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5. Receive comments SURFACE & COATINGS TECHNOLOGY – Special Issue TITLE: Effect of cathode arc current and bias voltage on the mechanical properties of CrAlSiN thin films CORRESPONDING AUTHOR: Sun Kyu Kim GUEST EDITOR IN CHARGE: Masaharu Shiratani E-Mail: aepse-sct@plasma.ed.kyushu-u.ac.jp Return this evaluation sheet and detailed comments, corrections or remarks to the Guest Editor being in charge of this paper by mail, e-mail or FAX within two weeks after receiving the manuscript. 1. Is the paper suitable for publication in SURFACE & COATINGS TECHNOLOGY? (Please check below with X) Acceptable in the present form....... [ ] Minor revision................................ [ ] Major revision................................. [X ] Reject outright................................. [ ] *In the case of “reject outright”, please state its reason. 2. Does the paper contain a new and original contribution? Yes [X] ; No [ ] 3. Is the paper clearly presented and well organized? Yes [ ] ; No [X ] 4. Are illustrations and tables all necessary, adequate, and clear? Yes [ ] ; No [X ] 5. Does the abstract include the important points of the paper? Yes [X] ; No [ ] 6. Do the conclusions summarize the important results described in the paper? Yes [X] ; No [ ] 7. Is the English satisfactory? Outstanding [ ] ; Good [ X ] ; Marginal [] ; Poor [ ] 8. Is the paper put in a page limit (4-regular/6 -pages invited) provided for this Special Issue? Yes [X] ; No [ ] Please describe comments or specific suggestions related to the items 1-8 above on separate sheet(s). 1) Figures 1 and 3 contain modulus of CrAlSiN films. There is no description and discussion in the main text as well as the figure caption. 2) Figure 4. 11.16 11.16 nm.
6. Receive comments SURFACE & COATINGS TECHNOLOGY – Special Issue TITLE: Effect of cathode arc current and bias voltage on the mechanical properties of CrAlSiN thin films CORRESPONDING AUTHOR: Sun Kyu Kim GUEST EDITOR IN CHARGE: Masaharu Shiratani E-Mail: aepse-sct@plasma.ed.kyushu-u.ac.jp Return this evaluation sheet and detailed comments, corrections or remarks to the Guest Editor being in charge of this paper by mail, e-mail or FAX within two weeks after receiving the manuscript. Title: Effect of cathode arc current and bias voltage on the mechanical properties of CrAlSiN thin films Corresponding author: Sun Kyu Kim Referee’s Report. This is an interesting paper but there are some questions raised which the authors should address. In fig 1(a), the silicon content apparently falls when the current is increased from 50 to 55A. Why is this? If this is the case, then it casts doubt on the conclusions that the reduction in hardness in increasing the AlSi target current from 50 to 55 A is due to excess Si content, as claimed. It may be that a further increase in Si content would further increase the hardness. There is also a rather small variation in hardness over the range 40-55 A. Error bars on the hardness measurements should be included to know the significance of the apparent changes in hardness. The hardness v. bias voltage measurements show a strong peak at 100 V (fig.3). If this is compared with fig 6, the XRD scan for 150 V shows a big difference from the others whereas the 100 V scan shows little difference. Can the authors explain this anomaly? The last paragraph in the results section refers to the change in hardness related to the change in rotation speed. The results of hardness as a function of superlattice period are probably the important points here. In view of the limited length available for the paper, these comments on rotation should be omitted unless these details can be included.
