scattering rate in the gamma valley of 2 SiC at
          different temperatures for phonon emission.




                                                                                               636 | P a g e

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  • 1. Mohammad Khooshebast / International Journal of Engineering Research and Applications (IJERA) ISSN: 2248-9622 www.ijera.com Vol. 3, Issue 2, March -April 2013, pp.633-636 The Scattering Mechanisms and Electronic Properties of SiC Semiconductor M. Khooshebast and H. Arabshahi Department of Physics, Payame Noor University, Tehran, Iran Abstract We have studied the band structure properties of atoms by C atoms in wurtzite crystal structure. There SiC in wurtzite crystal structures. In our are two important parameters which should be calculations we have adopted a pseudopotential optimized correctly for saving time and also to have approach based on the Density Functional Theory an acceptable precision in calculations. These (DFT). We have calculated the band structure and parameters are cutoff-energy and kgrid-cutoff where density of state (DOS). The result shows that the their optimized values were chosen. SiC can electronic band structure and density of state data crystallize in zincblende, wurtzite and rombohedral for SiC in wurtzite crystal structures are structures, which have slightly different material comparable with their experimental calculations. properties and substantially different band structures In the second part we have calculated the effective [3]. However, the wurtzite phase of SiC is the more mass of electron in three valley model. And finally stable bulk form of the material and the common in the third part of this survey we have studied form for epitaxial layers. The wurtzite crystal piezoelectric, deformation potential and optical structure of SiC is shown in figure 1. It can be phonon scattering mechanisms. regarded as an interpenetration of two hexagonally close packed (HCP) sublattices with a relative Key words: Pseudopotential; Density Functional displacement along the c-axis by uc where u is the so Theory; Effective Mass; Electron Scattering. called internal parameter and c is the lattice constant for the c-axis. The distance between in-plane atomic Band Structure Calculation neighbors is denoted by a. For an ideal wurtzite First principles or ab-initio approaches structure c/a=(8/3)1/2 =1.633 and u=3/8=0.375 and the provide a method for modeling systems based solely atoms have the regular tetrahedral coordination of on their atomic coordinates and the Z numbers of the nearest neighbors that occurs for the zincblende different atoms. These techniques rely on the fact that structure [4]. The difference between the two there should be one unique charge density or structures is in the next nearest neighbor distribution which describes the ground state of a arrangement. The first Brillouin zone of wurtzite SiC system [1]. This reduces the problem of solving for which is a hexagonal prism of volume is shown in the electronic structure of a system from a 3N figure 1 as well together with the locations of the dimensional problem to one that only depends on the high-symmetry points , K, M and U [5,6]. charge density. A number of approaches have been developed to properly reduce a system to the minimum energy electronic configuration and abinit includes several of these. First principles codes such as abinit have proved useful to topics ranging from the composition of the planetary core to the electrical properties of single molecule. Abinit can calculate a) the forces on atoms in a structure and use this information to relax the system. This has provided critical understanding in how surfaces reconstruct, how absorbates interact with surface sites, and how magnetic impurities affect neighbor lattice sites. Typically calculations can consider 30-40 atoms comfortably. Larger systems can be done, but for fairly large systems (greater than 150 atoms), parallel calculations are essential [2-6]. In addition to minimizing the total energy of a structure, abinit can also calculate band structures, density of states, b) magnetic properties, and phonon dispersion curves. figure1. a) The crystal structure of wurtzite SiC and We made a 6×6×6 super cell of the unit cell which b) the first brillouin zone of a wurtzite. contain 12 atoms and then substituted some of the Si 633 | P a g e
  • 2. Mohammad Khooshebast / International Journal of Engineering Research and Applications (IJERA) ISSN: 2248-9622 www.ijera.com Vol. 3, Issue 2, March -April 2013, pp.633-636 The calculated band structure of 2H-SiC in wurtzite 1. Effective Mass crystal structure has been shown in figure 2. The In this section we shall present a general obtained band gap for 2H-siC is about 2.2 eV. For model for the band structure which enables us to SiC the top of the valance band is at the K point, and interpret the macroscopic properties of the it has an indirect band gap. The real band gap in this semiconductors of interest in devices. crystal will be somewhat larger on the order of about The model consists of one conduction band, 1 eV. with three sets of minima in the region around the minima of the conduction band, the function 25 E (k ) can be approximated by a quadratic function 20 of k : 2 1 15 E (k )   ( ) ij k i k j (1) Energy(eV) 10 i, j 2 m 1 1 2E ) ij  2 ( 5 Where ( ) (2) 0 m  k i k j -5 Is the inverse effective mass tensor, and k is A G K L measured from the centers of the valleys. In the model considered here E (k ) is assumed in figure2. The band structure of 2H- following from [9]: SiC 2  k l2 k t2  E (k )     (3) 2  ml mt  Equation (3) represents a band with ellipsoidal equi-energetic surfaces, with tensor effective mass. The ellipsoids have rotational symmetry around the crystallographic directions which contain the centers of the valleys. Here, k l and kt are he longitudinal and transverse components of k with respect to these directions; 1 1 and are the longitudinal and transverse ml mt fi components, respectively, of the inverse effective gure 3. The calculated total density of states in 2H- mass tensor. For values of k from the minima of SiC. conduction band, the energy deviates from the simple quadratic expression, and nonparabolicity occurs. For Table 1 summarizes the values of lowest indirect the conduction band, a simple analytical way of forbidden gaps (Eg) for 2H-SiC from our model, as introducing nonparabolicity is to consider an energy- well as theoretical results from LDA, GW and wave vector relation of type [10] experimental results. The discrepancies of the energy E (1  E )   (k ) (4) gap between the GW and experiment are around 0.01 Where  (k ) is given by the right-had side eV. Our result is in very good agreement with the experimental data [7] and pseudopotential ab initio of Eqs. (3).  is a nonparabolicity parameter [11-13]. results including the GW approximation [8] as listed By using equations (3) and (4) the effective in Table 1. mass in conduction bad for 2H-SiC has been calculated in  ,  and U valleys and the result is Table 1: Values of indirect gap (in eV) of SiC. shown in table (1) valley   U Table1: Calculated effective mass for 2H-SiC in , Effective 0.08 m 0 0.16 m 0 0.8 m 0  and U valley. mass Method This LDA GW Experiment 3. Scattering Mechanisms Work As usual in semi-classical transport, the Band 2.23 2.10 3.31 3.30 dynamics of electron interactions is assumed to be Gap 634 | P a g e
  • 3. Mohammad Khooshebast / International Journal of Engineering Research and Applications (IJERA) ISSN: 2248-9622 www.ijera.com Vol. 3, Issue 2, March -April 2013, pp.633-636 independent of the applied field, and the collisions are assumed to occur instantaneously. All scattering calculations presented here will be carried out with a first order perturbative approach, consequently only two-body interactions will be analyzed. The electronic transitions of interest for charge transport in semiconductors can be classified as intra valley when the initial and final states lie in the same valley, or inter valley when they lie in different valleys. The most important sources of scattering that determine these transitions in the bulk of homogeneous crystals are phonons and impurities. The interaction of phonons with charge carriers is due to the deformation of the otherwise perfect crystal produced by phonons through the deformation potential mechanism or through the electrostatic forces produced by the polarization waves that Fi accompany the phonons. It is useful to present a gure4. Energy dependence of the piezoelectric physical discussion of the main features of each scattering rate in gamma valley of SiC at different scattering process with particular attention to their temperatures. influence on carrier transport. a) Acoustic Scattering With Piezoelectric and Interaction Deformation Potential The maximum energy transfer for an electronic interaction with acoustic phonons is, in general, much smaller than the electron energy, and thus very often acoustic scattering is treated as an elastic process. The electrostatic nature of this mechanism leads to a scattering efficiency that decreases at increasing carrier energy; its importance is restricted to low temperature and low field situations, especially in high-purity materials. In dealing with hot-electron problems, where its influence is negligible, the piezoelectric scattering should always be considered together with the Fi scattering due to deformation-potential interaction. gure5. Energy dependence of the deformation- As is shown in figures 4 and 5 you can see the potential scattering rate in gamma valley of piezoelectric and deformation-potential scattering SiC at different temperatures. rates as a function of electron energy for acoustic b) Optical-Phonon Scattering with Deformation- phonons for SiC semiconductor in different Potential Interaction. temperatures. Usually the equivalent temperature of the As is shown in figure 4, by increasing the optical phonons s assumed to be constant since the temperature the scattering rate increases and for high dispersion relation of such kind of phonons is quite energy electrons, the scattering rate decreases. flat for the q values involved in electronic intra valley As is shown in figure 5, by increasing the transitions. As we shall see, this kin of scattering is temperature the scattering rate increases, and by isotropic. increasing the electron energy, the scattering rate increases from 0 to 7  10 13 c) Optical-Phonon Scattering With Polar in room temperature. Interaction The electrostatic nature of interaction is such that forward scattering is favored, so that this mechanism is strongly anisotropic. The treatment of this scattering is simplified by the constancy of the phonon energy in the transition. At high electron energies the total scattering rate for polar optical scattering decreases with increasing energy. 635 | P a g e
  • 4. Mohammad Khooshebast / International Journal of Engineering Research and Applications (IJERA) ISSN: 2248-9622 www.ijera.com Vol. 3, Issue 2, March -April 2013, pp.633-636 Optical phonon scattering rate in phonon emission and absorption as a function of energy in  valley for References 2H-SiC are shown in figures 6 and 7 for different [1] X. Gonze, J.-M. Beuken, R. Caracas, F. temperatures. Detraux, M. Fuchs, G.-M. Rignanese, L. As you can see in figure 6 electron can absorb Sindic, M. Verstraete, G. Zerah, F. Jollet, M. phonon in a high rate specially in low energies. By Torrent, A. Roy, M. Mikami, Ph. Ghosez, J.- increasing the temperature, the scattering rate Y. Raty, D. C. Allan, Comput. Mater. Sci. increases too. By increasing the electron energy from 25, 478 (2002). [2] A. M. Rappe, K. M. Rabe, E. Kaxiras, J. D. 0 to 0.4 eV the scattering rate varies from 5.2  10 12 Joannopoulos, Phys. Rev. B 41, 1227 (1990) 12 to 3 10 . [3] Numerical Data and Functional As you can see in figure 7 the probability of emission Relationships in Science and Technology, is obviously zero when E   op , since the carrier edited by O.Madelung, Landolt-Bornstein, New Series, Group 3, vol. 17, Pt. a does not have enough energy to emit the phonon. It is (Springer-Verlag, New York), (1982) also known that by increasing the temperature, the [4] A. R. Verma and P.Krishna, Polymorphism scattering rate increases. and Polytypism in Crystals (Wiley, New York, 1966), Chap. 5. [5] Properties of Advanced semiconductor Materials GaN, AlN, InN, BN, SiC, SiGe, M. E. Levinshtein, S. L. Rumyantsev, and M. S. Shur, Eds. New York: Wiley, 2001, pp. 31-47. [6] M. Ruff, H. Mitlehner, and R. Helbig, “SiC devices: hysics and numerical simulation”, IEEE Trans. Electron Dev., vol. 41, pp. 1040-1053, 1994 [7] K. H. Hellwege (ed.), Landolt-Börnstein, Numerical and Functional Relationships in Science and Technology (Springer-Verlag, Berlin, 1982). [8] B. Wenzien, P. Käckell, F. Bechstedt, and G. Cappellini, Phys. Rev. B 52, 10897 (1995). Figure6. Energy dependence of the optical phonons [9] Smith, R. A.: Semiconductors. Cambridge: scattering rate in gamma valley of SiC at different Cambridge University Press 1964. temperatures for phonon absorption. [10] Conwell, E. M., Vassel, M.O.: Phys. Rev. 166,797(1968). [11] Fawcett, W., Boardman, D. A., Swain, S.: J. Phys. 55, 645 (1983). [12] Paige, E. G. S.: The Electrical Conductivity of Germanium (Gibson, A. F., Burgess, R. E., eds.). London: Heywood. 1964. Figure7. Energy dependence of the optical phonon scattering rate in the gamma valley of 2 SiC at different temperatures for phonon emission. 636 | P a g e