Stamper Technology Mastering Primer. This presentation will show you the business, operational, and technical aspects of how a CD or DVD glass master and stamper is created.

1. www.stampertech.com
www.gomastering.com
www.facebook.com/stampertech

2.  The magic of mastering?
 Startup Considerations
 Need for Feedback (closed loop systems)
 Equipment
 Process
 People
 Process optimization
 Mastering is a science
 What’s next

3. Not if you know the tricks…
But it doesn’t mean that it’s easy.

4. Pre-Mastering
Stamper
Replication
laser
Molding
Acousto Opto
modulator 1,000’s
Glass Recording Plastic disc
(film exposure)
Mastering
Developing
Galvanics CD/DVD Player
(nickel plate)
Separation

5.  Business Plan and Model
 Types and quality of equipment
 Quality and experience of staff
 Core technical competency
 Unit Mfg Cost
 Media handling
 Utilities/Facilities
 Health, Safety, and Environmental
 Administrative
 Operations

6.  Revenues
 Target market
 Size of market
 Capacity based on yields and efficiencies
 Pricing strategy
 Costs
 Leaseholds and equipment capitals
 Staffing
 Consumables, Maintenance, Utilities, Facilities
 Rent and insurance
 Sales and marketing
 Yields and efficiencies
 Licensing
 Administrative and IT infrastructure

7.  Pre-Mastering
 Media, logical, and content testing; Network data transfers of DDP files (security and content
integrity)
 Mastering
 Glass cleaner, photoresist coater, laser beam recorder, developer, metallizer, inspection systems, PR
measurement/scanner, diffraction order measurement, optical densitometer.
 Galvanics
 Cleaning/passivation, plating cells, thickness measurement, protective coating.
 Utilities
 RO water, DI water, compressed air, chilled water, backup UPS, waste water treatment, exhaust.
 Post Production
 Stamper Testers, Inspection systems, microscopes, AFM, optical comparators, bit to bit verification,
digital and dynamic testing.

8.  Customer Service
 Operations President Front Office
Support
Technical Support
Facilities
 Customer Sales &
Support
Engineering Production
Service Marketing
IT Support
 Administrative Technician
0.6 per shift
Premastering Op)
1 per shift
Legal
Mastering Op
 Management 1 per shift
Galvanics Op
1 per shift
QA Op
 Sales and Marketing
1 per shift
 IT Support
 Legal Support

9.  Equipment capability and stability studies
 Process Development
 Training based on detailed operating procedures
 Operator Training
 Technical Training
 Documentation
 Users manuals
 Schematics
 Components Test Results
 Process procedures
 Spare parts and maintenance schedule

10.  Glass substrates (Cost/# of cycles)
 Laser (Cost/# of parts)
 Consumables
 Nickel pellets, acids, solvents, photoresists, alkalines, nickel targets, galvanics filters.
 Facilities
 Power, waste treatment, DI water production
 Cleanroom supplies
 Gloves, tacky mats, protective personal equipment, cleanroom notebooks and papers,
glass cases, face masks, cleaning solvents.
 Stamper Cases (Selected for best shipping ruggedness)

11.  Content rights
 Music
 Software
 Video
 Media quality
 CD’s, DVD’s, DLT’s, 8mm, Network.
 Format compliance
 DDP compatible, DVD spec, Philips Book specs.

12.  RO Water
 DI Water (resistivity, total organic content)
 Compressed Air (moisture and oil free)
 Electricity (total loads, transformers, UPS)
 Chilled Water (regulated temperature)
 Temp and Humidity Control
 Exhaust and flow control for balance
 Waste Water Treatment (complies to local reg)
 Plant monitoring system

13.  Osha compliance
 MSDS and rights to know
 Chemical labeling
 Harzardous communication
 Fire safety (evacuation plan)
 Environmental wastes
 Sewage permit
 Emissions permit
 Chemical handling/storage
 Ventilation

14.  Customer Service
 Credit Checks
 Accounts Payable
 Accounts Receivable
 Payroll/Benefits
 Human Resources
 Information Technology
 Sales and Marketing

15.  Scheduling
 Inventory
 Reporting
 Yields
 Failure Paretos
 Efficiency
 Product Tracking
 Quality Control (Statistical)

23.  Receive PO or Storefront Order
 Send confirm order to customer
 Create a workorder for each job with live 24/7 online status for customer
to monitor
 Receive physical media or FTP upload
 Check PO against Master
 Calculate due date based on turn time
 Automated production scheduling

24.  Verify WO against Source for ID info
 Verify content ownership
 Load source image into Image Server
 Check for virus
 Check for content compliance
 Check for logical structure integrity
 Enter playtime and any CDText into WO
 Create workorder sheet and send job to Mastering

25.  Program ID band into Laser Recorder
 Expose data onto photoresist glass
 Develop glass master with inline laser monitor
 Check exposure of each part with diffraction order offline to verify inline
developer
 Metallize glass master
 Inspect for defects
 Check HubID band on glass against work order
 Update online workorder status

26.  Program amp hours to make correct thickness for each
customer and make father from the glass
 Make mother and stamper if necessary
 Measure thickness of each part
 Inspect for defects
 Put protective coating on part

27.  Verify part needs to be finished
 Verify HubID band information
 Back sand each part
 Verify punch size on work order
 Punch part with matching punch size
 Inspect for defects and for burrs
 Update workorder online status

28.  Separate parts for CD’s and DVD’s
 Test using proper players
 Verify test results against specs
 Compare program time on work order against test results to
confirm correct content
 Inspect stamper for defects
 Update workorder online status

29.  Verify ID band on stamper against customer PO
 Verify program time on test result to source test result to
confirm correct source
 Verify punch size match work order
 Make label and put stamper in case

30.  Ship workorder in system and send paper work to A/R to
invoice
 Prepare packing slip for each customer
 Coordinate shipping carriers
 Send shipping information to customers

34. Metallized
Mastering System Glass with
Glass
Content
X + H(X) Y Z
Process Control System
H(Y)
X + H(X) Y Z
X + H(X) Y XZ + H(X) Y Z
X + H(X) Y Z
H(Y) H(Y) H(Y) H(Y)

35. Dev Flow
Dev Time
Laser Power
Laser Focus
Num Aperture
DI Temp
PR Sensitivity
PR Thickness
ce
lean
ur f a
ss C
s sS
Gla
Gla

36. Dev Flow
Laser Power Dev Time
DI Temp Num Aperture Laser Focus
Glass Clean Glass Surface PR Thickness PR Sensitivity

37.  Process Feedback
 Glass cleaning, photoresist coating, laser recording, developing,
metallizing, quality control, yield.
 Equipment Feedback
 Glass cleaner, photoresist coater, LBR, developer, metallizer, cycle time,
equipment efficiency.
 Human Resources Feedback
 Training, human error tracking, production efficiency.

38.  Glass Inspection
 PR profile and surface defects
 Laser profile and Intensity
 Diffraction Measurement
 AFM
 Dynamic Testing
 Logical Testing

40.  Glass Cleaner
 Chemical concentration, chemical level detectors, alarms.
 Photoresist Coater
 Chemical concentration, DI temperature, air temperature, humidity, airflow,
dispensing volume, rotational speed.
 Laser Beam Recorder
 Translational error, rotational error, focus error, beam direction error, effective
laser energy, laser mode, laser temp, beam shape.
 Developer
 Chemical concentration, DI temperature, air temperature, humidity, airflow,
dispensing volume, rotational speed, diffraction order.

41.  Glass preparation
 Surface defects, surface tension, residual grating, film.
 Photoresist coating
 Solvent cleaning, adhesion promotion, photoresist application, baking profile.
 Laser beam recording
 Laser power stability, laser quality, modulation transfer function (bandwidth),
focusing response, translation accuracy, rotational noise, vibration isolation,
optical path efficiency.
 Developing
 Development curve over time
 Metallizing
 Power ramp versus metallization density and quality

42.  More Cycle = Cheaper unit mfg cost
 Caustic solution to remove PR
 Acid to remove metals
 Neutralizer for surface tension
 Rinsing and drying
 Monitor quality with focus error and correlate to number of
usage

43.  Fine Cleaning
 Solvent Rinse
 Primer
 PhotoResist Coating
 Coating Curve
 Baking (40nm solvent reduction @ 130nm)

44.  White Light
 Scans entire glass surface quickly
 Thickness range 80nm – 400nm
 Resolution for defects
 Surface presentation for uniformity

45. PR Thickness Curve
600
PR Thick (nm)
500
400 20% PR Avg Thickness
300
200
100 10% PR Avg Thickness
0
200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500
Rotation (RPM )
PR TTV Curve
9.0
8.0
7.0
TTV (nm)
6.0 20% PR TTV
5.0
4.0
3.0
2.0 10% PR TTV
1.0
0.0
200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500
Rotation (RPM )

48. Modulator Curve Nonlinearity
0.8
Output Power%
0.7
0.6
0.5
0.4
0.3
0.2
0.1
0
0 0.5 1 1.5 2 2.5
Input Voltage

50. Intensity
Laser control
Controller
Modulation Driver
AOM
EFM1
EFM/Atip EFM2 Modulation Driver
Encoder EOM
ATIP1
ATIP2
Source
(Media or Network)
Glass plate

52. 0th Order
1st Order
2nd Order
240 mm Glass Substrate

54. Developing

55.  Cantilever that deflect laser light to monitor surface
deflections
 73 deg max at 90 deg scan direction
 Nanometric resolution

56. Photodiodes
Laserbeam
Tip
Substrate

59.  Photoresist thickness as variable (X)
 Fix photoresist concentration
 Fix laser power
 Fix developing I1/I0
 Output parameters measurement (Y)
 Physical pits
 Dynamic test signals (I3/Itop, I11/Itop, Symmetry, PP)

61. AFM vs Interferom etry Com parison D/W vs I2/I1
190 0.45 y = 1.0602x + 0.0257
y = 1.0239x - 8.2325
Interferometer Thickness
180 R2 = 0.9961 R2 = 0.9932
0.4
170
I2/I1 Ratio
0.35
160
0.3
150
0.25
140
130 0.2
130 140 150 160 170 180 190 0.2 0.25 0.3 0.35 0.4
AFM Pit Depth D/W Ratio

64. AFM Depth/Width vs Dynamic Signals
1 0.1
Symmetry/PP
0.8 0.05
Contrast
PP
I11 0
0.6
-0.05
0.4 I3
-0.1
Sym m etry
0.2 -0.15
0 -0.2
0.2 0.25 0.3 0.35 0.4
AFM Depth/Width Ratio

65. I2/I1 vs Signals
0.9 0.1
0.8 0.05
PP
Symmetry/PP
0.7 0
I11
Contrast
0.6 Symmetry
-0.05
0.5
0.4 I3 -0.1
0.3 -0.15
0.2 -0.2
0.25 0.3 0.35 0.4 0.45
I2/I1

66.  Definitely a science not magic!
 Understand the science (theoretical models).
 Characterize the process.
 Develop empirical models.
 Statistically control the process as feedback loop using the models to
predict.
 Last but most important feedback is that from the voice of the customer
and correlate your mastering process to the customer’s process.

67.  Use existing well characterized processes for
application in new industries
 Diffractive Holography
 Authentication, Decorative
 Diffractive Optics
 Computer Generated Diffractive Optical Elements
 Microchannels, microfluidics

71. www.stampertech.com
www.gomastering.com
www.facebook.com/stampertech