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2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 11
ManufacturingManufacturing
OperationsOperations
Dr. Len MeiDr. Len Mei
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 22
What is a manufacturingWhat is a manufacturing
operationoperation
An operation using givenAn operation using given
resources to produce productsresources to produce products
in volumein volume
Resources include: tools/ labor/Resources include: tools/ labor/
materials/ utilities/ cashmaterials/ utilities/ cash
A manufacturing operationA manufacturing operation
without a competitive cost/without a competitive cost/
quality cannot survive for longquality cannot survive for long
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ProductivityProductivity
How efficiently an organizationHow efficiently an organization
can convert input resources intocan convert input resources into
goods and servicesgoods and services
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ChallengesChallenges
Every manufacturing operation is uniqueEvery manufacturing operation is unique
Manufacturing operation is also dynamicManufacturing operation is also dynamic
that is constantly changingthat is constantly changing
Knowing the operation theory can help toKnowing the operation theory can help to
manage the operationmanage the operation
Establishing a good system can reduceEstablishing a good system can reduce
management intervention based onmanagement intervention based on
personal judgment (mostly biased), andpersonal judgment (mostly biased), and
move the production like clockworkmove the production like clockwork
Managing manufacturing is like navigatingManaging manufacturing is like navigating
a large ship, a decision can change thea large ship, a decision can change the
course and make it difficult to turn backcourse and make it difficult to turn back
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 55
ChallengesChallenges
A good operation requires precipitation ofA good operation requires precipitation of
every member in the factory with clearevery member in the factory with clear
understanding of his daily, weekly, monthlyunderstanding of his daily, weekly, monthly
goalsgoals
A good manufacturing system will reduceA good manufacturing system will reduce
complex operations into easy to followcomplex operations into easy to follow
goals at different levelsgoals at different levels
The goals for each member, each team/The goals for each member, each team/
task force/department need to be coherenttask force/department need to be coherent
and built toward the same ultimate goaland built toward the same ultimate goal
((HoshinHoshin 方针)方针)
Manufacturing requires disciplineManufacturing requires discipline
This cannot be accomplished without anThis cannot be accomplished without an
overall understanding of the operation itselfoverall understanding of the operation itself
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ChallengesChallenges
Manufacturing operation is not anManufacturing operation is not an
isolated operation. It has to exist andisolated operation. It has to exist and
operate under the business context.operate under the business context.
Factory priority is often set byFactory priority is often set by
business priority and financialbusiness priority and financial
requirementsrequirements
Such interface must be wellSuch interface must be well
establishedestablished
Manufacturing is a large organization.Manufacturing is a large organization.
Any wavering or conflict of directionsAny wavering or conflict of directions
will result in the waste of resourcewill result in the waste of resource
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A production system consistsA production system consists
of 4 partnersof 4 partners
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For a production to happen:For a production to happen:
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LaborLabor
Labor is the most difficultLabor is the most difficult
managementmanagement
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Capacity loss due to lackingCapacity loss due to lacking
laborlabor
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TaskTask
Compiling hourly going rateCompiling hourly going rate
trend charttrend chart
Identify the low HGR root causeIdentify the low HGR root cause
Use management technique toUse management technique to
eliminate root causeeliminate root cause
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TaskTask
Synchronization can provideSynchronization can provide
efficiency without extra costefficiency without extra cost
Need to develop a matrix toNeed to develop a matrix to
monitor synchronizationmonitor synchronization
management
productioninformation
managefeedback
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Shift change managementShift change management
Shift change creates the biggestShift change creates the biggest
productivity loss due to laborproductivity loss due to labor
and often createsand often creates misoperationmisoperation
1st shift 2nd shift
Overlap/
Shift handover
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Create working cellCreate working cell
A working cell, such asA working cell, such as
photolithography, involvesphotolithography, involves
operators, process engineers,operators, process engineers,
equipment engineers,equipment engineers,
integration. The communicationintegration. The communication
and cooperation among theand cooperation among the
working cell members areworking cell members are
critical to the performance of thecritical to the performance of the
cellcell
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A matrix organizationA matrix organization
diffusion etchphotoThin film
operator
Eq eng
Proc eng
cell
department
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ProcessProcess
Process is the keyProcess is the key
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Process improvementProcess improvement
ProcessProcess standarizationstandarization
Process simplificationProcess simplification
Yield improvementYield improvement
Process design to avoidProcess design to avoid
excursionexcursion
Unnecessarily tight processUnnecessarily tight process
spec reduces efficiency withoutspec reduces efficiency without
buying morebuying more quality or yieldquality or yield
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ToolsTools
The most expensive resourceThe most expensive resource
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ToolsTools
““ToolsTools”” is the most expensiveis the most expensive
partnerpartner
Two componentsTwo components
DepreciationDepreciation
MaintenanceMaintenance
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Factors determiningFactors determining
depreciation per unit outputdepreciation per unit output
Cost of acquisitionCost of acquisition
Capacity balanceCapacity balance
UtilizationUtilization –– productive timeproductive time
ThroughputThroughput
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 2121
TaskTask –– establish depreciationestablish depreciation
bench markbench mark
$1.6 M/masking layer/1K wafers$1.6 M/masking layer/1K wafers
per month for 70 nm technologyper month for 70 nm technology
AA fabfab with 40K/m, 30 MLwith 40K/m, 30 ML
process costs $1.92 Bprocess costs $1.92 B
Depreciation cost per wafer:Depreciation cost per wafer:
$1.6 Mx30/72/1000=$662$1.6 Mx30/72/1000=$662
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UtilizationUtilization
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TaskTask
Compile utilization charts for eachCompile utilization charts for each
equipment and equipment typeequipment and equipment type
Evaluate the rationale forEvaluate the rationale for capexcapex
expansionexpansion
cutting down Noncutting down Non--scheduled capacity isscheduled capacity is
a way to save money without sacrificinga way to save money without sacrificing
capacitycapacity
Bottleneck equipment should always beBottleneck equipment should always be
the most expensive equipmentthe most expensive equipment
Ranking of the depreciation per waferRanking of the depreciation per wafer
for equipment type should be the samefor equipment type should be the same
as ranking of bottleneck equipment typeas ranking of bottleneck equipment type
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0000
5555
10101010
15151515
20202020
25252525
30303030
35353535
40404040
45454545
50505050
AAAA BBBB
NonNon--scheduled capacityscheduled capacity
K unit/month
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Capacity balanceCapacity balance
0000
10101010
20202020
30303030
40404040
50505050
60606060
70707070
80808080
90909090
AAAA BBBB CCCC DDDD
Bottleneck equipment
Identifying and improving the capacity of bottleneck
equipment is a sure way to increase overall fab capacity
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TaskTask
Determine bottlenecks in theDetermine bottlenecks in the
production lineproduction line
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Unscheduled down timeUnscheduled down time
Unscheduled down usuallyUnscheduled down usually
means product damagemeans product damage
Its loss is two foldsIts loss is two folds--
Depreciation and maintenanceDepreciation and maintenance
Product scrap or downgradeProduct scrap or downgrade
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0000
50505050
100100100100
150150150150
200200200200
250250250250
AAAA BBBB CCCC DDDD EEEE
Pareto chartsPareto charts
Time units
Root cause
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TaskTask
CompilingCompiling paretopareto charts to determinecharts to determine
the top three root causes for thethe top three root causes for the
unscheduled down and address theunscheduled down and address the
problemproblemss
Fixing the unscheduled down rootFixing the unscheduled down root
causes usually improves the qualitycauses usually improves the quality
Distinguish between the real rootDistinguish between the real root
cause and the apparent root causecause and the apparent root cause
Difference between assist and downDifference between assist and down
(e.g. jammed wafer)(e.g. jammed wafer)
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Scheduled down and taskScheduled down and task
Daily, weekly, monthly, quarterlyDaily, weekly, monthly, quarterly
How long takes to performHow long takes to perform
Which parts are changedWhich parts are changed
Second source spare partsSecond source spare parts
Review necessity of parts changeReview necessity of parts change
Internal vs. outsourcingInternal vs. outsourcing
SchedulingScheduling
Multiple toolsMultiple tools
Multiple chambersMultiple chambers
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TaskTask
Compile trend chart data for theCompile trend chart data for the
total equipment maintenancetotal equipment maintenance
cost (parts/ labor for bothcost (parts/ labor for both
internal and outsourcing)internal and outsourcing)
Add maintenance cost to theAdd maintenance cost to the
equipment cost to determine theequipment cost to determine the
cost of ownershipcost of ownership
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TaskTask
Compile trend charts for MTTFCompile trend charts for MTTF
and MTTR for each equipmentand MTTR for each equipment
Bench mark different equipmentBench mark different equipment
of the same equipment typeof the same equipment type
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EngineeringEngineering
Daily performance checkDaily performance check
Kit change due to processKit change due to process
changechange
CalibrationCalibration
Recipe management or editingRecipe management or editing
Self cleaningSelf cleaning
Test runsTest runs
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TaskTask
Breakdown of engineeringBreakdown of engineering
activities on tools and evaluateactivities on tools and evaluate
its effectivenessits effectiveness
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StandbyStandby
TaskTask –– compile standby time forcompile standby time for
each equipment typeeach equipment type
Standby due to lack of partnersStandby due to lack of partners
LaborLabor
WIPWIP
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Improving bottleneck capacityImproving bottleneck capacity
For bottleneck
equipment,
we must minimize
this.
For bottleneck
equipment,
we must maxmize
this.
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 3737
Improving bottleneck capacityImproving bottleneck capacity
Equipment automation plays an important role!
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 3838
OEE using equipmentOEE using equipment
automationautomation
OEE (overall equipmentOEE (overall equipment
efficiency) improvement byefficiency) improvement by
retrieving equipmentretrieving equipment
performance data fromperformance data from
equipmentequipment
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WIPWIP
Managing WIP intelligentlyManaging WIP intelligently
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Capacity loss due to lacking ofCapacity loss due to lacking of
WIPWIP
Introduction of the theory ofIntroduction of the theory of
operating curve managementoperating curve management
Two normalized parametersTwo normalized parameters
UUUU –– fabfab capacity utilizationcapacity utilization
(capacity utilized vs. total capacity)(capacity utilized vs. total capacity)
FFFF –– flow factor (cycle time vs.flow factor (cycle time vs.
raw process time)raw process time)
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OCMOCM
DGR – daily going rate(raw process time)
gap
Queuing theory
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Operating curve with differentOperating curve with different
αα
SmallSmall ααis more efficientis more efficient
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Cycle timeCycle time
Flow factor (FF) is theFlow factor (FF) is the
normalized cycle timenormalized cycle time
Too long cycle time is bad:Too long cycle time is bad:
Increase cost of WIPIncrease cost of WIP
Decrease qualityDecrease quality
TaskTask –– create a trend chart forcreate a trend chart for
flow factorflow factor
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 4444
Cycle time breakdownCycle time breakdown
Processing timeProcessing time
Queue time (waiting for tools)Queue time (waiting for tools)
Queue time (waiting for labor)Queue time (waiting for labor)
Hold time (waiting for engineers/Hold time (waiting for engineers/
process)process)
Transport timeTransport time
Above CT analysis for eachAbove CT analysis for each
modulemodule
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Example of detail CT reportExample of detail CT report
no. stage Q-tgt Q-actual SPT R-actual H-tgt H-actual Avg CT cum CT cum SPT FF
1 wfr start - - 0.2 0.2 - - 0.2 0.2 0.2 1.00
2 preanneal 1.0 2.0 7.3 7.0 0.2 1.0 10.0 10.2 7.5 1.36
3 pad nitride 3.0 2.0 6.3 6.5 - - 8.5 18.7 13.8 1.36
4 BSG mask 3.4 3.0 1.6 1.7 2.0 1.2 5.9 24.6 15.4 1.60
5 BSG anneal 2.3 2.0 4.8 4.5 1.2 3.0 9.5 34.1 20.2 1.69
6 DT photo 3.5 4.0 7.1 7.0 1.0 1.5 12.5 46.6 27.3 1.71
7 DT MOetch 2.2 4.0 5.7 6.0 1.1 2.1 12.1 58.7 33.0 1.78
8 DT etch 3.0 2.3 2.3 2.2 2.0 2.0 6.5 65.2 35.3 1.85
9 edge poly 2.0 2.5 2.3 2.2 1.0 3.1 7.8 73.0 37.6 1.94
10 DT etch+ cln 2.3 3.0 1.5 1.6 1.4 2.0 6.6 79.6 39.1 2.04
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TaskTask
Create cycle time reportsCreate cycle time reports
Identify long cycle time itemsIdentify long cycle time items
Eliminate long cycle time itemsEliminate long cycle time items
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Daily management of WIPDaily management of WIP
no. stage BOH moves EOH turn turn tgt scrap rework
1 wfr start - - - - - - -
2 preanneal 200 200 350 0.73 0.80 21 -
3 pad nitride 340 650 435 1.68 1.50 - -
4 BSG mask 325 430 230 1.55 2.00 - -
5 BSG anneal 435 456 345 1.17 1.00 - -
6 DT photo 560 890 345 1.97 1.80 - 33
7 DT MOetch 325 232 230 0.84 2.00 - -
8 DT etch 450 270 230 0.79 2.40 - -
9 edge poly 325 435 235 1.55 1.60 - -
10 DT etch+ cln 421 534 411 1.28 1.60 - -
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Gap ChartGap Chart –– identifying the rootidentifying the root
cause of long cycle time and lowcause of long cycle time and low
utilizationutilization
Gap too large
FF too large
efficient production
In-efficient production
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Gap ChartGap Chart
Plotting daily gap chart is usefulPlotting daily gap chart is useful
because one can tell the factorybecause one can tell the factory
efficiency at one glanceefficiency at one glance
The direction of moving of theThe direction of moving of the
daily data point also tells us thedaily data point also tells us the
production is moving towardproduction is moving toward
more efficiency or less efficiencymore efficiency or less efficiency
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A Gap Trend ChartA Gap Trend Chart
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Trend charts of efficiencyTrend charts of efficiency
Regardless of the manufacturing theory,Regardless of the manufacturing theory,
we can set up many different trend chartswe can set up many different trend charts
to show the trend of efficiencyto show the trend of efficiency
It is easy to setup and powerfulIt is easy to setup and powerful
The design of trend charts should beThe design of trend charts should be
representative and the improvement shouldrepresentative and the improvement should
be directly linked to a few specific actionsbe directly linked to a few specific actions
taken. Interdependent parameters shouldtaken. Interdependent parameters should
be removedbe removed
The trend charts should beThe trend charts should be fabfab
independent so it can be benchmarkedindependent so it can be benchmarked
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Trend charts of efficiencyTrend charts of efficiency --11
MLPW – Masking layer per week
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Trend charts of efficiencyTrend charts of efficiency --22
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Trend chart of masking layerTrend chart of masking layer
productivityproductivity
Actual masking layer per weekActual masking layer per week
performed vs. targetperformed vs. target
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How to monitor monthly targetHow to monitor monthly target
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Manufacturing variabilityManufacturing variability αα
Not all the lots are equal
Queing theory CT/RPT=FF=αααα(u/(1- u)+1)
Where u=DGR/Capa
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Example of OCM curveExample of OCM curve
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αα, uptime and utilization trend, uptime and utilization trend
chartchart
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How to oHow to optimizingptimizing αα
OptimizingOptimizing ααmeans to improve the operation efficiencymeans to improve the operation efficiency
(more output in less time) without adding capacity(more output in less time) without adding capacity
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Line control to optimizingLine control to optimizing αα
Using line control methodologyUsing line control methodology
to improve line balanceto improve line balance
Accurately forecast WIP forAccurately forecast WIP for
bottleneck equipmentbottleneck equipment
Establish alert for coming WIP tooEstablish alert for coming WIP too
high or too lowhigh or too low
Establish dispatch rulesEstablish dispatch rules
Always provide enough WIP toAlways provide enough WIP to
feed bottleneck equipmentfeed bottleneck equipment
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Line balancingLine balancing
Daily WIP turn at 10 means a lot can goDaily WIP turn at 10 means a lot can go
through 10 process recipes per daythrough 10 process recipes per day
Lot dispatching should avoid sending theLot dispatching should avoid sending the
lots toward process bottleneck within 10lots toward process bottleneck within 10
process recipesprocess recipes
Dispatch rules need to be setup to arrangeDispatch rules need to be setup to arrange
the lot processing priorities automaticallythe lot processing priorities automatically
Bottlenecks are dynamic and changingBottlenecks are dynamic and changing
constantlyconstantly
A control table with a list of all theA control table with a list of all the WIPWIP’’ss atat
every equipment type should be generatedevery equipment type should be generated
for production control reviewfor production control review
Manual intervention is occasionally neededManual intervention is occasionally needed
to override auto dispatch systemto override auto dispatch system
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Line balanceLine balance
Bottleneck equipment type should be givenBottleneck equipment type should be given
highest priority for equipment maintenancehighest priority for equipment maintenance
Relationship between line balancing andRelationship between line balancing and
production efficiency (production efficiency (αα)) should beshould be
carefully monitoredcarefully monitored
Daily inventory turn for each equipmentDaily inventory turn for each equipment
type can be a good indicator for linetype can be a good indicator for line
balancebalance
Manufacturing system should flash alert forManufacturing system should flash alert for
the equipment type with inventory turnthe equipment type with inventory turn
trending down for prolong period or belowtrending down for prolong period or below
certain valuecertain value
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Line balanceLine balance
WIP management and lotWIP management and lot
dispatching provide the biggestdispatching provide the biggest
opportunity to improve efficiencyopportunity to improve efficiency
without extra cost.without extra cost.
The key tool is real timeThe key tool is real time
dispatching systemdispatching system
The theory is the OCMThe theory is the OCM
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Advanced techniques for lineAdvanced techniques for line
controlcontrol
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Planning of production startsPlanning of production starts
Production starts by pull and pushProduction starts by pull and push
PullPull --Production backed by customer orderProduction backed by customer order
PushPush ––Production allocated for sales force toProduction allocated for sales force to
pushpush
Production starts plan is driven by sales. ItProduction starts plan is driven by sales. It
is part of the business process.is part of the business process.
Erratic production plan is detrimental to theErratic production plan is detrimental to the
production efficiencyproduction efficiency
It is recommended to fix the productionIt is recommended to fix the production
plan for at leastplan for at least ½½ of cycle timeof cycle time
Monthly planning meeting for productionMonthly planning meeting for production
plan, capacity, production targetplan, capacity, production target
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Production planProduction plan
Mid term (6 months) productionMid term (6 months) production
plan drives resource forecast,plan drives resource forecast,
supply chain managementsupply chain management
Long term (1 year or more)Long term (1 year or more)
production plan drivesproduction plan drives capexcapex,,
headcount, and other strategicheadcount, and other strategic
business plans (market sharebusiness plans (market share
target, return on investmenttarget, return on investment
target, etc)target, etc)
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AutomationAutomation
Tool for productivity and qualityTool for productivity and quality
improvementimprovement
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AutomationAutomation
Automation is the essential toolAutomation is the essential tool
for factory efficiencyfor factory efficiency
improvementimprovement
Three areas of automationThree areas of automation
Factory automationFactory automation
Equipment automationEquipment automation
Data automationData automation
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Purpose of automationPurpose of automation
Relief mundane task of dataRelief mundane task of data
collection and calculationcollection and calculation
Shorten information feedbackShorten information feedback
looploop
ControlControl
Remove emotional decisionsRemove emotional decisions
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Factory automationFactory automation
MES (manufacturing executionMES (manufacturing execution
system)system)
WIP/ DGR/ turn/ equipment statusWIP/ DGR/ turn/ equipment status
AMHSAMHS –– automatic materialsautomatic materials
handling system (wafer transporthandling system (wafer transport
system)system)
Production control systemProduction control system
(interfacing with supply chain(interfacing with supply chain
management system and includingmanagement system and including
factory resource managementfactory resource management
system)system)
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Equipment automationEquipment automation
Equipment automation has twoEquipment automation has two
applications:applications:
OEE (Overall EquipmentOEE (Overall Equipment
Efficiency)Efficiency)
APC (Advanced Process Control)APC (Advanced Process Control)
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Equipment automationEquipment automation
Bring every piece equipment onBring every piece equipment on--lineline
APCAPC
CoCo--relating yield to equipmentrelating yield to equipment
parametersparameters
Monitor equipment performance data inMonitor equipment performance data in
real timereal time
OEEOEE
Event based schedulingEvent based scheduling vsvs time basedtime based
scheduling of equipment maintenancescheduling of equipment maintenance
Throughput improvementThroughput improvement
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Equipment automationEquipment automation
EAP
SERVER
Batch
Creat
e
APC
SERVER
Trac
e
Data
Batc
h
EQ DATA
External
sensors
EAP Server APC Functions :EAP Server APC Functions :
Configurable Trace DataConfigurable Trace Data
Connection.Connection.
(Including All Logistic Data)(Including All Logistic Data)
External Sensor Integration.External Sensor Integration.
Equipment Alarm Collection.Equipment Alarm Collection.
APC Server Functions:APC Server Functions:
Data CollectionData Collection
Fault DetectionFault Detection
Data CorrelationData Correlation
10 ~ 20 tools
Per server
10 tools
Per server
1 web server
1 def/ metrology server
1 WAT/yld server
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 7575
Equipment MaintenanceEquipment Maintenance
Database (OEE)Database (OEE)
Equipment abnormal serviceEquipment abnormal service
record systemrecord system
Schedule preventiveSchedule preventive
maintenance systemmaintenance system
Setting priority for scheduled andSetting priority for scheduled and
nonnon--scheduled maintenancescheduled maintenance
based on daily WIPbased on daily WIP disbributiondisbribution
and line balanceand line balance
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 7676
Equipment throughput (OEE)Equipment throughput (OEE)
To improve bottleneck equipmentTo improve bottleneck equipment
throughtputthroughtput increases overall factoryincreases overall factory
capacitycapacity
Throughput improvement requiresThroughput improvement requires
breakdown data for each processbreakdown data for each process
stepstep
Benchmarking equipment of theBenchmarking equipment of the
same equipment type will bring thesame equipment type will bring the
worst performer to the bestworst performer to the best
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 7777
Advanced Process ControlAdvanced Process Control
Data collection
From equipment
automation
Data analysis/
Fault detection &
classification
Process control
APC collects data from equipment in real time, analyzes
by FDC, sends alarm to equipment engineers for
decision.
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 7878
APC/OEEAPC/OEE
An abnormal parameter of an equipmentAn abnormal parameter of an equipment
sends an alert to equipment supervisorsends an alert to equipment supervisor
Supervisor reviews the alert to determineSupervisor reviews the alert to determine
whether shutdown is necessary. Hewhether shutdown is necessary. He
reviews the database to find previousreviews the database to find previous
cases of same alertcases of same alert
If the shutdown is required, he reviews theIf the shutdown is required, he reviews the
maintenance procedure (a check list) andmaintenance procedure (a check list) and
triggers a maintenance order.triggers a maintenance order.
The system automatically reThe system automatically re--schedule theschedule the
priority and send an order to store for thepriority and send an order to store for the
maintenance kitmaintenance kit
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 7979
Run to Run ControlRun to Run Control
Use the data from previous step to controlUse the data from previous step to control
the process in the next stepthe process in the next step
Step N Step N+1
Data collection
& analysis
Process control
Use the data from previous lots to controlUse the data from previous lots to control
the processthe process for next lotfor next lot
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 8080
Data automationData automation
Recipe management systemRecipe management system
Yield enhancement systemYield enhancement system
SPC control systemSPC control system
Equipment databaseEquipment database
Product knowledge databaseProduct knowledge database
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 8181
Link to the outside worldLink to the outside world
Factory data (WIP,
cycle time, equipment,
lots, process)
Accounting data
(cost, ASP)
Business and
planning data (order,
capex, purchasing,
inventory)
ERP
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 8282
Next level of businessNext level of business
engineeringengineering
Establish supply chain controlEstablish supply chain control
system to reduce inventory (JIT)system to reduce inventory (JIT)
Improve CT for WIP reductionImprove CT for WIP reduction
Managing spare parts and rawManaging spare parts and raw
materials inventory by turnmaterials inventory by turn
Managing finished productManaging finished product
inventory by PULL (convert asinventory by PULL (convert as
much PUSH to PULL)much PUSH to PULL)
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 8383
A word about quality controlA word about quality control
Quality monitoring and controlQuality monitoring and control
responsibility belong to QA/QCresponsibility belong to QA/QC
departmentdepartment
Execution to achieve goodExecution to achieve good
quality is the responsibility ofquality is the responsibility of
manufacturingmanufacturing
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 8484
Business processBusiness process
Advanced Planning and SchedulingAdvanced Planning and Scheduling
System is the calculation of theSystem is the calculation of the
production order based on forecastproduction order based on forecast
of sales order, profit margin andof sales order, profit margin and
otherother stretegicstretegic considerations.considerations.
What happens in sales for the nextWhat happens in sales for the next
month, in material costs, labor costs andmonth, in material costs, labor costs and
profit? What is going to happen with theprofit? What is going to happen with the
costs and the profit for this order?costs and the profit for this order?
Forecasting the future sales providesForecasting the future sales provides
the basic data for planning work.the basic data for planning work.
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 8585
ReportsReports
Manufacturing reports should beManufacturing reports should be
comprehensive enough to havecomprehensive enough to have
a birda bird’’s eye view of the overalls eye view of the overall
factoryfactory
All reports should containAll reports should contain
quantitative data that can bequantitative data that can be
benchbench--markedmarked
2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 8686
SummarySummary
Adapt OCM/Adapt OCM/HoshinHoshin/ automation/ automation
/OEE/ APC techniques to/OEE/ APC techniques to
eliminate waste and createeliminate waste and create
competitiveness incompetitiveness in
manufacturingmanufacturing
Integrate the above techniquesIntegrate the above techniques
into daily productioninto daily production
management systemmanagement system

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Manufacturing operation

  • 1. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 11 ManufacturingManufacturing OperationsOperations Dr. Len MeiDr. Len Mei
  • 2. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 22 What is a manufacturingWhat is a manufacturing operationoperation An operation using givenAn operation using given resources to produce productsresources to produce products in volumein volume Resources include: tools/ labor/Resources include: tools/ labor/ materials/ utilities/ cashmaterials/ utilities/ cash A manufacturing operationA manufacturing operation without a competitive cost/without a competitive cost/ quality cannot survive for longquality cannot survive for long
  • 3. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 33 ProductivityProductivity How efficiently an organizationHow efficiently an organization can convert input resources intocan convert input resources into goods and servicesgoods and services
  • 4. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 44 ChallengesChallenges Every manufacturing operation is uniqueEvery manufacturing operation is unique Manufacturing operation is also dynamicManufacturing operation is also dynamic that is constantly changingthat is constantly changing Knowing the operation theory can help toKnowing the operation theory can help to manage the operationmanage the operation Establishing a good system can reduceEstablishing a good system can reduce management intervention based onmanagement intervention based on personal judgment (mostly biased), andpersonal judgment (mostly biased), and move the production like clockworkmove the production like clockwork Managing manufacturing is like navigatingManaging manufacturing is like navigating a large ship, a decision can change thea large ship, a decision can change the course and make it difficult to turn backcourse and make it difficult to turn back
  • 5. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 55 ChallengesChallenges A good operation requires precipitation ofA good operation requires precipitation of every member in the factory with clearevery member in the factory with clear understanding of his daily, weekly, monthlyunderstanding of his daily, weekly, monthly goalsgoals A good manufacturing system will reduceA good manufacturing system will reduce complex operations into easy to followcomplex operations into easy to follow goals at different levelsgoals at different levels The goals for each member, each team/The goals for each member, each team/ task force/department need to be coherenttask force/department need to be coherent and built toward the same ultimate goaland built toward the same ultimate goal ((HoshinHoshin 方针)方针) Manufacturing requires disciplineManufacturing requires discipline This cannot be accomplished without anThis cannot be accomplished without an overall understanding of the operation itselfoverall understanding of the operation itself
  • 6. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 66 ChallengesChallenges Manufacturing operation is not anManufacturing operation is not an isolated operation. It has to exist andisolated operation. It has to exist and operate under the business context.operate under the business context. Factory priority is often set byFactory priority is often set by business priority and financialbusiness priority and financial requirementsrequirements Such interface must be wellSuch interface must be well establishedestablished Manufacturing is a large organization.Manufacturing is a large organization. Any wavering or conflict of directionsAny wavering or conflict of directions will result in the waste of resourcewill result in the waste of resource
  • 7. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 77 A production system consistsA production system consists of 4 partnersof 4 partners
  • 8. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 88 For a production to happen:For a production to happen:
  • 9. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 99 LaborLabor Labor is the most difficultLabor is the most difficult managementmanagement
  • 10. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 1010 Capacity loss due to lackingCapacity loss due to lacking laborlabor
  • 11. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 1111 TaskTask Compiling hourly going rateCompiling hourly going rate trend charttrend chart Identify the low HGR root causeIdentify the low HGR root cause Use management technique toUse management technique to eliminate root causeeliminate root cause
  • 12. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 1212 TaskTask Synchronization can provideSynchronization can provide efficiency without extra costefficiency without extra cost Need to develop a matrix toNeed to develop a matrix to monitor synchronizationmonitor synchronization management productioninformation managefeedback
  • 13. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 1313 Shift change managementShift change management Shift change creates the biggestShift change creates the biggest productivity loss due to laborproductivity loss due to labor and often createsand often creates misoperationmisoperation 1st shift 2nd shift Overlap/ Shift handover
  • 14. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 1414 Create working cellCreate working cell A working cell, such asA working cell, such as photolithography, involvesphotolithography, involves operators, process engineers,operators, process engineers, equipment engineers,equipment engineers, integration. The communicationintegration. The communication and cooperation among theand cooperation among the working cell members areworking cell members are critical to the performance of thecritical to the performance of the cellcell
  • 15. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 1515 A matrix organizationA matrix organization diffusion etchphotoThin film operator Eq eng Proc eng cell department
  • 16. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 1616 ProcessProcess Process is the keyProcess is the key
  • 17. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 1717 Process improvementProcess improvement ProcessProcess standarizationstandarization Process simplificationProcess simplification Yield improvementYield improvement Process design to avoidProcess design to avoid excursionexcursion Unnecessarily tight processUnnecessarily tight process spec reduces efficiency withoutspec reduces efficiency without buying morebuying more quality or yieldquality or yield
  • 18. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 1818 ToolsTools The most expensive resourceThe most expensive resource
  • 19. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 1919 ToolsTools ““ToolsTools”” is the most expensiveis the most expensive partnerpartner Two componentsTwo components DepreciationDepreciation MaintenanceMaintenance
  • 20. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 2020 Factors determiningFactors determining depreciation per unit outputdepreciation per unit output Cost of acquisitionCost of acquisition Capacity balanceCapacity balance UtilizationUtilization –– productive timeproductive time ThroughputThroughput
  • 21. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 2121 TaskTask –– establish depreciationestablish depreciation bench markbench mark $1.6 M/masking layer/1K wafers$1.6 M/masking layer/1K wafers per month for 70 nm technologyper month for 70 nm technology AA fabfab with 40K/m, 30 MLwith 40K/m, 30 ML process costs $1.92 Bprocess costs $1.92 B Depreciation cost per wafer:Depreciation cost per wafer: $1.6 Mx30/72/1000=$662$1.6 Mx30/72/1000=$662
  • 22. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 2222 UtilizationUtilization
  • 23. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 2323 TaskTask Compile utilization charts for eachCompile utilization charts for each equipment and equipment typeequipment and equipment type Evaluate the rationale forEvaluate the rationale for capexcapex expansionexpansion cutting down Noncutting down Non--scheduled capacity isscheduled capacity is a way to save money without sacrificinga way to save money without sacrificing capacitycapacity Bottleneck equipment should always beBottleneck equipment should always be the most expensive equipmentthe most expensive equipment Ranking of the depreciation per waferRanking of the depreciation per wafer for equipment type should be the samefor equipment type should be the same as ranking of bottleneck equipment typeas ranking of bottleneck equipment type
  • 24. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 2424 0000 5555 10101010 15151515 20202020 25252525 30303030 35353535 40404040 45454545 50505050 AAAA BBBB NonNon--scheduled capacityscheduled capacity K unit/month
  • 25. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 2525 Capacity balanceCapacity balance 0000 10101010 20202020 30303030 40404040 50505050 60606060 70707070 80808080 90909090 AAAA BBBB CCCC DDDD Bottleneck equipment Identifying and improving the capacity of bottleneck equipment is a sure way to increase overall fab capacity
  • 26. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 2626 TaskTask Determine bottlenecks in theDetermine bottlenecks in the production lineproduction line
  • 27. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 2727 Unscheduled down timeUnscheduled down time Unscheduled down usuallyUnscheduled down usually means product damagemeans product damage Its loss is two foldsIts loss is two folds-- Depreciation and maintenanceDepreciation and maintenance Product scrap or downgradeProduct scrap or downgrade
  • 28. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 2828 0000 50505050 100100100100 150150150150 200200200200 250250250250 AAAA BBBB CCCC DDDD EEEE Pareto chartsPareto charts Time units Root cause
  • 29. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 2929 TaskTask CompilingCompiling paretopareto charts to determinecharts to determine the top three root causes for thethe top three root causes for the unscheduled down and address theunscheduled down and address the problemproblemss Fixing the unscheduled down rootFixing the unscheduled down root causes usually improves the qualitycauses usually improves the quality Distinguish between the real rootDistinguish between the real root cause and the apparent root causecause and the apparent root cause Difference between assist and downDifference between assist and down (e.g. jammed wafer)(e.g. jammed wafer)
  • 30. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 3030 Scheduled down and taskScheduled down and task Daily, weekly, monthly, quarterlyDaily, weekly, monthly, quarterly How long takes to performHow long takes to perform Which parts are changedWhich parts are changed Second source spare partsSecond source spare parts Review necessity of parts changeReview necessity of parts change Internal vs. outsourcingInternal vs. outsourcing SchedulingScheduling Multiple toolsMultiple tools Multiple chambersMultiple chambers
  • 31. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 3131 TaskTask Compile trend chart data for theCompile trend chart data for the total equipment maintenancetotal equipment maintenance cost (parts/ labor for bothcost (parts/ labor for both internal and outsourcing)internal and outsourcing) Add maintenance cost to theAdd maintenance cost to the equipment cost to determine theequipment cost to determine the cost of ownershipcost of ownership
  • 32. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 3232 TaskTask Compile trend charts for MTTFCompile trend charts for MTTF and MTTR for each equipmentand MTTR for each equipment Bench mark different equipmentBench mark different equipment of the same equipment typeof the same equipment type
  • 33. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 3333 EngineeringEngineering Daily performance checkDaily performance check Kit change due to processKit change due to process changechange CalibrationCalibration Recipe management or editingRecipe management or editing Self cleaningSelf cleaning Test runsTest runs
  • 34. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 3434 TaskTask Breakdown of engineeringBreakdown of engineering activities on tools and evaluateactivities on tools and evaluate its effectivenessits effectiveness
  • 35. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 3535 StandbyStandby TaskTask –– compile standby time forcompile standby time for each equipment typeeach equipment type Standby due to lack of partnersStandby due to lack of partners LaborLabor WIPWIP
  • 36. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 3636 Improving bottleneck capacityImproving bottleneck capacity For bottleneck equipment, we must minimize this. For bottleneck equipment, we must maxmize this.
  • 37. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 3737 Improving bottleneck capacityImproving bottleneck capacity Equipment automation plays an important role!
  • 38. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 3838 OEE using equipmentOEE using equipment automationautomation OEE (overall equipmentOEE (overall equipment efficiency) improvement byefficiency) improvement by retrieving equipmentretrieving equipment performance data fromperformance data from equipmentequipment
  • 39. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 3939 WIPWIP Managing WIP intelligentlyManaging WIP intelligently
  • 40. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 4040 Capacity loss due to lacking ofCapacity loss due to lacking of WIPWIP Introduction of the theory ofIntroduction of the theory of operating curve managementoperating curve management Two normalized parametersTwo normalized parameters UUUU –– fabfab capacity utilizationcapacity utilization (capacity utilized vs. total capacity)(capacity utilized vs. total capacity) FFFF –– flow factor (cycle time vs.flow factor (cycle time vs. raw process time)raw process time)
  • 41. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 4141 OCMOCM DGR – daily going rate(raw process time) gap Queuing theory
  • 42. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 4242 Operating curve with differentOperating curve with different αα SmallSmall ααis more efficientis more efficient
  • 43. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 4343 Cycle timeCycle time Flow factor (FF) is theFlow factor (FF) is the normalized cycle timenormalized cycle time Too long cycle time is bad:Too long cycle time is bad: Increase cost of WIPIncrease cost of WIP Decrease qualityDecrease quality TaskTask –– create a trend chart forcreate a trend chart for flow factorflow factor
  • 44. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 4444 Cycle time breakdownCycle time breakdown Processing timeProcessing time Queue time (waiting for tools)Queue time (waiting for tools) Queue time (waiting for labor)Queue time (waiting for labor) Hold time (waiting for engineers/Hold time (waiting for engineers/ process)process) Transport timeTransport time Above CT analysis for eachAbove CT analysis for each modulemodule
  • 45. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 4545 Example of detail CT reportExample of detail CT report no. stage Q-tgt Q-actual SPT R-actual H-tgt H-actual Avg CT cum CT cum SPT FF 1 wfr start - - 0.2 0.2 - - 0.2 0.2 0.2 1.00 2 preanneal 1.0 2.0 7.3 7.0 0.2 1.0 10.0 10.2 7.5 1.36 3 pad nitride 3.0 2.0 6.3 6.5 - - 8.5 18.7 13.8 1.36 4 BSG mask 3.4 3.0 1.6 1.7 2.0 1.2 5.9 24.6 15.4 1.60 5 BSG anneal 2.3 2.0 4.8 4.5 1.2 3.0 9.5 34.1 20.2 1.69 6 DT photo 3.5 4.0 7.1 7.0 1.0 1.5 12.5 46.6 27.3 1.71 7 DT MOetch 2.2 4.0 5.7 6.0 1.1 2.1 12.1 58.7 33.0 1.78 8 DT etch 3.0 2.3 2.3 2.2 2.0 2.0 6.5 65.2 35.3 1.85 9 edge poly 2.0 2.5 2.3 2.2 1.0 3.1 7.8 73.0 37.6 1.94 10 DT etch+ cln 2.3 3.0 1.5 1.6 1.4 2.0 6.6 79.6 39.1 2.04
  • 46. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 4646 TaskTask Create cycle time reportsCreate cycle time reports Identify long cycle time itemsIdentify long cycle time items Eliminate long cycle time itemsEliminate long cycle time items
  • 47. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 4747 Daily management of WIPDaily management of WIP no. stage BOH moves EOH turn turn tgt scrap rework 1 wfr start - - - - - - - 2 preanneal 200 200 350 0.73 0.80 21 - 3 pad nitride 340 650 435 1.68 1.50 - - 4 BSG mask 325 430 230 1.55 2.00 - - 5 BSG anneal 435 456 345 1.17 1.00 - - 6 DT photo 560 890 345 1.97 1.80 - 33 7 DT MOetch 325 232 230 0.84 2.00 - - 8 DT etch 450 270 230 0.79 2.40 - - 9 edge poly 325 435 235 1.55 1.60 - - 10 DT etch+ cln 421 534 411 1.28 1.60 - -
  • 48. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 4848 Gap ChartGap Chart –– identifying the rootidentifying the root cause of long cycle time and lowcause of long cycle time and low utilizationutilization Gap too large FF too large efficient production In-efficient production
  • 49. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 4949 Gap ChartGap Chart Plotting daily gap chart is usefulPlotting daily gap chart is useful because one can tell the factorybecause one can tell the factory efficiency at one glanceefficiency at one glance The direction of moving of theThe direction of moving of the daily data point also tells us thedaily data point also tells us the production is moving towardproduction is moving toward more efficiency or less efficiencymore efficiency or less efficiency
  • 50. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 5050 A Gap Trend ChartA Gap Trend Chart
  • 51. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 5151 Trend charts of efficiencyTrend charts of efficiency Regardless of the manufacturing theory,Regardless of the manufacturing theory, we can set up many different trend chartswe can set up many different trend charts to show the trend of efficiencyto show the trend of efficiency It is easy to setup and powerfulIt is easy to setup and powerful The design of trend charts should beThe design of trend charts should be representative and the improvement shouldrepresentative and the improvement should be directly linked to a few specific actionsbe directly linked to a few specific actions taken. Interdependent parameters shouldtaken. Interdependent parameters should be removedbe removed The trend charts should beThe trend charts should be fabfab independent so it can be benchmarkedindependent so it can be benchmarked
  • 52. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 5252 Trend charts of efficiencyTrend charts of efficiency --11 MLPW – Masking layer per week
  • 53. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 5353 Trend charts of efficiencyTrend charts of efficiency --22
  • 54. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 5454 Trend chart of masking layerTrend chart of masking layer productivityproductivity Actual masking layer per weekActual masking layer per week performed vs. targetperformed vs. target
  • 55. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 5555 How to monitor monthly targetHow to monitor monthly target
  • 56. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 5656 Manufacturing variabilityManufacturing variability αα Not all the lots are equal Queing theory CT/RPT=FF=αααα(u/(1- u)+1) Where u=DGR/Capa
  • 57. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 5757 Example of OCM curveExample of OCM curve
  • 58. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 5858 αα, uptime and utilization trend, uptime and utilization trend chartchart
  • 59. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 5959 How to oHow to optimizingptimizing αα OptimizingOptimizing ααmeans to improve the operation efficiencymeans to improve the operation efficiency (more output in less time) without adding capacity(more output in less time) without adding capacity
  • 60. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 6060 Line control to optimizingLine control to optimizing αα Using line control methodologyUsing line control methodology to improve line balanceto improve line balance Accurately forecast WIP forAccurately forecast WIP for bottleneck equipmentbottleneck equipment Establish alert for coming WIP tooEstablish alert for coming WIP too high or too lowhigh or too low Establish dispatch rulesEstablish dispatch rules Always provide enough WIP toAlways provide enough WIP to feed bottleneck equipmentfeed bottleneck equipment
  • 61. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 6161 Line balancingLine balancing Daily WIP turn at 10 means a lot can goDaily WIP turn at 10 means a lot can go through 10 process recipes per daythrough 10 process recipes per day Lot dispatching should avoid sending theLot dispatching should avoid sending the lots toward process bottleneck within 10lots toward process bottleneck within 10 process recipesprocess recipes Dispatch rules need to be setup to arrangeDispatch rules need to be setup to arrange the lot processing priorities automaticallythe lot processing priorities automatically Bottlenecks are dynamic and changingBottlenecks are dynamic and changing constantlyconstantly A control table with a list of all theA control table with a list of all the WIPWIP’’ss atat every equipment type should be generatedevery equipment type should be generated for production control reviewfor production control review Manual intervention is occasionally neededManual intervention is occasionally needed to override auto dispatch systemto override auto dispatch system
  • 62. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 6262 Line balanceLine balance Bottleneck equipment type should be givenBottleneck equipment type should be given highest priority for equipment maintenancehighest priority for equipment maintenance Relationship between line balancing andRelationship between line balancing and production efficiency (production efficiency (αα)) should beshould be carefully monitoredcarefully monitored Daily inventory turn for each equipmentDaily inventory turn for each equipment type can be a good indicator for linetype can be a good indicator for line balancebalance Manufacturing system should flash alert forManufacturing system should flash alert for the equipment type with inventory turnthe equipment type with inventory turn trending down for prolong period or belowtrending down for prolong period or below certain valuecertain value
  • 63. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 6363 Line balanceLine balance WIP management and lotWIP management and lot dispatching provide the biggestdispatching provide the biggest opportunity to improve efficiencyopportunity to improve efficiency without extra cost.without extra cost. The key tool is real timeThe key tool is real time dispatching systemdispatching system The theory is the OCMThe theory is the OCM
  • 64. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 6464 Advanced techniques for lineAdvanced techniques for line controlcontrol
  • 65. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 6565
  • 66. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 6666 Planning of production startsPlanning of production starts Production starts by pull and pushProduction starts by pull and push PullPull --Production backed by customer orderProduction backed by customer order PushPush ––Production allocated for sales force toProduction allocated for sales force to pushpush Production starts plan is driven by sales. ItProduction starts plan is driven by sales. It is part of the business process.is part of the business process. Erratic production plan is detrimental to theErratic production plan is detrimental to the production efficiencyproduction efficiency It is recommended to fix the productionIt is recommended to fix the production plan for at leastplan for at least ½½ of cycle timeof cycle time Monthly planning meeting for productionMonthly planning meeting for production plan, capacity, production targetplan, capacity, production target
  • 67. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 6767 Production planProduction plan Mid term (6 months) productionMid term (6 months) production plan drives resource forecast,plan drives resource forecast, supply chain managementsupply chain management Long term (1 year or more)Long term (1 year or more) production plan drivesproduction plan drives capexcapex,, headcount, and other strategicheadcount, and other strategic business plans (market sharebusiness plans (market share target, return on investmenttarget, return on investment target, etc)target, etc)
  • 68. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 6868 AutomationAutomation Tool for productivity and qualityTool for productivity and quality improvementimprovement
  • 69. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 6969 AutomationAutomation Automation is the essential toolAutomation is the essential tool for factory efficiencyfor factory efficiency improvementimprovement Three areas of automationThree areas of automation Factory automationFactory automation Equipment automationEquipment automation Data automationData automation
  • 70. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 7070 Purpose of automationPurpose of automation Relief mundane task of dataRelief mundane task of data collection and calculationcollection and calculation Shorten information feedbackShorten information feedback looploop ControlControl Remove emotional decisionsRemove emotional decisions
  • 71. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 7171 Factory automationFactory automation MES (manufacturing executionMES (manufacturing execution system)system) WIP/ DGR/ turn/ equipment statusWIP/ DGR/ turn/ equipment status AMHSAMHS –– automatic materialsautomatic materials handling system (wafer transporthandling system (wafer transport system)system) Production control systemProduction control system (interfacing with supply chain(interfacing with supply chain management system and includingmanagement system and including factory resource managementfactory resource management system)system)
  • 72. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 7272 Equipment automationEquipment automation Equipment automation has twoEquipment automation has two applications:applications: OEE (Overall EquipmentOEE (Overall Equipment Efficiency)Efficiency) APC (Advanced Process Control)APC (Advanced Process Control)
  • 73. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 7373 Equipment automationEquipment automation Bring every piece equipment onBring every piece equipment on--lineline APCAPC CoCo--relating yield to equipmentrelating yield to equipment parametersparameters Monitor equipment performance data inMonitor equipment performance data in real timereal time OEEOEE Event based schedulingEvent based scheduling vsvs time basedtime based scheduling of equipment maintenancescheduling of equipment maintenance Throughput improvementThroughput improvement
  • 74. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 7474 Equipment automationEquipment automation EAP SERVER Batch Creat e APC SERVER Trac e Data Batc h EQ DATA External sensors EAP Server APC Functions :EAP Server APC Functions : Configurable Trace DataConfigurable Trace Data Connection.Connection. (Including All Logistic Data)(Including All Logistic Data) External Sensor Integration.External Sensor Integration. Equipment Alarm Collection.Equipment Alarm Collection. APC Server Functions:APC Server Functions: Data CollectionData Collection Fault DetectionFault Detection Data CorrelationData Correlation 10 ~ 20 tools Per server 10 tools Per server 1 web server 1 def/ metrology server 1 WAT/yld server
  • 75. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 7575 Equipment MaintenanceEquipment Maintenance Database (OEE)Database (OEE) Equipment abnormal serviceEquipment abnormal service record systemrecord system Schedule preventiveSchedule preventive maintenance systemmaintenance system Setting priority for scheduled andSetting priority for scheduled and nonnon--scheduled maintenancescheduled maintenance based on daily WIPbased on daily WIP disbributiondisbribution and line balanceand line balance
  • 76. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 7676 Equipment throughput (OEE)Equipment throughput (OEE) To improve bottleneck equipmentTo improve bottleneck equipment throughtputthroughtput increases overall factoryincreases overall factory capacitycapacity Throughput improvement requiresThroughput improvement requires breakdown data for each processbreakdown data for each process stepstep Benchmarking equipment of theBenchmarking equipment of the same equipment type will bring thesame equipment type will bring the worst performer to the bestworst performer to the best
  • 77. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 7777 Advanced Process ControlAdvanced Process Control Data collection From equipment automation Data analysis/ Fault detection & classification Process control APC collects data from equipment in real time, analyzes by FDC, sends alarm to equipment engineers for decision.
  • 78. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 7878 APC/OEEAPC/OEE An abnormal parameter of an equipmentAn abnormal parameter of an equipment sends an alert to equipment supervisorsends an alert to equipment supervisor Supervisor reviews the alert to determineSupervisor reviews the alert to determine whether shutdown is necessary. Hewhether shutdown is necessary. He reviews the database to find previousreviews the database to find previous cases of same alertcases of same alert If the shutdown is required, he reviews theIf the shutdown is required, he reviews the maintenance procedure (a check list) andmaintenance procedure (a check list) and triggers a maintenance order.triggers a maintenance order. The system automatically reThe system automatically re--schedule theschedule the priority and send an order to store for thepriority and send an order to store for the maintenance kitmaintenance kit
  • 79. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 7979 Run to Run ControlRun to Run Control Use the data from previous step to controlUse the data from previous step to control the process in the next stepthe process in the next step Step N Step N+1 Data collection & analysis Process control Use the data from previous lots to controlUse the data from previous lots to control the processthe process for next lotfor next lot
  • 80. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 8080 Data automationData automation Recipe management systemRecipe management system Yield enhancement systemYield enhancement system SPC control systemSPC control system Equipment databaseEquipment database Product knowledge databaseProduct knowledge database
  • 81. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 8181 Link to the outside worldLink to the outside world Factory data (WIP, cycle time, equipment, lots, process) Accounting data (cost, ASP) Business and planning data (order, capex, purchasing, inventory) ERP
  • 82. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 8282 Next level of businessNext level of business engineeringengineering Establish supply chain controlEstablish supply chain control system to reduce inventory (JIT)system to reduce inventory (JIT) Improve CT for WIP reductionImprove CT for WIP reduction Managing spare parts and rawManaging spare parts and raw materials inventory by turnmaterials inventory by turn Managing finished productManaging finished product inventory by PULL (convert asinventory by PULL (convert as much PUSH to PULL)much PUSH to PULL)
  • 83. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 8383 A word about quality controlA word about quality control Quality monitoring and controlQuality monitoring and control responsibility belong to QA/QCresponsibility belong to QA/QC departmentdepartment Execution to achieve goodExecution to achieve good quality is the responsibility ofquality is the responsibility of manufacturingmanufacturing
  • 84. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 8484 Business processBusiness process Advanced Planning and SchedulingAdvanced Planning and Scheduling System is the calculation of theSystem is the calculation of the production order based on forecastproduction order based on forecast of sales order, profit margin andof sales order, profit margin and otherother stretegicstretegic considerations.considerations. What happens in sales for the nextWhat happens in sales for the next month, in material costs, labor costs andmonth, in material costs, labor costs and profit? What is going to happen with theprofit? What is going to happen with the costs and the profit for this order?costs and the profit for this order? Forecasting the future sales providesForecasting the future sales provides the basic data for planning work.the basic data for planning work.
  • 85. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 8585 ReportsReports Manufacturing reports should beManufacturing reports should be comprehensive enough to havecomprehensive enough to have a birda bird’’s eye view of the overalls eye view of the overall factoryfactory All reports should containAll reports should contain quantitative data that can bequantitative data that can be benchbench--markedmarked
  • 86. 2009/07/172009/07/17 copy right by Dr. Len Mei 200907copy right by Dr. Len Mei 200907 8686 SummarySummary Adapt OCM/Adapt OCM/HoshinHoshin/ automation/ automation /OEE/ APC techniques to/OEE/ APC techniques to eliminate waste and createeliminate waste and create competitiveness incompetitiveness in manufacturingmanufacturing Integrate the above techniquesIntegrate the above techniques into daily productioninto daily production management systemmanagement system