Vlsi stick daigram (JCE)

H
Hrishikesh KamatStundent à School
UNIT II
CIRCUIT DESIGN
PROCESSES
• Objectives:
– To know MOS layers
– To understand the stick diagrams
– To learn design rules
– To understand layout and symbolic diagrams
• Outcome:
– At the end of this, will be able draw the stick
diagram, layout and symbolic diagram for simple
MOS circuits
INTRODUCTION
UNIT – II CIRCUIT DESIGN PROCESSES
MOS LAYERS
UNIT – II CIRCUIT DESIGN PROCESSES
STICK DIAGRAMS
UNIT – II CIRCUIT DESIGN PROCESSES
• Objectives:
– To know what is meant by stick diagram.
– To understand the capabilities and limitations of
stick diagram.
– To learn how to draw stick diagrams for a given
MOS circuit.
• Outcome:
– At the end of this module the students will be able
draw the stick diagram for simple MOS circuits.
STICK DIAGRAMS
UNIT – II CIRCUIT DESIGN PROCESSES
• VLSI design aims to translate circuit concepts
onto silicon.
• Stick diagrams are a means of capturing
topography and layer information using simple
diagrams.
• Stick diagrams convey layer information
through color codes (or monochrome
encoding).
• Acts as an interface between symbolic circuit
and the actual layout.
STICK DIAGRAMS
UNIT – II CIRCUIT DESIGN PROCESSES
• Does show all components/vias.
– Via is used to connect higher level metals from metal connection
• It shows relative placement of components.
• Goes one step closer to the layout
• Helps plan the layout and routing
A stick diagram is a cartoon of a layout.
STICK DIAGRAMS
UNIT – II CIRCUIT DESIGN PROCESSES
• Does not show
– Exact placement of components
– Transistor sizes
– Wire lengths, wire widths, tub boundaries
– Any other low level details such as
parasitics
STICK DIAGRAMS
UNIT – II CIRCUIT DESIGN PROCESSES
poly
Metal 1
ndiff
pdiff
Can also draw
in shades of
gray/line style.
Stick Diagrams – Notations
Buried Contact
Contact Cut
STICK DIAGRAMS
UNIT – II CIRCUIT DESIGN PROCESSES
NMOS ENCODING
STICK DIAGRAMS
UNIT – II CIRCUIT DESIGN PROCESSES
CMOS
ENCODING
STICK DIAGRAMS
UNIT – II CIRCUIT DESIGN PROCESSES
Stick Diagrams – Some Rules
Rule 1:
When two or more ‘sticks’ of the same type cross or touch
each other that represents electrical contact.
STICK DIAGRAMS
UNIT – II CIRCUIT DESIGN PROCESSES
Stick Diagrams – Some Rules
Rule 2:
When two or more „sticks‟ of different type cross or touch each
other there is no electrical contact.
(If electrical contact is needed we have to show the connection
explicitly)
STICK DIAGRAMS
UNIT – II CIRCUIT DESIGN PROCESSES
Stick Diagrams – Some Rules
Rule 3:
When a poly crosses diffusion it represents a transistor.
Note: If a contact is shown then it is not a transistor.
STICK DIAGRAMS
UNIT – II CIRCUIT DESIGN PROCESSES
Stick Diagrams – Some Rules
Rule 4:
In CMOS a demarcation line is drawn to avoid touching of p-diff
with n-diff. All PMOS must lie on one side of the line and all
NMOS will have to be on the other side.
STICK DIAGRAMS
UNIT – II CIRCUIT DESIGN PROCESSES
Examples of Stick Diagrams
Vout
Vdd = 5V
Vin
Vout
Vdd = 5V
Vin
pMOS
nMOS
STICK DIAGRAMS
UNIT – II CIRCUIT DESIGN PROCESSES
Examples of Stick Diagrams
Gnd
VDD
x x
X
X
X
X
VDD
x x
Gnd
STICK DIAGRAMS
UNIT – II CIRCUIT DESIGN PROCESSES
Examples of Stick Diagrams
STICK DIAGRAMS
UNIT – II CIRCUIT DESIGN PROCESSES
Examples of Stick Diagrams
Vout
Vdd = 5V
Vin
* Note the depletion mode device
STICK DIAGRAMS
UNIT – II CIRCUIT DESIGN PROCESSES
Examples of Stick Diagrams
STICK DIAGRAMS
UNIT – II CIRCUIT DESIGN PROCESSES
Examples of Stick Diagrams
STICK DIAGRAMS
UNIT – II CIRCUIT DESIGN PROCESSES
Examples of Stick Diagrams
NOR gate and NAND using NMOS Transistors
STICK DIAGRAMS
UNIT – II CIRCUIT DESIGN PROCESSES
Examples of Stick Diagrams
f= [(xy) +z]‟ using NMOS Transistors
STICK DIAGRAMS
UNIT – II CIRCUIT DESIGN PROCESSES
Examples of Stick Diagrams
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
• Why we use design rules?
– Interface between designer and process engineer
• Historically, the process technology referred to the
length of the silicon channel between the source and
drain terminals in field effect transistors.
• The sizes of other features are generally derived as a
ratio of the channel length, where some may be larger
than the channel size and some smaller.
– For example, in a 90 nm process, the length of the channel may be 90
nm, but the width of the gate terminal may be only 50 nm.
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
• Allow translation of circuits (usually in stick
diagram or symbolic form) into actual
geometry in silicon
• Interface between circuit designer and
fabrication engineer
• Compromise
– designer - tighter, smaller
– fabricator - controllable, reproducible
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
• Design rules define ranges for features
– Examples:
• min. wire widths to avoid breaks
• min. spacing to avoid shorts
• minimum overlaps to ensure complete overlaps
– Measured in microns
– Required for resolution/tolerances of masks
• Fabrication processes defined by minimum channel
width
– Also minimum width of poly traces
– Defines “how fast” a fabrication process is
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
• Two major approaches:
– “Micron” rules: stated at micron resolution.
–  rules: simplified micron rules with limited
scaling attributes.
• Design rules represents a tolerance which insures
very high probability of correct fabrication
– scalable design rules: lambda parameter
– absolute dimensions (micron rules)
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
• All minimum sizes and spacing specified in
microns.
• Rules don't have to be multiples of λ.
• Can result in 50% reduction in area over λ
based rules
• Standard in industry.
“Micron” rules
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
• Lambda-based (scalable CMOS) design rules define
scalable rules based on  (which is half of the
minimum channel length)
– classes of MOSIS SCMOS rules: SUBMICRON, DEEPSUBMICRON
• Stick diagram is a draft of real layout, it serves as an
abstract view between the schematic and layout.
Lambda-based Design Rules
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
• Circuit designer in general want tighter, smaller layouts
for improved performance and decreased silicon area.
• On the other hand, the process engineer wants design
rules that result in a controllable and reproducible
process.
• Generally we find there has to be a compromise for a
competitive circuit to be produced at a reasonable cost.
• All widths, spacing, and distances are written in the
form
•  = 0.5 X minimum drawn transistor length
Lambda-based Design Rules
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
• Design rules based on single parameter, λ
• Simple for the designer
• Wide acceptance
• Provide feature size independent way of setting out
mask
• If design rules are obeyed, masks will produce working
circuits
• Minimum feature size is defined as 2 λ
• Used to preserve topological features on a chip
• Prevents shorting, opens, contacts from slipping out of
area to be contacted
Lambda-based Design Rules
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
• Manufacturing processes have inherent limitations in
accuracy and repeatability
• Design rules specify geometry of masks that provide
reasonable yield
• Design rules are determined by experience
Design Rules – Reality
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
• Photoresist shrinking / tearing
• Variations in material deposition
• Variations in temperature
• Variations in oxide thickness
• Impurities
• Variations between lots
• Variations across the wafer
Problems in Manufacturing
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
• Variations in threshold voltage
– oxide thickness
– ion implantation
– poly variations
• Diffusion - changes in doping (variation in R, C)
• Poly, metal variations in height and width
• Shorts and opens
• Via may not be cut all the way through
• Undersize via has too much resistance
• Oversize via may short
Problems in Manufacturing
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
• Ease of learning because they are
scalable, portable, durable
• Long-levity of designs that are simple, abstract and
minimal clutter
• Increased designer efficiency
• Automatic translation to final layout
Advantages of Generalized Design Rules
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
• Minimum width of PolySi and diffusion line 2
• Minimum width of Metal line 3 as metal lines run over a
more uneven surface than other conducting layers to ensure
their continuity
2
Metal
Diffusion
Polysilicon
3
2
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
• PolySi – PolySi space 2
• Metal - Metal space 2
• Diffusion – Diffusion space 3 To avoid the possibility of
their associated regions overlapping and conducting
current
2
Metal
Diffusion
Polysilicon
2
3
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
• Diffusion – PolySi space  To prevent the lines overlapping
to form unwanted capacitor
• Metal lines can pass over both diffusion and polySi without
electrical effect. Where no separation is specified, metal
lines can overlap or cross

Metal
Diffusion
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
• Metal lines can pass over both diffusion and polySi without
electrical effect
• It is recommended practice to leave  between a metal edge
and a polySi or diffusion line to which it is not electrically
connected

Metal
Polysilicon
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
• Recall
– poly-poly spacing 2
– diff-diff spacing 3 (depletion regions tend to spread outward)
– metal-metal spacing 2
– diff-poly spacing 
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
Butting Contact
The gate and source of a depletion device can be connected by a
method known as butting contact. Here metal makes contact to
both the diffusion forming the source of the depletion transistor
and to the polySi forming this device‟s gate.
Advantage:
No buried contact mask required and avoids associated processing.
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
Butting Contact
Problem: Metal descending the hole has a tendency to
fracture at the polySi corner, causing an open circuit.
n+ n+
Insulating
Oxide
Metal
Gate Oxide PolySi
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
Buried Contact
Here gate length is depend upon the alignment of the buried
contact mask relative to the polySi and therefore vary by .
2
2
  Channel length 
PolySi
Buried contact
Diffusion
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
Contact Cut
• Metal connects to polySi/diffusion by contact cut.
• Contact area: 2  X 2 
• Metal and polySi or diffusion must overlap this contact
area by l so that the two desired conductors encompass the
contact area despite any mis-alignment between
conducting layers and the contact hole
4
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
Contact Cut
• Contact cut – any gate: 2  apart
• Why? No contact to any part of the gate.
4
2
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
Contact Cut
• Contact cut – contact cut: 2  apart
• Why? To prevent holes from merging.
2
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
6
2
6
2
3
All device mask dimensions are based on multiples of , e.g., polysilicon minimum
width = 2. Minimum metal to metal spacing = 3
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
n-diffusion p-diffusion
Thinox
2 λ
2 λ
3 λ
3 λ
3 λ
3 λ
4λ
4 λ
4 λ
2 λ
2 λ
Polysilicon
Metal 1
Metal 2
2 λ
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
• Wells must surround transistors by 6 
– Implies 12  between opposite transistor flavors
– Leaves room for one wire track
DESIGN RULES
UNIT – II CIRCUIT DESIGN PROCESSES
• A wiring track is the space required for a wire
– 4  width, 4  spacing from neighbour = 8  pitch
• Transistors also consume one wiring track
LAYOUTS
UNIT – II CIRCUIT DESIGN PROCESSES
• Layer Types
– p-substrate
– n-well
– n+
– p+
– Gate oxide
– Gate (polysilicon)
– Field Oxide
• Insulated glass
• Provide electrical isolation
LAYOUTS
UNIT – II CIRCUIT DESIGN PROCESSES
N+ N+
LAYOUTS
UNIT – II CIRCUIT DESIGN PROCESSES
n+ n+ n+ n+ p+ p+ p+ p+
NMOS NMOS PMOS PMOS
n-well
Top view of the FET pattern
LAYOUTS
UNIT – II CIRCUIT DESIGN PROCESSES
Individual
Transistors
Shared Gates
Shared drain/
source
Vp
Gnd
General Layout Geometry
LAYOUTS
UNIT – II CIRCUIT DESIGN PROCESSES
Metal Interconnect Layers
• Metal layers are electrically isolated from each other
• Electrical contact between adjacent conducting layers requires contact cuts
and vias
p-substrate
n+ n+ n+ n+
Via
Active
contact
Ox3
Metal2
Metal1
Ox2
Ox1
LAYOUTS
UNIT – II CIRCUIT DESIGN PROCESSES
Interconnect Layout Example
Metal2
Metal1
Metal1
Active contact
Gate contact
MOS
LAYOUTS
UNIT – II CIRCUIT DESIGN PROCESSES
Designing MOS Arrays
A B C
yx
y
x
A B C
LAYOUTS
UNIT – II CIRCUIT DESIGN PROCESSES
Parallel Connected MOS Patterning
x
y
A B
X X X
A B
x
y
A B
y
X X
X X
x
A B
y
LAYOUTS
UNIT – II CIRCUIT DESIGN PROCESSES
Basic Gate Design
• Both the power supply and ground are routed using the Metal
layer
• n+ and p+ regions are denoted using the same fill pattern. The
only difference is the n-well
• Contacts are needed from Metal to n+ or p+
LAYOUTS
UNIT – II CIRCUIT DESIGN PROCESSES
The CMOS NOT Gate
X
X
X
X
Vp
Gnd
x
Gnd
n-well
Vp
x
x
Contact
Cut
LAYOUTS
UNIT – II CIRCUIT DESIGN PROCESSES
The CMOS NOT Gate
LAYOUTS
UNIT – II CIRCUIT DESIGN PROCESSES
The CMOS NOT Gate
Gnd
Vp
x
x
X
x
Vp
Gnd
X
x
X
X
LAYOUTS
UNIT – II CIRCUIT DESIGN PROCESSES
The CMOS NAND Gate
Gnd
Vp
ba.
a b
X
Vp
Gnd
X X
X X
a b
ba.
LAYOUTS
UNIT – II CIRCUIT DESIGN PROCESSES
The CMOS NAND Gate
LAYOUTS
UNIT – II CIRCUIT DESIGN PROCESSES
The CMOS NOR Gate
Gnd
Vp
ba
a b
X
Vp
Gnd
X X
X X
a b
ba 
LAYOUTS
UNIT – II CIRCUIT DESIGN PROCESSES
The CMOS NOR Gate
LAYOUTS
UNIT – II CIRCUIT DESIGN PROCESSES
The 3-Input NAND Gate
3-input NAND
LAYOUTS
UNIT – II CIRCUIT DESIGN PROCESSES
The Transmission Gate
LAYOUTS
UNIT – II CIRCUIT DESIGN PROCESSES
The 3-D View of a Design
LAYOUTS
UNIT – II CIRCUIT DESIGN PROCESSES
GENERAL LAYOUT GUIDELINES
1. The electrical gate design must be completed by checking the
followings:
a. Right power and ground supplies
b. Noise at the gate input
c. Faulty connections and transistors
d. Improper ratios
e. Incorrect clocking and charge sharing
2. VDD and the VSS lines run at the top and the bottom of the design
3. Vertical poysilicon for each gate input
4. Order polysilicon gate signals for maximal connection between
transistors
5. The connectivity requires to place NMOS close to VSS and PMOS
close to VDD
6. Connection to complete the logic must be made using poly, metal
and even metal2
LAYOUTS
UNIT – II CIRCUIT DESIGN PROCESSES
GENERAL LAYOUT GUIDELINES
The factors for density improvement are (optimization):
• Efficient routing space usage. They can be placed over the cells or
even in multiple layers.
• Source drain connections must be merged better.
• White (blank) spaces must be minimum.
• The devices must be of optimum sizes.
• Transparent routing can be provided for cell to cell
interconnection, this reduces global wiring problems
LAYOUTS
UNIT – II CIRCUIT DESIGN PROCESSES
LAYOUT OPTIMIZATION FOR PERFORMANCE
1. Vary the size of the transistor according to its position in series. The transistor
closest to the output is the smallest. The transistor nearest to the VSS line is the
largest. This helps in increasing the performance by 30%. A three input NAND
gate with the varying size is shown.
LAYOUTS
UNIT – II CIRCUIT DESIGN PROCESSES
LAYOUT OPTIMIZATION FOR PERFORMANCE
1. When drains are connected in parallel, must try and reduce the number of
drains in parallel i.e. wherever possible must try and connect drains in series at
least at the output. This arrangement could reduce the capacitance at the output
enabling good voltage levels.
BASIC PHYSICAL DESIGN
UNIT – II CIRCUIT DESIGN PROCESSES
The VLSI design flow for any IC design is as follows
1. Specification (problem definition)
2. Schematic (gate level design) (equivalence check)
3. Layout (equivalence check)
4. Floor Planning
5. Routing, Placement
6. On to Silicon
ANY Qs?
1 sur 77

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Vlsi stick daigram (JCE)

  • 2. • Objectives: – To know MOS layers – To understand the stick diagrams – To learn design rules – To understand layout and symbolic diagrams • Outcome: – At the end of this, will be able draw the stick diagram, layout and symbolic diagram for simple MOS circuits INTRODUCTION UNIT – II CIRCUIT DESIGN PROCESSES
  • 3. MOS LAYERS UNIT – II CIRCUIT DESIGN PROCESSES
  • 4. STICK DIAGRAMS UNIT – II CIRCUIT DESIGN PROCESSES • Objectives: – To know what is meant by stick diagram. – To understand the capabilities and limitations of stick diagram. – To learn how to draw stick diagrams for a given MOS circuit. • Outcome: – At the end of this module the students will be able draw the stick diagram for simple MOS circuits.
  • 5. STICK DIAGRAMS UNIT – II CIRCUIT DESIGN PROCESSES • VLSI design aims to translate circuit concepts onto silicon. • Stick diagrams are a means of capturing topography and layer information using simple diagrams. • Stick diagrams convey layer information through color codes (or monochrome encoding). • Acts as an interface between symbolic circuit and the actual layout.
  • 6. STICK DIAGRAMS UNIT – II CIRCUIT DESIGN PROCESSES • Does show all components/vias. – Via is used to connect higher level metals from metal connection • It shows relative placement of components. • Goes one step closer to the layout • Helps plan the layout and routing A stick diagram is a cartoon of a layout.
  • 7. STICK DIAGRAMS UNIT – II CIRCUIT DESIGN PROCESSES • Does not show – Exact placement of components – Transistor sizes – Wire lengths, wire widths, tub boundaries – Any other low level details such as parasitics
  • 8. STICK DIAGRAMS UNIT – II CIRCUIT DESIGN PROCESSES poly Metal 1 ndiff pdiff Can also draw in shades of gray/line style. Stick Diagrams – Notations Buried Contact Contact Cut
  • 9. STICK DIAGRAMS UNIT – II CIRCUIT DESIGN PROCESSES NMOS ENCODING
  • 10. STICK DIAGRAMS UNIT – II CIRCUIT DESIGN PROCESSES CMOS ENCODING
  • 11. STICK DIAGRAMS UNIT – II CIRCUIT DESIGN PROCESSES Stick Diagrams – Some Rules Rule 1: When two or more ‘sticks’ of the same type cross or touch each other that represents electrical contact.
  • 12. STICK DIAGRAMS UNIT – II CIRCUIT DESIGN PROCESSES Stick Diagrams – Some Rules Rule 2: When two or more „sticks‟ of different type cross or touch each other there is no electrical contact. (If electrical contact is needed we have to show the connection explicitly)
  • 13. STICK DIAGRAMS UNIT – II CIRCUIT DESIGN PROCESSES Stick Diagrams – Some Rules Rule 3: When a poly crosses diffusion it represents a transistor. Note: If a contact is shown then it is not a transistor.
  • 14. STICK DIAGRAMS UNIT – II CIRCUIT DESIGN PROCESSES Stick Diagrams – Some Rules Rule 4: In CMOS a demarcation line is drawn to avoid touching of p-diff with n-diff. All PMOS must lie on one side of the line and all NMOS will have to be on the other side.
  • 15. STICK DIAGRAMS UNIT – II CIRCUIT DESIGN PROCESSES Examples of Stick Diagrams Vout Vdd = 5V Vin Vout Vdd = 5V Vin pMOS nMOS
  • 16. STICK DIAGRAMS UNIT – II CIRCUIT DESIGN PROCESSES Examples of Stick Diagrams Gnd VDD x x X X X X VDD x x Gnd
  • 17. STICK DIAGRAMS UNIT – II CIRCUIT DESIGN PROCESSES Examples of Stick Diagrams
  • 18. STICK DIAGRAMS UNIT – II CIRCUIT DESIGN PROCESSES Examples of Stick Diagrams Vout Vdd = 5V Vin * Note the depletion mode device
  • 19. STICK DIAGRAMS UNIT – II CIRCUIT DESIGN PROCESSES Examples of Stick Diagrams
  • 20. STICK DIAGRAMS UNIT – II CIRCUIT DESIGN PROCESSES Examples of Stick Diagrams
  • 21. STICK DIAGRAMS UNIT – II CIRCUIT DESIGN PROCESSES Examples of Stick Diagrams NOR gate and NAND using NMOS Transistors
  • 22. STICK DIAGRAMS UNIT – II CIRCUIT DESIGN PROCESSES Examples of Stick Diagrams f= [(xy) +z]‟ using NMOS Transistors
  • 23. STICK DIAGRAMS UNIT – II CIRCUIT DESIGN PROCESSES Examples of Stick Diagrams
  • 24. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES • Why we use design rules? – Interface between designer and process engineer • Historically, the process technology referred to the length of the silicon channel between the source and drain terminals in field effect transistors. • The sizes of other features are generally derived as a ratio of the channel length, where some may be larger than the channel size and some smaller. – For example, in a 90 nm process, the length of the channel may be 90 nm, but the width of the gate terminal may be only 50 nm.
  • 25. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES
  • 26. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES • Allow translation of circuits (usually in stick diagram or symbolic form) into actual geometry in silicon • Interface between circuit designer and fabrication engineer • Compromise – designer - tighter, smaller – fabricator - controllable, reproducible
  • 27. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES • Design rules define ranges for features – Examples: • min. wire widths to avoid breaks • min. spacing to avoid shorts • minimum overlaps to ensure complete overlaps – Measured in microns – Required for resolution/tolerances of masks • Fabrication processes defined by minimum channel width – Also minimum width of poly traces – Defines “how fast” a fabrication process is
  • 28. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES • Two major approaches: – “Micron” rules: stated at micron resolution. –  rules: simplified micron rules with limited scaling attributes. • Design rules represents a tolerance which insures very high probability of correct fabrication – scalable design rules: lambda parameter – absolute dimensions (micron rules)
  • 29. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES • All minimum sizes and spacing specified in microns. • Rules don't have to be multiples of λ. • Can result in 50% reduction in area over λ based rules • Standard in industry. “Micron” rules
  • 30. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES • Lambda-based (scalable CMOS) design rules define scalable rules based on  (which is half of the minimum channel length) – classes of MOSIS SCMOS rules: SUBMICRON, DEEPSUBMICRON • Stick diagram is a draft of real layout, it serves as an abstract view between the schematic and layout. Lambda-based Design Rules
  • 31. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES • Circuit designer in general want tighter, smaller layouts for improved performance and decreased silicon area. • On the other hand, the process engineer wants design rules that result in a controllable and reproducible process. • Generally we find there has to be a compromise for a competitive circuit to be produced at a reasonable cost. • All widths, spacing, and distances are written in the form •  = 0.5 X minimum drawn transistor length Lambda-based Design Rules
  • 32. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES • Design rules based on single parameter, λ • Simple for the designer • Wide acceptance • Provide feature size independent way of setting out mask • If design rules are obeyed, masks will produce working circuits • Minimum feature size is defined as 2 λ • Used to preserve topological features on a chip • Prevents shorting, opens, contacts from slipping out of area to be contacted Lambda-based Design Rules
  • 33. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES • Manufacturing processes have inherent limitations in accuracy and repeatability • Design rules specify geometry of masks that provide reasonable yield • Design rules are determined by experience Design Rules – Reality
  • 34. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES • Photoresist shrinking / tearing • Variations in material deposition • Variations in temperature • Variations in oxide thickness • Impurities • Variations between lots • Variations across the wafer Problems in Manufacturing
  • 35. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES • Variations in threshold voltage – oxide thickness – ion implantation – poly variations • Diffusion - changes in doping (variation in R, C) • Poly, metal variations in height and width • Shorts and opens • Via may not be cut all the way through • Undersize via has too much resistance • Oversize via may short Problems in Manufacturing
  • 36. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES • Ease of learning because they are scalable, portable, durable • Long-levity of designs that are simple, abstract and minimal clutter • Increased designer efficiency • Automatic translation to final layout Advantages of Generalized Design Rules
  • 37. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES • Minimum width of PolySi and diffusion line 2 • Minimum width of Metal line 3 as metal lines run over a more uneven surface than other conducting layers to ensure their continuity 2 Metal Diffusion Polysilicon 3 2
  • 38. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES • PolySi – PolySi space 2 • Metal - Metal space 2 • Diffusion – Diffusion space 3 To avoid the possibility of their associated regions overlapping and conducting current 2 Metal Diffusion Polysilicon 2 3
  • 39. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES • Diffusion – PolySi space  To prevent the lines overlapping to form unwanted capacitor • Metal lines can pass over both diffusion and polySi without electrical effect. Where no separation is specified, metal lines can overlap or cross  Metal Diffusion
  • 40. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES • Metal lines can pass over both diffusion and polySi without electrical effect • It is recommended practice to leave  between a metal edge and a polySi or diffusion line to which it is not electrically connected  Metal Polysilicon
  • 41. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES • Recall – poly-poly spacing 2 – diff-diff spacing 3 (depletion regions tend to spread outward) – metal-metal spacing 2 – diff-poly spacing 
  • 42. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES Butting Contact The gate and source of a depletion device can be connected by a method known as butting contact. Here metal makes contact to both the diffusion forming the source of the depletion transistor and to the polySi forming this device‟s gate. Advantage: No buried contact mask required and avoids associated processing.
  • 43. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES Butting Contact Problem: Metal descending the hole has a tendency to fracture at the polySi corner, causing an open circuit. n+ n+ Insulating Oxide Metal Gate Oxide PolySi
  • 44. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES Buried Contact Here gate length is depend upon the alignment of the buried contact mask relative to the polySi and therefore vary by . 2 2   Channel length  PolySi Buried contact Diffusion
  • 45. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES Contact Cut • Metal connects to polySi/diffusion by contact cut. • Contact area: 2  X 2  • Metal and polySi or diffusion must overlap this contact area by l so that the two desired conductors encompass the contact area despite any mis-alignment between conducting layers and the contact hole 4
  • 46. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES Contact Cut • Contact cut – any gate: 2  apart • Why? No contact to any part of the gate. 4 2
  • 47. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES Contact Cut • Contact cut – contact cut: 2  apart • Why? To prevent holes from merging. 2
  • 48. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES
  • 49. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES 6 2 6 2 3 All device mask dimensions are based on multiples of , e.g., polysilicon minimum width = 2. Minimum metal to metal spacing = 3
  • 50. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES n-diffusion p-diffusion Thinox 2 λ 2 λ 3 λ 3 λ 3 λ 3 λ 4λ 4 λ 4 λ 2 λ 2 λ Polysilicon Metal 1 Metal 2 2 λ
  • 51. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES • Wells must surround transistors by 6  – Implies 12  between opposite transistor flavors – Leaves room for one wire track
  • 52. DESIGN RULES UNIT – II CIRCUIT DESIGN PROCESSES • A wiring track is the space required for a wire – 4  width, 4  spacing from neighbour = 8  pitch • Transistors also consume one wiring track
  • 53. LAYOUTS UNIT – II CIRCUIT DESIGN PROCESSES • Layer Types – p-substrate – n-well – n+ – p+ – Gate oxide – Gate (polysilicon) – Field Oxide • Insulated glass • Provide electrical isolation
  • 54. LAYOUTS UNIT – II CIRCUIT DESIGN PROCESSES N+ N+
  • 55. LAYOUTS UNIT – II CIRCUIT DESIGN PROCESSES n+ n+ n+ n+ p+ p+ p+ p+ NMOS NMOS PMOS PMOS n-well Top view of the FET pattern
  • 56. LAYOUTS UNIT – II CIRCUIT DESIGN PROCESSES Individual Transistors Shared Gates Shared drain/ source Vp Gnd General Layout Geometry
  • 57. LAYOUTS UNIT – II CIRCUIT DESIGN PROCESSES Metal Interconnect Layers • Metal layers are electrically isolated from each other • Electrical contact between adjacent conducting layers requires contact cuts and vias p-substrate n+ n+ n+ n+ Via Active contact Ox3 Metal2 Metal1 Ox2 Ox1
  • 58. LAYOUTS UNIT – II CIRCUIT DESIGN PROCESSES Interconnect Layout Example Metal2 Metal1 Metal1 Active contact Gate contact MOS
  • 59. LAYOUTS UNIT – II CIRCUIT DESIGN PROCESSES Designing MOS Arrays A B C yx y x A B C
  • 60. LAYOUTS UNIT – II CIRCUIT DESIGN PROCESSES Parallel Connected MOS Patterning x y A B X X X A B x y A B y X X X X x A B y
  • 61. LAYOUTS UNIT – II CIRCUIT DESIGN PROCESSES Basic Gate Design • Both the power supply and ground are routed using the Metal layer • n+ and p+ regions are denoted using the same fill pattern. The only difference is the n-well • Contacts are needed from Metal to n+ or p+
  • 62. LAYOUTS UNIT – II CIRCUIT DESIGN PROCESSES The CMOS NOT Gate X X X X Vp Gnd x Gnd n-well Vp x x Contact Cut
  • 63. LAYOUTS UNIT – II CIRCUIT DESIGN PROCESSES The CMOS NOT Gate
  • 64. LAYOUTS UNIT – II CIRCUIT DESIGN PROCESSES The CMOS NOT Gate Gnd Vp x x X x Vp Gnd X x X X
  • 65. LAYOUTS UNIT – II CIRCUIT DESIGN PROCESSES The CMOS NAND Gate Gnd Vp ba. a b X Vp Gnd X X X X a b ba.
  • 66. LAYOUTS UNIT – II CIRCUIT DESIGN PROCESSES The CMOS NAND Gate
  • 67. LAYOUTS UNIT – II CIRCUIT DESIGN PROCESSES The CMOS NOR Gate Gnd Vp ba a b X Vp Gnd X X X X a b ba 
  • 68. LAYOUTS UNIT – II CIRCUIT DESIGN PROCESSES The CMOS NOR Gate
  • 69. LAYOUTS UNIT – II CIRCUIT DESIGN PROCESSES The 3-Input NAND Gate 3-input NAND
  • 70. LAYOUTS UNIT – II CIRCUIT DESIGN PROCESSES The Transmission Gate
  • 71. LAYOUTS UNIT – II CIRCUIT DESIGN PROCESSES The 3-D View of a Design
  • 72. LAYOUTS UNIT – II CIRCUIT DESIGN PROCESSES GENERAL LAYOUT GUIDELINES 1. The electrical gate design must be completed by checking the followings: a. Right power and ground supplies b. Noise at the gate input c. Faulty connections and transistors d. Improper ratios e. Incorrect clocking and charge sharing 2. VDD and the VSS lines run at the top and the bottom of the design 3. Vertical poysilicon for each gate input 4. Order polysilicon gate signals for maximal connection between transistors 5. The connectivity requires to place NMOS close to VSS and PMOS close to VDD 6. Connection to complete the logic must be made using poly, metal and even metal2
  • 73. LAYOUTS UNIT – II CIRCUIT DESIGN PROCESSES GENERAL LAYOUT GUIDELINES The factors for density improvement are (optimization): • Efficient routing space usage. They can be placed over the cells or even in multiple layers. • Source drain connections must be merged better. • White (blank) spaces must be minimum. • The devices must be of optimum sizes. • Transparent routing can be provided for cell to cell interconnection, this reduces global wiring problems
  • 74. LAYOUTS UNIT – II CIRCUIT DESIGN PROCESSES LAYOUT OPTIMIZATION FOR PERFORMANCE 1. Vary the size of the transistor according to its position in series. The transistor closest to the output is the smallest. The transistor nearest to the VSS line is the largest. This helps in increasing the performance by 30%. A three input NAND gate with the varying size is shown.
  • 75. LAYOUTS UNIT – II CIRCUIT DESIGN PROCESSES LAYOUT OPTIMIZATION FOR PERFORMANCE 1. When drains are connected in parallel, must try and reduce the number of drains in parallel i.e. wherever possible must try and connect drains in series at least at the output. This arrangement could reduce the capacitance at the output enabling good voltage levels.
  • 76. BASIC PHYSICAL DESIGN UNIT – II CIRCUIT DESIGN PROCESSES The VLSI design flow for any IC design is as follows 1. Specification (problem definition) 2. Schematic (gate level design) (equivalence check) 3. Layout (equivalence check) 4. Floor Planning 5. Routing, Placement 6. On to Silicon