The document discusses the challenges and opportunities in developing micro robots at the micrometer scale. It covers fabrication methods using materials like polymers, metals and carbon nanotubes. It also discusses actuators, sensors like cantilever sensors, and applications in medical, industrial and space domains. Future directions include realizing self-assembling microfactories and using micro robots for hazardous applications.
9. Cantilever Sensors Department of Physics and Physical Oceanography, Memorial University, St. John’s, Newfoundland,Canada θ=Angle of incidence Φ=Azimuthal angle Nc is the surface normal to cantilever ξ = Angle of inclination of PSD
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12. The state transition diagram of USDA Bruce R. Donald , Member, IEEE , Christopher G. Levey , Member, IEEE , Craig D. McGray , Member, IEEE , Igor Paprotny, and Daniela Rus
13. Configuration Space Bruce R. Donald , Member, IEEE , Christopher G. Levey , Member, IEEE , Craig D. McGray , Member, IEEE , Igor Paprotny, and Daniela Rus
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