Presentation on the LaserTRACER and LaserTRACER-MT system of Etalon during the workshop Machine precision of Sirris on 15 October 2014

1. © Etalon AG
The LaserTRACER and LaserTRACER-MTCalibration and Testing of machines with highest accuracy
A technology overview

2. © Etalon AG
Accuracy for measuring machines and machine tools
For machine tools and measuring machines geometrical accuracy is a key performance feature
Highest accuracy cannot be achieved economically without numerical compensation
Full error compensation is used for measuring machines since 15 years successfully, now it is available also in the machine tool industry
Classical methods for error mapping are time consuming and need operators with years of experience
Etalons technology combines superior accuracy, short measuring times, semi automated operation, universal application and complete information

3. © Etalon AG
Geometry deviations of a 3 axes machine: 21 deviations (notation according to ISO 230-1)
(Squareness for a kinematicX, Y, Z -system)

4. © Etalon AG
Systematic geometric deviations (here for X axis)
Position
Roll
Straightness1
Straightness2
Pitch
Yaw

5. © Etalon AG
Geometry deviations of a rotary axis: 6 deviations per axis + 5 locations(notation according to ISO 230-1)

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The progress in metrology: Comparison of machine calibration with navigation
conventional
new: Multilateration
Navigation
Calibration and testing of machines
GPS

7. © Etalon AG
The ETALON solution
TRAC-CAL
TRAC-CAL
TRAC-CHECK
Error mapping and compensation
Testing and qualification
LaserTRACER-NG
LaserTRACER-MT

8. © Etalon AG
Interferometer with 0.001 μm resolution (1)
Patented reference sphere (2) with form deviation < 0.050 μm on a solid stem (3)
Environmental compensation for temperature, pressure, humidity
Length measurement uncertainty: U95%= 0.2 μm + 0.3 μm/m
The LaserTRACER-NG

9. © Etalon AG
The LaserTRACER specification
Weightsanddimension
LaserTRACER weight
approx. 9.5 kg
Controller weight
approx. 14 kg
LaserTRACER height
230 mm
Height ofreferencesphereabovemachinetable
165 mm
Operating range
Angular rangeelevationaxis
-38°upto+ 85°
Angular rangeazimuthaxis
±225°
Measuringrange
0.2 m upto15 m
Angular rangereflector(cateye)
120°respectively160°
Environmental temperatureforaccuracyspecification
15 °C –35 °C
Dynamics
Maximal permissibleaccelerationofthereflector
8 m/s²
Maximal permissiblevelocityofthereflector
20 m/min
Accuracy
Frequencystabilitylaser24h
2∙10-8
Stabilityofthereferencesphereat ΔT = ±1 K
±0.1 μm
Resolution interferometer
0.001 μm
Spatialdisplacementmeasurements
U(k=2)= 0.2 μm + 0.3 μm/m
Power supply
Input power
50 W –100 W

10. © Etalon AG
New: The LaserTRACER-MT (MT: Mechanical Tracking)
Passive tracking mechanism of the laser interferometer
For small to medium sized machines
Based on the same principles as the LaserTRACER
Light weight (< 2500 g)
For machine axes up to 1.5 m
Angular working range from -35°to +80 ° (elevation) and >360°(azimuth)
The entire software options from Etalon are usable

11. © Etalon AG
LaserTRACER-MT in detail
Telescope 275 mm to 965 mm (1)
Active beam steering (2)
Stabilized Interferometer (3)
2 nest with precision spheres with concentric reflectors (4,5)

12. © Etalon AG
The LaserTRACER-MT specification
Weightsanddimension
Weightmeasuringunit
2.8 kg
Weightcontrollerbox
8 kg
Minimal heightabovemachinetable
120 mm
Transportation box (wateranddust-proof)
63 cmx 60 cm x 33 cm (11 kg)
Operating range
Angular rang elevationaxis
-30°upto+ 80°
Angular rangeazimuthaxis(restrictedonlybytheinterferometercable)
±270°
Radial measuringrange
260 mm upto940 mm
Cable length
5 m
Accuracy
Frequencystabilitylaser24h
2∙10-8
Resolution interferometer
0.001 μm
System accuracyoverthefullworkingrange
2 μm
Temperatur measurementaccuracy/ 3 Channels
0.1 K

13. © Etalon AG
XYZ-axis with the LaserTRACER-MT

14. © Etalon AG
A-axis with the LaserTRACER-MT

15. © Etalon AG
C-axis with the LaserTRACER-MT

16. © Etalon AG
The ETALON solution
TRAC-CAL
TRAC-CAL
TRAC-CHECK
Error mapping and compensation
Testing and qualification
LaserTRACER-NG
LaserTRACER-MT

17. © Etalon AG
Interferometriclength measurement from at least 3 positions (no alignment necessary!)
Evaluation of all errors entirely based on highly accurate displacement information
Position of LaserTRACER position and dead path doesn’t need to be known
The Principle:

18. © Etalon AG
How TRAC-CAL works on linear axes

19. © Etalon AG
Evaluation of 21 geomtricaldeviations

20. © Etalon AG
How TRAC-CAL works on rotary axes
Measurement of rotary table
Measurement of rotary head

21. © Etalon AG
Calibration of rotary axes
Determination of
Angular positioning
Axial error motion
Radial error motions
Tilt error motions
Angular location in the machine volume
Solely based on interferometric measurements of the LaserTRACER
No additional hardware necessary
Very high accuracy
Easy applicationTilt error EAC [μrad] −20−1001000200300Angular position [°] Tilt error EBC [μrad] 1000200300Angular position [°] −10010Position error ECC [μrad] 1000200300Angular position [°] 010 [μm] Radial error motion EXC1000200300Angular position [°] −20Radial error motion EYC [μm] 1000200300Angular position [°] −4−20 [μm] Axial error motion EZC1000200300Angular position [°] −20

22. © Etalon AG
Generation of an error map for volumetric compensation
Today most controllers offer volumetric compensation options
TRAC-CAL generates the compensation data by one click after measurement
Implementation leads to a significant accuracy enhancement in the entire volume (typically by a factor of 3-4)!
Interfaces for conventional compensations are also available

23. © Etalon AG
Example 1: Horizontal precision machining center
Comparison without and with compensation with Siemens VCS
0
5
10
15
20
25
30
35
40
EZZ (ztz)
EXZ (ztx)
EYZ (zty)
EZX (xtz)
EXX (xtx)
EYX (xty)
EZY (ytz)
EXY (ytx)
EYY (yty)
ECZ (zrz)
EAZ (zrx)
EBZ (zry)
ECX (xrz)
EAX (xrx)
EBX (xry)
ECY (yrz)
EAY (yrx)
EBY (yry)
B0Z (xwz)
A0Z (ywz)
C0Y (xwy)
Vorher
Nachher
without
with

24. © Etalon AG
Middle-class machining center
High-end machining center
without
with
without
with
Example2:
MachiningcenterswithFanuc controland3D-Error-Compensation

25. © Etalon AG
Example3:
Large GantrymachinewithFIDIA control
XY
XZ
YZ

26. © Etalon AG
Supported controllers for machine tools
Siemens
Heidenhain
Fanuc
Mazatronik
Fidia
Fagor
Supported protocols for CMMs
Zeiss CMMOS
I++
Leitz
DEA
Brown&Sharp
Wenzel
OGP

27. © Etalon AG
Measurements in practice
Measurement of linear axes
Measurement of rotary axes
Measurement of linear axes
Measurement of rotary axes
LaserTRACER
LaserTRACER-MT

28. © Etalon AG
Summary: Error Mapping with TRAC-CAL
Highest accuracy
All deviations solely based on the wavelength of a stabilized laser
For linear axes: linear position, straightness, pitch, yaw, roll, squareness
For rotary axes: angular positioning, axial motion, radial motions, tilt motions, angular positioning
Suitable for error mapping of machine tools and measuring machines
Applicable for almost any size of working volume
Fast execution: 1 –6 hours, depending on machine size
Simple setup and data handling
Interfaces and error mapping format for many machine tools and CMM controllers available

29. © Etalon AG
Application examples

30. © Etalon AG
The ETALON solution
TRAC-CAL
TRAC-CAL
TRAC-CHECK
Error mapping and compensation
Testing and qualification
LaserTRACER-NG
LaserTRACER-MT

31. © Etalon AG
Machine Testing with TRAC-CHECK
Principle:
The LaserTRACER operates in “fix interferometer mode” but the measurement direction is automatically aligned by machine motion
Laser displacement measurement in any direction without manual alignment
No cosine error
Measurement procedure and data evaluation according to -ISO 10360 -2for CMM (linear axes, axis parallel and diagonal) -ISO 230 -2/6or for machine tools (linear axes, axis parallel and diagonal) -VDI/DGQ 3441 or for machine tools (linear axes, axis parallel and diagonal) -ISO 230 -4 (machine tools, circular testing)

32. © Etalon AG
How TRAC-CHECK works –LINE MEASUREMENT

33. © Etalon AG
TRAC-CHECK results

34. © Etalon AG
Circular test(for the LaserTRACER/-MT)
Following the ISO 230-4:
Bi-directional deviation
Circular deviation
Radial deviation
…
Solely based on interferometric measurements of the LaserTRACER
No additional hardware necessary
Highest accuracy
Easy use
Radius up to 15 m

35. © Etalon AG
Additional functions in TRAC-CHECK
Dynamic analysisofmachinemotions(for the LaserTRACER/-MT)
(time domain)
(frequencedomain)
Simple geometricalanalysis
Scalefactor
Squareness
Velocity
Acceleration
Jerk
Length

36. © Etalon AG
Summary: Machine Testing with TRAC-CHECK
Highest accuracy
Semi-automated execution
No alignment of interferometer required
Application for machines of almost any size
Fast execution: Full geometry test in 30 minutes
Complete report function satisfying highest traceability demands
For measuring machines: In accordance to the latest revision of ISO 10360-2
For machine tools: Testing according to ISO 230-2, -4 and 6 and VDI/DGQ 3441
Simple and fast determination of scale and squareness errors

37. © Etalon AG
Extract from ETALONs customer list
Customers in 3D metrology
Customers in themachinetoolindustry
•Zeiss IMT / Germany
•Leitz Messtechnik / Germany
•OGP (Optical GagingProducts INC.) / USA
•Volkswagen AG / Germany
•Audi AG / Germany
•BMW AG / Germany
•SchaefflerAG / Germany
•PTB / Germany
•NIST / USA
•NPL / Great Britain
•CERN / Switzerland
•SLAC Stanford AcceleratorLaboratory / USA
•FundaçãoCERTI / Brazil
•INTI / Argentina
•INRIM / Italia
•CMTI / India
•Heller / Germany
•Deckel MahoGildemeister (DMG) / Germany
•Mazak/ Japan
•Röders / Germany
•Dixie/ Switzerland
•Heidenhain / Germany
•AgieCharmilles/ Germany
•Mori Seiki/ Japan
•Fermat / Czech Republic
•Tecnalia/ Spain
•WIA/ South Korea
•WaldrichCoburg / Germany
•Shaanxi QinchuanMachinery Development / China
•SNK / Japan
•Pratt & Whitney / USA
•Toshiba Heavy Industry / Japan
•KonecranesMachine Service / Finland
•Alzmetall/ Germany

38. © Etalon AG
Partners of ETALON
Companies withcooperationformachinecompensation
System-partnerforthetestingoflarge machines
Official partnercompaniesfor machinecompensation

39. © Etalon AG
ETALONsdistribution and service partner

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www.etalon-ag.com
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