mems technology

1. MEMS Gyroscope

2. What is MEMS Technology?
• Micro-Electro-Mechanical Systems.
• Micro-electromechanical systems (MEMS)
is a technology that combines computers
with tiny mechanical devices such as
sensors, valves, gears, mirrors, and
actuators embedded in semiconductor
chips

3. How it works?
• It comprise integrated
Mechanical Components like,
•levers
•springs
•deformable membranes
•vibrating structures
Electrical Components like,
•resistors
•capacitors
•inductors
• Designed to work in concert to sense and report on the physical
properties of their immediate or local environment to perform some
kind of controlled physical interaction or actuation with their
immediate or local environment.

4. How it works?

5. MEMS Gyroscope
Gyroscopic effect

6. MEMS Gyroscope
MEMS gyroscopes use the Coriolis Effect

7. MEMS Gyroscope

8. MEMS Gyroscope

9. Type
• Piezoelectric gyroscopes
• Wine-glass resonator
• Cylindrical resonator gyroscope (CRG)
• Tuning fork gyroscope
• Vibrating wheel gyroscope or Disc resonator gyroscope (DRG)

10. Application
• Helps in Positioning of Spacecraft
• Helps in detection of Yaw Rate, thus, helps in calculation of
steering Error
• Roll Over detection
• Gaming Companies use MEMS Gyroscope in making Gaming
Consoles
• Smart Phones are nowadays equipped with it, making it an input
device for running of various applications
• Used as a Image Stabilization device for Cameras and
Camcorders
• Detect Vibrations and Movements, thus robots can work more
efficiently

11. Thank You