MEMS is the emerging field of current technology. this powerpoint presentation helps the beginners who want to know about the introduction to mems technology

1. An introduction to MEMS
Technology
Presented by
S.Sathish.
P.Santhosh.

2. WHAT ARE MEMS ?
MICRO - small size , micro fabricated structure
ELECTRO - electrical signal / control
MECHANICAL- mechanical functionality
SYSTEM - device, structure , system control
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3. BIG QUESTION?
What is MEMS
Technology ?
Why is it Important?
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4. What is MEMS Technology?
• Mems is technology of very small devices. It is a combination of
mechanical functions and electrical functions on the same chip using
micro fabrication technology ..
• Mems are made up of components between 1 to 100 micrometres in
size
• Mems device generally ranging size from 20 micrometres to
millimetre
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5. FABRICATION
 DEPOSITION:
 Physical
 Chemical
 PATTTERING:
 ETCHING
 Dry
 Wet
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6. BUILDING BLOCKS in MEMS
There are three basic blocks in MEMS technology….
DEPOSITION – The ability to deposit thin films of material on a
substrate
LITHOGRAPHY- To apply a patterned mask on top of the films by
photolithographic imaging
ETCHING – To etch the films selectively to the mask .
Materials used are- silicon, polymers ,metals, ceramics..
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7. MEMS manufacturing
Technology
1) Bulk micromachining
2) Surface
micromachining
3) High aspect ratio
(HAR) silicon
micromachining
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9. MEMS Applications
Medical and bio field
 A mems is a device that can be implant in the human body
 Mems surgical tools provide the flexibility and accuracy to
perform surgery
 BioMEMS are used to refer to the science and technology
of operating at the micro scale for biological and bio
medical applications
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10. In military
MEMS technology help
projectiles to reach their
targets accurately
In sensors
A micro sensors reaches a
significantly higher speed
and sensitivity compared
with microscopic
approaches
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11.  IN-AUTOMOTIVES
Heavy use of MEMS is used in
airbag system, vehicle security
,inertial brake lights, automatic door
lock etc.
 IN- MICROPHONES
The MEMS microphone
also called as microphone
chip is widely used in the
present day communication
world.
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12. Advantages of MEMS
Minimize energy and materials
 MEMS can be mass-produced and are inexpensive to make.
Improved accuracy and reproducibility
Higher reliability than their macro scale counterparts
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13. Disadvantages
a. Due to their size, it is physically impossible for MEMS to
transfer any significant power.
b. MEMS are made up of Poly-Si (a brittle material), so they
cannot be loaded with large forces.
c. Micro components are costly compared to macro
components
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15. Queries?????
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